Quartz furnace device

Abstract

The utility model relates to a quartz furnace device which comprises a cabinet body and a heat exchange assembly, the cabinet body comprises a first containing cavity and a second containing cavity, the first containing cavity and the second containing cavity are adjacently arranged, and the first containing cavity is used for containing a quartz furnace; the heat exchange assembly is arranged in the second storage cavity and comprises a box body, a coil pipe, a liquid inlet pipe and a liquid outlet pipe, and ventilation holes are formed in the side, adjacent to the first storage cavity, of the box body so that the first storage cavity can communicate with the box body; the coil is arranged in the box body, one end of the liquid inlet pipe is communicated with one end of the coil, the other end of the liquid inlet pipe is communicated with the cooling medium supply unit, and one end of the liquid outlet pipe is communicated with the other end of the coil; the other side, opposite to the side provided with the ventilation holes, of the box body is provided with an air blowing component. According to the device provided by the utility model, hot air generated by the quartz furnace in the first accommodating cavity enters the box body of the second accommodating cavity through the ventilation holes, is cooled through the coil pipe and is blown out through the blowing component, so that a heat dissipation effect is achieved; the occupied area is small.

Description

Technical Field

[0001] The utility model relates to a quartz furnace device. Background Art

[0002] The existing horizontal furnaces in the semiconductor industry have high temperatures during production and are stacked, so heat is conducted from bottom to top. The existing technical solution is to install a finned tube radiator on top, which has the following problems: large size, large space occupation, and poor heat dissipation effect. Utility Model Content

[0003] The utility model aims to provide a quartz furnace device to improve the heat dissipation effect.

[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0005] A quartz furnace device comprises a cabinet and a heat exchange component, wherein the cabinet comprises a first storage chamber and a second storage chamber, wherein the first storage chamber and the second storage chamber are arranged adjacent to each other, and wherein the first storage chamber is used to accommodate the quartz furnace; wherein the heat exchange component is arranged in the second storage chamber, and wherein the heat exchange component comprises a box, a coil, a liquid inlet pipe, and a liquid outlet pipe, wherein ventilation holes are provided on one side of the box adjacent to the first storage chamber so that the first storage chamber and the box are connected; wherein the coil is arranged in the box, wherein one end of the liquid inlet pipe is connected to one end of the coil, and the other end of the liquid inlet pipe is connected to a cooling medium supply unit, and one end of the liquid outlet pipe is connected to the other end of the coil; wherein a blowing component is provided on the other side of the box opposite to the side on which the ventilation holes are arranged.

[0006] In some embodiments, the liquid inlet pipe includes a first pipe and a second pipe, the first pipe is connected to one end of the coil, one end of the second pipe is connected to the first pipe, and the other end of the second pipe is connected to the cooling medium supply unit; the second pipe is provided with a liquid inlet valve.

[0007] In some embodiments, the liquid outlet pipe includes a third pipe and a fourth pipe, the third pipe is connected to the other end of the coil, and one end of the fourth pipe is connected to the third pipe; a liquid outlet valve is provided on the fourth pipe.

[0008] In some embodiments, the device further comprises a shell, wherein the shell is located in the housing, and the coil is at least partially located in the shell.

[0009] In some embodiments, a collecting tray is disposed in the box body, and the collecting tray has a receiving space with an opening at the top and other closed surfaces, and the lower end portion of the shell is located in the receiving space of the collecting tray.

[0010] In some embodiments, the device further comprises a drain pipe, one end of which passes through the collection tray and is connected to the storage space of the collection tray, and the other end of which extends to the outside of the box.

[0011] In some embodiments, one side of the box body on which the blowing component is provided includes a first side panel and a second side panel that are relatively arranged, the first side panel is connected to the second side panel, the first side panel is closer to the interior of the box body than the second side panel, and the first side panel is provided with a long strip through hole; the second side panel is provided with a plurality of openings, the openings are connected with the through holes, and the openings correspond one-to-one with the blowing components.

