Furnace chamber rotating and lifting mechanism of single crystal furnace and single crystal furnace

Abstract

The utility model is suitable for the technical field of single crystal furnaces, and provides a furnace chamber rotating and lifting mechanism of a single crystal furnace and the single crystal furnace. The first hydraulic cylinder is fixed on the first frame body; the second frame body is used for being connected with the main furnace chamber or the auxiliary furnace chamber and rotatably connected to a piston rod of the first hydraulic cylinder, and the piston rod is used for driving the second frame body to ascend and descend; the driving assembly comprises a mounting plate fixed to the piston rod, a motor fixed to the mounting plate and a connecting rod mechanism, the connecting rod mechanism comprises a first connecting rod and a second connecting rod which are hinged to each other, the first connecting rod is connected with the motor, and the second connecting rod is hinged to the second frame body. According to the furnace chamber rotating and lifting mechanism of the single crystal furnace, the connecting rod mechanism is used for driving the main furnace chamber or the auxiliary furnace chamber to rotate, the mode that the main furnace chamber or the auxiliary furnace chamber rotates through gear transmission is replaced, the rotating precision of the main furnace chamber or the auxiliary furnace chamber of the single crystal furnace can be improved, and the rotating reliability of the main furnace chamber or the auxiliary furnace chamber of the single crystal furnace is good.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a furnace chamber rotation and lifting mechanism of a single crystal furnace and the single crystal furnace. Background Art

[0002] Single crystal furnace is a device used to produce solar-grade single crystal silicon rods. In order to increase its production capacity, reduce production costs, and improve the production efficiency of single crystal silicon rods, many silicon rod manufacturers use a single furnace to add materials multiple times and pull single crystal silicon rods multiple times to increase production capacity. This requires that the auxiliary furnace chamber of the single crystal furnace be raised and unscrewed multiple times when preparing silicon rods to achieve multiple feeding.

[0003] In the prior art, the furnace chamber of a single crystal furnace usually includes a main furnace chamber and an auxiliary furnace chamber. The main furnace chamber and the auxiliary furnace chamber are generally driven to rise and fall by a hydraulic cylinder. The lifting frame of the main furnace chamber or the auxiliary furnace chamber is connected to the piston rod of the hydraulic cylinder. The piston rod of the hydraulic cylinder drives the lifting frame to rise and fall to realize the lifting and falling of the main furnace chamber or the auxiliary furnace chamber. At the same time, a fixed gear is fixedly installed on the piston rod of the hydraulic cylinder, and a moving gear meshing with the fixed gear and rotatable relative to the piston rod needs to be installed. The moving gear is driven by the motor to rotate relative to the fixed gear, and the moving gear drives the main furnace chamber or the auxiliary furnace chamber to rotate. However, the motor drives the main furnace chamber or the auxiliary furnace chamber to rotate by using gears. Since the installation between the gears easily produces a large gear gap, the rotation accuracy of the main furnace chamber or the auxiliary furnace chamber is low, the rotation angle error of the main furnace chamber or the auxiliary furnace chamber is large, and the rotation reliability of the main furnace chamber or the auxiliary furnace chamber is poor. Utility Model Content

[0004] The utility model provides a furnace chamber rotating and lifting mechanism for a single crystal furnace, aiming to solve the problem that a large gear gap is easily generated during installation between gears in the furnace chamber rotating and lifting mechanism of the single crystal furnace in the prior art, resulting in low rotation accuracy of the main furnace chamber or the auxiliary furnace chamber.

[0005] The utility model is implemented by providing a furnace chamber rotation and lifting mechanism of a single crystal furnace, comprising:

[0006] The first frame;

[0007] a first hydraulic cylinder fixed on the first frame;

[0008] A second frame body connected to the main furnace chamber or the auxiliary furnace chamber, wherein the second frame body is rotatably connected to the piston rod of the first hydraulic cylinder, and the piston rod is used to drive the second frame body to rise and fall;

[0009] A drive assembly, the drive assembly includes a mounting plate fixed to the piston rod, a motor fixed to the mounting plate, and a connecting rod mechanism, the connecting rod mechanism includes a first connecting rod and a second connecting rod hinged to each other, the first connecting rod is connected to the motor, the second connecting rod is hinged to the second frame and is used to drive the second frame to rotate around the central axis of the piston rod.

