Welding tool and semiconductor welding device

Abstract

The utility model relates to the field of semiconductor processing equipment, and provides a welding tool and a semiconductor welding device. The welding tool comprises a base plate, a guide fixing assembly, a reference positioning assembly and a clamping assembly, and the guide fixing assembly, the reference positioning assembly and the clamping assembly are all arranged on the base plate. The reference positioning assembly can move relative to the guiding and fixing assembly so that the reference positioning assembly can be close to or away from the guiding and fixing assembly, the reference positioning assembly is used for pushing the welding part to abut against the guiding and fixing assembly, and the clamping assembly is used for fixing the welding part to the guiding and fixing assembly. According to the welding tool, the welding part can be fixed, so that the welding robot can weld the edge of the welding part according to the set welding path, stable and continuous welding seams are obtained, meanwhile, it is guaranteed that the welding part is fixed in the welding process, the consistency of the welding seams is guaranteed, gaps are prevented from being generated in the welding seams, and the welding quality is effectively improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor processing equipment, in particular to a welding tool and a semiconductor welding device. Background Art

[0002] The high-end waste gas treatment equipment in the semiconductor industry has extremely high requirements for air tightness. Welding leaks are not allowed when welding the waste gas treatment equipment. Therefore, the welding quality requirements for the parallelism and verticality of the end faces of the welded parts are extremely high.

[0003] At present, manual welding is the main welding method for welded parts. However, manual welding cannot guarantee continuous welding of welded parts, cannot guarantee the consistency of welds, and is prone to weld gaps that are difficult to detect, affecting welding quality. Utility Model Content

[0004] The utility model aims to solve at least one of the problems existing in the related art. To this end, the utility model proposes a welding tool that can fix the weldment so that the welding robot can weld the edge of the weldment according to the set welding path to obtain a stable and continuous weld, while ensuring that the weldment is fixed during the welding process, ensuring the consistency of the weld, avoiding gaps in the weld, and effectively improving the welding quality.

[0005] The utility model also provides a semiconductor welding device.

[0006] The first aspect of the utility model provides a welding tool, comprising:

[0007] substrate;

[0008] A guide fixing component is arranged on the base plate;

[0009] A reference positioning assembly, disposed on the base plate, the reference positioning assembly can move relative to the guide fixing assembly, and the reference positioning assembly is used to push the welding piece to abut against the guide fixing assembly;

[0010] A clamping assembly is arranged on the base plate, and the clamping assembly is used to fix the welding part to the guide fixing assembly.

[0011] According to a welding tool provided by an embodiment of the utility model, the reference positioning assembly includes at least two positioning members, a preset angle is formed between the two positioning members, a fixed portion of the positioning member is connected to the substrate, and a protruding portion of the positioning member is suitable for abutting against the welding member.

[0012] According to a welding tool provided by an embodiment of the utility model, the reference positioning assembly further includes an adjusting member, the positioning member and the base plate are connected via the adjusting member, and the adjusting member is used to adjust the height of the positioning member.

[0013] According to a welding tool provided by an embodiment of the utility model, the guide fixing assembly includes a plurality of guide fixing plates, and the guide fixing plates are arranged on the base plate, wherein a part of the guide fixing plates is arranged opposite to one of the positioning members, and another part of the guide fixing plates is arranged opposite to another positioning member.

[0014] According to a welding tool provided by an embodiment of the utility model, the clamping assembly includes at least two groups of clamping members, the fixing parts of the clamping members are arranged on the base plate, and the protruding parts of the clamping members are suitable for abutting against the welding member.

[0015] According to a welding tool provided by an embodiment of the utility model, the protruding parts of one group of the clamping members are arranged opposite to one part of the guide fixing plate, and the protruding parts of another group of the clamping members are arranged opposite to another part of the guide fixing plate.

[0016] According to a welding tool provided by an embodiment of the utility model, the protruding portion of the positioning member is higher than the protruding portion of the clamping member.

[0017] According to a welding tool provided by an embodiment of the utility model, the clamping assembly further includes a limiter, the limiter is arranged at a fixed end of the clamping member, and the limiter is used to limit the extension stroke of the clamping member.

[0018] A welding tool provided according to an embodiment of the utility model also includes:

[0019] A support component is arranged on the base plate, and the support component is used to support the welding part.

