Quartz heating pipe series-parallel connection structure

Abstract

The utility model discloses a quartz heating pipe series-parallel connection structure which comprises bases, heating pipes are arranged on the sides, close to each other, of the two bases at equal intervals, water stop plug rings are arranged at the two ends of each heating pipe, cover plates are arranged at the two ends of each heating pipe, and the cover plates are connected with the bases in a matched mode. Fixing holes are formed in the outer wall of the cover plate at equal intervals and connected with the water stop plug ring in a matched mode. The utility model relates to the technical field of quartz heating pipes, and solves the problems that in the prior art, the requirements of high temperature rise, short time and large flow of an existing ultrapure water heater are met, the flow of a single quartz heating pipe is small, the use requirement of the ultrapure water heater is difficult to meet, and a plurality of quartz heating pipes need to be combined for use.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz heating tubes, in particular to a series-parallel structure of quartz heating tubes. Background Art

[0002] In the wet cleaning process of Pan Semiconductor, due to the increase in silicon wafer size and the need for increased production capacity, the volume of the cleaning tank has increased, and there are higher requirements for the preparation time of the cleaning tank. The current heating method of the heating wire wrapped in the PFA tube has low heat transfer efficiency and high energy consumption, and it is increasingly difficult to adapt to the market demand for high temperature rise and large flow. However, in the existing technology, in response to the current high temperature rise, short time, and large flow requirements of ultrapure water heaters, the flow rate of a single quartz heating tube is small, which is difficult to meet the use requirements of ultrapure water heaters, and multiple quartz heating tubes need to be used in combination. Summary of the invention

[0003] In view of the shortcomings of the prior art, the utility model provides a series-parallel structure of quartz heating tubes, which solves the problem in the prior art that, in response to the current requirements of high temperature rise, short time and large flow of ultrapure water heaters, the flow of a single quartz heating tube is small and it is difficult to meet the use requirements of ultrapure water heaters, and multiple quartz heating tubes need to be used in combination.

[0004] To achieve the above-mentioned purpose, the utility model is implemented through the following technical scheme: a quartz heating tube series-parallel structure, including a base, two heating tubes are equidistantly arranged on the side where the two bases are close to each other, water stop plug rings are arranged at both ends of the heating tubes, and cover plates are arranged at both ends of the heating tubes, the cover plates are cooperatively connected with the base, and the outer wall of the cover plates is equidistantly arranged with fixing holes, and the fixing holes are cooperatively connected with the water stop plug rings.

[0005] Preferably, a first liquid inlet is provided on one side of the base located at the bottom, a first liquid outlet is provided on the other side of the base located at the bottom, partition blocks are provided on both sides of the top of the base located at the bottom, and a partition block is provided at the bottom of the base located at the top, and the partition block is connected with the cover plate.

[0006] Preferably, a second liquid inlet is formed on an outer wall of the base at the bottom, and a second liquid outlet is formed on an outer wall of the base at the top.

[0007] Preferably, closing blocks are equidistantly arranged on one side of the base close to the cover plate, and the closing blocks are cooperatively connected to the cover plate. Connecting rods are inserted at both ends of the base, and the connecting rods pass through the closing block and the cover plate respectively. Both ends of the connecting rods are threadedly connected with fastening nuts, and the fastening nuts are cooperatively connected to the base.

[0008] Preferably, both ends of one side of the cover plate close to the base are provided with limiting blocks, and the limiting blocks are cooperatively connected with the closing blocks.

[0009] The utility model provides a quartz heating tube series-parallel structure. It has the following beneficial effects: the quartz heating tube series-parallel structure, through the cooperation between the base, the cover plate, the heating tube, the water stop ring and the fixing hole, by fixing multiple groups of heating tubes, and forming a liquid circulation channel between the base and the cover plate, multiple groups of heating tubes can heat the liquid at the same time, by using multiple groups of heating tubes in parallel, the flow rate of the heated liquid can be increased, and by separating the liquid circulation channel, multiple groups of heating tubes can be used in series, which can quickly increase the temperature of the liquid and shorten the time required for liquid heating. By using multiple groups of heating tubes in series and parallel, the use requirements of ultrapure water heaters for high temperature rise, short time and large flow can be met.

