Composite cooling structure of diffusion furnace

Abstract

The utility model discloses a diffusion furnace compound type cooling structure, which comprises a diffusion furnace body and a cooling mechanism, the diffusion furnace body comprises a plurality of combined type ceramic fiber layers, the inner sides of the plurality of combined type ceramic fiber layers are all provided with heating wires, and the heating wires are arranged in the diffusion furnace body. The multiple combined ceramic fiber layers are sequentially installed together one by one to form a furnace-shaped structure, the integrated ceramic fiber layer is installed on the outer side of the combined ceramic fiber layers, and the protective shell is installed on the outer side of the integrated ceramic fiber layer; the cooling mechanism comprises an airflow channel and a cooling water pipe. According to the composite cooling mechanism composed of the airflow channel and the cooling pipe, the inside and the outside of the diffusion furnace can be cooled by utilizing the dual functions of airflow and cooling water, the cooling efficiency of the cooling mechanism is improved, the energy consumption is reduced, and meanwhile, the cooling mechanism is simple in structural design, so that the cooling mechanism is simple to maintain.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor heating furnaces, and in particular relates to a composite cooling structure of a diffusion furnace. Background Art

[0002] The diffusion process is one of the most important doping processes in integrated circuit manufacturing. It diffuses atoms such as phosphorus and boron into the wafer under high temperature conditions, thereby changing and controlling the type, concentration and distribution of impurities in the semiconductor in order to establish different electrical characteristic areas. Most of the existing diffusion processes are carried out in a batch processing mode, that is, multiple batches of wafers are placed in a diffusion furnace for diffusion processing at the same time, which can greatly improve production efficiency.

[0003] The existing diffusion furnace cooling mechanism has the problems of low cooling efficiency, high energy consumption during cooling and difficulty in maintenance.

[0004] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0005] The utility model aims to provide a composite cooling structure for a diffusion furnace, which can solve the problems of low efficiency, high energy consumption and difficult maintenance of the cooling mechanism.

[0006] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0007] A composite cooling structure for a diffusion furnace, comprising:

[0008] The diffusion furnace body comprises a combined ceramic fiber layer, wherein the combined ceramic fiber layer is provided with a plurality of layers, the inner sides of the plurality of combined ceramic fiber layers are all provided with heating wires, and the plurality of combined ceramic fiber layers are provided with heating wires.

[0009] The ceramic fiber layers are installed one by one in sequence to form a furnace-shaped structure, and multiple heating wires are installed in multiple combined ceramic fiber layers to form a furnace-shaped structure, which effectively improves the heating efficiency of the diffusion furnace; an integral ceramic fiber layer is installed on the outer side of the combined ceramic fiber layer, and a protective shell is installed on the outer side of the integral ceramic fiber layer, and the internal structure is supported by the protective shell to ensure the strength of the diffusion furnace.

[0010] The cooling mechanism includes an airflow channel and a cooling water pipe. The airflow channel is arranged between the combined ceramic fiber layer and the integral ceramic fiber layer. The airflow channel forms a special-shaped air duct between the combined ceramic fiber layer and the integral ceramic fiber layer to facilitate airflow and take away the heat from the periphery. The airflow channel takes away the heat from the periphery through the flow of airflow, thereby reducing the energy consumption of the cooling structure during cooling. The cooling water pipe is installed on the outer wall of the protective shell. By arranging the cooling water pipe, the heat is further taken away by water cooling to achieve cooling of the diffusion furnace, and the water cooling energy consumption is low. The composite cooling mechanism composed of the airflow channel and the cooling water pipe can effectively cool the diffusion furnace, improve the cooling efficiency, and reduce the cooling energy consumption, and has good practicality.

[0011] In one or more embodiments of the present invention, an installation groove is opened on the inner side wall of the combined ceramic fiber layer, and the heating wire is installed in the installation groove. The installation groove enables the heating wire to have good heat dissipation performance after installation, which is convenient for heating and rapid cooling during cooling.

[0012] In one or more embodiments of the present invention, a groove is provided at one end of the combined ceramic fiber layer close to the outer side wall, and a protrusion is provided at the other end of the combined ceramic fiber layer close to the outer side wall.

[0013] In one or more embodiments of the present invention, the protrusions on the adjacent combined ceramic fiber layers abut against the grooves.

