Thermal field structure and single crystal furnace

Abstract

The utility model is applicable to the technical field of single crystal furnaces, and provides a thermal field structure and a single crystal furnace, in the thermal field structure, a positioning piece is arranged on a furnace chassis, and the positioning piece is relatively fixed with the furnace chassis through a first positioning structure and a second positioning structure; the furnace bottom heat preservation piece is at least partially installed in the installation cavity of the positioning piece and matched with the inner wall face of the installation cavity, the concentricity between the furnace bottom heat preservation piece and the furnace chassis can be assembled and positioned through the positioning piece, manual measurement is not needed for control, consumed time is short, and centering precision is high. Meanwhile, the whole thermal field structure is assembled and positioned through a second positioning structure on the positioning piece and a first positioning structure on the furnace chassis, after each time of installation is completed, the position of the whole thermal field relative to the furnace chassis is basically the same, the installation consistency is good, the temperature field distribution change value becomes smaller, the thermal field temperature gradient change becomes smaller, and the thermal field temperature gradient change becomes smaller. Therefore, the probability of shouldering and equal-diameter line breakage in the crystal pulling process is reduced, and the yield of single crystals is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a thermal field structure and a single crystal furnace. Background Art

[0002] At present, in single crystal furnaces, the assembly of the thermal field of single crystal furnaces is simply based on the furnace chassis as a reference for installation. The concentricity between the furnace chassis and the thermal field components arranged above it is controlled by the installers, which takes a long time and has poor centering accuracy. During installation, the thermal field components are installed with the furnace chassis as a reference. As the thermal field components are assembled one by one, the concentricity of the thermal field as a whole with the furnace chassis will deteriorate. After each installation, the position of the thermal field relative to the furnace chassis is different. In this way, the consistency of the thermal field installation position is poor each time, resulting in large changes in the temperature field distribution and the temperature gradient of the thermal field. The degree of change in the temperature field distribution is likely to exceed the process tolerance, which will increase the probability of shouldering and equal-diameter wire breaking during the crystal pulling process, and reduce the yield of silicon single crystals. Utility Model Content

[0003] The utility model provides a thermal field structure and a single crystal furnace, aiming to solve the technical problems that the thermal field structure of the single crystal furnace in the prior art has poor centering accuracy, the consistency of the thermal field installation position each time is poor, which easily leads to an increased probability of shouldering and equal-diameter wire breakage during the crystal pulling process, and a reduced silicon single crystal yield.

[0004] The utility model is implemented in this way. The thermal field structure of the embodiment of the utility model includes:

[0005] The thermal field structure comprises:

[0006] A furnace bottom plate, wherein a first positioning structure is formed on the furnace bottom plate;

[0007] A positioning member disposed on the furnace bottom plate, wherein a second positioning structure is formed on the positioning member, and the second positioning structure cooperates with the first positioning structure to relatively fix the positions of the positioning member and the furnace bottom plate, and a mounting cavity is formed on a side of the positioning member away from the furnace bottom plate; and

[0008] A furnace bottom insulation component is installed on the positioning component and is at least partially located in the installation cavity, and the outer peripheral surface of the furnace bottom insulation component matches the inner wall surface of the installation cavity.

[0009] Furthermore, one of the first positioning structure and the second positioning structure is a groove, and the other is a protrusion, and the groove and the protrusion match each other.

[0010] Furthermore, the furnace bottom plate, the positioning member and the furnace bottom insulation member are all formed with concentrically arranged center holes at their center positions;

[0011] The first positioning structure comprises an annular protrusion formed on the furnace bottom plate and arranged concentrically with the center hole, and the second positioning structure comprises an annular groove formed on the positioning member and arranged concentrically with the center hole, and the annular protrusion is embedded in the annular groove and matched with the annular groove; or

[0012] The first positioning structure includes an annular groove formed on the furnace bottom plate and arranged concentrically with the center hole, and the second positioning structure includes an annular protrusion formed on the positioning member and arranged concentrically with the center hole, and the annular protrusion is embedded in the annular groove and cooperates with the annular groove.