[0020] A semiconductor welding device provided in an embodiment of the second aspect of the utility model comprises a welding robot, a pneumatic control element and any one of the welding tools described above, wherein the pneumatic control element is electrically connected to the control system of the welding robot, and the reference positioning assembly and the clamping assembly are both connected to the pneumatic control element.

[0021] The above one or more technical solutions in the embodiments of the utility model have at least one of the following technical effects:

[0022] According to the welding tooling provided in the embodiment of the utility model, since the reference positioning assembly can be moved relative to the guide fixing assembly, before using the welding robot to weld the weldment, the reference positioning assembly is moved in a direction close to the guide fixing assembly, so that the reference positioning assembly can be used to push the weldment to abut against the guide fixing assembly, so that the edge of the weldment corresponds to the welding path set by the welding robot.

[0023] Subsequently, the weldment is fixed to the guide fixing assembly by means of a clamping assembly to fix the edge of the weldment, thereby enabling the welding robot to weld the edge of the weldment according to the set welding path, and utilize the welding stability of the welding robot to weld the weldment to obtain a stable and continuous weld. At the same time, the weldment is fixed during the welding process, thereby ensuring the consistency of the weld, avoiding gaps in the weld, and effectively improving the welding quality.

[0024] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 It is a three-dimensional structural schematic diagram of a welding tool provided in an embodiment of the utility model;

[0027] Figure 2 It is a schematic diagram of the top view of the welding tool provided in the embodiment of the utility model;

[0028] Figure 3 It is a structural schematic diagram of a welding part provided in an embodiment of the utility model.

[0029] Reference numerals:

[0030] 100, substrate; 110, avoidance hole;

[0031] 200, guide fixing assembly; 210, guide fixing plate;

[0032] 300, reference positioning assembly;

[0033] 310, positioning member; 311, positioning cylinder; 312, positioning plate; 313, first connecting plate;

[0034] 320, adjusting member; 321, adjusting cylinder; 322, adjusting plate; 323, second connecting plate;

[0035] 400, clamping assembly;

[0036] 410, clamping member; 411, clamping cylinder; 412, clamping plate; 413, third connecting plate;

[0037] 420, a limiting member; 421, a limiting plate; 422, a limiting guide shaft;

[0038] 500. Support assembly; 600. Welding parts. DETAILED DESCRIPTION

[0039] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0040] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0041] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0042] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0043] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0044] Combine the following Figures 1 to 3 The welding tool provided by the embodiment of the first aspect of the utility model is described.

[0045] Figure 1 The three-dimensional structural diagram of the welding tool provided by the embodiment of the utility model is illustrated. Figure 2 The schematic diagram of the top view of the welding tool provided by the embodiment of the utility model is illustrated as follows: Figure 1 and Figure 2 As shown, the welding tool includes a base plate 100, a guide fixing assembly 200, a reference positioning assembly 300 and a clamping assembly 400, and the guide fixing assembly 200, the reference positioning assembly 300 and the clamping assembly 400 are all arranged on the base plate 100. The reference positioning assembly 300 can move relative to the guide fixing assembly 200 so that the reference positioning assembly 300 can be close to or away from the guide fixing assembly 200, the reference positioning assembly 300 is used to push the welding piece 600 to abut against the guide fixing assembly 200, and the clamping assembly 400 is used to fix the welding piece 600 to the guide fixing assembly 200.

[0046] According to the welding tooling provided in the embodiment of the utility model, since the reference positioning assembly 300 can be moved relative to the guide fixing assembly 200, before using the welding robot to weld the weldment 600, the reference positioning assembly 300 is moved in a direction close to the guide fixing assembly 200, so that the reference positioning assembly 300 can be used to push the weldment 600 to abut against the guide fixing assembly 200, so that the edge of the weldment 600 corresponds to the welding path set by the welding robot.

[0047] Subsequently, the welding piece 600 is fixed to the guide fixing assembly 200 by the clamping assembly 400 to fix the edge of the welding piece 600, so that the welding robot can weld the edge of the welding piece 600 according to the set welding path, and the welding stability of the welding robot is used to weld the welding piece 600 to obtain a stable and continuous weld. At the same time, the welding piece 600 is fixed during the welding process, which ensures the consistency of the weld, avoids the generation of gaps in the weld, and effectively improves the welding quality.

[0048] In addition, the welding piece 600 is fixed by the clamping assembly 400 and the guide fixing assembly 200 to limit the movement and shaking of the welding piece 600 during the welding process, thereby reducing the deformation generated when welding the welding piece 600 and further ensuring the welding quality.

