Novel dust collector adapter

Abstract

The utility model discloses a novel dust collector adapter which comprises a suction nozzle body, the suction nozzle body comprises an inserting pipe assembled with a dust collector input pipe and a suction nozzle pipe in contact with a graphite disc, and the assembling end of the inserting pipe is provided with an inserting conical angle which is convenient for the inserting pipe to be inserted into the dust collector input pipe. And an inserting chamfer for protecting the interior of the input pipe of the dust collector is arranged on the back of the inserting conical angle. According to the novel dust collector adapter, the material of a traditional dust collector adapter is improved, a quartz material is used for replacing a traditional plastic material, the quartz material is more resistant to abrasion compared with the traditional plastic material, and the surface of a graphite disc can be prevented from being scratched during operation by means of the suction nozzle chamfer; the service life of the graphite disc and the growth environment of the epitaxial wafer are not affected by accidental scratches and residues, the flow speed of airflow of the dust collector is increased through the reducer pipe, and particles such as falling dust on the surface of the graphite disc can be better and more thoroughly treated.

Description

Technical Field

[0001] The utility model relates to the technical field of graphite carrier processing, in particular to a novel vacuum cleaner adapter. Background Art

[0002] The graphite carrier is a carrier used for MOCVD epitaxial growth. It is made of a whole piece of graphite material and is placed on a base composed of heating wires inside the reaction chamber. The base can drive the graphite carrier to rotate at a constant speed to achieve uniform heating. Different numbers of grooves dug on the surface of the graphite carrier according to the size of the growing epitaxial wafer are called "epitaxial wafer grooves".

[0003] The epitaxial wafer slot needs to be cleaned every time the wafer is loaded. The usual practice is to use a vacuum cleaner. The existing vacuum cleaner heads are made of plastic, which can easily damage the graphite disk. Scratches on the surface of the graphite disk will affect the growth of the epitaxial material, making the graphite disk unusable and irreparable, and therefore scrapped. If there is any plastic material left on the graphite disk, the growth of the epitaxial wafer will be even more affected. To this end, we have designed a new vacuum cleaner adapter to solve the above problem. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a novel vacuum cleaner adapter, which solves the problem that the existing vacuum cleaner heads are mostly made of plastic, which easily causes damage to the graphite disk and residue in actual application.

[0005] To achieve the above objectives, the utility model is implemented through the following technical solutions: a new vacuum cleaner adapter, including a nozzle body, the nozzle body including a plug-in tube assembled with a vacuum cleaner input pipe and a nozzle tube in contact with a graphite disk, the assembly end of the plug-in tube is provided with a plug-in cone angle for facilitating its insertion into the interior of the vacuum cleaner input pipe, the back of the plug-in cone angle is provided with a plug-in chamfer for protecting the interior of the vacuum cleaner input pipe, and the working end of the nozzle tube is provided with a nozzle chamfer for contact with the graphite disk for protection.

[0006] Preferably, the plug-in tube and the suction nozzle tube are coaxially connected via a reducing tube.

[0007] Preferably, the plug-in tube, the reducer tube and the nozzle tube are all made of quartz.

[0008] Beneficial Effects

[0009] The utility model provides a new vacuum cleaner adapter. Compared with the prior art, it has the following beneficial effects:

[0010] The new vacuum cleaner adapter improves the material of the traditional vacuum cleaner adapter and replaces the traditional plastic material with quartz material. The quartz material is more wear-resistant than the traditional plastic material. The chamfer of the suction nozzle can avoid scratches on the surface of the graphite disk during operation, and will not affect the service life of the graphite disk and the growth environment of the epitaxial wafer due to accidental scratches. At the same time, the flow rate of the vacuum cleaner airflow is increased by the reducer, so that the dust and other particles on the surface of the graphite disk can be better and more thoroughly cleaned. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a structural schematic diagram of the utility model;

[0012] Figure 2 It is a schematic diagram of the cross-sectional structure of the utility model;

[0013] Figure 3 It is a schematic diagram of the assembly structure of the utility model;

[0014] In the figure: 1. nozzle body; 2. plug-in tube; 201. plug-in taper angle; 202. plug-in chamfer; 3. reducer; 4. nozzle tube; 401. nozzle chamfer. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0016] See also Figure 1-3 The utility model provides a technical solution: a new vacuum cleaner adapter, including a nozzle body 1, the nozzle body 1 includes a plug-in tube 2 assembled with a vacuum cleaner input pipe and a nozzle tube 4 in contact with a graphite disk, the assembly end of the plug-in tube 2 is provided with a plug-in cone angle 201 for facilitating its insertion into the interior of the vacuum cleaner input pipe, the back of the plug-in cone angle 201 is provided with a plug-in chamfer 202 for protecting the interior of the vacuum cleaner input pipe, and the working end of the nozzle tube 4 is provided with a nozzle chamfer 401 for contacting with the graphite disk for protection.