[0014] In one or more embodiments of the utility model, a plurality of flow slots are provided on the inner side wall of the integral ceramic fiber layer, and the air flow channel is formed by the holes between the plurality of flow slots and the outer side wall of the combined ceramic fiber layer. Since the air flow channel is provided between the combined ceramic fiber layer and the integral ceramic fiber layer, the heat outside the combined ceramic fiber layer can be taken away through the air flow channel.

[0015] In one or more embodiments of the present invention, the cooling water pipe is configured as an S-shaped elbow.

[0016] The S-shaped elbow improves the cooling efficiency of the airflow channel. The material of the cooling water pipe is copper. Since copper has good thermal conductivity, the cooling efficiency of the airflow channel is further improved.

[0017] In one or more embodiments of the utility model, a water inlet is provided at one end of the cooling water pipe, and the water inlet is used to provide cooling water into the cooling water pipe. A water outlet is provided at the other end of the cooling water pipe, and the water outlet recovers the cooling water in the cooling water pipe.

[0018] In one or more embodiments of the utility model, a protective layer is provided on the outside of the cooling water pipe, and the protective layer is used to protect the cooling water pipe. The water inlet and the water outlet are both provided on the outside of the insulation layer, so that the water inlet and the water outlet are conveniently connected to the pipeline. At the same time, the insulation layer is arranged to be easy to disassemble and assemble, and the air flow channel and the cooling water pipe are simple in structure design, so it is convenient to maintain and service the cooling mechanism.

[0019] In one or more embodiments of the present invention, a mounting shell is installed on the outer wall of the protective shell, and a plurality of power connectors are installed on the mounting shell. The power connectors are used to connect to a power source so as to provide electrical energy to the heating wires. A conductive plate is installed between the plurality of power connectors and the plurality of heating wires, and the electrical energy provided by the power connectors is transmitted to the heating wires through the conductive plate.

[0020] In one or more embodiments of the utility model, a ceramic fiber cover is installed on the diffusion furnace body, and when the airflow in the diffusion furnace flows, it is discharged through the ceramic fiber cover, and the airflow can take away the heat in the diffusion furnace when it is discharged, thereby improving the cooling efficiency of the cooling mechanism and reducing the energy consumed by cooling. A plurality of air holes are opened on the outer wall of the integral ceramic fiber layer, and the gas enters through the air holes on one side and is discharged through the air hole channel on the other side.

[0021] Compared with the prior art, the utility model uses a composite cooling mechanism composed of an airflow channel and a cooling pipe, and utilizes the dual effects of airflow and cooling water to cool the inside and outside of the diffusion furnace, thereby improving the cooling efficiency of the cooling mechanism and reducing energy consumption. At the same time, the cooling mechanism has a simple structural design, which makes the maintenance of the cooling mechanism simple. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art,

[0023] A brief introduction is given to the drawings required for use in the embodiments or descriptions of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 It is a front view of a composite cooling structure of a diffusion furnace in one embodiment of the utility model;

[0025] Figure 2 It is a three-dimensional diagram of a composite cooling structure of a diffusion furnace in one embodiment of the utility model;

[0026] Figure 3 This is a schematic diagram of the installation of a cooling water pipe in an embodiment of the utility model;

[0027] Figure 4 It is a right side cross-sectional view of a composite cooling structure of a diffusion furnace in one embodiment of the utility model;

[0028] Figure 5 It is a front cross-sectional view of a composite cooling structure of a diffusion furnace in one embodiment of the utility model;

[0029] Figure 6 In one embodiment of the utility model Figure 5 The enlarged view of point A in the middle;

[0030] Figure 7 It is a cross-sectional view of a composite cooling structure of a diffusion furnace in one embodiment of the utility model;

[0031] Figure 8 In one embodiment of the utility model Figure 7 Enlarged view of point B in the middle.

[0032] Description of main reference numerals:

[0033] 1-diffusion furnace body, 11-combined ceramic fiber layer, 1101-installation groove, 1102-groove, 1103-bump, 12-power connector, 1201-conductive plate, 13-integral ceramic fiber layer, 1301-circulation groove, 14-protective shell, 15-protective layer, 16-ceramic fiber cover, 17-exhaust hole, 18-installation shell, 2-cooling mechanism, 21-air flow channel, 22-cooling water pipe, 2201-water inlet, 2202-water outlet. DETAILED DESCRIPTION

[0034] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0035] like Figure 1 to Figure 3 As shown, a composite cooling structure for a diffusion furnace in one embodiment of the utility model comprises a diffusion furnace body 1 and a cooling mechanism 2.