[0010] A series structure of quartz heating tubes is formed by the cooperation among the base, the cover plate, the heating tube, the water stop ring, the first liquid inlet, the first liquid outlet and the partition block. The liquid flow channel is separated by the partition block, so that multiple groups of heating tubes are connected in series, so that the liquid can be heated by each heating tube in turn, and the liquid can reach a higher temperature in a short time. In this way, the multiple groups of heating tubes connected in series can quickly increase the temperature of the liquid and shorten the time required for heating the liquid.

[0011] A parallel structure of quartz heating tubes is formed by the cooperation between the base, the cover plate, the heating tube, the water stop ring, the second liquid inlet and the second liquid outlet. Both ends of the multiple groups of heating tubes are connected to the liquid flow channel. The liquid is input into the parallel structure of the quartz heating tubes through the second liquid inlet, so that the multiple groups of heating tubes in parallel can heat the liquid at the same time, thereby increasing the flow rate of the heated liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic diagram of the serial structure of the utility model;

[0013] Figure 2 It is a schematic diagram of the parallel structure of the utility model.

[0014] In the figure: 1. base, 2. cover plate, 3. heating tube, 4. water stop ring, 5. first liquid inlet, 6. first liquid outlet, 7. partition block, 8. second liquid inlet, 9. second liquid outlet, 10. support block, 11. connecting rod, 12. fastening nut, 13. limit block, 14. fixing hole. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0016] In the prior art, in view of the current requirements of high temperature rise, short time and large flow rate of ultrapure water heaters, the flow rate of a single quartz heating tube is relatively small, which is difficult to meet the use requirements of ultrapure water heaters, and multiple quartz heating tubes need to be used in combination.

[0017] In view of this, the utility model provides a series-parallel structure of quartz heating tubes, which, through the cooperation among the base, the cover plate, the heating tubes, the water stop ring and the fixing holes, fixes multiple groups of heating tubes, and forms a liquid circulation channel between the base and the cover plate, so that the multiple groups of heating tubes can heat the liquid at the same time, and the flow rate of the heated liquid can be increased by using the multiple groups of heating tubes in parallel, and the liquid circulation channel can be separated so that the multiple groups of heating tubes can be used in series, which can quickly increase the temperature of the liquid and shorten the time required for heating the liquid. By using the multiple groups of heating tubes in series and parallel, the use requirements of the ultrapure water heater for high temperature rise, short time and large flow can be met.

[0018] Through the personnel in this field, all the electrical components in this case are connected to their corresponding power supplies through wires, and appropriate controllers and encoders should be selected according to actual conditions to meet the control requirements. The specific connection and control sequence should refer to the following working principle, and the electrical connection between the electrical components is completed in the order of working in sequence. The detailed connection means are well-known technologies in this field. The following mainly introduces the working principles and processes, and no longer explains the electrical control.

[0019] Depend on Figure 1-2 It can be seen that a quartz heating tube series-parallel structure includes a base 1, the base 1 is used to fix the quartz heating tube, and a heating tube 3 is equidistantly arranged on the side where the two bases 1 are close to each other. The heating tube 3 is the body of the quartz heating tube. Both ends of the heating tube 3 are provided with a water stop plug ring 4, and the water stop plug ring 4 is used to seal and limit the connection between the heating tube 3 and the cover plate 2. Both ends of the heating tube 3 are provided with a cover plate 2, and the cover plate 2 is used to limit the heating tube 3, and a liquid transmission channel is formed through the chamber between the base 1 and the cover plate 2. The cover plate 2 is connected with the base 1, and the outer wall of the cover plate 2 is equidistantly provided with fixing holes 14, and the fixing holes 14 are connected with the water stop plug ring 4.

[0020] In the specific implementation process, it is worth pointing out that the base 1 is used to fix the quartz heating tube, and a liquid inlet and a liquid outlet are opened according to the use requirements of the quartz heating tube in series and parallel. The heating tube 3 is the body of the quartz heating tube, and the cover plate 2 is used to limit the heating tube 3, and a liquid transmission channel is formed through the chamber between the base 1 and the cover plate 2. The water stop plug ring 4 is a plug ring made of silicone or fluororubber, which is used to seal and limit the connection between the heating tube 3 and the cover plate 2. Through the base 1, the cover plate 2, the heating tube 3, the water stop plug ring 4 and the fixing hole 14 By fixing the plurality of heating tubes 3 and forming a liquid circulation channel between the base 1 and the cover plate 2, the plurality of heating tubes 3 can heat the liquid at the same time. By using the plurality of heating tubes 3 in parallel, the flow rate of the heated liquid can be increased. The liquid circulation channel can be separated so that the plurality of heating tubes 3 can be used in series, which can quickly increase the temperature of the liquid and shorten the time required for heating the liquid. By using the plurality of heating tubes 3 in series and parallel, the use requirements of the ultrapure water heater for high temperature rise, short time and large flow rate can be met.

