Intelligent efficient xenon recovery and purification all-in-one machine

Abstract

The utility model discloses an intelligent efficient xenon recovery and purification all-in-one machine which comprises a shell, a recovery pipe is arranged on one side of the shell and communicated with a vacuum pump, the output end of the vacuum pump is communicated with a low-pressure tank, the output end of the low-pressure tank is communicated with a compressor, and the output end of the compressor is communicated with a high-pressure tank. The output end of the high-pressure tank is communicated with a gas supply pipe, the output end of the high-pressure tank is communicated with a first concentration meter, a membrane separation purifier is arranged at one end, far away from the high-pressure tank, of the first concentration meter, and a gas pressure regulator is mounted at the input end of the membrane separation purifier. The utility model relates to the technical field of xenon recovery and purification equipment, and solves the problems that in the prior art, when xenon is recovered and purified by adopting a membrane separation and purification technology, frequent pressure change in a pipeline affects the stability of xenon purification, the concentration of xenon purification is unstable, the recovery and purification efficiency of xenon is lower, and the recovery and purification efficiency of xenon is higher. And the xenon recovery and purification equipment is easy to damage.

Description

Technical Field

[0001] The utility model relates to the technical field of xenon gas recovery and purification equipment, in particular to an intelligent and efficient xenon gas recovery and purification integrated machine. Background Art

[0002] Xenon gas recovery and purification equipment is a device that can recover and purify xenon gas. Xenon gas can be separated from exhaust gas and recycled for reuse. The application range of xenon gas recovery equipment is very wide, and it can be used in semiconductors, optoelectronics, medical and other fields. In these fields, xenon gas is used as laser medium, filling gas in discharge tubes, etc. Therefore, recycling xenon gas can not only save resources, but also reduce production costs and improve economic benefits. In the prior art, when membrane separation and purification technology is used to recover and purify xenon gas, the frequent pressure changes in the pipeline affect the stability of xenon gas purification, resulting in unstable concentration of xenon gas purification and low recovery and purification efficiency of xenon gas, and it is easy to cause damage to the xenon gas recovery and purification equipment. Utility Model Content

[0003] In view of the shortcomings of the prior art, the utility model provides an intelligent and efficient xenon gas recovery and purification integrated machine, which solves the problem in the prior art that when membrane separation and purification technology is used to recover and purify xenon gas, frequent pressure changes in the pipeline affect the stability of xenon gas purification, resulting in unstable concentration of xenon gas purification and low recovery and purification efficiency of xenon gas, and easily causing damage to the xenon gas recovery and purification equipment.

[0004] To achieve the above-mentioned purpose, the utility model is implemented through the following technical solutions: an intelligent and efficient xenon gas recovery and purification integrated machine, comprising a shell, a recovery pipe is arranged on one side of the shell, the recovery pipe is connected to a vacuum pump, the output end of the vacuum pump is connected to a low-pressure tank, the output end of the low-pressure tank is connected to a compressor, the output end of the compressor is connected to a high-pressure tank, the output end of the high-pressure tank is connected to an air supply pipe, the output end of the high-pressure tank is connected to a first concentration meter, the end of the first concentration meter away from the high-pressure tank is provided with a membrane separation purifier, the membrane separation A gas pressure regulator is installed at the input end of the purifier, and the gas pressure regulator is connected to the first concentration meter. A waste gas discharge pipe is arranged on one side of the membrane separation purifier. The output end of the membrane separation purifier is connected to the low-pressure tank. Pressure transmitters are installed on the tops of the low-pressure tank and the high-pressure tank. The output end of the low-pressure tank and the input end of the high-pressure tank are both connected with a pressure regulating pipe, and the pressure regulating pipe is installed with a first solenoid valve. A controller is installed inside the shell, and the controller is electrically connected to the vacuum pump, the compressor, the first concentration meter, the pressure transmitter and the first solenoid valve, respectively.