[0010] Preferably, it further comprises a connecting plate fixed to the piston rod, wherein the connecting plate is connected to the mounting plate.

[0011] Preferably, it further comprises a roller fixed to one end of the connecting plate, the mounting plate is provided with a mounting hole for the roller, and the roller is embedded in the mounting hole to support and fix the mounting plate.

[0012] Preferably, a guide rail arranged in a vertical direction is provided on the first frame; the driving assembly includes a limiting component fixedly connected to the mounting plate, and the limiting component cooperates with the guide rail and can move up and down along the guide rail.

[0013] Preferably, the limiting component is a slider, and the slider is slidably connected to the guide rail and can slide up and down along the guide rail.

[0014] Preferably, the limiting component is a guide wheel, the guide rail is provided with a slide groove distributed in a vertical direction, and the guide wheel is embedded in the slide groove and can roll up and down along the slide groove.

[0015] Preferably, the driving assembly further comprises:

[0016] A transmission box is mounted on the mounting plate, one end of the first connecting rod is connected to the output shaft of the transmission box, and the motor is connected to the input shaft of the transmission box.

[0017] Preferably, the second frame includes a main body, an upper connecting block and a lower connecting block connected to the main body and spaced apart up and down, the main body is hinged to the second connecting rod, and the upper connecting block and the lower connecting block are both rotatably connected to the piston rod.

[0018] Preferably, the connecting plate is fixed to the piston rod via a tension sleeve.

[0019] The utility model also provides a single crystal furnace, comprising the furnace chamber rotating and lifting mechanism of the single crystal furnace.

[0020] The utility model provides a furnace chamber rotation and lifting mechanism for a single crystal furnace by setting a connecting rod mechanism. The motor drives the second frame to rotate around the central axis of the piston rod through the connecting rod mechanism, thereby driving the main furnace chamber or the auxiliary furnace chamber to rotate, replacing the method of using the motor to use gear transmission to realize the rotation of the main furnace chamber or the auxiliary furnace chamber, avoiding the problem of low rotation accuracy of the main furnace chamber or the auxiliary furnace chamber caused by a large gear gap during gear installation, and can improve the rotation accuracy of the main furnace chamber or the auxiliary furnace chamber, reduce the rotation angle error of the main furnace chamber or the auxiliary furnace chamber, and the rotation reliability of the main furnace chamber or the auxiliary furnace chamber is good; moreover, the connecting rod mechanism is more convenient to process than the gear, and has a low production cost. Therefore, the use of the connecting rod mechanism to realize the rotation of the main furnace chamber or the auxiliary furnace chamber can reduce the processing cost and installation difficulty. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A three-dimensional schematic diagram of a furnace chamber rotation and lifting mechanism of a single crystal furnace provided by an embodiment of the utility model;

[0022] Figure 2 Another three-dimensional schematic diagram of a furnace chamber rotation and lifting mechanism of a single crystal furnace provided by an embodiment of the utility model;

[0023] Figure 3 for Figure 2 A magnified view of the part A in the middle;

[0024] Figure 4 A three-dimensional diagram of a driving assembly of a furnace chamber rotation and lifting mechanism of a single crystal furnace provided in an embodiment of the utility model. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0026] The furnace chamber rotation and lifting mechanism of a single crystal furnace provided by an embodiment of the utility model is provided with a connecting rod mechanism. The motor drives the second frame to rotate around the central axis of the piston rod through the connecting rod mechanism, thereby driving the main furnace chamber or the auxiliary furnace chamber to rotate, replacing the method of using the motor to realize the rotation of the main furnace chamber or the auxiliary furnace chamber by gear transmission, avoiding the problem of low rotation accuracy of the main furnace chamber or the auxiliary furnace chamber caused by a large gear gap during gear installation, and can improve the rotation accuracy of the main furnace chamber or the auxiliary furnace chamber, reduce the rotation angle error of the main furnace chamber or the auxiliary furnace chamber, and the rotation reliability of the main furnace chamber or the auxiliary furnace chamber is good; moreover, the connecting rod mechanism is more convenient to process than the gear, and has a low production cost. Compared with the gear transmission method to realize the rotation of the main furnace chamber or the auxiliary furnace chamber, the connecting rod mechanism is used to realize the rotation of the main furnace chamber or the auxiliary furnace chamber, which can reduce the processing cost and installation difficulty.

