Silane combustion cylinder with solid-gas separation structure

Abstract

The utility model discloses a silane combustion cylinder with a solid-gas separation structure, which relates to the technical field of silane combustion cylinders, and comprises a combustion cylinder main body and a separation assembly, a gas inlet is arranged outside the combustion cylinder main body, and the separation assembly is arranged inside the combustion cylinder main body. The separation assembly comprises an upper mounting block, a pneumatic rod, a hollow bearing frame, a screen, a spring damping rod and a lower mounting block, the pneumatic rod is arranged at the lower end of the upper mounting block, the hollow bearing frame is mounted at the front end of the pneumatic rod, the screen is additionally arranged in the hollow bearing frame, and the spring damping rod is mounted on the outer side of the lower end of the hollow bearing frame. According to the silane combustion cylinder with the solid-gas separation structure, through the arrangement of the separation assembly, the problem that silicon dioxide smoke dust and gas in most silane combustion cylinders are poor in separation effect, so that the silicon dioxide smoke dust is easily discharged into air from the exhaust pipe along with the gas is solved, and the overall practicability of the silane combustion cylinder is conveniently improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silane combustion cylinders, in particular to a silane combustion cylinder with a solid-gas separation structure. Background Art

[0002] When chemical vapor deposition technology is used in spraying and drying equipment and in the manufacturing field of integrated circuits and electronic components, the gas produced by the process is harmful to the human body. It is easy to spontaneously combust when in contact with air under high temperature conditions, and it may also spontaneously combust even under normal temperature conditions or when in contact with oxidants. This kind of industrial waste gas is mainly silane and ammonia chloride, etc., and most of them are now treated by incineration. In order to improve the efficiency of industrial waste gas treatment, a silane combustion cylinder is needed, but the existing silane combustion cylinder still has the following shortcomings:

[0003] For example, the utility model with application number 202321052101.4 discloses a silane combustion cylinder, which continuously adjusts the angle of the nitrogen output pipe to evenly fill the cylinder with nitrogen, allowing the nitrogen to play a good role in annealing protection and other functions, thereby increasing the service life of the device while reducing the occurrence of accidents. By regularly cleaning the ash box, dust pollution is prevented and the health of users is protected. However, similar to the comparative documents of the above-mentioned application, when the existing silane combustion cylinders are used, the dense silica smoke produced by the combustion of the process exhaust gas inside most silane combustion cylinders is not well separated from the gas, causing the silica smoke to be easily discharged into the air from the exhaust pipe along with the gas, resulting in reduced practicality and reduced efficiency of the silane combustion cylinder.

[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a silane combustion cylinder with a solid-gas separation structure is proposed. Utility Model Content

[0005] The purpose of the utility model is to provide a silane combustion cylinder with a solid-gas separation structure to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a silane combustion tube with a solid-gas separation structure, comprising a combustion tube body and a separation component, the combustion tube body is provided with an air inlet on the outside, the combustion tube body is provided with a separation component inside, and the separation component comprises an upper mounting block, a pneumatic rod, a hollow receiving frame, a sieve, a spring damping rod and a lower mounting block, a pneumatic rod is provided at the lower end of the upper mounting block, and a hollow receiving frame is installed at the front end of the pneumatic rod, and a sieve is additionally provided inside the hollow receiving frame, and a spring damping rod is installed on the outer side of the lower end of the hollow receiving frame, a lower mounting block is provided at the bottom of the spring damping rod, and a collecting component is provided at the lower end of the combustion tube body.

[0007] Furthermore, an exhaust port is provided in the middle of the upper end of the combustion tube body, and support columns are installed at the four corners of the bottom of the combustion tube body.

[0008] Furthermore, the inner dimensions of the hollow receiving frame match the outer dimensions of the screening mesh, and the screening mesh is threadedly connected to the hollow receiving frame.

[0009] Furthermore, the hollow receiving frame and the spring damping rod are distributed vertically, and the hollow receiving frame is elastically connected to the lower mounting block through the spring damping rod.