[0049] It should be noted that the welding path is a welding path from the starting point to the end point planned by the welding robot according to the actual shape, size and welding requirements of the welded part 600. During welding, the welding robot can perform continuous welding along the set welding path to ensure the continuity of the weld and ensure that there are no gaps in the weld. The welding path can be a straight line, a curve or other shapes, depending on the actual welded part 600 and the welding requirements.

[0050] It should also be noted that after the clamping assembly 400 fixes the welding piece 600, the reference positioning assembly 300 needs to be moved away from the guide fixing assembly 200 so that the reference positioning assembly 300 can avoid the welding path.

[0051] Figure 3 The structural schematic diagram of the welding part provided by the utility model is illustrated. Figure 3 Taking the welding structure shown in as an example, the welding part 600 in this embodiment includes a welding plate and a welding block, and the connecting surface between the welding plate and the welding block is a straight line, so the welding path is a straight line. At the same time, in order to ensure that there is no gap between the welds of adjacent connecting surfaces, the welds of adjacent connecting surfaces must be vertical, so the welding paths of adjacent connecting surfaces must also be vertical.

[0052] In the embodiment of the present utility model, Figure 1 and Figure 2 As shown, the reference positioning assembly 300 includes at least two positioning members 310 , and a preset angle is formed between the two positioning members 310 . The fixing portion of the positioning member 310 is connected to the substrate 100 , and the protruding portion of the positioning member 310 is suitable for abutting against the welding member 600 .

[0053] It is understandable that when the welding piece 600 needs to be abutted against the guide fixing assembly 200, the extension of the positioning piece 310 can be extended so that the extension of the positioning piece 310 abuts against the welding piece 600, so that the welding piece 600 is pushed toward the guide fixing assembly 200 by the extension of the positioning piece 310 to adjust the position of the welding piece 600. At the same time, the welding piece 600 is pushed by two positioning pieces 310 at preset angles to adjust the placement angle of the welding piece 600. Then, the position and placement angle of the welding piece 600 are adjusted by the positioning piece 310, so that the welding piece 600 can correspond to the set welding path to meet the actual welding requirements and ensure the welding quality.

[0054] For example, when the weldment 600 is Figure 3 In the welding part structure shown, the preset angle is preferably 90°, so as to adjust the placement angle of the welding part 600 so that the welding surface position of the welding part 600 can coincide with the welding path to ensure the welding quality.

[0055] Specifically, two positioning members 310 are provided, and the two positioning members 310 are at a preset angle. The positioning member 310 includes a positioning cylinder 311, a positioning plate 312 and a first connecting plate 313, the first connecting plate 313 is connected to the base plate 100, the fixed part of the positioning cylinder 311 is installed on the first connecting plate 313, the positioning plate 312 is installed on the extended part of the positioning cylinder 311, and the positioning plate 312 can abut against the welding member 600, so that the positioning cylinder 311 pushes the positioning plate 312 to move, thereby pushing the welding member 600 to move.

[0056] When the welding path needs to be avoided, the extended portion of the positioning cylinder 311 can be retracted to retract the positioning plate 312 .

[0057] It should be noted that the first connecting plate 313 may be an L-shaped connecting plate, which is threadedly connected to the positioning cylinder 311. Of course, the connection method between the positioning cylinder 311 and the first connecting plate 313 is not limited to threaded connection, and can be selected according to actual conditions.

[0058] Furthermore, if Figure 1 As shown, the reference positioning assembly 300 further includes an adjusting member 320, through which the positioning member 310 is connected to the substrate 100, and the adjusting member 320 is used to adjust the height of the positioning member 310. The height of the positioning member 310 is then adjusted by the adjusting member 320, so that the positioning member 310 can be raised to the height where the welding surface of the welding member 600 is located, so that the protruding portion of the positioning member 310 can directly push the welding surface of the welding member 600, so as to adjust the position and placement angle of the welding surface of the welding member 600, further ensuring that the welding surface of the welding member 600 corresponds to the set welding path, thereby ensuring the welding quality.