[0005] Preferably, the input end and output end of the membrane separation purifier are respectively installed with a first flow meter, the input end and output end of the membrane separation purifier are respectively installed with a second solenoid valve, the input end of the low-pressure tank is connected to a supplementary pipe, the outer wall of the supplementary pipe is installed with a second flow meter, the outer wall of the supplementary pipe is installed with a third solenoid valve, the first flow meter, the second solenoid valve, the second flow meter and the third solenoid valve are all electrically connected to the controller.

[0006] Preferably, a fourth solenoid valve is installed on the outer wall of the recovery pipe, and one end of the fourth solenoid valve away from the recovery pipe is connected to a filter tank, the output end of the filter tank is connected to a vacuum pump, and the fourth solenoid valve is electrically connected to a controller.

[0007] Preferably, a second concentration meter is installed at the output end of the filter tank, and the second concentration meter is electrically connected to the controller.

[0008] Preferably, a fifth solenoid valve is installed at the input end of the compressor, and the fifth solenoid valve is electrically connected to the controller.

[0009] The utility model provides an intelligent and efficient xenon gas recovery and purification integrated machine. It has the following beneficial effects: the intelligent and efficient xenon gas recovery and purification integrated machine, through the cooperation between the shell, the recovery pipe, the vacuum pump, the low-pressure tank, the compressor, the high-pressure tank, the gas supply pipe, the membrane separation purifier, the first concentration meter, the exhaust gas discharge pipe, the pressure transmitter, the gas pressure regulator, the pressure regulating pipe, the first solenoid valve and the controller, measures the air pressure in the low-pressure tank and the high-pressure tank in real time, and automatically controls the first solenoid valve to open or close the pressure regulating pipe through the controller, so that the air pressure difference between the low-pressure tank and the high-pressure tank is maintained within a certain range, thereby ensuring the gas delivery stability in the membrane separation purifier, and at the same time, the gas delivery pressure is adjusted at the input end of the membrane separation purifier by the gas pressure regulator, so that the membrane separation purifier can purify the xenon gas in the recovered gas under a stable pressure, improve the stability of the xenon gas purification, and more accurately control the purification concentration of the xenon gas, improve the recovery rate of helium, which helps to reduce the maintenance frequency and maintenance cost of the equipment.

[0010] Through the coordination among the membrane separation purifier, the controller, the first flow meter, the second solenoid valve, the replenishing pipe, the second flow meter and the third solenoid valve, by measuring the input and output gas flow rates of the membrane separation purifier, the xenon recovery and purification system can calculate the exhaust gas discharge amount, and by measuring the input flow rate of the xenon gas, the xenon replenishment amount can be kept consistent with the exhaust gas discharge amount, thereby ensuring the stability of the gas pressure of the xenon recovery and purification system, thereby ensuring the stability and continuity of the xenon supply. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the structure of the utility model;

[0012] Figure 2 for Figure 1 A partial enlarged view of the middle A area;

[0013] Figure 3 This is a schematic diagram of the structure of the utility model.

[0014] In the figure: 1. shell, 2. recovery pipe, 3. vacuum pump, 4. low-pressure tank, 5. compressor, 6. high-pressure tank, 7. gas supply pipe, 8. membrane separation purifier, 9. first concentration meter, 10. exhaust gas discharge pipe, 11. pressure transmitter, 12. gas pressure regulator, 13. pressure regulating pipe, 14. first solenoid valve, 15. controller, 16. first flow meter, 17. second solenoid valve, 18. replenishing pipe, 19. second flow meter, 20. third solenoid valve, 21. fourth solenoid valve, 22. filter tank, 23. second concentration meter, 24. fifth solenoid valve. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0016] In the prior art, when membrane separation and purification technology is used to recover and purify xenon gas, frequent pressure changes in the pipeline affect the stability of xenon gas purification, resulting in unstable concentration of xenon gas purification and low recovery and purification efficiency of xenon gas, and easily causing damage to xenon gas recovery and purification equipment.