[0036] like Figures 4 to 8As shown, the diffusion furnace body 1 includes a combined ceramic fiber layer 11, and a plurality of combined ceramic fiber layers 11 are provided. Heating wires are installed on the inner sides of the plurality of combined ceramic fiber layers 11. The plurality of combined ceramic fiber layers 11 are installed together in sequence to form a furnace-shaped structure. A plurality of heating wires are installed in the plurality of combined ceramic fiber layers 11 to form a furnace-shaped structure, which effectively improves the heating efficiency of the diffusion furnace; an integral ceramic fiber layer 13 is installed on the outer side of the combined ceramic fiber layer 11, and a protective shell 14 is installed on the outer side of the integral ceramic fiber layer 13. The internal structure is supported by the protective shell 14 to ensure the strength of the diffusion furnace.

[0037] like Figure 3 to Figure 8 As shown, the cooling mechanism 2 includes an airflow channel 21 and a cooling water pipe 22. The airflow channel 21 is arranged between the combined ceramic fiber layer 11 and the integral ceramic fiber layer 13. The airflow channel 21 forms a special-shaped air duct between the combined ceramic fiber layer 11 and the integral ceramic fiber layer 13 to facilitate airflow and take away the heat from the periphery. The airflow channel 21 takes away the heat in the furnace through the flow of airflow, thereby reducing the energy consumption of the cooling structure during cooling. The cooling water pipe 22 is installed on the outer wall of the protective shell 14. By setting the cooling water pipe 22, the heat is further taken away by water cooling to achieve cooling of the diffusion furnace, and the water cooling energy consumption is low. The composite cooling mechanism composed of the airflow channel 21 and the cooling water pipe 22 effectively cools the diffusion furnace, improves the cooling efficiency, and reduces the cooling energy consumption, which has good practicality.

[0038] like Figure 6 and Figure 8 As shown, a mounting groove 1101 is provided on the inner side wall of the combined ceramic fiber layer 11 , and the heating wire is installed in the mounting groove 1101 .

[0039] like Figure 6 and Figure 8 As shown, a groove 1102 is provided at one end of the combined ceramic fiber layer 11 close to the outer wall, and a protrusion 1103 is provided at the other end of the combined ceramic fiber layer 11 close to the outer wall.

[0040] like Figure 6 and Figure 8 As shown, the protrusions 1103 on the adjacent combined ceramic fiber layers 11 abut against the grooves 1102 .

[0041] like Figure 6 to Figure 8As shown, a plurality of flow slots 1301 are provided on the inner side wall of the integral ceramic fiber layer 13, and the air flow channel 21 is formed by the channels between the plurality of flow slots 1301 and the outer side of the combined ceramic fiber layer 11. Since the air flow channel 21 is provided between the combined ceramic fiber layer 11 and the integral ceramic fiber layer 13, the heat outside the combined ceramic fiber layer 11 can be taken away through the air flow channel 21.

[0042] like Figure 3 As shown, the cooling water pipe 22 is configured as an S-shaped elbow, which improves the cooling efficiency of the airflow channel 21. The cooling water pipe 22 is made of copper, which has good thermal conductivity, thereby further improving the cooling efficiency of the airflow channel 21.

[0043] like Figure 1 to Figure 3 As shown, a water inlet 2201 is provided at one end of the cooling water pipe 22, and the water inlet 2201 is used to provide cooling water to the cooling water pipe 22. A water outlet 2202 is provided at the other end of the cooling water pipe 22, and the water outlet 2202 recovers the cooling water in the cooling water pipe 22.

[0044] like Figure 1 and Figure 2 As shown, a protection layer 15 is provided on the outside of the cooling water pipe 22, and the protection layer 15 is used to protect the cooling water pipe 22. The water inlet 2201 and the water outlet 2202 are both provided on the outside of the protection layer 15, so that the water inlet 2201 and the water outlet 2202 are conveniently connected to the pipeline. At the same time, the protection layer 15 is arranged to be easy to disassemble and assemble, and the structural design of the air flow channel 21 and the cooling water pipe 22 is simple, so it is convenient to maintain and service the cooling mechanism 2.