[0013] Furthermore, the positioning member includes a bottom plate and an annular convex edge protruding from the bottom plate on the side away from the furnace bottom plate, the annular convex edge and the bottom plate together form the installation cavity, and the outer peripheral surface of the furnace bottom insulation member cooperates with the inner wall of the annular convex edge.

[0014] Furthermore, the thermal field structure further comprises a porous heat sink, which is installed in the installation cavity and located at the bottom of the furnace bottom insulation component, and has a plurality of heat dissipation holes formed on the porous heat sink.

[0015] Furthermore, the porous heat sink is made of a carbon-carbon composite material.

[0016] Furthermore, the positioning member is made of a carbon-carbon composite material; and / or

[0017] The furnace bottom insulation component comprises insulation felt.

[0018] Furthermore, the outer peripheral surface of the furnace bottom insulation component is interference fit with the inner wall surface of the installation cavity.

[0019] Furthermore, the furnace bottom plate, the positioning member and the furnace bottom insulation member are all formed with concentrically arranged exhaust holes and concentrically arranged electrode mounting holes.

[0020] The utility model also provides a single crystal furnace, which comprises the thermal field structure described in any one of the above items.

[0021] In the thermal field structure and the single crystal furnace in the embodiment of the utility model, the thermal field structure includes a furnace bottom plate, a positioning member and a furnace bottom insulation member, a first positioning structure is formed on the furnace bottom plate, a second positioning structure and a mounting cavity are formed on the positioning member, the second positioning structure cooperates with the first positioning structure to relatively fix the positions of the positioning member and the furnace bottom plate, the furnace bottom insulation member is installed in the mounting cavity and the outer peripheral surface of the furnace bottom insulation member cooperates with the inner wall surface of the mounting cavity, thereby fixing the relative positions of the furnace bottom insulation member and the positioning member. In this way, by installing the positioning member on the furnace bottom plate, the positioning member is relatively fixed with the furnace bottom plate through the first positioning structure and the second positioning structure, the furnace bottom insulation member is at least partially installed in the mounting cavity of the positioning member and cooperates with the inner wall surface of the mounting cavity, the concentricity between the furnace bottom insulation member and the furnace bottom plate can be assembled and positioned by the positioning member, and does not need to rely on personnel measurement to control, which takes less time and has higher centering accuracy. At the same time, the entire thermal field structure is assembled and positioned through the second positioning structure on the positioning piece and the first positioning structure on the furnace bottom plate. After each installation is completed, the position of the entire thermal field relative to the furnace bottom plate is basically the same, and the installation consistency is good, which makes the temperature field distribution change value smaller and the temperature gradient change of the thermal field smaller, thereby reducing the probability of shouldering and equal-diameter wire breaking during crystal pulling and improving the single crystal yield.

[0022] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural schematic diagram of a single crystal furnace provided by an embodiment of the utility model;

[0024] Figure 2 It is a three-dimensional structural schematic diagram of the thermal field structure provided by the embodiment of the utility model;

[0025] Figure 3 It is a schematic diagram of the decomposed structure of the thermal field structure provided by the embodiment of the utility model;

[0026] Figure 4 It is a structural schematic diagram of a positioning member provided in an embodiment of the utility model;

[0027] Figure 5 It is a schematic diagram of the planar structure of the thermal field structure provided by the embodiment of the utility model;

[0028] Figure 6 yes Figure 5 Schematic diagram of the cross section of the thermal field structure along line VI-VI;

[0029] Figure 7 yes Figure 6 Enlarged schematic diagram of the thermal field structure at point VII.