[0017] Based on the above-mentioned structural setting, the new vacuum cleaner adapter consists of a plug-in tube 2 and a suction nozzle tube 4, wherein the plug-in tube 2 is used for the adapter to be plugged in and connected with the external vacuum cleaner input tube, and the suction nozzle tube 4 is used for the adapter to contact the graphite disk to adsorb and extract particles on its surface. Specifically, during the working process, the staff can insert the plug-in tube 2 into the contact end of the external vacuum cleaner, so that the adapter and the vacuum cleaner can be assembled. At the same time, the plug-in tapered angle 201 can be used to tapered the installation end of the plug-in tube 2, so that it is convenient for the staff to insert the plug-in tube 2 into the contact end of the vacuum cleaner, which increases the convenience of the staff in assembling the adapter and the vacuum cleaner. The plug-in chamfer 202 can be used to round the installation end of the plug-in tube 2. The chamfering treatment can prevent the plug-in tube 2 from being inserted into the vacuum cleaner input tube. The inner wall is scratched and the operation is affected. The sealing performance is improved, thereby increasing the stability of the adapter during installation and use. The staff holds the adapter and operates the suction nozzle tube 4 to gently contact and move with the surface of the graphite disk, so that the particles on the surface of the graphite disk can be adsorbed and cleaned through the suction nozzle tube 4. The suction nozzle chamfer 401 set at the working end of the suction nozzle tube 4 can avoid scratching the graphite disk during operation, and will not affect the service life of the graphite disk and the growth environment of the epitaxial wafer due to accidental scratch residues, thereby increasing the safety and stability when cleaning particles on the surface of the graphite disk. When in use, the staff turns on the vacuum cleaner working switch, holds the original pipe of the vacuum cleaner and the plug-in pipe 2 parts of the adapter, allows the air inlet part of the suction nozzle tube 4 to gently contact the graphite disk, and moves slowly on the surface of the graphite disk. The entire graphite disk surface can be cleaned from the inside to the outside, first sucking the low place and then sucking the high place.

[0018] Preferably, the plug-in tube 2 and the suction nozzle tube 4 are coaxially connected via a reducer 3. The reducer 3 connects the plug-in tube 2 and the suction nozzle tube 4, and the reducer 3 reduces the inner diameter of the suction nozzle tube 4 relative to the plug-in tube 2, thereby increasing the suction force and flow rate of the suction nozzle tube 4 during operation, greatly improving the efficiency of the suction nozzle tube 4 in adsorbing and extracting particles on the graphite disk.

[0019] Preferably, the plug-in tube 2, the reducer 3, and the nozzle tube 4 are all made of quartz. Among them, the adapter made of quartz is more wear-resistant than the traditional plastic adapter, avoiding accidental residue when adsorbing and extracting particles on the surface of the graphite disk, which affects the service life of the graphite disk and the growth environment of the epitaxial wafer. At the same time, the adapter made of quartz can withstand high temperatures of 150°C-300°C, avoiding deformation and melting of the adapter when operating in a high-temperature environment, and improving the stability of the adapter when operating in a high-temperature environment.

[0020] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0021] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A new vacuum cleaner adapter, characterized by: The invention comprises a nozzle body (1), wherein the nozzle body (1) comprises a plug-in tube (2) assembled with a vacuum cleaner inlet tube and a nozzle tube (4) in contact with a graphite disk, wherein the assembly end of the plug-in tube (2) is provided with a plug-in taper angle (201) for facilitating its insertion into the interior of the vacuum cleaner inlet tube, the back of the plug-in taper angle (201) is provided with a plug-in chamfer (202) for protecting the interior of the vacuum cleaner inlet tube, and the working end of the nozzle tube (4) is provided with a nozzle chamfer (401) for contacting and protecting the graphite disk.

2. A new vacuum cleaner adapter according to claim 1, characterized in that: The plug-in tube (2) and the suction nozzle tube (4) are coaxially connected via a reducer (3).

3. The novel vacuum cleaner adapter according to claim 1, characterized in that: The inserting tube (2), the reducing tube (3) and the suction nozzle tube (4) are all made of quartz.

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