[0017] In view of this, the utility model provides an intelligent and efficient xenon gas recovery and purification integrated machine, which cooperates with a shell, a recovery pipe, a vacuum pump, a low-pressure tank, a compressor, a high-pressure tank, a gas supply pipe, a membrane separation purifier, a first concentration meter, an exhaust gas discharge pipe, a pressure transmitter, a gas pressure regulator, a pressure regulating pipe, a first solenoid valve and a controller, and measures the air pressure in the low-pressure tank and the high-pressure tank in real time, and automatically controls the first solenoid valve to open or close the pressure regulating pipe through the controller, so that the air pressure difference between the low-pressure tank and the high-pressure tank is maintained within a certain range, thereby ensuring the gas transportation stability in the membrane separation purifier, and at the same time, the gas pressure regulator is used to adjust the gas transportation pressure at the input end of the membrane separation purifier, so that the membrane separation purifier purifies the xenon in the recovered gas under a stable pressure, thereby improving the stability of xenon purification, more accurately controlling the purification concentration of xenon, improving the recovery rate of helium, and reducing the maintenance frequency and maintenance cost of the equipment.

[0018] Through the personnel in this field, all the electrical components in this case are connected to their corresponding power supplies through wires, and appropriate controllers and encoders should be selected according to actual conditions to meet the control requirements. The specific connection and control sequence should refer to the following working principle, and the electrical connection between the electrical components is completed in the order of working in sequence. The detailed connection means are well-known technologies in this field. The following mainly introduces the working principles and processes, and no longer explains the electrical control.

[0019] Depend on Figure 1-3 It can be seen that an intelligent and efficient xenon gas recovery and purification integrated machine includes a shell 1, a recovery pipe 2 is arranged on one side of the shell 1, the recovery pipe 2 is used to recover the gas and input it to the xenon gas recovery and purification equipment, the recovery pipe 2 is connected to a vacuum pump 3, the output end of the vacuum pump 3 is connected to a low-pressure tank 4, the output end of the low-pressure tank 4 is connected to a compressor 5, the output end of the compressor 5 is connected to a high-pressure tank 6, the output end of the high-pressure tank 6 is connected to a gas supply pipe 7, the gas supply pipe 7 is used for the xenon gas recovery and purification equipment to output the recovered and purified xenon gas, the output end of the high-pressure tank 6 is connected to a first concentration meter 9, the end of the first concentration meter 9 away from the high-pressure tank 6 is provided with a membrane separation purifier 8, and the input end of the membrane separation purifier 8 is installed with A gas pressure regulator 12, the gas pressure regulator 12 is used to improve the stability of the gas pressure input to the membrane separation purifier 8, the gas pressure regulator 12 is connected to the first concentration meter 9, a waste gas discharge pipe 10 is provided on one side of the membrane separation purifier 8, the output end of the membrane separation purifier 8 is connected to the low-pressure tank 4, the tops of the low-pressure tank 4 and the high-pressure tank 6 are both equipped with a pressure transmitter 11, the output end of the low-pressure tank 4 and the input end of the high-pressure tank 6 are both connected with a pressure regulating pipe 13, the pressure regulating pipe 13 is equipped with a first solenoid valve 14, a controller 15 is installed inside the housing 1, and the controller 15 is electrically connected to the vacuum pump 3, the compressor 5, the first concentration meter 9, the pressure transmitter 11 and the first solenoid valve 14 respectively;