[0045] like Figure 1 to Figure 4 As shown, a mounting shell 18 is installed on the outer wall of the protective shell 14, and a plurality of power connectors 12 are installed on the mounting shell 18. The power connectors 12 are used to connect to a power source so as to provide electrical energy to the heating wires. A conductive plate 1201 is installed between the plurality of power connectors 12 and the plurality of heating wires, and the electrical energy provided by the power connectors 12 is transmitted to the heating wires through the conductive plate 1201.

[0046] like Figure 4 and Figure 5 As shown, a ceramic fiber cover 16 is installed on the diffusion furnace body 1. When the airflow in the diffusion furnace flows, it is discharged through the ceramic fiber cover 16. When discharged, the airflow can take away the heat in the diffusion furnace, thereby improving the cooling efficiency of the cooling mechanism and reducing the energy consumed by cooling. A plurality of inlet and outlet holes 17 are opened on the outer wall of the integral ceramic fiber layer 13. When the gas flows, it enters through the exhaust hole on one side and is discharged through the air hole on the other side.

[0047] During use, when the diffusion furnace is cooled, the airflow in the airflow channel 21 can take away the heat between the combined ceramic fiber layer 11 and the integral ceramic fiber layer 13, and when discharged, the airflow can take away the heat in the diffusion furnace; then, the diffusion furnace is cooled by a composite cooling mechanism composed of the airflow channel 21 and the cooling water pipe 22, thereby improving the cooling efficiency and reducing energy consumption.

[0048] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0049] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A composite cooling structure for a diffusion furnace, characterized in that: include: The diffusion furnace body comprises a combined ceramic fiber layer, wherein a plurality of the combined ceramic fiber layers are provided, heating wires are installed on the inner sides of the plurality of the combined ceramic fiber layers, the plurality of the combined ceramic fiber layers are installed one by one in sequence to form a furnace-shaped structure, an integral ceramic fiber layer is installed on the outer side of the combined ceramic fiber layer, and a protective shell is installed on the outer side of the integral ceramic fiber layer; The cooling mechanism comprises an air flow channel and a cooling water pipe, wherein the air flow channel is arranged between the combined ceramic fiber layer and the integral ceramic fiber layer, and the cooling water pipe is installed on the outer side wall of the protective shell.

2. A diffusion furnace composite cooling structure according to claim 1, characterized in that: An installation groove is provided on the inner side wall of the combined ceramic fiber layer, and the heating wire is installed in the installation groove.

3. The composite cooling structure of a diffusion furnace according to claim 1, characterized in that: A groove is formed at one end of the combined ceramic fiber layer close to the outer wall, and a protrusion is formed at the other end close to the outer wall.

4. The composite cooling structure of a diffusion furnace according to claim 3, characterized in that: The protrusions on the adjacent combined ceramic fiber layers abut against the grooves.

5. The composite cooling structure of a diffusion furnace according to claim 1, characterized in that: A plurality of flow slots are provided on the inner side wall of the integral ceramic fiber layer, and the air flow channel is formed by the channels between the plurality of flow slots and the outer side wall of the combined ceramic fiber layer.

6. The composite cooling structure of a diffusion furnace according to claim 1, characterized in that: The cooling water pipe is configured as an S-shaped elbow, and the material of the cooling water pipe is copper.

7. The composite cooling structure of a diffusion furnace according to claim 6, characterized in that: One end of the cooling water pipe is provided with a water inlet, and the other end of the cooling water pipe is provided with a water outlet.

8. The composite cooling structure of a diffusion furnace according to claim 7, characterized in that: A heat-insulating layer is arranged on the inner side of the cooling water pipe, and the water inlet and the water outlet are arranged on the outer side of the heat-insulating layer.

9. The composite cooling structure of a diffusion furnace according to claim 1, characterized in that: A mounting shell is mounted on the outer side wall of the protective shell, a plurality of power connectors are mounted on the mounting shell, and a conductive plate is mounted between the plurality of power connectors and the plurality of heating wires.

10. The composite cooling structure of a diffusion furnace according to claim 1, characterized in that: A ceramic fiber cover is installed on the diffusion furnace body.

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