Furnace chamber rotating and lifting mechanism of single crystal furnace and single crystal furnace

Abstract

The utility model is suitable for the technical field of single crystal furnaces, and provides a furnace chamber rotating and lifting mechanism of a single crystal furnace and the single crystal furnace. The first hydraulic cylinder is fixed on the first frame body; the second frame body is connected with the main furnace chamber or the auxiliary furnace chamber, and the second frame body is rotatably connected to a piston rod of the first hydraulic cylinder; the hollow rotating platform comprises a fixing base, a rotating disc, a gear set and a motor in transmission connection with the rotating disc through the gear set. The turntable is fixed on the piston rod, and the fixed seat is fixedly connected with the second frame body and can drive the second frame body to rotate around the central axis of the piston rod; or the fixed seat is fixed on the piston rod, and the turntable is fixedly connected with the second frame body and can drive the second frame body to rotate around the central axis of the piston rod. According to the furnace chamber rotating and lifting mechanism of the single crystal furnace, the hollow rotating platform is used for driving the main furnace chamber or the auxiliary furnace chamber to rotate, so that the rotating precision of the main furnace chamber or the auxiliary furnace chamber of the single crystal furnace can be improved, and the rotating angle error of the main furnace chamber or the auxiliary furnace chamber is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a furnace chamber rotation and lifting mechanism of a single crystal furnace and the single crystal furnace. Background Art

[0002] A single crystal furnace is a device used to produce solar-grade single crystal silicon rods. In order to increase its production capacity, reduce production costs, and improve the production efficiency of single crystal silicon rods, many silicon rod manufacturers use a single furnace to add materials multiple times and pull single crystal silicon rods multiple times to increase production capacity. This requires that the auxiliary furnace chamber of the single crystal furnace be lifted and rotated multiple times when preparing silicon rods in order to achieve multiple feeding.

[0003] In the prior art, the furnace chamber of a single crystal furnace usually includes a main furnace chamber and an auxiliary furnace chamber. The main furnace chamber and the auxiliary furnace chamber are generally lifted and lowered by hydraulic cylinders. The lifting frame of the main furnace chamber or the auxiliary furnace chamber is connected to the piston rod of the hydraulic cylinder. The piston rod of the hydraulic cylinder drives the lifting frame to lift and lower the main furnace chamber or the auxiliary furnace chamber. At the same time, a fixed gear is fixedly installed on the piston rod of the hydraulic cylinder, and a moving gear that meshes with the fixed gear and can rotate relative to the piston rod needs to be installed. The moving gear is driven by a motor to rotate relative to the fixed gear, and the moving gear drives the main furnace chamber or the auxiliary furnace chamber to rotate. However, since a large gear gap is easily generated when installing the gear, the rotation accuracy of the main furnace chamber or the auxiliary furnace chamber is low, and the rotation angle error of the main furnace chamber or the auxiliary furnace chamber is large. Utility Model Content

[0004] The utility model provides a furnace chamber rotating and lifting mechanism for a single crystal furnace, aiming to solve the problem of low rotation accuracy of a main furnace chamber or a sub-furnace chamber in the furnace chamber rotating and lifting mechanism for a single crystal furnace in the prior art, in which a large gear gap is easily generated during installation between gears.

[0005] The utility model is implemented by providing a furnace chamber rotation and lifting mechanism of a single crystal furnace, comprising:

[0006] The first frame;

[0007] a first hydraulic cylinder fixed on the first frame;

[0008] A second frame body connected to the main furnace chamber or the auxiliary furnace chamber, wherein the second frame body is rotatably connected to the piston rod of the first hydraulic cylinder, and the piston rod is used to drive the second frame body to rise and fall; and

[0009] The hollow rotating platform comprises a fixed seat, a turntable rotatably mounted on the fixed seat, a gear set mounted in the fixed seat, and a motor fixed on the fixed seat and connected to the turntable through the gear set;

[0010] In which, the turntable is fixed to the piston rod, the fixed seat is fixedly connected to the second frame, and the fixed seat can drive the second frame to rotate around the central axis of the piston rod; or, the fixed seat is fixed to the piston rod, the turntable is fixedly connected to the second frame, and the turntable can drive the second frame to rotate around the central axis of the piston rod.

