Flow-adjustable layered exhaust device

Abstract

The flow-adjustable layered exhaust device comprises an exhaust chamber, a flow adjusting module and an exhaust collecting pipe, a plurality of partition plates are arranged in the exhaust chamber and divide the exhaust chamber into a plurality of exhaust spaces, each exhaust space is provided with an air inlet and an air outlet, the air inlets of the exhaust spaces are all located on one side of the exhaust chamber, and the air outlets of the exhaust spaces are all located on the other side of the exhaust chamber. Air outlets of the multiple exhaust spaces are all located at the upper end of the exhaust chamber, the air outlets of the exhaust spaces are provided with air outlet channels communicated with the air outlets, and the exhaust collecting pipe is arranged at the upper end of the exhaust chamber and wraps at least part of the air outlet channels; the flow adjusting module is connected with the gas outlet channel and used for adjusting the flow of gas flowing from the gas exhaust space to the gas exhaust collecting pipe. According to the device provided by the utility model, the exhaust chamber is divided into a plurality of exhaust spaces, so that the air inlet can be separated independently, and exhaust layering is realized; and the air outlet channel and the flow adjusting module are arranged, so that the air flow of each exhaust space can be adjusted, and stable exhaust is achieved.

Description

Technical Field

[0001] The utility model relates to a flow-adjustable layered exhaust device. Background Art

[0002] When semiconductor silicon wafers are taken out of the boat, waste gas will be discharged from the furnace tube outlet. It is necessary to add an exhaust device at the furnace mouth to ensure that the waste gas will not be discharged into the purification room and pollute the environment.

[0003] Existing technical solutions (such as Fig.12 ) is to add a single-layer (single-channel) exhaust device at the furnace tube outlet, open an air inlet on one side and connect the corresponding furnace tube outlets respectively (for example, if there are 4 layers of furnace tubes, open 4 air inlets), and the gases at the outlets of multiple furnace tubes are simultaneously gathered to the exhaust port on the top through the air inlet.

[0004] The existing technical solutions have the following disadvantages: 1. The air intake flow rate of each air inlet is a uniform flow rate, and the uniform flow rate cannot be adjusted; 2. The flow rate of a single air inlet cannot be adjusted. Utility Model Content

[0005] The utility model aims to provide a flow-adjustable layered exhaust device.

[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0007] A flow-adjustable stratified exhaust device comprises an exhaust chamber, a flow regulating module and an exhaust collecting pipe, wherein a plurality of partitions are arranged in the exhaust chamber, and the plurality of partitions divide the exhaust chamber into a plurality of exhaust spaces, the exhaust space has an air inlet and an air outlet, the air inlets of the plurality of exhaust spaces are all located at one side of the exhaust chamber, the air outlets of the plurality of exhaust spaces are all located at the upper end of the exhaust chamber, the air outlets of the exhaust spaces are provided with an air outlet channel communicating therewith, the exhaust collecting pipe is arranged at the upper end of the exhaust chamber and covers at least a part of the air outlet channel, the exhaust collecting pipe is provided with an exhaust hole communicating with the air outlet channel; the flow regulating module is connected to the air outlet channel, and the flow regulating module is used to adjust the gas flow from the exhaust space to the exhaust collecting pipe.

[0008] In some embodiments, the flow regulating module includes a sleeve, a rotating shaft, and a baffle, one end of the rotating shaft passes through the opposite sides of the air outlet channel in sequence, and the two ends of the rotating shaft are respectively located on the opposite sides of the air outlet channel; the baffle is connected to the rotating shaft, the baffle is located in the air outlet channel, the sleeve is fixedly arranged on the outside of the air outlet channel, the middle part of the sleeve has a center hole for the rotating shaft to pass through, the outer periphery of the sleeve is provided with a through hole that passes through the center hole, the rotating shaft can rotate around its own axis relative to the sleeve, and one end of a fastener can extend into the through hole of the sleeve and resist the rotating shaft to limit the rotation of the rotating shaft.

[0009] In some embodiments, the baffle is a square plate.

[0010] In some embodiments, two sleeves are provided, and the two sleeves are respectively located on opposite sides of the air outlet channel.

[0011] In some embodiments, the device further comprises a connecting plate disposed outside the air outlet channel, a plurality of the air outlet channels are connected to the connecting plate, and the sleeve is fixedly disposed on a side of the connecting plate away from the air outlet channel.

[0012] In some embodiments, a slot recessed toward the center of the rotating shaft is provided in the middle portion thereof, and the baffle is disposed in the slot.

