Hot air discharge proportional control valve of substrate high-temperature baking furnace

Abstract

The utility model discloses a hot air discharge proportional control valve of a substrate high-temperature baking oven. A backflow cavity in a valve cavity of a proportional valve body is communicated with a hot air backflow pipe, and a flow dividing cavity is communicated with an oven cavity hot air discharge pipe; the drainage cavity is communicated with an outer drainage pipe; a backflow window is arranged on the backflow cavity partition plate, a drainage window is arranged on the drainage cavity partition plate, corresponding proportional valve plates are arranged at the window positions of the backflow window and the drainage window in a sliding mode, and valve plate nuts fixedly connected with the proportional valve plates are movably arranged on the driving screw in a sleeving mode. The area of the backflow window is equal to that of the drainage window, and the area of the face of the proportional valve plate is larger than that of the backflow window and that of the drainage window. And the peripheries of the backflow window and the drainage window are respectively provided with a backflow window sealing gasket layer and a drainage window sealing gasket layer. And a valve plate sealing cushion layer is arranged on the plate surface of the proportional valve plate. The hot air discharge proportional control valve not only can reduce the severe temperature fluctuation of the furnace chamber caused by the discharge of baking hot air, but also can purify the baking environment of the furnace chamber, thereby ensuring the quality of a baked glass substrate.

Description

Technical Field

[0001] The utility model relates to a glass substrate production device for a liquid crystal display, in particular to a hot air baking device for baking a glass substrate with high-temperature hot air, and specifically to a hot air discharge valve structure of a high-temperature hot air baking furnace. Background Art

[0002] In order to manufacture flat panel displays, high-precision fine patterns must be formed on the surface of a flat glass substrate. The process is to coat the glass substrate with photoresist and then perform vacuum drying and pre-baking to form a uniform photoresist cover film on the glass substrate. The exposed and developed glass substrate is then sent to a hot air baking furnace with a baking temperature of 230°C-280°C for high-temperature film hardening baking. The key factor affecting the baking quality of the glass substrate is the stability and uniformity of the temperature field in the film hardening baking chamber.

[0003] The glass substrate baking furnace is a special hard film baking equipment for curing the photoresist coated on the surface of the substrate. It not only has strict process requirements, but is also a high-energy-consuming equipment. In the process of heating, emptying and replacing the fresh air in the baking furnace, on the one hand, a large amount of heat energy in the baking hot air is wasted, which increases the energy consumption of the baking furnace and increases the production cost; on the other hand, it causes drastic fluctuations in the furnace chamber temperature, which is not conducive to the photoresist curing of the glass substrate, directly affects the stability of the performance indicators of the glass substrate and the substrate qualification rate, and also greatly limits the improvement of the baking efficiency. Utility Model Content

[0004] In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the utility model is to provide a hot air discharge proportional control valve for a substrate high-temperature baking furnace which can reduce the drastic fluctuation of the furnace chamber temperature caused by the baking hot air discharge.

[0005] In order to solve the above technical problems, the utility model provides a hot air discharge proportional control valve for a substrate high-temperature baking furnace, comprising a proportional valve body, wherein the valve cavity of the proportional valve body is divided into a reflux chamber, a diversion chamber and a discharge chamber by a reflux chamber partition and a discharge chamber partition; the reflux chamber is connected to the hot air reflux pipe, the diversion chamber is connected to the furnace chamber hot air discharge pipe; the discharge chamber is connected to the external discharge pipe; a reflux window is arranged on the reflux chamber partition, and a discharge window is arranged on the discharge chamber partition, and corresponding proportional valve plates are slidably arranged at the window positions of the reflux window and the discharge window, and the valve plate nut fixedly connected to the proportional valve plate is movably sleeved on the driving screw.

[0006] Preferably, the proportional valve plate and the valve plate nut are fixedly connected to each other, and the valve plate nut and the drive screw constitute a screw nut pair; the drive screw is transmission-connected to the drive motor via a gear transmission pair.

[0007] Preferably, the gear transmission pair is a bevel gear transmission pair, and the drive motor is a servo motor or a stepper motor.

[0008] Preferably, the window areas of the return window and the discharge window are equal, and the plate surface area of ​​the proportional valve plate is larger than the window areas of the return window and the discharge window.

[0009] Preferably, a return window sealing gasket layer and a discharge window sealing gasket layer are respectively provided around the windows of the return window and the discharge window.

[0010] Preferably, a valve plate sealing gasket layer is provided on the plate surface of the proportional valve plate.

[0011] Preferably, the reflux window sealing gasket layer, the discharge window sealing gasket layer and the valve plate sealing gasket layer are nylon material coating layers.