[0011] Preferably, the gear set includes a driving gear installed in the fixing seat, a driven gear installed in the fixing seat and meshing with the driving gear, the driven gear is connected to the turntable, and the output shaft of the motor is connected to the driving gear.

[0012] Preferably, it also includes:

[0013] A guide rail fixed to the first frame and arranged along the vertical direction;

[0014] A limiting component connected to the piston rod cooperates with the guide rail and can move up and down along the guide rail.

[0015] Preferably, the limiting component is a guide wheel, the guide rail is provided with a slide groove distributed in a vertical direction, and the guide wheel is embedded in the slide groove and can roll up and down along the slide groove.

[0016] Preferably, the limiting component is a slider, and the slider is slidably connected to the guide rail and can slide up and down along the guide rail.

[0017] Preferably, it also includes:

[0018] A connecting plate is fixed to the piston rod, and the guide wheel is connected to the connecting plate.

[0019] Preferably, the connecting plate is provided with a connecting portion extending in the direction of the first frame, and the guide wheel is fixed to the connecting portion.

[0020] Preferably, it also includes a connecting shaft for installing the guide wheel, the connecting part is provided with a through groove formed by hollowing out, and a mounting hole connected to the through groove, one end of the connecting shaft is rotatably connected to the guide wheel, and the other end extends from the mounting hole into the through groove and is fixed to the connecting part by a nut.

[0021] Preferably, the second frame is provided with a first connecting block extending in the direction of the piston rod, the turntable is fixed to the piston rod, and the fixing seat is fixedly connected to the first connecting block.

[0022] The utility model also provides a single crystal furnace, comprising the furnace chamber rotating and lifting mechanism of the single crystal furnace.

[0023] The utility model provides a furnace chamber rotation and lifting mechanism for a single crystal furnace, which drives the main furnace chamber or the auxiliary furnace chamber to rotate by setting a hollow rotating platform, and utilizing the hollow rotating platform of a standard part. It only needs to install the hollow rotating platform as a whole, and utilizes the motor of the hollow rotating platform and the gear set inside the hollow rotating platform to realize the rotation of the main furnace chamber or the auxiliary furnace chamber. There is no need to manually install the gears separately, which avoids the problem of low rotation accuracy of the main furnace chamber or the auxiliary furnace chamber caused by a large gear gap during gear installation. The rotation accuracy of the main furnace chamber or the auxiliary furnace chamber can be improved, the rotation angle error of the main furnace chamber or the auxiliary furnace chamber can be reduced, and the rotation reliability of the main furnace chamber or the auxiliary furnace chamber is good. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A three-dimensional schematic diagram of a furnace chamber rotation and lifting mechanism of a single crystal furnace provided by an embodiment of the utility model;

[0025] Figure 2 Another three-dimensional schematic diagram of a furnace chamber rotation and lifting mechanism of a single crystal furnace provided by an embodiment of the utility model;

[0026] Figure 3 for Figure 2 A magnified view of the part A in the middle;

[0027] Figure 4 A three-dimensional diagram of a hollow rotating platform of a furnace chamber rotating and lifting mechanism of a single crystal furnace provided in an embodiment of the utility model;

[0028] Figure 5 A three-dimensional diagram of a connection plate of a furnace chamber rotation and lifting mechanism of a single crystal furnace provided by an embodiment of the utility model being connected to a limiting component;

