Clamp

Abstract

The utility model belongs to the technical field of wafer processing, and relates to a clamp. The clamp comprises a sleeve which is of a hollow structure with two open ends; the pushing rod can move in the sleeve in the length direction of the sleeve, one end face of the pushing rod is a datum plane, and a space defined by the datum plane and the inner wall of the sleeve is a clamping space; the fixing structure is used for fixing the pushing rod relative to the sleeve; and at least one first fastener is connected to the sleeve through threads and extends into the clamping space from the outer wall of the sleeve. According to the utility model, the push rod moves in the sleeve to adjust the position of the reference surface in the sleeve, so that the height of the thin wafer exposed out of the sleeve is adjusted; the oriented end of the thin wafer is attached to the datum plane, the thin wafer is fixed in the clamping space through the first fastener, and it is guaranteed that the end face obtained after grinding machining is parallel to the datum plane.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer processing and relates to a clamp. Background Art

[0002] When taking Hall slices of the crystal, take one slice from each end until the carrier concentration at both ends is less than 2E10cm -3 Until then, according to the carrier concentration, cut off the next Hall plate, and 0.5 to 3 cm thin slices will be produced in this process.

[0003] In order to avoid the waste of resources caused by the scrapping of such thin wafers, one end face of such thin wafers can be inspected by an orientation instrument, scribed, and then ground. After grinding, it is inspected again by an orientation instrument. If the requirements are not met, the marking and grinding steps need to be repeated until the orientation requirements are met.

[0004] When processing the other end face, the end face to be processed needs to be inspected, marked and ground again by an orientation instrument. The processing efficiency is low and the operation is cumbersome. Utility Model Content

[0005] The technical problem to be solved by the utility model is to provide a clamp which takes the oriented end face as the positioning reference to grind another end face to be processed, thereby improving the processing efficiency and being simple to operate.

[0006] The technical solution proposed by the utility model is:

[0007] A clamp, comprising:

[0008] A sleeve, which is a hollow structure with openings at both ends;

[0009] A push rod, which can move in the sleeve along the length direction of the sleeve, one end face of the push rod is a reference surface, and the space enclosed by the reference surface and the inner wall of the sleeve is a clamping space;

[0010] A fixing structure, wherein the fixing structure fixes the push rod relative to the sleeve;

[0011] The first fastener, at least one first fastener, is connected to the sleeve through threads and extends from the outer wall of the sleeve into the clamping space.

[0012] Optionally, also include:

[0013] A connecting rod, one end of the connecting rod is connected to the push rod, and the other end of the connecting rod extends out of the sleeve. The connecting rod and the reference surface are respectively located at two ends of the push rod.

[0014] Optionally, also include:

[0015] The hand-held part is connected to the connecting rod and is located outside the sleeve.

[0016] Optionally, the fixing structure includes an external thread arranged on an outer side wall of the push rod and an internal thread arranged on an inner wall of the sleeve, and the push rod is connected to the inner wall of the sleeve via threads.

[0017] Optionally, the fixing structure further includes: an anti-loosening sleeve, which is arranged outside the connecting rod, and the outer wall of the anti-loosening sleeve is connected to the inner wall of the sleeve through a thread.

[0018] Optionally, a sleeve is provided at one end of the anti-loosening sleeve, the sleeve is sleeved outside the connecting rod, the sleeve extends out of the sleeve, and the outer wall of the sleeve is provided with at least a pair of mutually parallel connecting surfaces.

[0019] Optionally, a plurality of first fasteners clamp and fix the workpiece.

[0020] Optionally, at least one first fastener pushes the workpiece to fit tightly against the inner wall of the sleeve.

[0021] Optionally, the fixing structure includes multiple second fasteners, which are connected to the sleeve. Multiple second fasteners arranged in the same circumference form a group, and at least one group of second fasteners is arranged along the length direction of the sleeve. At least one group of second fasteners fixes the push rod relative to the sleeve.

[0022] Optionally, a guide and limiting structure is also included, and the guide and limiting structure is arranged between the sleeve and the push rod.

[0023] Compared with the prior art, the beneficial effects of the utility model are:

[0024] The utility model adjusts the position of the reference surface in the sleeve by moving the push rod in the sleeve, thereby adjusting the height of the thin wafer exposed from the sleeve; by fitting one end of the thin wafer that has been oriented with the reference surface and fixing the thin wafer in the clamping space by a first fastener, it is ensured that the end face after grinding is parallel to the reference surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation to the present invention.

[0026] Figure 1 It is a schematic diagram of the structure of the utility model;

[0027] Figure 2 This is a schematic diagram of the anti-loosening sleeve and casing installation structure of the utility model;

[0028] Figure 3 It is a top view of the anti-loosening sleeve and the casing of the utility model;

[0029] Figure 4It is a top view of the handheld part of the utility model;

[0030] Figure 5 This is a schematic diagram of the installation structure of the second fastener of the utility model;

[0031] Figure 6 For this utility model Figure 5 Top view of the sleeve.