[0010] Furthermore, the collecting assembly includes a dust collecting box, a water storage tank, a water pump, a water collecting chamber and a water outlet. The water storage tank is installed on the left side of the outside of the dust collecting box, and the upper end of the water storage tank is connected to the water pump, and the upper end of the water pump is connected to the water collecting chamber, and a water outlet is added inside the water collecting chamber.

[0011] Furthermore, the collecting assembly also includes a lower mounting ring, a mounting docking groove, a docking block, an upper mounting ring and a feed pipe. A lower mounting ring is arranged in the middle of the upper end of the ash collecting box, and a mounting docking groove is opened at the upper end of the lower mounting ring, and a docking block is connected to the mounting docking groove, and an upper mounting ring is arranged on the upper end of the docking block, and a feed pipe is arranged on the upper end of the upper mounting ring.

[0012] Furthermore, the water outlets are equidistantly distributed on the inner side of the water collecting chamber, and the water outlets are threadedly connected to the water collecting chamber.

[0013] Furthermore, the inner dimensions of the mounting docking groove match the outer dimensions of the docking block, and the docking block is connected to the lower mounting ring through the mounting docking groove.

[0014] The utility model provides a silane combustion cylinder with a solid-gas separation structure, which has the following beneficial effects:

[0015] 1. The utility model can use the separation component to avoid the poor separation effect of dense silicon dioxide smoke and gas generated by the combustion of process waste gas in most silane combustion tubes, which is easy to be discharged into the air from the exhaust pipe along with the gas, when using the silane combustion tube with a solid-gas separation structure. The upper mounting block is fixedly mounted on the upper end of the combustion tube body by fasteners, and the pneumatic rod is fixedly mounted on the lower end of the upper mounting block with the fasteners, and the hollow receiving frame is fixedly mounted on the front end of the pneumatic rod. The pneumatic rod is fixedly installed so that the operation of the pneumatic rod drives the hollow receiving frame to move its position, the lower mounting block is fixedly installed on the lower end of the hollow receiving frame, and the spring damping rod is fixedly installed on the upper end of the lower mounting block with the fastening bolts, so that the hollow receiving frame is elastically connected to the lower mounting block through the spring damping rod, and the screen is fixedly installed on the middle end of the hollow receiving frame. The smoke is intercepted by the setting of the screen, and the operation of the pneumatic rod drives the movement of the hollow receiving frame, and the spring damping rod is cooperated to make the screen fluctuate up and down, so that the smoke ash attached to the screen falls down, thereby further increasing the utilization efficiency of the silane combustion cylinder.

[0016] 2. The utility model can prevent the ash in most silane combustion tubes from falling down by gravity by itself through the collection assembly arranged at the lower end of the combustion tube body when the silane combustion tube with solid-gas separation structure is used, so that the centralized collection of ash takes a relatively long time, resulting in a decrease in the use efficiency of the silane combustion tube. The upper mounting ring is fixedly mounted at the lower end of the feed pipe, and the outer size of the docking block added at the lower end of the upper mounting ring matches the inner size of the mounting docking groove opened inside the lower mounting ring at the upper end of the ash collecting box, and then the docking groove is matched with the docking block to fix the upper mounting ring. The upper mounting ring and the lower mounting ring are limit-jointed, and the water tank is fixedly mounted on the outer left side of the ash collecting box via fasteners, and the water pump is fixedly mounted on the upper end of the water tank with the fasteners, and the water tank is connected to the water pump through a water pipe, and the water pump is connected to the water collecting chamber with the water pipe, so that the water pump can transport the clean water inside the water tank to the water collecting chamber through the water pipe, and spray the clean water out through the water outlet installed on the inner side of the water collecting chamber, so that the sprayed clean water allows the ash to quickly fall into the ash collecting box, thereby increasing the ash collection efficiency and improving the convenience of using the silane combustion cylinder. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a three-dimensional structural schematic diagram of a silane combustion cylinder with a solid-gas separation structure according to the utility model;

[0018] Figure 2 This is a schematic diagram of a three-dimensional cross-sectional structure of a separation component of a silane combustion cylinder with a solid-gas separation structure according to the utility model;

[0019] Figure 3 This is a schematic diagram of the three-dimensional structure of a water outlet of a silane combustion cylinder with a solid-gas separation structure according to the utility model;

[0020] Figure 4 It is a schematic diagram of the three-dimensional structure of a docking block of a silane combustion cylinder with a solid-gas separation structure according to the utility model.