[0029] Figure 6 A three-dimensional exploded view of a connecting plate and a limiting component of a furnace chamber rotation and lifting mechanism of a single crystal furnace provided in an embodiment of the utility model. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0031] The furnace chamber rotation and lifting mechanism of a single crystal furnace provided by an embodiment of the utility model is provided with a hollow rotating platform, and the hollow rotating platform is used to drive the main furnace chamber or the auxiliary furnace chamber to rotate. It only needs to install the hollow rotating platform as a whole, and the main furnace chamber or the auxiliary furnace chamber is rotated by utilizing the motor of the hollow rotating platform and the internal gear set of the hollow rotating platform. There is no need to manually install the driving gear and the driven gear separately, so the problem of low rotation accuracy of the main furnace chamber or the auxiliary furnace chamber caused by a large gear gap during gear installation is avoided. The rotation accuracy of the main furnace chamber or the auxiliary furnace chamber can be improved, the rotation angle error of the main furnace chamber or the auxiliary furnace chamber can be reduced, and the rotation reliability of the main furnace chamber or the auxiliary furnace chamber is good.

[0032] Please refer to Figure 1-Figure 4 The embodiment of the utility model provides a furnace chamber rotation and lifting mechanism of a single crystal furnace, comprising:

[0033] The first frame 1;

[0034] A first hydraulic cylinder 2 fixed on the first frame 1;

[0035] A second frame 3 connected to the main furnace chamber or the auxiliary furnace chamber, the second frame 3 is rotatably connected to the piston rod 22 of the first hydraulic cylinder 2, and the piston rod 22 is used to drive the second frame 3 to rise and fall; and

[0036] The hollow rotating platform 4 includes a fixed seat 41, a turntable 42 rotatably mounted on the fixed seat 41, a gear set (not shown) mounted in the fixed seat 41, and a motor 43 fixed on the fixed seat 41 and connected to the turntable 42 through the gear set;

[0037] Among them, the turntable 42 is fixed to the piston rod 22, the fixed seat 41 is fixedly connected to the second frame 3, and the fixed seat 41 can drive the second frame 3 to rotate around the central axis of the piston rod 22; or, the fixed seat 41 is fixed to the piston rod 22, the turntable 42 is fixedly connected to the second frame 3, and the turntable 42 can drive the second frame 3 to rotate around the central axis of the piston rod 22.

[0038] As a possible situation, the hollow rotating platform 4 is a standard part. Specifically, the gear set includes a driving gear installed in the fixed seat 41, a driven gear installed in the fixed seat 41 and meshing with the driving gear, the driven gear is connected to the turntable 42, the output shaft of the motor 43 is connected to the driving gear, the output shaft of the motor 43 rotates by the driving gear, the driving gear rotates to drive the driven gear to rotate, and thus drive the turntable 42 to rotate synchronously.

[0039] The specific gear types of the driving gear and the driven gear of the hollow rotating platform 4 are not limited. For example, the driving gear can be a worm, and the driven gear can be a turbine that cooperates with the worm; for another example, the driving gear and the driven gear are a pair of cylindrical gears that cooperate with each other, or the driving gear and the driven gear are a pair of bevel gears that cooperate with each other.

[0040] In the embodiment of the utility model, the turntable 42 of the hollow rotating platform 4 can be fixed to the piston rod 22, and the fixing seat 41 is fixedly connected to the second frame 3, so as to facilitate the fixed connection between the turntable 42 and the piston rod 22. The motor 43 drives the driving gear of the gear set to rotate, and since the driven gear connected to the turntable 42 is fixed to the piston rod 22 and is stationary, the driving gear will rotate relative to the driven gear, thereby driving the fixing seat 41 and the motor 43 to rotate around the central axis of the piston rod 22, and the fixing seat 41 synchronously drives the second frame 3 to rotate around the central axis of the piston rod 22, thereby driving the main furnace chamber or the auxiliary furnace chamber to rotate.