[0032] In the figure: 1. sleeve; 2. push rod; 3. first fastener; 4. connecting rod; 5. hand-held part; 6. anti-loosening sleeve; 7. sleeve; 8. connecting surface; 9. second fastener; 10. guide limit structure; 11. wafer. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0035] Example 1

[0036] Please refer to Figure 1-6 , a fixture comprising:

[0037] Sleeve 1, which is a hollow structure with openings at both ends;

[0038] A push rod 2, which can move in the sleeve 1 along the length direction of the sleeve 1, one end surface of the push rod 2 is a reference surface, and the space enclosed by the reference surface and the inner wall of the sleeve 1 is a clamping space;

[0039] A fixing structure, wherein the fixing structure fixes the push rod 2 relative to the sleeve 1;

[0040] A first fastener 3 , at least one first fastener 3 is connected to the sleeve 1 through threads and extends from the outer wall of the sleeve 1 into the clamping space.

[0041] It should be noted that the first fastener 3 is a bolt or a set screw. The first fastener 3 is made of plastic material, or a plastic head is used at the end of the first fastener 3 that contacts the thin wafer.

[0042] Specifically, when clamping the thin wafer, the oriented end of the thin wafer is fitted with the reference surface, and then the height of the push rod 2 is adjusted so that the height of the thin wafer exposed from the sleeve 1 is appropriate, and the push rod 2 and the sleeve 1 are relatively fixed by the fixing structure; further, the first fastener 3 is rotated so that the first fastener 3 moves into the clamping space, thereby supporting the outer wall of the thin wafer and fixing the thin wafer.

[0043] As a further option, it also includes:

[0044] Connecting rod 4, one end of connecting rod 4 is connected to ejector rod 2, the other end of connecting rod 4 extends out of sleeve 1, connecting rod 4 and reference surface are respectively located at two ends of ejector rod 2. The purpose of setting connecting rod 4 is to facilitate the movement of ejector rod 2. When using equipment such as grinder or lathe for processing, connecting rod 4 can be clamped by the chuck of grinder or lathe to realize the installation and fixation of the fixture. At this time, connecting rod 4 is coaxial with ejector rod 2, so that the reference surface can be perpendicular to the center line of the chuck of grinder or lathe.

[0045] As a further option, it also includes:

[0046] The hand-held part 5 is connected to the connecting rod 4 and is located outside the sleeve 1. When a thin wafer is processed on a grinding disc by using a hand-held fixture, the hand-held part 5 can be used to conveniently rotate the push rod 2 and to conveniently grasp the fixture.

[0047] The handle 5 can be arranged in a variety of ways, for example, by welding at least one rod to the outer side wall of the connecting rod 4, or by welding a frame to the end of the connecting rod 4, and the frame can be perpendicular or parallel to the rod.

[0048] It should be noted that there are two ways to fix the thin wafer by the first fastener 3 . One is to clamp and fix the thin wafer by multiple first fasteners 3 .

[0049] Another way is to use at least one first fastener 3 to push the workpiece to fit tightly against the inner wall of the sleeve 1, thereby clamping and fixing the thin wafer.

[0050] It should be noted that in the above two fixing methods, a plurality of first fasteners 3 arranged along the same circumferential direction are grouped together, and a plurality of groups of first fasteners 3 may be arranged along the length direction of the sleeve 1 .

[0051] Example 2

[0052] refer to Figure 1 , Figure 2 , Figure 3 , the fixing structure of the utility model is described in detail.

[0053] The fixing structure includes an external thread provided on the outer wall of the push rod 2 and an internal thread provided on the inner wall of the sleeve 1, and the push rod 2 is connected to the inner wall of the sleeve 1 through threads. The push rod 2 can be fixed relative to the sleeve 1 by connecting the external thread on the outer wall of the push rod 2 with the internal thread on the inner wall of the sleeve 1. The height of the reference surface in the sleeve 1 can be adjusted by rotating the push rod 2.

[0054] As a further solution, the fixing structure further includes: an anti-loosening sleeve 6, which is sleeved outside the connecting rod 4, and the outer wall of the anti-loosening sleeve 6 is connected to the inner wall of the sleeve 1 through a thread. By threading the anti-loosening sleeve 6 with the inner wall of the sleeve 1, the push rod 2 can be supported by the anti-loosening sleeve 6 to prevent the push rod 2 from loosening after being subjected to a reverse force.

[0055] It should be noted that the anti-loosening sleeve 6 and the connecting rod 4 in this solution are clearance-fitted.