[0059] Specifically, the adjusting member 320 includes an adjusting cylinder 321, an adjusting plate 322, and a second connecting plate 323, wherein the second connecting plate 323 is disposed on the base plate 100, the fixing portion of the adjusting cylinder 321 is mounted on the second connecting plate 323, the adjusting plate 322 is mounted on the extended portion of the adjusting cylinder 321, and the first connecting plate 313 is mounted on the adjusting plate 322. When the height of the positioning member 310 needs to be adjusted, the height of the second connecting plate 323 and the first connecting plate 313 can be adjusted by controlling the extended length of the extended portion of the adjusting cylinder 321, so as to adjust the height of the positioning cylinder 311 and the positioning plate 312.

[0060] It should be noted that, in this embodiment, the adjusting cylinder 321 and the base plate 100 can be connected by a right-angle bracket, one side of the right-angle bracket is threadedly connected to the adjusting cylinder 321, and the other side of the right-angle bracket is threadedly connected to the base plate 100, so as to facilitate the maintenance and replacement of the adjusting cylinder 321. Of course, the connection between the adjusting cylinder 321 and the base plate 100 is not limited to the right-angle bracket, and can also be replaced by a connector such as an L-shaped connecting plate or an angle iron, which can be selected according to actual conditions.

[0061] In the embodiment of the present utility model, Figure 1 and Figure 2 As shown, the guide fixing assembly 200 includes a plurality of guide fixing plates 210 , which are disposed on the substrate 100 , wherein a portion of the guide fixing plates 210 is disposed opposite to one of the positioning members 310 , and another portion of the guide fixing plates 210 is disposed opposite to another positioning member 310 .

[0062] Furthermore, when the positioning member 310 pushes the welding member 600 toward the guide fixing plate 210, the guide fixing plate 210 can provide guidance for the movement of the welding member 600, so that the placement angle of the welding member 600 can be adjusted according to the setting method of multiple guide fixing plates 210 to meet the welding requirements of the welding member 600 during welding and ensure the welding quality.

[0063] In this embodiment, since the guide fixing plate 210 is arranged relative to the corresponding positioning member 310, when the two positioning members 310 are at a preset angle, one part of the guide fixing plate 210 and the other part of the guide fixing plate 210 are also at the preset angle. Then, the position of the welding part 600 can be constrained by the guide fixing plate 210 and the positioning plate 312, thereby ensuring that the welding surface of the welding part 600 can be located in the set welding path, thereby further ensuring the welding quality of the welding part 600.

[0064] Specifically, in this embodiment, four guide fixing plates 210 are provided, and the guide fixing plates 210 are arranged in groups of two, and are arranged opposite to the corresponding positioning plates 312. The side of the guide fixing plate 210 facing the positioning plate 312 is an abutting surface, and the welding piece 600 abuts against the abutting surface. The abutting surfaces of the two guide positioning plates 312 in the same group are coplanar, and the abutting surfaces of one group of guide positioning plates 312 and the abutting surfaces of the other group of guide positioning plates 312 form a preset angle, and the preset angle is preferably 90°.

[0065] In the embodiment of the present utility model, Figure 1 and Figure 2 As shown, the clamping assembly 400 includes at least two groups of clamping members 410 , the fixing portions of the clamping members 410 are disposed on the substrate 100 , and the protruding portions of the clamping members 410 are suitable for abutting against the welding member 600 .

[0066] It can be understood that after the positioning member 310 abuts the welding member 600 against the guide fixing plate 210, the protruding portion of the clamping member 410 extends out and abuts against the welding member 600, so that the welding member 600 remains fixed during the welding process, avoiding movement or shaking during the welding process, ensuring that the welding process of the welding robot on the welding member 600 can be completed stably, and making the weld of the welding member 600 continuous without generating gaps, thereby ensuring the welding quality of the welding member 600.

[0067] Among them, the protruding part of one group of clamping members 410 is arranged opposite to one part of the guide fixing plate 210, and the protruding part of the other group of clamping members 410 is arranged opposite to another part of the guide fixing plate 210, so that the protruding part of one group of clamping members 410 and the protruding part of the other group of clamping members 410 form a preset angle, so as to ensure that when the clamping members 410 and the guide fixing plate 210 clamp and fix the welding member 600, the placement angle of the welding member 600 can remain unchanged, so that the welding surface of the welding member 600 can always be located in the set welding path, so as to further improve the welding accuracy and welding quality.