[0012] In some embodiments, a protective net is provided at the opening, and the protective net includes a plurality of annular rings and a plurality of reinforcing ribs, the plurality of annular rings are arranged concentrically with the opening, and the reinforcing ribs are arranged radially along the opening.

[0013] In some embodiments, a support member is provided on one side of the second receiving chamber where the blowing member is provided, and the support member has an arc-shaped surface for supporting the blowing member.

[0014] In some embodiments, the box body is in a cubic shape, and the box body includes a top plate, a bottom plate, a front plate and a back plate. The top plate includes a top surface and two first extension surfaces, and the two first extension surfaces are respectively arranged at opposite ends of the top surface, and the first extension surface is perpendicular to the top surface; the bottom plate includes a bottom surface and two second extension surfaces, and the two second extension surfaces are respectively arranged at opposite ends of the bottom surface, and the second extension surfaces are perpendicular to the bottom surface. The top surface and the bottom surface are arranged opposite to each other, one first extension surface and one second extension surface are located on the same side of the box body and are connected to form the left side surface of the box body, and the other first extension surface and the other second extension surface are located on the other side of the box body and are connected to form the right side surface of the box body. One of the front plate and the back plate of the box body is provided with the ventilation hole, and the other is provided with the blowing component.

[0015] Due to the application of the above technical solution, the utility model has the following advantages compared with the prior art:

[0016] The quartz furnace device provided by the utility model is provided with a first storage chamber and a second storage chamber adjacent to each other. The first storage chamber is used to accommodate the quartz furnace, and the second storage chamber is used to accommodate the heat exchange component. The hot air generated by the quartz furnace in the first storage chamber enters the box body of the second storage chamber through the ventilation hole, is cooled by the coil, and then the hot air is blown out by the blowing component, which plays a cooling role and achieves the heat dissipation effect. Under the same volume, the heat dissipation efficiency is high and the space occupied is small. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Attached Figure 1 A structural diagram of a quartz furnace device provided by the utility model from a first perspective;

[0018] Attached Figure 2 A structural diagram of a quartz furnace device provided by the utility model from a second viewing angle;

[0019] Attached Figure 3 A structural diagram of the quartz furnace device provided by the utility model from a third viewing angle (ventilation holes can be seen);

[0020] Attached Figure 4 A structural diagram of a heat exchange component of a quartz furnace device provided by the utility model from a first perspective;

[0021] Attached Figure 5 A structural diagram of a heat exchange component of a quartz furnace device provided by the utility model from a second perspective;

[0022] Attached Figure 6 A structural diagram of a heat exchange component of a quartz furnace device provided by the utility model from a third perspective;

[0023] Attached Figure 7 A structural diagram of a shell of a heat exchange component of a quartz furnace device provided by the utility model;

[0024] Attached Figure 8 A structural diagram of the blowing component of the quartz furnace device provided by the utility model;

[0025] Attached Fig. 9 A structural diagram of the top plate of the box body of the quartz furnace device provided by the utility model;

[0026] Attached Fig.10 A structural diagram of the bottom plate and blowing components of the box of the quartz furnace device provided by the utility model;

[0027] Attached Fig.11 A structural diagram of the bottom plate of the box body of the quartz furnace device provided by the utility model;

[0028] Attached Fig.12 A structural diagram of the housing and collecting plate of the quartz furnace device provided by the utility model (without the front plate);

[0029] Attached Fig.13 This is a structural diagram of the shell and collecting plate of the quartz furnace device provided by the utility model.

[0030] In the above attached figure:

[0031] 1- first storage cavity;

[0032] 2-box body, 21-first side panel, 22-second side panel, 23-top surface, 24-first extension surface, 25-bottom surface, 26-second extension surface, 27-ventilation hole, 28-folding plate, 29-front plate;

[0033] 3-coil; 4-liquid inlet pipe, 41-first pipe, 42-second pipe; 5-liquid outlet pipe, 51-third pipe, 52-fourth pipe; 6-liquid inlet valve; 7-liquid outlet valve; 8-shell; 9-liquid discharge pipe; 10-annular ring; 11-reinforcement rib; 12-blowing component; 13-collecting tray; 14-support; 15-column; 16-support plate. DETAILED DESCRIPTION

[0034] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0036] See also Figures 1 to 13 The quartz furnace device shown includes a cabinet and a heat exchange component. The cabinet is a cube and includes a first receiving chamber 1 and a second receiving chamber. The first receiving chamber 1 and the second receiving chamber are adjacently arranged. The first receiving chamber 1 is used to accommodate the quartz furnace.