[0027] Please refer to Figure 1-Figure 4The embodiment of the utility model provides a furnace chamber rotation and lifting mechanism of a single crystal furnace, comprising:

[0028] The first frame 1;

[0029] A first hydraulic cylinder 2 fixed on the first frame 1;

[0030] A second frame 3 connected to the main furnace chamber or the auxiliary furnace chamber, the second frame 3 is rotatably connected to the piston rod 22 of the first hydraulic cylinder 2, and the piston rod 22 is used to drive the second frame 3 to rise and fall;

[0031] The driving assembly 4 includes a mounting plate 41 fixed on the piston rod 22, a motor 42 fixed on the mounting plate 41, and a connecting rod mechanism 43. The connecting rod mechanism 43 includes a first connecting rod 431 and a second connecting rod 432 hinged to each other. The first connecting rod 431 is connected to the motor 42, and the second connecting rod 432 is hinged to the second frame 3 and is used to drive the second frame 3 to rotate around the central axis of the piston rod 22.

[0032] In the embodiment of the utility model, a furnace chamber rotation and lifting mechanism of a single crystal furnace is provided by setting a connecting rod mechanism 43, the connecting rod mechanism 43 includes a first connecting rod 431 and a second connecting rod 432 which are hinged to each other, the first connecting rod 431 is connected to the motor 42, the second connecting rod 432 is hinged to the second frame 3, the motor 42 drives the first connecting rod 431 and the second connecting rod 432 to rotate, so as to realize the rotation of the second frame 3 around the central axis of the piston rod 22, thereby driving the main furnace chamber or the auxiliary furnace chamber to rotate. The motor 42 drives the main furnace chamber or the auxiliary furnace chamber to rotate by using the connecting rod mechanism 43, and there is no need to use gear transmission to realize the rotation of the main furnace chamber or the auxiliary furnace chamber, so as to avoid the problem of low rotation accuracy of the main furnace chamber or the auxiliary furnace chamber caused by large gear clearance during gear installation, and can improve the rotation accuracy of the main furnace chamber or the auxiliary furnace chamber, reduce the rotation angle error of the main furnace chamber or the auxiliary furnace chamber, and improve the rotation reliability of the main furnace chamber or the auxiliary furnace chamber; moreover, the connecting rod mechanism 43 is more convenient to process than the gear, and has low production cost, so the use of the connecting rod mechanism 43 can reduce the processing cost and installation difficulty.

[0033] In the embodiment of the utility model, the first connecting rod 431 and the second connecting rod 432 can be directly hinged, that is, the connecting rod mechanism 43 only includes the first connecting rod 431 and the second connecting rod 432, and the first connecting rod 431 and the second connecting rod 432 are directly hinged, and the first connecting rod 431 and the second connecting rod 432 can rotate with each other. The first connecting rod 431 and the second connecting rod 432 can be indirectly hinged, which can be understood as that the connecting rod mechanism 43 can also include a third connecting rod, one end of the third connecting rod is hinged with the first connecting rod 431, and the other end of the third connecting rod is hinged with the second connecting rod 432, and the first connecting rod 431 and the second connecting rod 432 are indirectly hinged through the third connecting rod. In addition, more connecting rods can be included between the first connecting rod 431 and the second connecting rod 432, and the first connecting rod 431 and the second connecting rod 432 are hinged through multiple connecting rods. Preferably, the first connecting rod 431 and the second connecting rod 432 are directly hinged, which can simplify the structure of the connecting rod mechanism 43, reduce production costs, and the rotation accuracy of the connecting rod mechanism 43 is higher.

[0034] In the embodiment of the utility model, the furnace chamber rotating and lifting mechanism of the single crystal furnace can be used for the rotation and lifting of the main furnace chamber of the single crystal furnace, and can also be used for the rotation and lifting of the auxiliary furnace chamber of the single crystal furnace. The principle of the furnace chamber rotating and lifting mechanism for the single crystal furnace is the same as that of the auxiliary furnace chamber. For the convenience of description, the embodiment of the utility model is described by using the furnace chamber rotating and lifting mechanism for the single crystal furnace to rotate and lift the auxiliary furnace chamber of the single crystal furnace.

