Protection device for sintering furnace with long rotating target

Abstract

The utility model relates to the technical field of target material production, in particular to a long rotating target sintering furnace protection device which comprises a sintering furnace, a furnace bed is arranged at the bottom in the sintering furnace, a fixing column is installed on the furnace bed, a beam net is installed at the upper end of the fixing column, a plurality of through holes are formed in the surface of the beam net, and a long rotating target is placed on the furnace bed. The upper end of the long rotating target penetrates through the through hole in the cross beam net. The cross beam net is attached to the upper end of the long rotating target, in the sintering process, when the target material is bent abnormally due to sintering, the long rotating target can abut against the cross beam net, the cross beam net can well prevent the long rotating target from toppling over in a sintering furnace, and therefore the target material sintering effect is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of target material production, in particular to a protective device for a long rotary target sintering furnace. Background Art

[0002] ITO target belongs to indium tin composite oxide ceramics, which is an important optoelectronic functional material. It is often used as a magnetron sputtering target to prepare transparent conductive films on glass, plastic and other substrate materials, and is used to produce flat-panel display devices such as liquid crystal displays and touch screens. With people's requirements for TV display screens, the display industry has an increasing demand for large-sized rotary targets. Therefore, the sintering of long-sized rotary targets is an inevitable trend in the development of target materials. However, due to the length of long rotary targets, they are prone to bending during the sintering process, causing the target to fall over, causing serious damage to the sintering furnace electric heating, thermocouples, cavities, etc., resulting in high maintenance costs and affecting production. Utility Model Content

[0003] In view of this, the purpose of the utility model is to provide a long rotary target sintering furnace protection device to solve the problem of bending and tilting of the long target during the sintering process.

[0004] Based on the above purpose, the utility model provides a long rotating target sintering furnace protection device, including a sintering furnace, a furnace bed is provided at the bottom of the sintering furnace, a fixed column is installed on the furnace bed, a crossbeam net is installed on the upper end of the fixed column, a plurality of through holes are opened on the surface of the crossbeam net, the long rotating target is placed on the furnace bed, and the upper end of the long rotating target passes through the through holes on the crossbeam net.

[0005] A further improvement is that the height of the crossbeam mesh is set at a position of 60% along the length direction of the long rotating target.

[0006] A further improvement is that the crossbeam mesh and the fixed columns are fixed by bolts, and the fixed columns and the furnace bed are fixed by bolts.

[0007] A further improvement is that an elastic protrusion is provided in the through hole.

[0008] A further improvement is that the fixing column is made of an aluminum oxide material and has a telescopic adjustment structure.

[0009] A further improvement is that the crossbeam mesh is made of silicon carbide material.

[0010] The beneficial effects of the utility model are as follows: a crossbeam net is arranged above the furnace bed, a long rotating target is placed on the furnace bed, and the upper end passes through the crossbeam net, and the upper end of the long rotating target is limited by the crossbeam net. During the sintering process, when the target material is abnormally bent due to sintering, the target material can lean on the crossbeam net, and the crossbeam net limits the target material. The crossbeam net can well prevent the target material from tipping over in the sintering furnace, effectively reducing the problem of bending and tilting of the target material, effectively ensuring the sintering effect of the target material, and ensuring the product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0012] Figure 1 It is a schematic diagram of the structure of the utility model;

[0013] Figure 2 It is a schematic diagram of the beam network structure;

[0014] The markings in the figure are: 1, sintering furnace; 2, furnace bed; 3, fixed column; 4, crossbeam mesh; 5, perforation; 6, elastic protrusion. DETAILED DESCRIPTION

[0015] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0016] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0017] like Figure 1 , Figure 2As shown, this embodiment provides a long rotating target sintering furnace protection device, including a sintering furnace 1, which is a prior art and is not particularly limited here; a furnace bed 2 is provided at the bottom of the sintering furnace 1, a fixed column 3 is installed on the furnace bed 2, a beam mesh 4 is installed on the upper end of the fixed column 3, the beam mesh 4 is made of silicon carbide material, and a plurality of through holes 5 are opened on the surface of the beam mesh 4, the long rotating target is placed on the furnace bed 2, and the upper end of the long rotating target passes through the through holes 5 on the beam mesh 4.

[0018] An elastic protrusion 6 is provided in the through hole 5. By providing the elastic protrusion 6, the gap between the target material and the inner wall of the through hole 5 is reduced, thereby ensuring effective positioning of the target material.

[0019] The crossbeam net 4 and the fixed column 3 are fixed by bolts, and the fixed column 3 and the hearth 2 are fixed by bolts. The bolt fixation facilitates installation and disassembly.

[0020] The fixing column 3 is made of alumina material and is a telescopic adjustment structure. The height position of the crossbeam net 4 is adjusted by telescoping the fixing column 3 .

[0021] The height of the crossbeam net 4 is set at 60% of the length of the long rotating target. By adjusting the height of the crossbeam net 4, it is ensured that the crossbeam net 4 can effectively support and limit the upper end of the target material to prevent the upper end of the target material from tipping and bending.

[0022] Working principle: Load the target material into the furnace in the normal way, install the target material on the furnace bed 2, confirm the straight length of the target material, determine the installation position of the crossbeam net 4, install the crossbeam net 4 and the fixing column 3 on the furnace bed 2 in sequence, and the upper end of the target material passes through the through hole 5 on the crossbeam net 4; during the sintering process, when the target material is abnormally bent due to sintering, the crossbeam net 4 can well prevent the target material from tipping over in the sintering furnace 1, thereby ensuring the stability of sintering.

[0023] A person skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention is limited to these examples; under the concept of the present invention, the technical features in the above embodiments or different embodiments may also be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity. Any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A long rotary target sintering furnace protection device, comprising a sintering furnace (1), wherein a furnace bed (2) is provided at the bottom of the sintering furnace (1), characterized in that: A fixed column (3) is installed on the furnace bed (2), a beam net (4) is installed on the upper end of the fixed column (3), a plurality of through holes (5) are opened on the surface of the beam net (4), and a long rotating target is placed on the furnace bed, and the upper end of the long rotating target passes through the through holes (5) on the beam net (4).

2. The long rotary target sintering furnace protection device according to claim 1, characterized in that: The height of the crossbeam net (4) is set at 60% of the length of the long rotating target.

3. The long rotary target sintering furnace protection device according to claim 1, characterized in that: The crossbeam mesh (4) and the fixed column (3) are fixed by bolts, and the fixed column (3) and the furnace bed (2) are fixed by bolts.

4. The long rotary target sintering furnace protection device according to claim 1, characterized in that: An elastic protrusion (6) is arranged in the through hole (5).

5. The long rotary target sintering furnace protection device according to claim 1, characterized in that: The fixing column (3) is made of an aluminum oxide material and is a telescopic adjustment structure.

6. The long rotary target sintering furnace protection device according to claim 1, characterized in that: The crossbeam net (4) is made of silicon carbide material.

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