[0041] In the embodiment of the utility model, the fixing seat 41 of the hollow rotating platform 4 can also be fixed to the piston rod 22, the turntable 42 is fixedly connected to the second frame 3, the motor 43 drives the driving gear in the hollow rotating platform 4 to rotate, the driving gear drives the driven gear to rotate relatively, the driven gear drives the turntable 42 to rotate, and the turntable 42 synchronously drives the second frame 3 to rotate around the central axis of the piston rod 22, thereby driving the main furnace chamber or the auxiliary furnace chamber to rotate.

[0042] The drawings of this embodiment only illustrate the situation that the turntable 42 of the hollow rotating platform 4 is fixed to the piston rod 22 , and the fixing seat 41 is fixedly connected to the second frame 3 .

[0043] In an embodiment of the utility model, a furnace chamber rotation and lifting mechanism for a single crystal furnace is provided by setting a hollow rotating platform 4, and the motor 43 of the hollow rotating platform 4 is used to drive the second frame 3 to rotate around the central axis of the piston rod 22 to realize the rotation of the main furnace chamber or the auxiliary furnace chamber. The hollow rotating platform 4 can be a standard part, and it only needs to be installed as a whole. When the hollow rotating platform 4 is installed, the turntable 42 of the hollow rotating platform 4 can be fixed to the piston rod 22, and the fixed seat 41 can be fixedly connected to the second frame 3; or, the fixed seat 41 of the hollow rotating platform 4 can be fixed to the piston rod 22, the turntable 42 is fixedly connected to the second frame 3, and the motor 43 of the hollow rotating platform 4 is used to drive the turntable 42 to rotate, thereby driving the second frame 3 to rotate around the central axis of the piston rod 22 to realize the rotation of the main furnace chamber or the auxiliary furnace chamber. The hollow rotating platform 4 is used to drive the main furnace chamber or the auxiliary furnace chamber to rotate, and there is no need to manually install gears, which can avoid the problem of low rotation accuracy of the main furnace chamber or the auxiliary furnace chamber caused by large gear gaps during gear installation. The rotation accuracy of the main furnace chamber or the auxiliary furnace chamber can be improved, the rotation angle error of the main furnace chamber or the auxiliary furnace chamber can be reduced, and the rotation reliability of the main furnace chamber or the auxiliary furnace chamber is good.

[0044] In the embodiment of the utility model, the furnace chamber rotation and lifting mechanism of the single crystal furnace can be used for the rotation and lifting of the main furnace chamber of the single crystal furnace, and can also be used for the rotation and lifting of the auxiliary furnace chamber of the single crystal furnace. The single crystal furnace uses the furnace chamber rotation and lifting mechanism of the single crystal furnace for the main furnace chamber rotation and lifting principle and the auxiliary furnace chamber rotation and lifting principle. For the convenience of description, the embodiment of the utility model is described by using the furnace chamber rotation and lifting mechanism of the single crystal furnace for the single crystal furnace for the rotation and lifting of the auxiliary furnace chamber of the single crystal furnace.

[0045] In the embodiment of the utility model, Figure 1 As shown, the first frame 1 is the main furnace chamber frame, the second frame 3 is used to connect with the auxiliary furnace chamber, the cylinder body 21 of the first hydraulic cylinder 2 is fixed on the first frame 1, and the piston rod 22 of the first hydraulic cylinder 2 is used to lift the second frame 3, thereby driving the auxiliary furnace chamber to lift. The main furnace chamber frame is connected to the second hydraulic cylinder 10, and the second hydraulic cylinder 10 is used to lift the main furnace chamber frame to realize the lifting of the main furnace chamber.