[0068] Specifically, in this embodiment, four clamping members 410 are provided, and each clamping member 410 is arranged in one-to-one correspondence with the corresponding guide fixing plate, wherein two clamping members 410 facing the same direction are grouped in pairs. The clamping member 410 includes a clamping cylinder 411, a clamping plate 412 and a third connecting plate 413, wherein the third connecting plate 413 is connected to the base plate 100, the fixing portion of the clamping cylinder 411 is mounted on the third connecting plate 413, and the extension portion of the clamping cylinder 411 is connected to the clamping plate 412. When it is necessary to clamp the weldment 600, the extension portion of the clamping cylinder 411 can be controlled to extend to drive the clamping plate 412 to move toward the weldment 600, so as to achieve clamping of the weldment 600 by the clamping plate 412.

[0069] It should be noted that the third connecting plate 413 can be an L-shaped connecting piece, one side of which is connected to the base plate 100 by bolts, and the other side of which is connected to the clamping cylinder 411 by bolts, so as to facilitate the maintenance and replacement of the adjusting cylinder 321. Of course, the third connecting plate 413 is not limited to the L-shaped connecting plate, and can also be replaced by connecting pieces such as angle brackets or angle irons, which can be selected according to actual conditions.

[0070] Furthermore, if Figure 1 As shown, since the extended portion of the positioning member 310 is located at the height of the welding surface of the welding member 600, the welding surface of the welding member 600 is directly pushed to move. In this embodiment, the extended portion of the positioning member 310 is higher than the extended portion of the clamping member 410, so that the extended portion of the clamping member 410 is located below the welding surface of the welding member 600. Then, when the clamping member 410 completes the fixation of the welding member 600 and the extended portion of the positioning member 310 is recovered, the extended end of the clamping member 410 is below the welding path, so as to avoid the extended end of the clamping member 410 interfering with the welding process of the welding member 600.

[0071] In the embodiment of the present utility model, Figure 1 and Figure 2 As shown, the clamping assembly 400 also includes a limit member 420, which is arranged at the fixed end of the clamping member 410. The limit member 420 is used to limit the extension stroke of the clamping member 410 to ensure that the clamping member 410 can work within the set stroke range to avoid the clamping member 410 exceeding the set stroke range and causing damage.

[0072] Specifically, the limiting member 420 includes a limiting plate 421 and a limiting guide shaft 422. The protruding part of the clamping cylinder 411 is the protruding shaft. The limiting guide shaft 422 is integrally formed with the protruding shaft of the clamping cylinder 411. The limiting plate 421 is installed on the limiting guide shaft 422. When the protruding shaft of the clamping cylinder 411 is extended, the protruding shaft drives the limiting plate 421 to move toward the clamping cylinder 411. When the limiting plate 421 abuts against the clamping cylinder 411, the protruding shaft of the clamping cylinder 411 stops extending, thereby limiting the formation of the clamping cylinder 411 through the limiting plate 421.

[0073] In the embodiment of the present utility model, Figure 1 and Figure 2 As shown, the welding tooling also includes a support assembly 500, which is disposed on the substrate 100. The support assembly 500 is used to support the weldment 600 to further ensure that the weldment 600 remains stable during the welding process. At the same time, the weldment 600 is supported by the support assembly 500 to disperse the gravity of the weldment 600, thereby reducing the possibility of deformation and movement of the weldment 600.

[0074] Specifically, Figure 1 As shown, the support assembly 500 includes at least two support plates, which are mounted on the base plate 100 via connecting bosses. The support plates can abut against the bottom surface of the welding member 600 to support the welding member 600 .

[0075] It should be noted here that the substrate 100 can be provided with avoidance holes 110 according to the structure of the welding part 600 and the setting position of the support assembly 500, so as to further limit the welding part 600 through the avoidance holes 110 and the welding tooling to ensure that the welding part 600 does not move or shake.

[0076] The second embodiment of the utility model provides a semiconductor welding device, which includes a welding robot, a pneumatic control element and the welding tooling described in the first embodiment. The pneumatic control element is electrically connected to the control system of the welding robot, and the reference positioning assembly 300 and the clamping assembly 400 are both connected to the pneumatic control element.