[0013] In some embodiments, the air outlet channel is a vertically arranged cylindrical structure with an opening at the top and an opening at the bottom, and the cross-section of the air outlet channel is square.

[0014] In some embodiments, the exhaust chamber has a bottom surface and an annular side surface perpendicular to the bottom surface, the annular side surface is connected to the bottom surface and surrounds a storage space with a top opening, and the partition is L-shaped.

[0015] In some embodiments, the partition includes a connected longitudinal plate and a transverse plate, and first plates are respectively provided on opposite sides of the longitudinal plate facing the transverse plate, and the first plates are perpendicular to the longitudinal plate; second plates are respectively provided on opposite sides of the transverse plate facing the longitudinal plate, and the second plates are perpendicular to the transverse plate; the first plate and the second plate are abutted against the inner wall of the storage space and connected to the annular side surface; a space for accommodating an air outlet channel is formed between the first partition and one side of the annular side surface, a space for accommodating an air outlet channel is formed between the last partition and the other side of the annular side surface, and a space for accommodating the air outlet channel is formed between the partition located between the first partition and the last partition and the partition adjacent to it.

[0016] In some embodiments, the exhaust manifold includes a first section and a second section that are connected to each other, the first section is a square cylindrical structure that is vertically arranged with an opening on the top and an opening on the bottom, and the first section covers at least a portion of the exhaust channel; the second section includes a first part and a second part, the first part is a cylindrical structure that is vertically arranged with an opening on the top and an opening on the bottom, the second part is arranged at the bottom of the first part and around the periphery of the first part, and the second part is arranged on the top surface of the first section and connected to the top surface of the first section.

[0017] Due to the application of the above technical solution, the utility model has the following advantages compared with the prior art:

[0018] The utility model provides a flow-adjustable stratified exhaust device, in which the exhaust chamber is divided into a plurality of exhaust spaces, and the air inlet can be separated separately to achieve exhaust stratification; an air outlet channel and a flow regulating module are provided, so that the gas flow in each exhaust space can be adjusted to achieve stable exhaust. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Attached Figure 1 A structural diagram of the flow-adjustable layered exhaust device provided by the utility model;

[0020] Attached Figure 2 A structural diagram of a flow regulating module and an air outlet channel from a first perspective of the flow-adjustable layered exhaust device provided by the utility model;

[0021] Attached Figure 3 A structural diagram from a second perspective of a flow regulating module and an air outlet channel of the flow-adjustable layered exhaust device provided by the utility model;

[0022] Attached Figure 4 A structural diagram of a flow regulating module of a flow-adjustable stratified exhaust device provided by the utility model;

[0023] Attached Figure 5 A structural diagram of a flow regulating module of a flow-adjustable stratified exhaust device provided by the utility model (without baffle);

[0024] Attached Figure 6 A structural diagram of the flow-adjustable layered exhaust device provided by the utility model (without the annular side of the exhaust chamber);

[0025] Attached Figure 7 For attachment Figure 6 An enlarged view of the flow regulating module and the partition in FIG.

[0026] Attached Figure 8 A structural diagram of the air outlet passage of the flow-adjustable layered exhaust device provided by the utility model;

[0027] Attached Fig. 9 A structural diagram of a baffle of a flow-adjustable layered exhaust device provided by the utility model from a first perspective;

[0028] Attached Fig.10 A structural diagram of a baffle of the flow-adjustable layered exhaust device provided by the utility model from a second perspective;

[0029] Attached Fig.11 For attachment Fig.10 A front view of a flow regulating module of a flow-adjustable layered exhaust device provided by the utility model;

[0030] Attached Fig.12 The figure is a structural diagram of an existing exhaust device.

[0031] In the above attached figure:

[0032] 1-exhaust chamber, 101-air inlet; 2-flow regulating module, 21-sleeve, 22-rotating shaft, 23-baffle, 24-bushing, 25-fastener, 26-limiting nut;

[0033] 3-air outlet channel; 4-connecting plate; 5-partition plate, 51-longitudinal plate, 52-transverse plate, 53-first plate, 54-second plate, 6-exhaust collecting pipe, 61-first section, 62-first part, 63-second part; 7-fixing part. DETAILED DESCRIPTION