[0046] In the embodiment of the utility model, when the auxiliary furnace chamber needs to rotate, the motor 43 works, and the motor 43 drives the driving gear in the hollow rotating platform 4 to rotate. Since the driven gear connected to the turntable 42 is stationary, the turntable 42 is stationary, and the driving gear rotates relative to the driven gear, so that the driving gear drives the fixed seat 41 and the motor 43 to rotate around the rotation center of the driven gear, that is, to rotate around the central axis of the piston rod 22, thereby driving the auxiliary furnace chamber to rotate; when the auxiliary furnace chamber needs to be lifted or lowered, the piston rod 22 of the first hydraulic cylinder 2 is lifted or lowered, and the piston rod 22 drives the hollow rotating platform 4 and the second frame 3 to be lifted or lowered synchronously, so that the second frame 3 drives the auxiliary furnace chamber to be lifted or lowered.

[0047] As an embodiment of the utility model, it also includes:

[0048] A guide rail 5 fixed to the first frame 1 and arranged along the vertical direction;

[0049] The limiting component 6 connected to the piston rod 22 cooperates with the guide rail 5 and can move up and down along the guide rail 5 .

[0050] In this embodiment, by setting a guide rail 5 distributed along the vertical direction on the first frame 1, and setting a limiting component 6 connected to the piston rod 22, on the one hand, the limiting component 6 cooperates with the guide rail 5 to realize the guiding effect of the piston rod 22, so that the piston rod 22 can be stably lifted and lowered along the guide rail 5, and on the other hand, the limiting component 6 cooperates with the guide rail 5 to realize the circumferential limit of the piston rod 22 of the hydraulic cylinder, so that the piston rod 22 of the first hydraulic cylinder 2 is not easy to produce a rotation angle, and the furnace chamber rotation reliability of the single crystal furnace is good. Moreover, the limiting point of the piston rod 22 of the limiting component 6 is located on the guide rail 5 of the first frame 1, rather than on the piston rod 22, which greatly increases the distance from the circumferential limit point to the central axis of the piston rod 22, and greatly improves the accuracy of the circumferential limit of the piston rod 22 of the hydraulic cylinder.

[0051] As an embodiment of the utility model, it also includes:

[0052] The connection plate 7 is fixed to the piston rod 22 , and the limiting component 6 is connected to the connection plate 7 .

[0053] In this embodiment, the limiting component 6 is fixedly connected to the piston rod 22 via the connecting plate 7, which facilitates the connection and fixation between the limiting component 6 and the piston rod 22. Of course, the connecting plate 7 may not be required, and the limiting component 6 may be directly fixed to the piston rod 22.

[0054] As an embodiment of the utility model, the connecting plate 7 is fixed to the piston rod 22 through the tension sleeve 8, so that the connecting plate 7 and the piston rod 22 are stably connected to prevent the connecting plate 7 from rotating relative to the piston rod 22. Among them, the connecting plate 7 is provided with a center hole, the tension sleeve 8 is fixed to the center hole of the connecting plate 7, the piston rod 22 passes through the tension sleeve 8 and is fixedly connected to the tension sleeve 8, so that the connecting plate 7 is fixed to the piston rod 22.

[0055] As an embodiment of the present invention, the limiting component 6 is a guide wheel, the guide rail 5 is provided with a vertically distributed slide groove 51, and the guide wheel is embedded in the slide groove 51 and can roll up and down along the slide groove 51. The drawings only illustrate the situation where the limiting component 6 is a guide wheel.

[0056] In this embodiment, when the limiting component 6 is a guide wheel, the guide wheel can roll relative to the guide rail 5 during the process of moving up and down along the guide rail 5. The guide wheel and the guide rail 5 have rolling friction, which greatly reduces the friction between the limiting component 6 and the guide rail 5, and the limiting component 6 moves relative to the guide rail 5 more smoothly.

[0057] Please refer to Figure 5-Figure 6 As an embodiment of the present utility model, the connecting plate 7 is provided with a connecting portion 71 extending toward the first frame 1 , and the guide wheel is fixed to the connecting portion 71 .