[0020] In the specific implementation process, it is worth pointing out that the shell 1 is the external shell of the xenon gas recovery and purification equipment, the recovery pipe 2 is used to input the recovered gas to the xenon gas recovery and purification equipment, and the recovery pipe 2, the vacuum pump 3 and the low-pressure tank 4 are used to cooperate with each other to realize the input of the recovered gas to the low-pressure tank 4. Through the cooperation between the low-pressure tank 4, the compressor 5 and the high-pressure tank 6, the recovered gas is pressurized by the compressor 5 and transported to the high-pressure tank 6, so that there is a certain pressure difference between the low-pressure tank 4 and the high-pressure tank 6, so that the recovered gas can be stably transported in the purification pipeline, and then the recovered gas is subjected to concentration detection and purification operations, etc. The gas supply pipe 7 is used for the xenon gas recovery and purification equipment to output the recovered and purified xenon gas, through the low-pressure tank 4, the high-pressure tank 6, the membrane separation purifier 8, the first The coordination between the concentration meter 9 and the exhaust gas discharge pipe 10 is to generate a certain pressure difference between the recovered gas in the low-pressure tank 4 and the high-pressure tank 6, so that the recovered gas in the high-pressure tank 6 can be transported to the low-pressure tank 4 through the membrane separation purifier 8. During the transportation process, the xenon concentration in the recovered gas is measured by the first concentration meter 9, and the recovered gas is purified and the exhaust gas is discharged by the membrane separation purifier 8. Through the coordination between the low-pressure tank 4, the high-pressure tank 6, the pressure transmitter 11 and the controller 15, the air pressure in the low-pressure tank 4 and the high-pressure tank 6 is measured by the pressure transmitter 11, and the measurement data is transmitted to the controller 15 in real time, which provides an important basis for the controller 15 to adjust the gas pressure in the low-pressure tank 4 and the high-pressure tank 6. The gas pressure regulator 12 is used In order to improve the stability of the gas pressure input to the membrane separation purifier 8, through the cooperation between the low-pressure tank 4, the high-pressure tank 6, the pressure transmitter 11, the pressure regulating pipe 13, the first solenoid valve 14 and the controller 15, the gas pressure in the low-pressure tank 4 and the high-pressure tank 6 is measured in real time, and the first solenoid valve 14 is automatically controlled by the controller 15 to open or close the pressure regulating pipe 13, so as to reduce or increase the gas input to the high-pressure tank 6, and realize automatic adjustment of the gas pressure in the high-pressure tank 6, so that the gas pressure difference between the low-pressure tank 4 and the high-pressure tank 6 is maintained within a certain range, thereby ensuring the stability of gas transportation, and avoiding frequent start and stop of the compressor 5, thereby improving the service life of the equipment, through the shell 1, the recovery pipe 2, the vacuum pump 3, the low-pressure tank 4, the compressor 5, the high The pressure tank 6, the gas supply pipe 7, the membrane separation purifier 8, the first concentration meter 9, the exhaust gas discharge pipe 10, the pressure transmitter 11, the gas pressure regulator 12, the pressure regulating pipe 13, the first solenoid valve 14 and the controller 15 cooperate with each other, and the gas pressure in the low-pressure tank 4 and the high-pressure tank 6 is measured in real time, and the controller 15 automatically controls the first solenoid valve 14 to open or close the pressure regulating pipe 13, so that the pressure difference between the low-pressure tank 4 and the high-pressure tank 6 is maintained within a certain range, thereby ensuring the transportation stability of the gas in the membrane separation purifier 8. At the same time, the gas pressure regulator 12 adjusts the gas transportation pressure at the input end of the membrane separation purifier 8, so that the membrane separation purifier 8 purifies the xenon gas in the recovered gas under a stable pressure, thereby improving the stability of the xenon gas purification.The purified concentration of xenon gas is controlled more accurately, the recovery rate of helium gas is improved, and the maintenance frequency and maintenance cost of the equipment are reduced. The specific models of the vacuum pump 3, the compressor 5, the membrane separation purifier 8, the first concentration meter 9, the pressure transmitter 11, the gas pressure regulator 12, the first solenoid valve 14 and the controller 15 are not limited, and they can meet the use requirements;