[0056] As a further solution, a sleeve 7 is provided at one end of the anti-loosening sleeve 6, and the sleeve 7 is sleeved outside the connecting rod 4, and the sleeve 7 extends out of the sleeve 1, and the outer wall of the sleeve 7 is provided with at least a pair of mutually parallel connecting surfaces 8. By providing the sleeve 7, the anti-loosening sleeve 6 can be conveniently rotated. By providing the connecting surface 8, the sleeve 7 can be twisted by a wrench. Obviously, the sleeve 7 and the anti-loosening sleeve 6 are integrally formed. The sleeve 7 and the connecting rod 4 are clearance fit.

[0057] Furthermore, the outer wall of the sleeve 7 is a regular hexagon.

[0058] Example 3

[0059] refer to Figure 5 , Figure 6 , providing a fixing structure different from that of Example 2.

[0060] The fixing structure includes multiple second fasteners 9, which are connected to the sleeve 1. Multiple second fasteners 9 arranged in the same circumference form a group. At least one group of second fasteners 9 is arranged along the length direction of the sleeve 1. At least one group of second fasteners 9 fixes the push rod 2 relative to the sleeve 1.

[0061] It should be noted that the second fastener 9 can be a bolt or a set screw. Further, the end of the second fastener 9 that contacts the push rod 2 is a ball head.

[0062] As a further solution, multiple groups of second fasteners 9 are arranged at intervals along the length direction of the sleeve 1. Thus, the push rod 2 can be limited within a larger range, thereby increasing the application range of the device.

[0063] As a further solution, a guide and limit structure 10 is also included, and the guide and limit structure 10 is arranged between the inner wall of the sleeve 1 and the outer wall of the push rod 2.

[0064] The guide limit structure 10 is used to limit the relative position of the push rod 2 and the sleeve 1. Specifically, a slider and a slide groove can be used, and the slider slides in the slide groove. The slider and the slide groove are respectively arranged on the push rod 2 and the sleeve 1. On the one hand, it can limit the relative position of the push rod 2 and the sleeve 1, and on the other hand, it can guide the push rod 2 to slide. The slider and the slide groove are arranged in pairs, and their shape and number are not limited. The guide limit structure 10 can improve the coaxiality of the sleeve 1 and the push rod 2. When processing on a machine tool or a grinder, the coaxiality of the sleeve 1 and the push rod 2 can ensure that the force in all directions is uniform during the rotation of the fixture.

[0065] It should be noted that the utility model can also be used for other wafers with larger thickness, but the utility model can only be used after the orientation of one end face of the wafer is completed.

[0066] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A clamp, characterized in that: include: A sleeve, which is a hollow structure with openings at both ends; A push rod, which can move in the sleeve along the length direction of the sleeve, one end face of the push rod is a reference surface, and the space enclosed by the reference surface and the inner wall of the sleeve is a clamping space; A fixing structure, wherein the fixing structure fixes the push rod relative to the sleeve; The first fastener, at least one first fastener, is connected to the sleeve through threads and extends from the outer wall of the sleeve into the clamping space.

2. The clamp according to claim 1, characterized in that: Also includes: A connecting rod, one end of the connecting rod is connected to the push rod, and the other end of the connecting rod extends out of the sleeve. The connecting rod and the reference surface are respectively located at two ends of the push rod.

3. The clamp according to claim 2, characterized in that: Also includes: The hand-held part is connected to the connecting rod and is located outside the sleeve.

4. The clamp according to claim 3, characterized in that: The fixing structure comprises an external thread arranged on the outer side wall of the push rod and an internal thread arranged on the inner wall of the sleeve, and the push rod is connected with the inner wall of the sleeve through threads.

5. The clamp according to claim 4, characterized in that: The fixing structure also includes an anti-loosening sleeve, which is arranged outside the connecting rod, and the outer wall of the anti-loosening sleeve is connected to the inner wall of the sleeve through a thread.

6. The clamp according to claim 5, characterized in that: One end of the anti-loosening sleeve is provided with a sleeve, the sleeve is sleeved outside the connecting rod, the sleeve extends out of the sleeve, and the outer wall of the sleeve is provided with at least a pair of mutually parallel connecting surfaces.

7. The clamp according to claim 1, characterized in that: The fixing structure includes a plurality of second fasteners connected to the sleeve. The plurality of second fasteners arranged in the same circumference form a group. At least one group of second fasteners is arranged along the length direction of the sleeve. The at least one group of second fasteners fixes the push rod relative to the sleeve.

8. The clamp according to claim 7, characterized in that: It also includes a guide and limit structure, which is arranged between the sleeve and the push rod.

9. The clamp according to claim 1, characterized in that: A plurality of first fasteners clamp and fix the workpiece.

10. The clamp according to claim 1, characterized in that At least one first fastener pushes the workpiece against the inner side wall of the sleeve.

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