[0058] In this embodiment, the connecting portion 71 is integrally formed with the connecting plate 7, which is easy to process. The connecting plate 7 is connected to the guide wheel through the connecting portion 71, and the guide wheel cooperates with the guide rail 2 to achieve circumferential limit of the connecting plate 7 to prevent the connecting plate 7 from rotating. Since the connecting plate 7 is fixed on the piston rod 22, the guide wheel cooperates with the guide rail 5 to synchronously achieve circumferential limit of the piston rod 22.

[0059] As an embodiment of the utility model, it also includes a connecting shaft 9 for installing the guide wheel. The connecting part is provided with a hollowed-out through groove 711 and a mounting hole (unnumbered) connected to the through groove 711. One end of the connecting shaft 9 is rotatably connected to the guide wheel, and the other end extends from the mounting hole into the through groove 711 and is fixed to the connecting part 71 by a nut 11.

[0060] In this embodiment, the guide wheel can rotate relative to the connecting shaft 9, so that the guide wheel can roll during the up and down movement along the guide rail 5. By providing a through slot 711 in the connecting portion 71, one end of the connecting shaft 9 extends from the mounting hole into the through slot 711 and is fixed to the connecting portion 71 by a nut 11, the guide wheel is fixedly connected to the connecting plate 7, and the installation and fixation of the guide wheel is facilitated.

[0061] As another embodiment of the present invention, the limiting component 6 may also be a slider, which is slidably connected to the guide rail 5 and can slide up and down along the guide rail 5 .

[0062] In this embodiment, compared with the guide wheel, the contact surface between the slider and the guide rail 5 is larger, which can further improve the reliability of the circumferential limit of the piston rod 22. In addition, the limit component 6 can also be a slip ring, and the guide rail 5 can be a guide column.

[0063] As an embodiment of the present invention, the second frame 3 is provided with a first connecting block 31 extending toward the piston rod 22 , the rotating disk 42 is fixed to the piston rod 22 , and the fixing seat 41 is fixedly connected to the first connecting block 31 .

[0064] In this embodiment, the fixing seat 41 is fixedly connected to the first connecting block 31, and the fixing seat 41 drives the second frame 3 to rotate synchronously through the first connecting block 31, so as to facilitate the connection between the second frame 3 and the hollow rotating platform 4. Among them, the piston rod 22 passes through the center hole of the rotating disk 42 and is fixedly connected to the rotating disk 42, the piston rod 22 passes through the first connecting block 31, and the first connecting block 31 can rotate synchronously with the fixing seat 41 relative to the piston rod 22, so as to realize the rotation of the second frame 3.

[0065] As an embodiment of the utility model, the second frame 3 is further provided with a second connecting block 32 extending toward the piston rod 22 and spaced apart from the first connecting block 31 , and the second connecting block 32 is rotatably connected to the piston rod 22 .

[0066] In this embodiment, the piston rod 22 passes through the second connecting block 32 and forms a rotating connection with the second connecting block 32, so that the second connecting block 32 can rotate relative to the piston rod 22. The second frame 3 simultaneously forms a rotatable connection with the piston rod 22 through the first connecting block 31 and the second connecting block 32, so that the second frame 3 can stably rotate relative to the central axis of the piston rod 22, and it is convenient for the piston rod 22 to drive the second frame 3 to rise and fall through the first connecting block 31 and the second connecting block 32, thereby realizing the lifting and lowering of the auxiliary furnace chamber.

[0067] The embodiment of the utility model also provides a single crystal furnace, including the furnace chamber rotation and lifting mechanism of the single crystal furnace of the above embodiment. The single crystal furnace of this embodiment is provided with the furnace chamber rotation and lifting mechanism of the above single crystal furnace, and the motor 43 drives the main furnace chamber or the auxiliary furnace chamber to rotate by using the hollow rotating platform 4. It only needs to install the hollow rotating platform 4 as a whole, and there is no need to install the gears separately manually, which avoids the problem of low rotation accuracy of the main furnace chamber or the auxiliary furnace chamber caused by large gear gap during gear installation, and can improve the rotation accuracy of the main furnace chamber or the auxiliary furnace chamber of the single crystal furnace, reduce the rotation angle error of the main furnace chamber or the auxiliary furnace chamber of the single crystal furnace, and improve the rotation reliability of the main furnace chamber or the auxiliary furnace chamber of the single crystal furnace.