[0030] Description of main component symbols:

[0031] Single crystal furnace 100, thermal field structure 10, furnace bottom plate 11, center hole 101, exhaust hole 102, electrode mounting hole 103, first positioning structure 111, positioning member 12, second positioning structure 121, mounting cavity 122, bottom plate 123, annular convex edge 124, furnace bottom insulation member 13, porous heat dissipation member 14, heat dissipation hole 141, insulation tube 15, heater 16, furnace body 20, crucible 30. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model. In addition, it should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model.

[0033] In the description of the present invention, it should be understood that the terms "upper", "lower", "top", "bottom", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0034] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0035] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0036] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0037] The disclosure below provides many different embodiments or examples for realizing different structures of the utility model. In order to simplify the disclosure of the utility model, the components and settings of specific examples are described below. Of course, they are merely examples, and the purpose is not to limit the utility model. In addition, the utility model may repeat reference numbers and / or reference letters in different examples, and such repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the utility model provides examples of various specific processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use scenarios of other materials.

[0038] Embodiment 1

[0039] See also Figure 1 The single crystal furnace 100 in the embodiment of the present invention may include the thermal field structure 10, the furnace body 20, the crucible 30 and other components in the embodiment of the present invention. The furnace body 20 is the main carrier of the single crystal furnace 100. The furnace body 20 may form a furnace cavity 21. The thermal field structure 10 may be installed at the bottom of the furnace cavity 21. The crucible 30 may be arranged in the furnace body 20 and located above the thermal field structure 10.

[0040] See also Figure 2-Figure 6 The thermal field structure 10 in the embodiment of the utility model may include a furnace bottom plate 11, a positioning member 12 and a furnace bottom insulation member 13.

[0041] The furnace bottom plate 11 can be arranged in the furnace cavity 21 of the furnace body 20 and is located at the bottom of the furnace cavity 21. A first positioning structure 111 is formed on the furnace bottom plate 11. The positioning member 12 is arranged on the furnace bottom plate 11. A second positioning structure 121 is formed on the positioning member 12. The second positioning structure 121 cooperates with the first positioning structure 111 to relatively fix the positions of the positioning member 12 and the furnace bottom plate 11.

[0042] A mounting cavity 122 is formed on one side of the positioning member 12 away from the furnace bottom plate 11 . The furnace bottom insulation member 13 is mounted on the positioning member 12 and at least partially located in the mounting cavity 122 . The outer peripheral surface 131 of the furnace bottom insulation member 13 matches the inner wall surface 1221 of the mounting cavity 122 .

[0043] In the thermal field structure 10 and the single crystal furnace 100 in the embodiment of the utility model, the thermal field structure 10 includes a furnace bottom plate 11, a positioning member 12 and a furnace bottom insulation member 13. A first positioning structure 111 is formed on the furnace bottom plate 11, and a second positioning structure 121 and an installation cavity 122 are formed on the positioning member 12. The second positioning structure 121 cooperates with the first positioning structure 111 to relatively fix the positions of the positioning member 12 and the furnace bottom plate 11. The furnace bottom insulation member 13 is installed in the installation cavity 122 and the outer peripheral surface 131 of the furnace bottom insulation member 13 cooperates with the inner wall surface 1221 of the installation cavity 122, thereby fixing the relative positions of the furnace bottom insulation member 13 and the positioning member 12.

[0044] In this way, by installing the positioning member 12 on the furnace bottom plate 11, the positioning member 12 is relatively fixed with the furnace bottom plate 11 through the first positioning structure 111 and the second positioning structure 121, and the furnace bottom insulation member 13 is at least partially installed in the installation cavity 122 of the positioning member 12 and matched with the inner wall surface 1221 of the installation cavity 122. The concentricity between the furnace bottom insulation member 13 and the furnace bottom plate 11 can be assembled and positioned by relying on the positioning member 12, and does not need to rely on personnel measurement to control, which takes less time and has higher centering accuracy. At the same time, the entire thermal field structure 10 is assembled and positioned by the second positioning structure 121 on the positioning member 12 and the first positioning structure 111 on the furnace bottom plate 11. After each installation is completed, the position of the entire thermal field relative to the furnace bottom plate 11 is basically the same, and the installation consistency is good, so that the temperature field distribution change value becomes smaller, and the temperature gradient change of the thermal field becomes smaller, thereby reducing the probability of shouldering and equal diameter wire breaking during crystal pulling, and improving the single crystal yield.