[0035] In the embodiment of the utility model, Figure 1 As shown, the first frame 1 is the main furnace chamber frame, the second frame 3 is used to connect with the auxiliary furnace chamber, the cylinder body 21 of the first hydraulic cylinder 2 is fixed on the first frame 1, and the piston rod 22 of the first hydraulic cylinder 2 is used to lift the second frame 3, thereby driving the auxiliary furnace chamber to lift. The main furnace chamber frame is connected to the second hydraulic cylinder 10, and the second hydraulic cylinder 10 is used to lift the main furnace chamber frame to realize the lifting of the main furnace chamber.

[0036] In the embodiment of the utility model, when the auxiliary furnace chamber needs to rotate, the motor 42 drives the first connecting rod 431 to rotate, the first connecting rod 431 drives the second connecting rod 432 to rotate, and the second connecting rod 432 drives the second frame 3 to rotate around the central axis of the piston rod 22, so as to realize the rotation of the auxiliary furnace chamber; when the auxiliary furnace chamber needs to be lifted or lowered, the piston rod 22 of the first hydraulic cylinder 2 is lifted or lowered, and the piston rod 22 drives the mounting plate 41, the motor 42 and the connecting rod mechanism 43 to be lifted or lowered synchronously together with the second frame 3, that is, the entire driving assembly 4 is lifted or lowered synchronously with the second frame 3, and the second frame 3 drives the auxiliary furnace chamber to be lifted or lowered.

[0037] As an embodiment of the present utility model, it also includes a connecting plate 5 fixed to the piston rod 22 , and the connecting plate 5 is connected to the mounting plate 41 .

[0038] In this embodiment, the mounting plate 41 is fixed to the piston rod 22 via the connecting plate 5, which facilitates the fixed installation of the mounting plate 41. Of course, the connecting plate 5 may not be required, and the mounting plate 41 may also be directly fixed to the piston rod 22.

[0039] As an embodiment of the utility model, it also includes a roller 6 fixed to one end of the connecting plate 5 , and the mounting plate 41 is provided with a mounting hole 410 for the roller 6 , and the roller 6 is embedded in the mounting hole 410 to support and fix the mounting plate 41 .

[0040] In this embodiment, when the mounting plate 41 is mounted on the connecting plate 5, the mounting hole 410 on the mounting plate 41 is aligned with the roller 6, and the roller 6 is embedded in the mounting hole 410, so that the mounting plate 41 is supported and fixed on the connecting plate 5, so that the entire driving assembly 4 is supported and fixed on the connecting plate 5, and the entire driving assembly 4 can be raised and lowered synchronously with the connecting plate 5. The connecting plate 5 cooperates with the mounting plate 41 through the roller 6, which can reduce the assembly and processing accuracy of the connecting plate 5 and the mounting plate 41. Of course, the connecting plate 5 can also be directly fixedly connected to the mounting plate 41 without the roller 6.

[0041] As an embodiment of the utility model, a guide rail 7 arranged in a vertical direction is provided on the first frame 1, and the driving assembly 4 includes a limiting component 45 fixedly connected to the mounting plate 41, and the limiting component 45 cooperates with the guide rail 7 and can move up and down along the guide rail 7.

[0042] In this embodiment, a guide rail 7 distributed along the vertical direction is provided on the first frame 1, and a limiting component 45 cooperating with the guide rail 7 is externally connected to the mounting plate 41. On the one hand, the limiting component 45 cooperates with the guide rail 7 to realize the guiding effect of the piston rod 22, so that the piston rod 22 can be stably lifted and lowered along the guide rail 7. On the other hand, the limiting component 45 cooperates with the guide rail 7 to realize the circumferential limitation of the piston rod 22 of the hydraulic cylinder. Since the limiting point of the piston rod 22 of the limiting component 45 is located on the guide rail 7 of the first frame 1 instead of on the piston rod 22, the distance from the circumferential limiting point to the center axis of the piston rod 22 is greatly increased, which greatly improves the accuracy of the circumferential limitation of the piston rod 22 of the hydraulic cylinder, improves the circumferential limiting effect of the piston rod 22 of the first hydraulic cylinder 2, and the piston rod 22 of the first hydraulic cylinder 2 is not easy to produce a rotation angle, so that the furnace chamber rotation reliability of the single crystal furnace is good, and the circumferential limiting point of the piston rod 22 of the first hydraulic cylinder 2 is subjected to less force and the structure is more durable.

[0043] As an embodiment of the present invention, the limiting component 45 is a guide wheel or a slider. Among them, the limiting component 45 shown in the drawings of this embodiment is a slider.