[0021] Furthermore, a first liquid inlet 5 is provided on one side of the base 1 at the bottom, a first liquid outlet 6 is provided on the other side of the base 1 at the bottom, both sides of the top of the base 1 at the bottom are provided with a partition block 7, and a partition block 7 is provided at the bottom of the base 1 at the top, and the partition block 7 is connected with the cover plate 2 in cooperation;

[0022] In the specific implementation process, it is worth pointing out that the series structure of the quartz heating tube is formed by the cooperation between the base 1, the cover plate 2, the heating tube 3, the water stopper ring 4, the first liquid inlet 5, the first liquid outlet 6 and the partition block 7. The liquid flow channel is separated by the partition block 7, so that multiple groups of heating tubes 3 are connected in series, and the liquid is input into the series structure of the quartz heating tube through the first liquid inlet 5. At the same time, the heated liquid is discharged through the first liquid outlet 6, so that the multiple groups of heating tubes 3 in series quickly increase the temperature of the liquid and shorten the time required for heating the liquid;

[0023] Furthermore, a second liquid inlet 8 is provided on the outer wall of the base 1 at the bottom, and a second liquid outlet 9 is provided on the outer wall of the base 1 at the top;

[0024] In the specific implementation process, it is worth pointing out that the parallel structure of the quartz heating tubes is formed by the cooperation between the base 1, the cover plate 2, the heating tube 3, the water stop ring 4, the second liquid inlet 8 and the second liquid outlet 9. Both ends of the multiple groups of heating tubes 3 are connected to the liquid flow channel. The liquid is input into the parallel structure of the quartz heating tubes through the second liquid inlet 8, so that the multiple groups of heating tubes 3 in parallel can heat the liquid at the same time, increasing the flow rate of the heated liquid;

[0025] Furthermore, a closing block 10 is equidistantly arranged on one side of the base 1 close to the cover plate 2, and a sealing rubber ring is arranged at the bottom of the closing block 10 to maintain a tight seal between the closing block 10 and the cover plate 2. The closing block 10 is cooperatively connected with the cover plate 2, and connecting rods 11 are inserted at both ends of the base 1. The connecting rods 11 pass through the closing block 10 and the cover plate 2 respectively, and fastening nuts 12 are threadedly connected at both ends of the connecting rod 11, and the fastening nuts 12 are cooperatively connected with the base 1;

[0026] In the specific implementation process, it is worth pointing out that a sealing rubber ring is provided at the bottom of the closing block 10 to maintain a tight seal between the closing block 10 and the cover plate 2. Through the cooperation among the base 1, the cover plate 2, the heating tube 3, the water stop ring 4, the closing block 10, the connecting rod 11 and the fastening nut 12, the base 1 is fastened by the fastening nut 12 to achieve the fixation between the base 1, the cover plate 2 and the heating tube 3, and the sealing between the closing block 10 and the cover plate 2, and the cover plate 2 and the heating tube 3 is maintained, and a sealed liquid flow channel is formed at both ends of the heating tube 3 to prevent liquid leakage;

[0027] Furthermore, both ends of the cover plate 2 close to the base 1 are provided with limit blocks 13, and the limit blocks 13 are connected with the closing block 10 in a coordinated manner;

[0028] In the specific implementation process, it is worth pointing out that through the cooperation between the base 1, the cover plate 2, the closing block 10 and the limiting block 13, the closing block 10 is limited by the limiting block 13, so that the connection between the base 1 and the cover plate 2 is more stable, and the sealing of the liquid flow channel is ensured;