[0045] Specifically, Figure 1 As shown, in the thermal field structure 10 of the embodiment of the utility model, the thermal field structure 10 may also include a heat preservation tube 15 installed above the furnace bottom heat preservation member 13, and a heater 16 located above the furnace bottom heat preservation member 13, the heat preservation tube 15 may be arranged around the crucible 30, and the heater 16 is also arranged around the crucible 30, and the heater 16 is used to heat the crucible 30. The furnace body 20 may also be provided with an air intake pipe (not shown) and an exhaust pipe (not shown) for introducing protective gas and extracting the protective gas in the furnace body 20.

[0046] In some embodiments, the furnace bottom plate 11 may be a liquid-cooled furnace bottom plate, and a sealed liquid channel may be formed in the furnace bottom plate 11 , and the liquid channel is used for liquid circulation to achieve heat dissipation of the furnace bottom plate 11 .

[0047] like Figure 2-Figure 5 As shown, in the present invention, the furnace bottom plate 11, the positioning member 12 and the furnace bottom insulation member 13 can all be circular, and the installation cavity 122 is also circular.

[0048] In the embodiment of the utility model, during the assembly process, the positioning member 12 can be first positioned and assembled on the furnace bottom plate 11 through the first positioning structure 111 and the second positioning structure 121, so that the positioning member 12 and the furnace bottom plate 11 are relatively fixed, and then the furnace bottom insulation member 13 can be installed in the installation cavity 122. The installation cavity 122 and the furnace bottom insulation member 13 are matched to make the furnace bottom insulation member 13 and the positioning member relatively fixed, and then the insulation cylinder 15, the crucible 30, the heater 16 and other components can be installed above the furnace bottom insulation member 13. It can be understood that due to the setting of the positioning member 12, the positioning member 12 can ensure that the position of the furnace bottom insulation member 13 and the furnace bottom plate 11 is relatively fixed, thereby ensuring the concentricity between the furnace bottom insulation member 13 and the furnace bottom plate 11, thereby ensuring the concentricity of other thermal field components installed on the furnace bottom insulation member 13.

[0049] That is to say, in the present invention, the concentricity between the furnace bottom plate 11 and the thermal field components installed above it can be ensured by the positioning member 12 at the bottom of the thermal field structure 10, and it is not necessary to rely on personnel to measure and control, which can shorten the assembly time. At the same time, it can also ensure that after each installation is completed, the relative position of the furnace bottom insulation member 13 and the furnace bottom plate 11 is basically the same, thereby ensuring the installation consistency, avoiding poor installation consistency and causing a large change in the temperature field distribution, a large change in the thermal field temperature gradient, and thus increasing the probability of shouldering and equal diameter wire breaking during the crystal pulling process, resulting in a decrease in yield.

[0050] like Figure 6 As shown, in some embodiments, the outer peripheral surface 131 of the furnace bottom insulation member 13 can be interference fit with the inner wall surface 1221 of the installation cavity 122. In this way, the two are assembled by interference fit, which can effectively avoid the expansion of the material due to temperature rise and the extrusion and rupture of the component.

[0051] Embodiment 2

[0052] In some embodiments, the positioning member 12 may be made of a carbon-carbon composite material, that is, the positioning member 12 may be a carbon-carbon positioning member.

[0053] In this way, the carbon fiber has high strength and good supporting performance, which can better protect the furnace bottom insulation 13 installed in the installation cavity 122. At the same time, the carbon fiber also has good thermal conductivity, which can quickly introduce heat into the furnace bottom plate 11 to achieve efficient heat dissipation.