[0021] In the figure: 1. combustion tube body; 2. air inlet; 3. exhaust port; 4. support column; 5. separation component; 501. upper mounting block; 502. pneumatic rod; 503. hollow receiving frame; 504. screening mesh; 505. spring damping rod; 506. lower mounting block; 6. collecting component; 601. ash collecting box; 602. water storage tank; 603. water pump; 604. water collecting chamber; 605. water outlet; 606. lower mounting ring; 607. mounting docking groove; 608. docking block; 609. upper mounting ring; 610. feeding pipe. DETAILED DESCRIPTION

[0022] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0023] like Figure 1 and Figure 2As shown, a silane combustion tube with a solid-gas separation structure includes a combustion tube body 1 and a separation component 5, the combustion tube body 1 is provided with an air inlet 2 on the outside, the combustion tube body 1 is provided with a separation component 5 inside, and the separation component 5 includes an upper mounting block 501, a pneumatic rod 502, a hollow receiving frame 503, a sieve 504, a spring damping rod 505 and a lower mounting block 506, the upper mounting block 501 is provided with a pneumatic rod 502 at the lower end, and a hollow receiving frame 503 is installed at the front end of the pneumatic rod 502, and the hollow receiving frame 503 is provided inside. A sieve 504 is added to the hollow receiving frame 503, and a spring damping rod 505 is installed on the outer side of the lower end of the hollow receiving frame 503, and a lower mounting block 506 is arranged at the bottom of the spring damping rod 505. An exhaust port 3 is arranged in the middle of the upper end of the combustion tube body 1, and support columns 4 are installed at the four corners of the bottom of the combustion tube body 1. The internal size of the hollow receiving frame 503 matches the external size of the sieve 504, and the sieve 504 is threadedly connected to the hollow receiving frame 503. The hollow receiving frame 503 and the spring damping rod 505 are vertically distributed, and the hollow receiving frame 5 03 is elastically connected to the lower mounting block 506 through the spring damping rod 505, the upper mounting block 501 is fixedly mounted on the upper end of the combustion tube body 1 through the fasteners, and the pneumatic rod 502 is fixedly mounted on the lower end of the upper mounting block 501 with the fasteners, and the hollow receiving frame 503 is fixedly mounted on the front end of the pneumatic rod 502, so that the operation of the pneumatic rod 502 drives the hollow receiving frame 503 to move the position, and the lower mounting block 506 is fixedly mounted on the lower end of the hollow receiving frame 503, and the spring damping rod 505 is fixedly mounted with the fastening bolts. Installed on the upper end of the lower mounting block 506, the hollow receiving frame 503 is elastically connected to the lower mounting block 506 through the spring damping rod 505, and the screen 504 is fixedly installed at the middle end of the hollow receiving frame 503. The smoke is intercepted by the setting of the screen 504, and the operation of the pneumatic rod 502 drives the movement of the hollow receiving frame 503, and at the same time cooperates with the spring damping rod 505 to make the screen 504 fluctuate up and down, so that the smoke ash attached to the screen 504 falls down, further increasing the use efficiency of the silane combustion cylinder;