[0037] The heat exchange component is arranged in the second storage cavity, and the heat exchange component includes a box body 2, a shell 8, a coil 3, a liquid inlet pipe 4, and a liquid outlet pipe 5. A ventilation hole 27 is opened on the side of the box body 2 adjacent to the first storage cavity 1 so that the first storage cavity 1 and the box body 2 are connected; the coil 3 is arranged in the box body 2, the shell 8 is located in the box body 2, and the coil 3 is at least partially located in the shell 8, that is, the coil 3 can partially extend out of the shell 8; one end of the liquid inlet pipe 4 is connected to one end of the coil 3, and the other end of the liquid inlet pipe 4 is connected to the cooling medium supply unit, and the cooling medium supply unit is used to transport cooling medium (such as refrigerant) to the coil 3, and one end of the liquid outlet pipe 5 is connected to the other end of the coil 3; a blowing component 12 is arranged on the other side of the box body 2 opposite to the side where the ventilation hole 27 is set.

[0038] The hot air generated by the quartz furnace in the first storage chamber 1 enters the box body 2 of the second storage chamber through the ventilation holes 27, is cooled by the cooling medium in the coil 3, and is then blown out through the blowing component 12, which can cool the shell 8 to achieve a heat dissipation effect.

[0039] See also Figure 7 The liquid inlet pipe 4 includes a first pipe 41 and a second pipe 42. The first pipe 41 is connected to one end of the coil 3, and one end of the second pipe 42 is connected to the first pipe 41. The first pipe 41 and the second pipe 42 are arranged vertically, and the other end of the second pipe 42 is connected to the cooling medium supply unit. The first pipe 41 is connected to one end of the coil 3 extending out of the shell 8. The first pipe 41 is arranged vertically, and the second pipe 42 is arranged horizontally. The other end of the second pipe 42 can extend out of the box 2 to facilitate communication with the cooling medium supply unit. The second pipe 42 is provided with a liquid inlet valve 6 to facilitate control of the on and off of the second pipe 42.

[0040] See also Figure 7 The liquid outlet pipe 5 includes a third pipe 51 and a fourth pipe 52. The third pipe 51 is connected to the other end of the coil 3. One end of the fourth pipe 52 is connected to the third pipe 51. The other end of the fourth pipe 52 is a liquid outlet. The third pipe 51 can be connected to the other end of the coil 3 extending out of the housing 8. The third pipe 51 is vertically arranged, and the fourth pipe 52 is horizontally arranged. The other end of the fourth pipe 52 can extend out of the box 2 to facilitate liquid discharge. The fourth pipe 52 is provided with a liquid outlet valve 7 to facilitate the on-off control of the fourth pipe 52.

[0041] The coil 3 is distributed in a serpentine manner. The cooling medium enters the coil 3 through the second tube 42 and the first tube 41, and is then discharged through the coil 3, the third tube 51, and the fourth tube 52, thereby maintaining a circulation flow.

[0042] See also Figure 8 A support member 14 is provided on one side of the second receiving chamber where the blowing component 12 is provided. The support member 14 is connected to the side through a fastener. The support member 14 has an arcuate surface for supporting the blowing component 12. The blowing component 12 is cylindrical, and the arcuate surface of the support member 14 is adapted to the outer periphery of the blowing component 12.