[0054] Of course, it is understandable that in other embodiments, the positioning member 12 may also be made of other materials with good thermal conductivity, which is not specifically limited here.

[0055] Embodiment 3

[0056] In some embodiments, the furnace bottom insulation member 13 may include insulation felt. In this way, the insulation felt can insulate the airflow in the insulation tube 15 to prevent the heat from being lost too quickly.

[0057] Specifically, the heat-insulating felt can be cured felt. Of course, it is understandable that, in some embodiments, the furnace bottom heat-insulating member 13 can also be other structures filled with heat-insulating materials such as soft felt and heat-insulating cotton, which is not specifically limited here.

[0058] Embodiment 4

[0059] See also Figure 2-Figure 6 In some embodiments, a concentrically arranged center hole 101 is formed at the center of the furnace bottom plate 11 , the positioning member 12 and the furnace bottom insulation member 13 .

[0060] In this way, the crucible shaft at the bottom of the crucible 30 can pass through the central hole 101 and be installed in the furnace chamber 21 .

[0061] Specifically, it is not difficult to understand that in the present invention, the positioning member 12 and the furnace bottom plate 11 are positioned by the first positioning structure 111 and the second positioning structure 121, which can ensure the concentricity of the center hole 101 on the furnace bottom plate 11, the positioning member 12 and the furnace bottom insulation member 13, thereby facilitating the installation of the crucible 30.

[0062] Embodiment 5

[0063] See also Figure 3 , Figure 4 , Figure 6 as well as Figure 7 In some embodiments, one of the first positioning structure 111 and the second positioning structure 121 is a groove, and the other is a protrusion, and the groove and the protrusion match each other.

[0064] In this way, the positioning member 12 and the furnace bottom plate 11 are positioned by the cooperation of the protrusions and the grooves, and the structure is simple and easy to manufacture.

[0065] Specifically, Figure 3 , Figure 4 , Figure 6 as well as Figure 7As shown, taking the first positioning structure 111 as a groove and the second positioning structure 121 as a protrusion as an example, a concave step may be formed on the side of the furnace bottom plate 11 facing the positioning member 12 to form a groove, and a convex step may be formed on the side of the positioning member 12 facing the furnace bottom plate 11 to form a protrusion. During installation, the positioning member 12 can be positioned and installed by simply aligning the protrusion and the groove, so that the position of the positioning member 12 and the furnace bottom plate 11 remain relatively fixed, thereby ensuring the concentricity of the furnace bottom insulation member 13 with the furnace bottom plate 11 when it is installed on the positioning member 12. In a possible embodiment, both the protrusion and the groove can be formed by cutting, which is not limited here.

[0066] Embodiment 6

[0067] See also Figure 3 , Figure 4 , Figure 6 as well as Figure 7 In some embodiments, the first positioning structure 111 may include an annular protrusion formed on the furnace bottom plate 11 and arranged concentrically with the center hole 101, and the second positioning structure 121 may include an annular groove formed on the positioning member 12 and arranged concentrically with the second center hole 101, and the annular protrusion is embedded in the annular groove and cooperates with the annular groove.

[0068] In this way, by arranging the annular protrusion and the annular groove around the center hole 101, it is easier to find the assembly position of the positioning member 12 and the furnace bottom plate 11 during installation, and it is also possible to ensure that the center hole 101 on the positioning member 12 is aligned with the center hole 101 on the furnace bottom plate 11.

[0069] Of course, it is understandable that in some embodiments, the first positioning structure 111 may include an annular groove formed on the furnace bottom plate 11 and arranged concentrically with the center hole 101, and the second positioning structure 121 may include an annular protrusion formed on the positioning member 12 and arranged concentrically with the center hole 101, and the annular protrusion is embedded in the annular groove and cooperates with the annular groove, and no specific limitation is made here.