[0034] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0036] See also Figures 1 to 11The flow-adjustable layered exhaust device shown includes an exhaust chamber 1, a flow regulating module 2, and an exhaust collecting pipe 6. A plurality of partitions 5 are arranged in the exhaust chamber 1, and the plurality of partitions 5 divide the exhaust chamber 1 into a plurality of exhaust spaces, each of which is independent of each other; the exhaust space has an air inlet 101 and an air outlet, the air inlet 101 of the plurality of exhaust spaces are all located on one side of the exhaust chamber 1 (any one of the front side, the rear side, the left side, and the right side), the air outlets of the plurality of exhaust spaces are all located at the upper end of the exhaust chamber 1, the air outlet of the exhaust space is provided with an air outlet channel 3, the air outlet channel 3 is communicated with the air outlet of the exhaust space, the exhaust collecting pipe 6 is arranged at the upper end of the exhaust chamber 1 and covers at least part of the air outlet channel 3, the exhaust collecting pipe 6 is provided with an exhaust hole communicated with the air outlet channel 3; the flow regulating module 2 is connected to the air outlet channel 3, the flow regulating module 2 is used to adjust the gas flow from the exhaust space to the exhaust collecting pipe 6, each air outlet channel 3 corresponds to a flow regulating module 2, and the gas flow of a single exhaust space can be adjusted.

[0037] See also Figure 2-5 The flow regulating module 2 of this example includes a sleeve 21, a rotating shaft 22, and a baffle 23. The sleeve 21 is fixedly arranged on the outer side of the air outlet channel 3. The middle part of the sleeve 21 has a central hole for the rotating shaft 22 to pass through. The outer periphery of the sleeve 21 is provided with a through hole that penetrates the central hole. One end of the rotating shaft 22 passes through the central hole of the sleeve 21 and the opposite sides of the air outlet channel 3 in sequence, and the two ends of the rotating shaft 22 are respectively located on the opposite sides of the outside of the air outlet channel 3; the baffle 23 is connected to the rotating shaft 22, and the baffle 23 is located in the air outlet channel 3. The rotating shaft 22 can rotate relative to the sleeve 21. The body axis rotates, one end of a fastener 25 can be extended into the through hole of the sleeve 21 and abut against the rotating shaft 22 to limit the rotation of the rotating shaft 22 to fix the position of the baffle 23. The position of the baffle 23 can be adjusted by rotating the rotating shaft 22 to adjust the gas flow from the exhaust space to the exhaust collecting pipe 6. For example, when the surface where the baffle 23 is located is a vertical surface, the air output is maximum; when the surface where the baffle 23 is located is a horizontal surface, the baffle 23 will horizontally block the air outlet channel, and the air output is minimum, or the surface where the baffle 23 is located forms an acute angle or an obtuse angle with the horizontal plane, and the air output is different at this time.

[0038] For the multiple air outlet channels 3 , multiple flow regulating modules 2 are provided, and the flow regulating modules 2 correspond to the air outlet channels 3 one by one. The rotating shafts 22 of the multiple flow regulating modules 2 can be located in the same horizontal plane, and the multiple rotating shafts 22 are provided in parallel.

[0039] In some embodiments, the device further comprises a connecting plate 4 arranged outside the air outlet channel 3, a plurality of air outlet channels 3 are connected to the connecting plate 4, a plurality of air outlet channels 3 are connected through the connecting plate 4, and a sleeve 21 is fixedly arranged on a side of the connecting plate 4 away from the air outlet channel 3. Two connecting plates 4 may be provided, and the two connecting plates 4 are respectively located on opposite sides of the air outlet channel 3, one end of the rotating shaft 22 passes through the two connecting plates 4 at a time, and the two ends of the rotating shaft 22 are respectively located on the side of the two connecting plates 4 away from each other, and corresponding mounting holes are provided on the connecting plate 4 and the air outlet channel 3, and the connecting plate 4 is fixedly connected to the air outlet channel 3 by installing a fixing member 7 (the fixing member 7 is a bolt and nut assembly) in the mounting hole. Two sleeves 21 are provided, and the two sleeves 21 are respectively located on opposite sides of the air outlet channel 3, and the two ends of the rotating shaft 22 respectively pass through the center holes of the two sleeves 21, so that the structure is more stable.

[0040] See also Figure 4-5 , Fig.12 The baffle 23 is a square plate; a slot recessed toward the center of the rotating shaft 22 is provided in the middle thereof, and the baffle 23 is arranged in the slot; the device also includes a bushing 24, which is sleeved on the rotating shaft 22, and the bushing 24 can be a Teflon bushing; an external thread is arranged on the end of the rotating shaft 22 away from the sleeve 21, and a limiting nut 26 is arranged on the end.