[0024] like Figure 1 , Figure 2 and Figure 3As shown, a collecting assembly 6 is provided at the lower end of the combustion tube body 1, and the collecting assembly 6 includes an ash collecting box 601, a water storage tank 602, a water pump 603, a water collecting chamber 604 and a water outlet 605. The water storage tank 602 is installed on the left side of the outside of the ash collecting box 601, and the upper end of the water storage tank 602 is connected to the water pump 603, and the upper end of the water pump 603 is connected to the water collecting chamber 604, and the water outlet 605 is added inside the water collecting chamber 604. The collecting assembly 6 also includes a lower mounting ring 606, a mounting docking groove 607, a docking block 608, an upper mounting ring 609 and a feed pipe 61 0, a lower mounting ring 606 is provided at the middle of the upper end of the ash collecting box 601, and a mounting docking groove 607 is provided at the upper end of the lower mounting ring 606, and a docking block 608 is connected to the mounting docking groove 607, and an upper mounting ring 609 is provided at the upper end of the docking block 608, and a feed pipe 610 is provided at the upper end of the upper mounting ring 609, and the water outlets 605 are equidistantly distributed on the inner side of the water collecting cavity 604, and the water outlets 605 are threadedly connected to the water collecting cavity 604, and the inner size of the mounting docking groove 607 matches the outer size of the docking block 608, and the docking block 608 is connected to the outer side of the ash collecting cavity 604, and the inner size of the ash collecting cavity 607 matches the outer size of the docking block 608, and the docking block 608 is connected to the outer side of the ash collecting cavity 604, and the inner size of the ash collecting cavity 607 matches the outer size of the docking block 608, and the docking block 608 is connected to the outer side of the ash collecting cavity 604, and the ash collecting cavity 604 ... The upper mounting ring 609 is fixedly mounted on the lower end of the feed pipe 610 by connecting the mounting butt joint groove 607 with the lower mounting ring 606, and the outer size of the docking block 608 added at the lower end of the upper mounting ring 609 matches the inner size of the mounting butt joint groove 607 opened inside the lower mounting ring 606 at the upper end of the ash collecting box 601, and then the upper mounting ring 609 and the lower mounting ring 606 are limitedly docked by installing the docking groove 607 and cooperating with the docking block 608, and the water storage tank 602 is fixedly mounted on the outer left side of the ash collecting box 601 through fasteners, and the water storage tank 602 is fixedly mounted on the outer left side of the ash collecting box 601 by cooperating with the fasteners. The pump 603 is fixedly installed on the upper end of the water tank 602, and the water tank 602 is connected to the water pump 603 through a water pipe, and the water pump 603 is connected to the water collecting chamber 604 in cooperation with the water pipe, so that the water pump 603 can operate to transport the clean water inside the water tank 602 to the inside of the water collecting chamber 604 through the water pipe, and spray the clean water out through the water outlet 605 installed on the inner side of the water collecting chamber 604, so that the smoke ash can quickly fall into the ash collecting box 601 through the sprayed clean water, thereby increasing the smoke ash collection efficiency and improving the convenience of using the silane combustion cylinder.

[0025] In summary, when the silane combustion tube with a solid-gas separation structure is used, first, the support column 4 installed at the bottom of the combustion tube body 1 increases the stability of the equipment during use, and the main process waste gas such as silane is forced to mix with compressed air through the air inlet 2 set outside the combustion tube body 1 to self-ignite in the combustion tube body 1, and the excess gas is discharged through the exhaust port 3, and the upper mounting block 501 is fixedly installed at the upper end of the combustion tube body 1 by fasteners, and the pneumatic rod 502 is fixedly installed at the lower end of the upper mounting block 501 with the fasteners, and the hollow receiving frame 503 is fixed to the front end of the pneumatic rod 502. The pneumatic rod 502 is fixedly installed so that the operation of the hollow receiving frame 503 drives the position to move, the lower mounting block 506 is fixedly installed at the lower end of the hollow receiving frame 503, and the spring damping rod 505 is fixedly installed at the upper end of the lower mounting block 506 with the fastening bolts, so that the hollow receiving frame 503 is elastically connected with the lower mounting block 506 through the spring damping rod 505, and the sieve 504 is fixedly installed at the middle end of the hollow receiving frame 503. The smoke is intercepted by the setting of the sieve 504, and the operation of the pneumatic rod 502 drives the movement .... The rod 505 makes the screen 504 fluctuate up and down, so that the ash attached to the screen 504 falls down. Then, the upper mounting ring 609 is fixedly installed at the lower end of the feed pipe 610, and the outer size of the docking block 608 added at the lower end of the upper mounting ring 609 matches the inner size of the mounting docking groove 607 opened inside the lower mounting ring 606 at the upper end of the ash collecting box 601. Then, the upper mounting ring 609 and the lower mounting ring 606 are limitedly docked by installing the docking groove 607 and cooperating with the docking block 608, and the water storage tank 602 is fixedly installed on the outer left side of the ash collecting box 601 through fasteners. The water pump 603 is fixedly installed on the upper end of the water tank 602 with fasteners, the water tank 602 is connected to the water pump 603 through a water pipe, and the water pump 603 is connected to the water collecting chamber 604 with the water pipe, so that the water pump 603 can operate to transport the clean water inside the water tank 602 to the inside of the water collecting chamber 604 through the water pipe, and spray the clean water out through the water outlet 605 installed on the inner side of the water collecting chamber 604, so that the smoke ash can quickly fall into the ash collecting box 601 through the sprayed clean water, thereby increasing the smoke ash collection efficiency and improving the convenience of using the silane combustion cylinder.