[0070] Of course, it can also be understood that in other possible embodiments, the first positioning structure 111 and the second positioning structure 121 may also be other structures. For example, the first positioning structure 111 may be a plurality of positioning holes formed on the furnace bottom plate 11, and the second positioning structure 121 may be a plurality of positioning columns formed on the bottom of the positioning member 12, and the positioning columns cooperate with the positioning holes to fix the relative position between the positioning member 12 and the furnace bottom plate 11.

[0071] Embodiment 7

[0072] See also Figure 3 , Figure 4 and Figure 6In some embodiments, the positioning member 12 may include a bottom plate 123 and an annular flange 124 protruding on the side of the bottom plate 123 away from the furnace bottom plate 11, the annular flange 124 and the bottom plate 123 together form an installation cavity 122, and the outer peripheral surface 131 of the furnace bottom insulation member 13 cooperates with the inner wall of the annular flange 124 (i.e., the inner wall surface of the installation cavity 122).

[0073] Thus, by forming the annular protrusion 124 on the positioning member 12 to form the installation cavity 122 , the installation efficiency of the furnace bottom insulation member 13 can be improved, and the relative position of the furnace bottom insulation member 13 and the positioning member 12 can also be ensured by the annular protrusion 124 .

[0074] Specifically, Figure 3 , Figure 4 and Figure 6 As shown, the annular protrusion 124 can be located at the outermost position of the bottom plate 123 of the positioning member 12. When installing the furnace bottom insulation member 13, the bottom of the furnace bottom insulation member 13 can be installed in the installation cavity 122 so that the positions of the furnace bottom insulation member 13 and the positioning member 12 are relatively fixed, thereby making the positions of the furnace bottom insulation member 13 and the furnace bottom plate 11 relatively fixed.

[0075] like Figure 6 As shown, when the furnace bottom insulation member 13 is installed in the installation cavity 122, the top of the furnace bottom insulation member 13 can protrude from the top of the installation cavity 122. Of course, it can be understood that in some embodiments, the entire furnace bottom insulation member 13 can also be located in the installation cavity 122, which is not specifically limited here.

[0076] In addition, it is understandable that in other embodiments, the annular flange 124 may not be located at the edge of the positioning member 12 , and it is only necessary that the installation cavity 122 defined by the annular flange 124 can meet the installation dimensions of the furnace bottom insulation member 13 .

[0077] Embodiment 8

[0078] See also Figure 3 and Figure 6 In some embodiments, the thermal field structure 10 may further include a porous heat sink 14 , which is installed in the installation cavity 122 and located at the bottom of the furnace bottom insulation member 13 , and a plurality of heat dissipation holes 141 are formed on the porous heat sink 14 .

[0079] In this way, uniform heat conduction can be achieved by disposing the porous heat sink 14 , thereby effectively preventing heat accumulation at the furnace bottom plate 11 and damaging the furnace bottom plate 11 .

[0080] Specifically, in such an embodiment, the porous heat sink 14 is located between the furnace bottom insulation member 13 and the bottom plate 123 of the positioning member 12, and the outer peripheral surface of the porous heat sink 14 cooperates with the inner wall surface 1221 of the mounting cavity 122 to ensure the concentricity between the porous heat sink 14 and the furnace bottom plate 11. The center position of the porous heat sink 14 also forms a center hole 101 that is concentrically arranged with the center hole 101 on the furnace bottom plate 11, the positioning member 12 and the furnace bottom insulation member 13, so that the crucible axis at the bottom of the crucible 30 can pass through.

[0081] In the embodiment of the present invention, the shape and number of the heat dissipation holes 141 are not limited, and the heat dissipation holes 141 may be circular, rectangular, elliptical or other regular or irregular shapes.

[0082] Furthermore, in such an embodiment, the porous heat sink 14 may also be made of a carbon-carbon composite material, so that the porous heat sink 14 can have higher strength and better thermal conductivity.

[0083] Embodiment 9

[0084] See also Figure 2-Figure 6 In some embodiments, the furnace bottom plate 11 , the positioning member 12 and the furnace bottom insulation member 13 are all formed with concentrically arranged exhaust holes 102 and concentrically arranged electrode mounting holes 103 .