[0029] Specifically, when using the series-parallel structure of the quartz heating tube, the connection method of the quartz heating tube is selected according to the use requirements. When the liquid temperature needs to be higher, the quartz heating tubes are used in series, the water stop ring 4 of the heating tube 3 is inserted into the fixing hole 14 of the cover plate 2, and the base 1 corresponding to the series quartz heating tube is selected. The bottom base 1 with the first liquid inlet 5 and the first liquid outlet 6 is selected, and the connecting rod 11 is inserted into the two ends of the bottom base 1, and the fastening nut 12 is screwed into the bottom end of the connecting rod 11. The connecting rod 11 is inserted into the mounting holes at both ends of the cover plate 2, and the corresponding top base is installed. 1 is placed on the top of the heating tube 3, the fastening nut 12 is screwed into the top of the connecting rod 11, and each fastening nut 12 is tightened to make the two connecting rods 11 and each group of heating tubes 3 remain parallel, and the first liquid inlet 5 and the first liquid outlet 6 are connected to the liquid transmission pipeline respectively to complete the installation of the quartz heating tube series structure. The liquid is input from the first liquid inlet 5, and the liquid is heated by each heating tube 3 in turn, and is output through the first liquid outlet 6, so that the heated liquid can obtain a higher temperature in a short time. When the liquid needs a larger flow rate, the quartz heating tube is connected. For parallel use, select the base 1 corresponding to the parallel quartz heating tube, adopt the same fixing method as the series structure, fix the base 1 corresponding to the parallel connection with the multiple groups of heating tubes 3, connect the second liquid inlet 8 and the second liquid outlet 9 with the liquid transmission pipeline respectively, and complete the installation of the parallel structure of the quartz heating tube. The liquid is input from the second liquid inlet 8, so that the liquid passes through each heating tube 3 at the same time for heating, and is output through the second liquid outlet 9, so that the heated liquid can obtain a larger flow output in a short time. Through the base 1, the cover plate 2, the heating tube 3, the water stop ring 4 and the fixing The holes 14 cooperate with each other, fix the multiple groups of heating tubes 3, and form a liquid circulation channel between the base 1 and the cover plate 2, so that the multiple groups of heating tubes 3 can heat the liquid at the same time. By using the multiple groups of heating tubes 3 in parallel, the flow rate of the heated liquid can be increased, and the liquid circulation channel can be separated so that the multiple groups of heating tubes 3 can be used in series, which can quickly increase the temperature of the liquid and shorten the time required for heating the liquid. By using the multiple groups of heating tubes 3 in series and parallel, the requirements of the ultrapure water heater for high temperature rise, short time and large flow can be met.

[0030] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions. The sentence "including an element defined by... does not exclude the existence of other identical elements in the process, method, article or device including the element".

[0031] In the present utility model, unless otherwise clearly stipulated and limited, the terms such as "installation", "setting", "connection", "fixation" and "screw-on" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the utility model according to the specific circumstances.

[0032] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A quartz heating tube series-parallel structure, comprising a base (1), characterized in that: A heating tube (3) is equidistantly arranged on one side of the two bases (1) close to each other, and a water stop ring (4) is arranged at both ends of the heating tube (3). A cover plate (2) is arranged at both ends of the heating tube (3), and the cover plate (2) is connected to the base (1). The outer wall of the cover plate (2) is equidistantly arranged with fixing holes (14), and the fixing holes (14) are connected to the water stop ring (4).

2. The quartz heating tube series-parallel structure according to claim 1, characterized in that: A first liquid inlet (5) is provided on one side of the base (1) at the bottom, a first liquid outlet (6) is provided on the other side of the base (1) at the bottom, partition blocks (7) are provided on both sides of the top of the base (1) at the bottom, and a partition block (7) is provided at the bottom of the base (1) at the top, and the partition block (7) is connected to the cover plate (2).

3. The quartz heating tube series-parallel structure according to claim 1, characterized in that: The outer wall of the base (1) at the bottom is provided with a second liquid inlet (8), and the outer wall of the base (1) at the top is provided with a second liquid outlet (9).

4. The quartz heating tube series-parallel structure according to claim 1, characterized in that: A closing block (10) is equidistantly arranged on one side of the base (1) close to the cover plate (2), and the closing block (10) is connected to the cover plate (2). Connecting rods (11) are inserted at both ends of the base (1), and the connecting rods (11) respectively penetrate the closing block (10) and the cover plate (2). Both ends of the connecting rod (11) are threadedly connected with fastening nuts (12), and the fastening nuts (12) are connected to the base (1).

5. The quartz heating tube series-parallel structure according to claim 4, characterized in that: Limiting blocks (13) are provided at both ends of one side of the cover plate (2) close to the base (1), and the limiting blocks (13) are cooperatively connected with the closing block (10).

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