[0043] The shell 8 of the main body is a cube; the box body 2 is a cube, and the box body 2 includes a top plate, a bottom plate, a front plate 29 and a rear plate. The top plate includes a top surface 23 and two first extension surfaces 24, and the two first extension surfaces 24 are respectively arranged at opposite ends of the top surface 23, and the first extension surfaces 24 are perpendicular to the top surface 23; the bottom plate includes a bottom surface 25 and two second extension surfaces 26, and the two second extension surfaces 26 are respectively arranged at opposite ends of the bottom surface 25, and the second extension surfaces 26 are perpendicular to the bottom surface 25. The top surface 23 and the bottom surface 25 are arranged opposite to each other, one first extension surface 24 and one second extension surface 26 are located on the same side of the box body 2 and are connected to form the left side of the box body 2, and the other first extension surface 24 and the other second extension surface 26 are located on the other same side of the box body 2 and are connected to form the right side of the box body 2. One of the front plate 29 and the rear plate of the box body 2 is provided with a ventilation hole 27, and the other is provided with a blowing component 12. Such an arrangement can enhance the strength of the housing 2 , enhance the strength for installing the blowing component 12 , and facilitate assembly and disassembly of the housing 2 .

[0044] One side of the box body 2 on which the blowing component 12 is arranged includes a first side panel 21 and a second side panel 22. The first side panel 21 and the second side panel 22 are arranged opposite to each other. The first side panel 21 is closer to the interior of the box body 2 than the second side panel 22. A long strip through hole is opened on the first side panel 21. A folding plate 28 is arranged on the edge of the through hole of the inner side wall of the first side panel 21 facing the interior of the box body 2. The folding plate 28 is located inside the box body 2. The folding plate 28 is perpendicular to the first side panel 21. The long strip through hole is square. There are four folding plates 28, and the four folding plates 28 are arranged around the four sides of the through hole; the second side panel 22 is arranged on the side of the first side panel 21 away from the interior of the box body 2. The first side panel 21 and the second side panel 22 are connected by fasteners. The first side panel 21 and the second side panel 22 are arranged to enhance the strength of installing the blowing component 12.

[0045] The second side plate 22 is provided with a plurality of openings, which correspond to the blowing components 12 one by one. The blowing components 12 can be exposed at the openings, and heat can be dissipated through the openings. A protective net is provided at the openings, and the openings are circular. The protective net includes a plurality of annular rings 10 and a plurality of reinforcing ribs 11. The plurality of annular rings 10 are concentrically arranged, and the reinforcing ribs 11 are arranged along the radial direction of the openings to enhance the strength of the protective net and better protect the blowing components 12.

[0046] In a preferred embodiment, a collecting tray 13 and a drain pipe 9 are provided in the housing 2. The collecting tray 13 is located on the bottom plate of the housing 2. The collecting tray 13 has a storage space with an open top and other closed surfaces. The housing 8 is partially located in the storage space of the collecting tray 13, that is, the collecting tray 13 is located under the housing 8. One end of the drain pipe 9 passes through the collecting tray 13 and is connected to the storage space of the collecting tray 13. The other end of the drain pipe 9 extends to the outside of the housing 2. A collecting tank can be provided below the other end of the drain pipe 9 to collect condensed water. The condensed water generated by the housing 8 and the coil 3 during condensation gathers in the collecting tray 13, and flows out through the drain pipe 9 to the collecting tank for collection.

[0047] See also Figure 12-13 A side surface of the collecting tray 13 that is perpendicular to the bottom surface 25 is higher than the other side surfaces, and the side surface is connected to the adjacent side surface of the box body 2 .

[0048] The blowing component 12 in this example is a fan; a plurality of blowing components 12 may be provided, and the plurality of blowing components 12 are sequentially distributed along the length direction of the side of the box body 2 to improve the heat dissipation effect.

[0049] In some embodiments, the first storage cavity 1 and the second storage cavity both include a frame, which includes a plurality of columns 15, horizontal columns and support plates 16, enclosing a square cavity with a hollow space. The ventilation hole 27 of the first storage cavity 1 is located at the upper end of one side of the cavity (either the left side, the right side, the front side, or the rear side), and the second storage cavity is located at the upper part of the cabinet.