[0044] As an embodiment of the present invention, the limiting component 45 is a slider, which is slidably connected to the guide rail 7 and can slide up and down along the guide rail 7. Compared with the guide wheel, the contact surface between the slider and the guide rail 7 is larger, which can further improve the reliability of the circumferential limiting of the piston rod 22.

[0045] As another embodiment of the present invention, the limiting component 45 can also be a guide wheel, and the guide rail 7 is provided with a slide groove distributed in the vertical direction. The guide wheel is embedded in the slide groove and can roll up and down along the slide groove.

[0046] In this embodiment, when the limiting component 45 is a guide wheel, the guide wheel can roll relative to the guide rail 7 during the up and down movement along the guide rail 7. The guide wheel and the guide rail 7 have rolling friction, which greatly reduces the friction between the limiting component 45 and the guide rail 7, and the limiting component 45 moves more smoothly relative to the guide rail 7. In addition, the limiting component 45 can also be a slip ring, and the guide rail 7 can be a guide column.

[0047] As an embodiment of the present utility model, the driving assembly 4 further includes:

[0048] The transmission box 44 is mounted on the mounting plate 41 , one end of the first connecting rod 431 is connected to the output shaft of the transmission box 44 , and the motor 42 is connected to the input shaft of the transmission box 44 .

[0049] In this embodiment, the motor 42 rotates with the input shaft of the transmission box 44, and the input shaft of the transmission box 44 drives the output shaft of the transmission box 44 to rotate through the transmission gear inside the transmission box 44, and the output shaft of the transmission box 44 drives the first connecting rod 431 to rotate, and the first connecting rod 431 drives the second connecting rod 432 to rotate, and the second connecting rod 432 drives the second frame 3 to rotate, thereby realizing the rotation of the auxiliary furnace chamber. The motor 42 is connected to the transmission box and the connecting rod mechanism 43 by transmission, and the corresponding transmission box can be flexibly selected, which is convenient for adjusting the speed of the connecting rod mechanism 43, and it is also convenient to change the layout of the output shaft of the motor 42 and the rotation axis of the first connecting rod 431. In this embodiment, the output shaft of the motor 42 and the rotation axis of the first connecting rod 431 are perpendicular to each other, which is convenient for the layout setting of the drive assembly 4. Of course, the output shaft of the motor 42 and the rotation axis of the first connecting rod 431 can also be arranged parallel to each other.

[0050] As an embodiment of the utility model, the second frame 3 includes a main body 31, an upper connecting block 32 and a lower connecting block 33 connected to the main body 31 and spaced apart up and down, the main body 31 is hinged to the second connecting rod 432, and the upper connecting block 32 and the lower connecting block 33 are both rotatably connected to the piston rod 22.

[0051] In this embodiment, the second frame 3 forms a rotatable connection with the piston rod 22 using the upper connecting block 32 and the lower connecting block 33, and the second frame 3 is hinged with the second connecting rod 432 using the main body 31, so as to facilitate the rotation of the second frame 3 relative to the central axis of the piston rod 22 to realize the rotation of the auxiliary furnace chamber, and facilitate the piston rod 22 to drive the second frame 3 to rise and fall through the upper connecting block 32 and the lower connecting block 33 to realize the lifting and falling of the auxiliary furnace chamber.

[0052] As an embodiment of the utility model, the connecting plate 5 is fixed to the piston rod 22 through the tension sleeve 9, so that the connecting plate 5 and the piston rod 22 are stably connected to prevent the connecting plate 5 from rotating relative to the piston rod 22. Among them, the connecting plate 5 is provided with a center hole, the tension sleeve 9 is fixed to the center hole of the connecting plate 5, the piston rod 22 passes through the tension sleeve 9 and is fixedly connected to the tension sleeve 9, so that the connecting plate 5 is fixed to the piston rod 22.