[0026] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A silane combustion cylinder with a solid-gas separation structure, comprising a combustion cylinder body (1) and a separation assembly (5), characterized in that: The combustion tube body (1) is provided with an air inlet (2) on the outside, and a separation assembly (5) is provided inside the combustion tube body (1), and the separation assembly (5) comprises an upper mounting block (501), a pneumatic rod (502), a hollow receiving frame (503), a sieve (504), a spring damping rod (505) and a lower mounting block (506). The pneumatic rod (502) is provided at the lower end of the upper mounting block (501), and the hollow receiving frame (503) is installed at the front end of the pneumatic rod (502), and the sieve (504) is additionally provided inside the hollow receiving frame (503). At the same time, a spring damping rod (505) is installed on the outer side of the lower end of the hollow receiving frame (503), and the bottom of the spring damping rod (505) is provided with a lower mounting block (506). The lower end of the combustion tube body (1) is provided with a collecting assembly (6).

2. The silane combustion cylinder with a solid-gas separation structure according to claim 1, characterized in that: An exhaust port (3) is provided in the middle of the upper end of the combustion tube body (1), and support columns (4) are installed at the four corners of the bottom of the combustion tube body (1).

3. The silane combustion cylinder with a solid-gas separation structure according to claim 1, characterized in that: The inner dimensions of the hollow receiving frame (503) match the outer dimensions of the sieve (504), and the sieve (504) is threadedly connected to the hollow receiving frame (503).

4. The silane combustion cylinder with a solid-gas separation structure according to claim 1, characterized in that: The hollow receiving frame (503) and the spring damping rod (505) are distributed vertically, and the hollow receiving frame (503) is elastically connected to the lower mounting block (506) through the spring damping rod (505).

5. The silane combustion cylinder with a solid-gas separation structure according to claim 1, characterized in that: The collecting assembly (6) comprises an ash collecting box (601), a water storage tank (602), a water pump (603), a water collecting chamber (604) and a water outlet (605); the water storage tank (602) is installed on the left side of the outside of the ash collecting box (601); the upper end of the water storage tank (602) is connected to the water pump (603); the upper end of the water pump (603) is connected to the water collecting chamber (604); and a water outlet (605) is additionally provided inside the water collecting chamber (604).

6. The silane combustion cylinder with a solid-gas separation structure according to claim 5, characterized in that: The collecting assembly (6) also includes a lower mounting ring (606), a mounting docking groove (607), a docking block (608), an upper mounting ring (609) and a feed pipe (610). The ash collecting box (601) is provided with a lower mounting ring (606) in the middle of the upper end, and the upper end of the lower mounting ring (606) is provided with a mounting docking groove (607), and the mounting docking groove (607) is connected to the inside of the docking groove (607). At the same time, an upper mounting ring (609) is provided at the upper end of the docking block (608), and a feed pipe (610) is provided at the upper end of the upper mounting ring (609).

7. The silane combustion cylinder with a solid-gas separation structure according to claim 6, characterized in that: The water outlets (605) are evenly distributed inside the water collecting chamber (604), and the water outlets (605) are threadedly connected to the water collecting chamber (604).

8. The silane combustion cylinder with a solid-gas separation structure according to claim 6, characterized in that: The inner dimensions of the mounting docking groove (607) match the outer dimensions of the docking block (608), and the docking block (608) is connected to the lower mounting ring (606) via the mounting docking groove (607).

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