[0012] Preferably, the diverter chamber is located between the reflux chamber partition and the discharge chamber partition, and two proportional valve plates movably arranged on the driving screw are arranged back to back, and the driving screw is located in the diverter chamber.

[0013] In the above technical scheme, since the furnace cavity hot air discharge pipe, the hot air return pipe and the external discharge pipe are connected to the valve body, the hot air discharge proportional valve can effectively control and adjust the wind speed and flow rate of the discharge airflow and the recycled hot air, so that the high-content organic volatiles in the furnace cavity can be discharged proportionally through the discharge main pipe, and these externally discharged exhaust gases take away harmful substances such as organic volatiles and dust particles in the baking hot air, purify the furnace cavity baking environment, and ensure the quality of the baked glass substrate; the hot air discharge proportional valve can proportionally return the high-temperature hot air to the furnace cavity of the baking furnace, thereby increasing the basic temperature of the new air input into the furnace cavity, reducing the heating energy consumption of the entire baking furnace, stabilizing the baking temperature in the baking cavity, and effectively suppressing the temperature fluctuation in the baking cavity, avoiding the adverse effects of temperature fluctuations on the glass substrate. Because the hot air discharge proportional valve is divided into a reflux chamber, a diversion chamber and a discharge chamber, and the driving nut screw pair drives two movable proportional valve plates, the synchronous movement of the two proportional valve plates can reversely and synchronously adjust the opening of the reflux window and the discharge window; when the reflux window opening increases, the discharge window opening will decrease in the same proportion, and conversely, when the reflux window opening decreases, the discharge window opening will increase in the same proportion, thereby realizing a proportional increase or decrease in the reflux high-temperature hot air and the discharge high temperature, thereby accurately controlling the discharge and reuse of the high-temperature hot air, and achieving an effective balance between the temperature stability and purification degree of the baking furnace chamber, which not only ensures the controlled discharge of organic volatiles in the high-temperature gas, but also increases the basic temperature of the fresh air added into the furnace chamber, so as to stabilize the temperature field of the baking chamber, and can effectively reduce the energy consumption of baking and improve the baking efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The hot air discharge proportional control valve of the substrate high temperature baking furnace of the utility model is further described in detail below in conjunction with the drawings and specific implementation methods.

[0015] Figure 1 It is a cross-sectional structural schematic diagram of a specific implementation of the hot air discharge proportional control valve of the substrate high-temperature baking furnace of the utility model;

[0016] Figure 2 yes Figure 1 Schematic diagram of the structure from top view;

[0017] Figure 3 yes Figure 1 A-direction structural diagram in FIG.

[0018] Figure 4 yes Figure 1 Schematic diagram of the cross-sectional structure of the medium-proportional valve plate and the valve plate nut;

[0019] Figure 5 yes Figure 1 Enlarged structural diagram of part I in the middle.

[0020] In the figure, 1 is a proportional valve body, 2 is a proportional valve plate, 3 is a valve plate nut, 4 is a reflux window, 5 is a reflux window sealing gasket, 6 is a reflux chamber partition, 7 is a reflux chamber, 8 is a driving screw, 9 is a screw driving pair, 10 is a driving motor, 11 is a discharge window sealing gasket, 12 is a discharge chamber partition, 13 is a discharge window, 14 is a discharge chamber, 15 is a discharge chamber partition, 16 is a diversion chamber, 17 is a valve plate sealing gasket, 18 is a hot air reflux pipe, 19 is a furnace chamber hot air discharge pipe, and 20 is an external discharge pipe. DETAILED DESCRIPTION

[0021] like Figure 1 and Figure 2The hot air discharge proportional control valve of the substrate high temperature baking furnace shown in the figure comprises a rectangular cabinet-shaped proportional valve body 1, and the proportional valve body 1 divides the valve cavity of the proportional valve body 1 into a reflux cavity 7, a diverter cavity 16 and a discharge cavity 14 through two parallel and spaced reflux cavity partitions 6 and a discharge cavity partition 5, and the reflux cavity 7 and the discharge cavity 14 are respectively located on both sides of the diverter cavity 16. The reflux cavity 7 is connected to the hot air reflux pipe 18, the discharge cavity 14 is connected to the external discharge pipe 20, and the diverter cavity 16 is connected to the furnace cavity hot air discharge pipe 19, and the furnace cavity hot air discharge pipe 19 leads to the furnace cavity of the baking furnace. A through reflux window 4 is provided on the reflux cavity partition 6, and a through discharge window 13 is provided on the discharge cavity partition 15. The windows of the oppositely arranged reflux window 4 and the discharge window 13 can be movably provided with a proportional valve plate 2, and the two proportional valve plates 2 are arranged back to back. The proportional valve plate 2 is fixed with a corresponding valve plate nut 3, and the two valve plate nuts 3 are both screwed onto the same driving screw 8. The driving screw 8 is vertically located in the diverter chamber 16, and the driving screw 8 is supported on the proportional valve body 1 through a rotating support seat. The upper protruding end of the driving screw 8 is transmission-connected to the driving motor 10 through a screw driving pair 9, and the screw driving pair 9 is a bevel gear pair. The driving motor 10 adopts a servo motor, and can also be a stepping motor, and the driving motor is installed on the proportional valve body 1.