[0021] Further, the input end and the output end of the membrane separation purifier 8 are respectively installed with a first flow meter 16, the input end and the output end of the membrane separation purifier 8 are respectively installed with a second solenoid valve 17, the input end of the low-pressure tank 4 is connected with a supplementary pipe 18, the outer wall of the supplementary pipe 18 is installed with a second flow meter 19, the outer wall of the supplementary pipe 18 is installed with a third solenoid valve 20, the first flow meter 16, the second solenoid valve 17, the second flow meter 19 and the third solenoid valve 20 are all electrically connected to the controller 15;

[0022] In the specific implementation process, it is worth pointing out that, through the cooperation among the membrane separation purifier 8, the controller 15, the first flowmeter 16 and the second solenoid valve 17, the second solenoid valve 17 at the input and output ends of the membrane separation purifier 8 is controlled to realize the control of the delivery of the recovered gas into the membrane separation purifier 8, the gas flow rate of the input and output of the membrane separation purifier 8 is measured by the first flowmeter 16, and the measurement signal is transmitted to the controller 15 in real time, so that the xenon recovery and purification system can calculate the exhaust gas discharge, which is convenient for the subsequent replenishment of xenon gas, and through the cooperation among the controller 15, the replenishment pipe 18, the second flowmeter 19 and the third solenoid valve 20, the controller 15 controls the third solenoid valve 20 according to the exhaust gas discharge of the membrane separation purifier 8, so that high-purity xenon gas can be replenished , and the supplementary xenon gas flow is measured by the second flowmeter 19, so that the supplementary amount of xenon gas is consistent with the exhaust gas discharge. Through the cooperation between the membrane separation purifier 8, the controller 15, the first flowmeter 16, the second solenoid valve 17, the supplementary pipe 18, the second flowmeter 19 and the third solenoid valve 20, the input and output gas flows of the membrane separation purifier 8 are measured, so that the xenon recovery and purification system can calculate the exhaust gas discharge, and by measuring the input flow of xenon gas, the supplementary amount of xenon gas can be consistent with the exhaust gas discharge, ensuring the stability of the air pressure of the xenon recovery and purification system, and ensuring the stability and continuity of the xenon supply. The specific models of the first flowmeter 16, the second solenoid valve 17, the second flowmeter 19 and the third solenoid valve 20 are not limited, and can meet the use requirements;

[0023] Furthermore, a fourth solenoid valve 21 is installed on the outer wall of the recovery pipe 2, and one end of the fourth solenoid valve 21 away from the recovery pipe 2 is connected to a filter tank 22, and the output end of the filter tank 22 is connected to the vacuum pump 3, and the fourth solenoid valve 21 is electrically connected to the controller 15;

[0024] In the specific implementation process, it is worth pointing out that, through the cooperation between the recovery pipe 2, the fourth solenoid valve 21 and the filter tank 22, the xenon recovery and purification equipment can accurately control the input of the recovered gas, and the recovered gas is filtered by the filter tank 22 to filter out the dust, particulate matter and other impurities in the recovered gas, which can significantly improve the purity of the recovered gas, and at the same time can reduce the impact of the vacuum pump 3 on the gas delivery pipeline when working, effectively extending the service life of the equipment, wherein the specific model of the fourth solenoid valve 21 is not limited, and it can meet the use requirements;

[0025] Furthermore, a second concentration meter 23 is installed at the output end of the filter tank 22, and the second concentration meter 23 is electrically connected to the controller 15;

[0026] In the specific implementation process, it is worth noting that the xenon concentration of the recovered gas is detected by the second concentration meter 23, and the measurement signal is transmitted to the controller 15 in real time, which provides key feedback data for the xenon recovery and purification system, and facilitates the staff to grasp the xenon concentration data in the recovered gas in real time. The specific model of the second concentration meter 23 is not limited, and it can meet the use requirements;

[0027] Furthermore, a fifth solenoid valve 24 is installed at the input end of the compressor 5, and the fifth solenoid valve 24 is used to control the input of the recovered gas to the compressor 5, and the fifth solenoid valve 24 is electrically connected to the controller 15;

[0028] In the specific implementation process, it is worth pointing out that the fifth solenoid valve 24 is used to control the input of the recovered gas to the compressor 5, wherein the specific model of the fifth solenoid valve 24 is not limited, and it only needs to meet the use requirements.