[0053] The embodiment of the utility model also provides a single crystal furnace, including the furnace chamber rotation and lifting mechanism of the single crystal furnace of the above embodiment. The single crystal furnace of this embodiment is provided with the furnace chamber rotation and lifting mechanism of the above single crystal furnace, and the motor 42 drives the main furnace chamber or the auxiliary furnace chamber to rotate by using the connecting rod mechanism 43, and there is no need to use gear transmission to realize the rotation of the main furnace chamber or the auxiliary furnace chamber, thereby avoiding the problem of low rotation accuracy of the main furnace chamber or the auxiliary furnace chamber caused by large gear clearance during gear installation, and can improve the rotation accuracy of the main furnace chamber or the auxiliary furnace chamber of the single crystal furnace, reduce the rotation angle error of the main furnace chamber or the auxiliary furnace chamber of the single crystal furnace, and improve the rotation reliability of the main furnace chamber or the auxiliary furnace chamber of the single crystal furnace, and can reduce the processing cost and installation difficulty of the single crystal furnace.

[0054] The embodiment of the utility model provides a furnace chamber rotation and lifting mechanism of a single crystal furnace by setting a connecting rod mechanism 43, the connecting rod mechanism 43 includes a first connecting rod 431 and a second connecting rod 432 that are hinged to each other, the first connecting rod 431 is connected to the motor 42, and the second connecting rod 432 is hinged to the second frame 3, the motor 42 rotates the first connecting rod 431 and the second connecting rod 432 to realize the second frame 3 to rotate around the central axis of the piston rod 22, thereby driving the main furnace chamber or the auxiliary furnace chamber to rotate, the motor 42 drives the main furnace chamber or the auxiliary furnace chamber to rotate by the connecting rod mechanism 43, and there is no need to use gear transmission to realize the rotation of the main furnace chamber or the auxiliary furnace chamber, avoiding the problem of low rotation accuracy of the main furnace chamber or the auxiliary furnace chamber caused by a large gear gap during gear installation, which can improve the rotation accuracy of the main furnace chamber or the auxiliary furnace chamber, reduce the rotation angle error of the main furnace chamber or the auxiliary furnace chamber, and the reliability of the rotation of the main furnace chamber or the auxiliary furnace chamber. Moreover, compared with the gear transmission method to realize the rotation of the main furnace chamber or the auxiliary furnace chamber, the use of the connecting rod mechanism 43 can reduce the processing cost and installation difficulty.

[0055] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A furnace chamber rotation and lifting mechanism for a single crystal furnace, characterized in that: include: The first frame; a first hydraulic cylinder fixed on the first frame; A second frame body connected to the main furnace chamber or the auxiliary furnace chamber, wherein the second frame body is rotatably connected to the piston rod of the first hydraulic cylinder, and the piston rod is used to drive the second frame body to rise and fall; A drive assembly, the drive assembly includes a mounting plate fixed to the piston rod, a motor fixed to the mounting plate, and a connecting rod mechanism, the connecting rod mechanism includes a first connecting rod and a second connecting rod hinged to each other, the first connecting rod is connected to the motor, the second connecting rod is hinged to the second frame and is used to drive the second frame to rotate around the central axis of the piston rod.

2. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 1, characterized in that: It also includes a connecting plate fixed to the piston rod, wherein the connecting plate is connected to the mounting plate.

3. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 2, characterized in that: It also includes a roller fixed to one end of the connecting plate, the mounting plate is provided with a mounting hole for the roller, and the roller is embedded in the mounting hole to support and fix the mounting plate.

4. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 1, characterized in that: The first frame is provided with a guide rail arranged in a vertical direction; the driving assembly includes a limiting component fixedly connected to the mounting plate, and the limiting component cooperates with the guide rail and can move up and down along the guide rail.

5. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 4, characterized in that: The limiting component is a slider, which is slidably connected to the guide rail and can slide up and down along the guide rail.

6. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 4, characterized in that: The limiting component is a guide wheel, and the guide rail is provided with a slide groove distributed in a vertical direction. The guide wheel is embedded in the slide groove and can roll up and down along the slide groove.

7. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 1, characterized in that: The drive assembly also includes: A transmission box is mounted on the mounting plate, one end of the first connecting rod is connected to the output shaft of the transmission box, and the motor is connected to the input shaft of the transmission box.

8. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 1, characterized in that: The second frame includes a main body, an upper connecting block and a lower connecting block connected to the main body and spaced apart from each other, the main body is hinged to the second connecting rod, and the upper connecting block and the lower connecting block are both rotatably connected to the piston rod.

9. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 2, characterized in that: The connecting plate is fixed on the piston rod through a tension sleeve.

10. A single crystal furnace, characterized in that: A furnace chamber rotating and lifting mechanism comprising a single crystal furnace as described in any one of claims 1 to 9.

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