[0022] like Figure 3 and Figure 5 As shown, a reflux window sealing gasket layer 5 is arranged around the window of the reflux window 4, and the proportional valve plate 2 is movably covered on the reflux window 4 and the reflux window sealing gasket layer 5 around the window, and the discharge window 13 and the drainage window sealing gasket layer 11 around the window also adopt the same structure as the reflux window 4 and the reflux window sealing gasket layer 5. The reflux window sealing gasket layer 5 and the drainage window sealing gasket layer 11 are both made of nylon coating, and the flow area of ​​the reflux window 14 and the drainage window 113 is the same; the plate surface area of ​​the proportional valve plate 2 is larger than the window area of ​​the reflux window 4 and the drainage window 13.

[0023] like Figure 4 As shown, the proportional valve plate 2 and the valve plate nut 3 are fixedly connected, and the plate surface of the proportional valve plate 2 is parallel to the center line of the valve plate nut 3. The plate surface of the proportional valve plate 2 is also coated to form a valve plate sealing pad layer 17. The reflux window 4 and the discharge window 13 are in sliding contact with the corresponding proportional valve plate 2 through the nylon pad layer, which is conducive to improving its wear resistance and sealing performance.

[0024] The above only lists some preferred embodiments of the present invention, but the present invention is not limited thereto, and many improvements and changes can be made. As long as the improvements and changes are made on the basis of the basic principles of the present invention, they should be regarded as falling within the scope of protection of the present invention.

Claims

1. A hot air discharge proportional control valve for a substrate high temperature baking furnace, comprising a proportional valve body (1), characterized in that: The valve cavity of the proportional valve body (1) is divided into a reflux cavity (7), a diverter cavity (16) and a discharge cavity (14) by a reflux cavity partition (6) and a discharge cavity partition (15); the reflux cavity (7) is connected to a hot air reflux pipe (18), and the diverter cavity (16) is connected to a furnace cavity hot air discharge pipe (19); the discharge cavity (14) is connected to an external discharge pipe (20); a reflux window (4) is provided on the reflux cavity partition (6), and a discharge window (13) is provided on the discharge cavity partition (15); corresponding proportional valve plates (2) are slidably provided at the window positions of the reflux window (4) and the discharge window (13); a valve plate nut (3) fixedly connected to the proportional valve plate (2) is movably sleeved on a driving screw (8).

2. The hot air discharge proportional control valve for a substrate high temperature baking furnace according to claim 1, characterized in that: The proportional valve plate (2) and the valve plate nut (3) are fixedly connected to each other, and the valve plate nut (3) and the driving screw (8) form a screw nut pair; the driving screw (8) is transmission-connected to the driving motor (10) via a gear transmission pair.

3. The hot air discharge proportional control valve for a substrate high temperature baking furnace according to claim 2, characterized in that: The gear transmission pair is a bevel gear transmission pair, and the drive motor (10) is a servo motor or a stepping motor.

4. The hot air discharge proportional control valve for a substrate high temperature baking furnace according to claim 1, characterized in that: The window areas of the return window (4) and the discharge window (13) are equal, and the plate surface area of ​​the proportional valve plate (2) is larger than the window areas of the return window (4) and the discharge window (13).

5. The hot air discharge proportional control valve for a substrate high temperature baking furnace according to claim 1, characterized in that: A return window sealing gasket layer (5) and a discharge window sealing gasket layer (11) are respectively arranged around the windows of the return window (4) and the discharge window (13).

6. The hot air discharge proportional control valve for a substrate high temperature baking furnace according to claim 5, characterized in that: A valve plate sealing gasket layer (17) is arranged on the plate surface of the proportional valve plate (2).

7. The hot air discharge proportional control valve for a substrate high temperature baking furnace according to claim 5 or 6, characterized in that: The return window sealing gasket layer (5), the discharge window sealing gasket layer (11) and the valve plate sealing gasket layer (17) are nylon material coating layers.

8. The hot air discharge proportional control valve for a substrate high temperature baking furnace according to claim 1, characterized in that: The diverter chamber (16) is located between the return chamber partition (6) and the discharge chamber partition (15), and two proportional valve plates (2) movably arranged on the driving screw (8) are arranged back to back, and the driving screw (8) is located in the diverter chamber (16).

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