[0077] According to the semiconductor welding device provided by the embodiment of the utility model, when welding the welding piece 600, the control system of the welding robot first controls the reference positioning assembly 300 through the pneumatic control element, so that the reference positioning unit pushes the welding piece 600 to abut against the guide fixing assembly 200, and the reference positioning unit is used to complete the positioning of the welding piece 600; then the control system of the welding robot controls the clamping assembly 400 to move toward the welding piece 600 through the pneumatic control element, thereby fixing the welding piece 600 through the clamping assembly 400 and the guide fixing assembly 200, so that the welding piece 600 cannot move or shake; finally, the welding robot is controlled to weld the welding piece 600, so that the weld seam of the welding piece 600 is continuous, effectively avoiding the appearance of gaps in the weld seam of the welding piece 600, and effectively improving the welding quality.

[0078] Specifically, in this embodiment, the pneumatic control element is connected to the positioning cylinder 311 , the adjusting cylinder 321 , and the clamping cylinder 411 through an air pipe to control the movement of the positioning cylinder 311 , the adjusting cylinder 321 , and the clamping cylinder 411 .

[0079] Combine the following Figures 1 to 3 The specific working process of the welding tool provided by the utility model is described.

[0080] by Figure 3Taking the weldment structure shown in as an example, the extension of the positioning cylinder 311, the extension of the adjusting cylinder 321 and the extension of the clamping cylinder 411 are kept in a retracted state, and the bottom surface of the weldment 600 is placed on the support plate. The control system of the welding robot controls the extension of the adjusting cylinder 321 to extend, so that the height of the positioning cylinder 311 is consistent with the height of the welding surface of the weldment 600. The control system of the welding robot controls the extension of the positioning cylinder 311 to extend, so as to adjust the placement angle and placement position of the weldment 600, so that the weldment 600 is against the guide fixing plate 210. The control system of the welding robot controls the extension part of the clamping cylinder 411 to extend, so as to fix the weldment 600 through the guide fixing plate 210 and the clamping plate 412, so that the welding robot can weld the edge of the weldment 600 according to the set welding path, and utilize the welding stability of the welding robot to weld the weldment 600, so that the weld of the weldment 600 is stable, and at the same time, the weldment 600 is fixed during the welding process, thereby ensuring the consistency of the weld, avoiding the generation of gaps in the weld, and effectively improving the welding quality.

[0081] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A welding tool, characterized in that: include: substrate; A guide fixing component is arranged on the base plate; A reference positioning assembly is disposed on the base plate, the reference positioning assembly can move relative to the guide fixing assembly, and the reference positioning assembly is used to push the welding piece to abut against the guide fixing assembly; A clamping assembly is arranged on the base plate, and the clamping assembly is used to fix the welding part to the guide fixing assembly.

2. The welding tool according to claim 1, characterized in that: The reference positioning assembly includes at least two positioning members, a preset angle is formed between the two positioning members, a fixing portion of the positioning member is connected to the substrate, and a protruding portion of the positioning member is suitable for abutting against the welding member.

3. The welding tool according to claim 2, characterized in that: The reference positioning assembly also includes an adjusting member, through which the positioning member and the base plate are connected, and the adjusting member is used to adjust the height of the positioning member.

4. The welding tool according to claim 2, characterized in that: The guide fixing assembly includes a plurality of guide fixing plates, and the guide fixing plates are arranged on the base plate, wherein a part of the guide fixing plates is arranged opposite to one of the positioning members, and another part of the guide fixing plates is arranged opposite to another positioning member.

5. The welding tool according to claim 4, characterized in that: The clamping assembly comprises at least two groups of clamping members, the fixing parts of the clamping members are arranged on the base plate, and the protruding parts of the clamping members are suitable for abutting against the welding member.

6. The welding tool according to claim 5, characterized in that: The protruding portions of one group of the clamping members are arranged opposite to one part of the guide fixing plates, and the protruding portions of the other group of the clamping members are arranged opposite to another part of the guide fixing plates.

7. The welding tool according to claim 6, characterized in that: The protruding portion of the positioning member is higher than the protruding portion of the clamping member.

8. The welding tool according to claim 5, characterized in that: The clamping assembly further comprises a limiter, which is arranged at a fixed end of the clamping member and is used to limit an extension stroke of the clamping member.

9. The welding tool according to any one of claims 1 to 8, characterized in that: Also includes: A support component is arranged on the base plate, and the support component is used to support the welding part.

10. A semiconductor welding device, characterized in that: It comprises a welding robot, a pneumatic control element and the welding tooling as described in any one of claims 1 to 9, wherein the pneumatic control element is electrically connected to the control system of the welding robot, and the reference positioning assembly and the clamping assembly are both connected to the pneumatic control element.

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