[0029] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions. The sentence "includes an element defined by ... does not exclude the existence of other identical elements in the process, method, article or device including the element".

[0030] In the present utility model, unless otherwise clearly stipulated and limited, the terms such as "installation", "setting", "connection", "fixation" and "screw-on" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the utility model according to the specific circumstances.

[0031] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An intelligent and efficient xenon gas recovery and purification integrated machine, comprising a housing (1), characterized in that: A recovery pipe (2) is provided on one side of the shell (1), the recovery pipe (2) is connected to a vacuum pump (3), the output end of the vacuum pump (3) is connected to a low-pressure tank (4), the output end of the low-pressure tank (4) is connected to a compressor (5), the output end of the compressor (5) is connected to a high-pressure tank (6), the output end of the high-pressure tank (6) is connected to a gas supply pipe (7), the output end of the high-pressure tank (6) is connected to a first concentration meter (9), a membrane separation purifier (8) is provided at one end of the first concentration meter (9) away from the high-pressure tank (6), a gas pressure regulator (12) is installed at the input end of the membrane separation purifier (8), and the gas pressure regulator (12) is connected to the first concentration meter (9). The shell (1) is connected to a meter (9), a waste gas discharge pipe (10) is arranged on one side of the membrane separation purifier (8), the output end of the membrane separation purifier (8) is connected to the low-pressure tank (4), the top of the low-pressure tank (4) and the high-pressure tank (6) are both equipped with a pressure transmitter (11), the output end of the low-pressure tank (4) and the input end of the high-pressure tank (6) are both connected to a pressure regulating pipe (13), the pressure regulating pipe (13) is equipped with a first solenoid valve (14), a controller (15) is installed inside the shell (1), and the controller (15) is respectively electrically connected to the vacuum pump (3), the compressor (5), the first concentration meter (9), the pressure transmitter (11) and the first solenoid valve (14).

2. The intelligent and efficient xenon gas recovery and purification integrated machine according to claim 1 is characterized in that: The input end and output end of the membrane separation purifier (8) are respectively installed with a first flow meter (16), and the input end and output end of the membrane separation purifier (8) are respectively installed with a second solenoid valve (17). The input end of the low-pressure tank (4) is connected to a supplementary pipe (18), and a second flow meter (19) is installed on the outer wall of the supplementary pipe (18). A third solenoid valve (20) is installed on the outer wall of the supplementary pipe (18). The first flow meter (16), the second solenoid valve (17), the second flow meter (19) and the third solenoid valve (20) are all electrically connected to the controller (15).

3. The intelligent and efficient xenon gas recovery and purification integrated machine according to claim 1 is characterized in that: A fourth solenoid valve (21) is installed on the outer wall of the recovery pipe (2); one end of the fourth solenoid valve (21) away from the recovery pipe (2) is connected to a filter tank (22); the output end of the filter tank (22) is connected to a vacuum pump (3); and the fourth solenoid valve (21) is electrically connected to a controller (15).

4. The intelligent and efficient xenon gas recovery and purification integrated machine according to claim 3 is characterized by: A second concentration meter (23) is installed at the output end of the filter tank (22), and the second concentration meter (23) is electrically connected to the controller (15).

5. The intelligent and efficient xenon gas recovery and purification integrated machine according to claim 1 is characterized in that: A fifth solenoid valve (24) is installed at the input end of the compressor (5), and the fifth solenoid valve (24) is electrically connected to the controller (15).

Images