[0085] In this way, the exhaust hole 102 can be connected to the exhaust hole 102 to achieve exhaust of the furnace chamber 21, and the electrode installation hole 103 can also be used to install the electrode for electrical connection with the heater 16.

[0086] Specifically, Figure 3 As shown, in such an embodiment, if a porous heat sink 14 is provided, exhaust holes corresponding to the exhaust holes 102 on other components are also formed on the porous heat sink 14, and exhaust holes corresponding to the electrode mounting holes 103 on other components are also formed. The exhaust hole 102 can be single or multiple, and the electrode mounting holes 103 are arranged in pairs. When there is only one heater 16, only one pair of electrode mounting holes 103 can be provided, one for mounting the positive electrode and one for mounting the negative electrode. When there are multiple heaters 16, the number of pairs of electrode mounting holes 103 is the same as the number of heaters 16.

[0087] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0088] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A thermal field structure for a single crystal furnace, characterized in that: The thermal field structure comprises: A furnace bottom plate, wherein a first positioning structure is formed on the furnace bottom plate; A positioning member disposed on the furnace bottom plate, wherein a second positioning structure is formed on the positioning member, and the second positioning structure cooperates with the first positioning structure to relatively fix the positions of the positioning member and the furnace bottom plate, and a mounting cavity is formed on a side of the positioning member away from the furnace bottom plate; and A furnace bottom insulation component is installed on the positioning component and is at least partially located in the installation cavity, and the outer peripheral surface of the furnace bottom insulation component matches the inner wall surface of the installation cavity.

2. The thermal field structure according to claim 1, characterized in that: One of the first positioning structure and the second positioning structure is a groove, and the other is a protrusion, and the groove and the protrusion match each other.

3. The thermal field structure according to claim 1, characterized in that: The furnace bottom plate, the positioning member and the furnace bottom insulation member are all formed with concentrically arranged center holes at their center positions; The first positioning structure comprises an annular protrusion formed on the furnace bottom plate and arranged concentrically with the center hole, and the second positioning structure comprises an annular groove formed on the positioning member and arranged concentrically with the center hole, and the annular protrusion is embedded in the annular groove and matched with the annular groove; or The first positioning structure includes an annular groove formed on the furnace bottom plate and arranged concentrically with the center hole, and the second positioning structure includes an annular protrusion formed on the positioning member and arranged concentrically with the center hole, and the annular protrusion is embedded in the annular groove and cooperates with the annular groove.

4. The thermal field structure according to claim 1, characterized in that: The positioning member includes a bottom plate and an annular convex edge protruding from the bottom plate on the side away from the furnace bottom plate. The annular convex edge and the bottom plate together form the installation cavity. The outer peripheral surface of the furnace bottom insulation member matches the inner wall of the annular convex edge.

5. The thermal field structure according to claim 1, characterized in that: The thermal field structure further comprises a porous heat sink, which is installed in the installation cavity and located at the bottom of the furnace bottom insulation component, and has a plurality of heat dissipation holes formed on the porous heat sink.

6. The thermal field structure according to claim 5, characterized in that: The porous heat sink is made of a carbon-carbon composite material.

7. The thermal field structure according to claim 1, characterized in that: The positioning member is made of a carbon-carbon composite material; and / or The furnace bottom insulation component comprises insulation felt.

8. The thermal field structure according to claim 1, characterized in that: The outer peripheral surface of the furnace bottom insulation component is interference fit with the inner wall surface of the installation cavity.

9. The thermal field structure according to claim 1, characterized in that: The furnace bottom plate, the positioning member and the furnace bottom insulation member are all formed with concentrically arranged exhaust holes and concentrically arranged electrode mounting holes.

10. A single crystal furnace, characterized in that: The thermal field structure comprises any one of claims 1 to 9.

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