[0050] The quartz furnace device of this example is provided with adjacent first and second storage chambers. The first storage chamber 1 is used to accommodate the quartz furnace, and the second storage chamber is used to accommodate the heat exchange component. The hot air generated by the quartz furnace in the first storage chamber enters the box body of the second storage chamber through the ventilation hole, is cooled by the cooling medium in the coil, and then is blown out by the blowing component, which plays a cooling role and achieves the heat dissipation effect. The heat dissipation efficiency is high under the same volume and the space occupied is small.

[0051] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A quartz furnace device, characterized in that: It includes a cabinet and a heat exchange component. The cabinet includes a first storage chamber and a second storage chamber. The first storage chamber and the second storage chamber are arranged adjacent to each other. The first storage chamber is used to accommodate a quartz furnace. The heat exchange component is arranged in the second storage chamber. The heat exchange component includes a box, a coil, a liquid inlet pipe, and a liquid outlet pipe. A ventilation hole is provided on one side of the box adjacent to the first storage chamber so that the first storage chamber and the box are connected. The coil is arranged in the box, one end of the liquid inlet pipe is connected to one end of the coil, the other end of the liquid inlet pipe is connected to a cooling medium supply unit, and one end of the liquid outlet pipe is connected to the other end of the coil. A blowing component is provided on the other side of the box opposite to the side where the ventilation hole is arranged.

2. The quartz furnace device according to claim 1, characterized in that: The liquid inlet pipe includes a first pipe and a second pipe. The first pipe is connected to one end of the coil, one end of the second pipe is connected to the first pipe, and the other end of the second pipe is connected to the cooling medium supply unit. The second pipe is provided with a liquid inlet valve.

3. The quartz furnace device according to claim 2, characterized in that: The liquid outlet pipe comprises a third pipe and a fourth pipe. The third pipe is connected to the other end of the coil, and one end of the fourth pipe is connected to the third pipe. A liquid outlet valve is arranged on the fourth pipe.

4. The quartz furnace device according to claim 1, characterized in that: The device further comprises a shell, wherein the shell is located in the box, and the coil is at least partially located in the shell.

5. The quartz furnace device according to claim 4, characterized in that: A collecting tray is arranged in the box body, and the collecting tray has a containing space with an opening at the top and other closed surfaces, and the lower end portion of the shell is located in the containing space of the collecting tray.

6. The quartz furnace device according to claim 5, characterized in that: The device further comprises a drain pipe, one end of which passes through the collecting tray and communicates with the accommodating space of the collecting tray, and the other end of which extends to the outside of the box.

7. The quartz furnace device according to claim 1, characterized in that: The side of the box body where the blowing component is arranged includes a first side panel and a second side panel which are arranged opposite to each other. The first side panel is connected to the second side panel. The first side panel is closer to the interior of the box body than the second side panel. The first side panel is provided with a long strip through hole. The second side panel is provided with a plurality of openings which are connected with the through holes and correspond one by one to the blowing components.

8. The quartz furnace device according to claim 7, characterized in that: A protective net is arranged at the opening, and the protective net comprises a plurality of annular rings and a plurality of reinforcing ribs. The plurality of annular rings are arranged concentrically with the opening, and the reinforcing ribs are arranged radially along the opening.

9. The quartz furnace device according to claim 1, characterized in that: A support member is provided on one side of the second receiving chamber where the blowing member is provided, and the support member has an arc-shaped surface for supporting the blowing member.

10. The quartz furnace device according to claim 1, characterized in that: The box body is in a cubic shape and comprises a top plate, a bottom plate, a front plate and a back plate. The top plate comprises a top surface and two first extension surfaces, the two first extension surfaces are respectively arranged at opposite ends of the top surface, and the first extension surface is perpendicular to the top surface; the bottom plate comprises a bottom surface and two second extension surfaces, the two second extension surfaces are respectively arranged at opposite ends of the bottom surface, the second extension surfaces are perpendicular to the bottom surface, the top surface is arranged opposite to the bottom surface, one first extension surface and one second extension surface are located on the same side of the box body and are connected to form the left side surface of the box body, the other first extension surface and the other second extension surface are located on the other side of the box body and are connected to form the right side surface of the box body, one of the front plate and the back plate of the box body is provided with the ventilation hole, and the other is provided with the blowing component.

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