[0068] The furnace chamber rotation and lifting mechanism of a single crystal furnace provided by an embodiment of the utility model is provided with a hollow rotating platform 4, and the hollow rotating platform 4 is used to drive the second frame 3 to rotate around the central axis of the piston rod 22 to realize the rotation of the main furnace chamber or the auxiliary furnace chamber. It only needs to install the hollow rotating platform 4 as a whole, and there is no need to manually install gears separately, so as to avoid the problem of low rotation accuracy of the main furnace chamber or the auxiliary furnace chamber caused by a large gear gap during gear installation. The rotation accuracy of the main furnace chamber or the auxiliary furnace chamber can be improved, the rotation angle error of the main furnace chamber or the auxiliary furnace chamber can be reduced, and the rotation reliability of the main furnace chamber or the auxiliary furnace chamber is good.

[0069] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A furnace chamber rotation and lifting mechanism for a single crystal furnace, characterized in that: include: The first frame; a first hydraulic cylinder fixed on the first frame; A second frame body connected to the main furnace chamber or the auxiliary furnace chamber, wherein the second frame body is rotatably connected to the piston rod of the first hydraulic cylinder, and the piston rod is used to drive the second frame body to rise and fall; and The hollow rotating platform comprises a fixed seat, a turntable rotatably mounted on the fixed seat, a gear set mounted in the fixed seat, and a motor fixed on the fixed seat and connected to the turntable through the gear set; In which, the turntable is fixed to the piston rod, the fixed seat is fixedly connected to the second frame, and the fixed seat can drive the second frame to rotate around the central axis of the piston rod; or, the fixed seat is fixed to the piston rod, the turntable is fixedly connected to the second frame, and the turntable can drive the second frame to rotate around the central axis of the piston rod.

2. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 1, characterized in that: The gear set includes a driving gear installed in the fixing seat, a driven gear installed in the fixing seat and meshing with the driving gear, the driven gear is connected to the rotating disk, and the output shaft of the motor is connected to the driving gear.

3. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 1, characterized in that: Also includes: A guide rail fixed to the first frame and arranged along the vertical direction; A limiting component connected to the piston rod cooperates with the guide rail and can move up and down along the guide rail.

4. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 3, characterized in that: The limiting component is a guide wheel, and the guide rail is provided with a slide groove distributed in a vertical direction. The guide wheel is embedded in the slide groove and can roll up and down along the slide groove.

5. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 3, characterized in that: The limiting component is a slider, which is slidably connected to the guide rail and can slide up and down along the guide rail.

6. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 4, characterized in that: Also includes: A connecting plate is fixed to the piston rod, and the guide wheel is connected to the connecting plate.

7. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 6, characterized in that: The connecting plate is provided with a connecting portion extending toward the first frame body, and the guide wheel is fixed to the connecting portion.

8. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 7, characterized in that: It also includes a connecting shaft for installing the guide wheel, the connecting part is provided with a through groove formed by hollowing out, and a mounting hole connected to the through groove, one end of the connecting shaft is rotatably connected to the guide wheel, and the other end extends from the mounting hole into the through groove and is fixed to the connecting part by a nut.

9. The furnace chamber rotating and lifting mechanism of the single crystal furnace according to claim 1, characterized in that: The second frame is provided with a first connecting block extending in the direction of the piston rod, the rotating disk is fixed to the piston rod, and the fixing seat is fixedly connected to the first connecting block.

10. A single crystal furnace, characterized in that: A furnace chamber rotating and lifting mechanism comprising a single crystal furnace as described in any one of claims 1 to 9.

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