[0041] The air outlet channel 3 of this example is a vertically arranged cylindrical structure with an opening at the top and an opening at the bottom. The cross section of the air outlet channel 3 is square, that is, in the shape of a square cylinder.

[0042] The exhaust chamber 1 of this example is divided into a plurality of exhaust spaces to realize exhaust stratification, which changes the original single-layer single-channel into a multi-layer multi-channel (which can be layered according to needs, 1 layer, 2 layers, 3 layers or more).

[0043] The exhaust chamber 1 of this example has a bottom surface and an annular side surface perpendicular to the bottom surface, the annular side surface is connected to the bottom surface and surrounds a storage space with a top opening. The partition 5 includes a longitudinal plate 51 and a transverse plate 52 connected to each other, and the longitudinal plate 51 and the transverse plate 52 are connected to form an L shape.

[0044] There are multiple partitions 5, and the longitudinal plates 51 of each partition 5 extend along the height direction of the exhaust chamber 1. The longitudinal plates 51 of the multiple partitions 5 are parallel; the transverse plates 52 of the multiple partitions 5 are arranged horizontally and parallel, and the transverse plates 52 of the multiple partitions 5 are distributed in sequence along the height direction of the exhaust chamber 1. In the direction from top to bottom, the surface area of ​​the transverse plates 52 increases in sequence; the first partition 5 (such as Fig.10 A space for accommodating an air outlet passage 3 is formed between the end baffle 5 (as indicated by a in the figure) and one side of the annular side. Fig.10 A space for accommodating an air outlet passage 3 is formed between the first baffle plate 5 and the last baffle plate 5 (as shown in FIG. Fig.10A space for accommodating the air outlet channel 3 is formed between (indicated by c) and the adjacent partition 5.

[0045] See also Fig. 9 , first plates 53 are respectively provided on the opposite sides of the longitudinal plate 51 facing the transverse plate 52, and the first plates 53 are perpendicular to the longitudinal plate 51, and second plates 54 are respectively provided on the opposite sides of the transverse plate 52 facing the longitudinal plate 51, and the second plates 54 are perpendicular to the transverse plate 52, the first plate 53 and the second plate 54 are arranged adjacent to each other, the first plate 53 and the second plate 54 are abutted against the inner wall of the storage space of the exhaust chamber 1 and connected to the annular side surface, the partition 5 is provided with the first plate 53 and the second plate 54, and one end of the air outlet channel 3 can be inserted into the space formed between the first partition plate 5 (two first plates 53, longitudinal plate 51) and one side of the annular side surface, or inserted into the space formed between the last partition plate 5 (two first plates 53, longitudinal plate 51) and the other side of the annular side surface, or in the space formed between the partition plate 5 (longitudinal plate 51) located between the first partition plate 5 and the last partition plate 5 and the adjacent partition plate 5 (two first plates 53, longitudinal plate 51).

[0046] The exhaust manifold 6 of this example is arranged at the upper end of the exhaust chamber 1 and covers a part of the exhaust channel 3 . The exhaust channel 3 is partially located in the exhaust chamber 1 , and the remaining part is located outside the exhaust chamber 1 and the exhaust manifold 6 .

[0047] See also Figure 1 The exhaust manifold 6 includes a first section 61 and a second section connected to each other. The first section 61 is a vertically arranged square cylindrical structure with an opening at the top and an opening at the bottom. The first section 61 covers at least a portion of the gas outlet channel 3. The second section is arranged at the top of the first section 61. The second section includes a first part 62 and a second part 63. The first part 62 is a vertically arranged cylindrical structure with an opening at the top and an opening at the bottom. The second part 63 is arranged at the bottom of the first part 62 and around the outer circumference of the first part 62. The second part 63 is arranged on the top surface of the first section 61 and connected to the top surface of the first section 61. Corresponding mounting holes are opened on the top surface of the first section 61 and the second part 63. The first section 61 and the second section are connected by installing fasteners in the mounting holes.

[0048] In the flow-adjustable layered exhaust device of this example, when exhausting, the gas passes through the flow regulating module 2 from the air inlet 101 of the exhaust chamber 1 and converges to the exhaust manifold 6, and finally exhausts to the outside. When exhausting, the flow regulating module 2 is adjusted to rotate the baffle 23 to adjust the position of the baffle 23, and the baffle 23 is fixed after determining the required flow size, so as to achieve the purpose of adjusting the gas flow size flowing from the exhaust space to the exhaust manifold 6.

[0049] The advantages of the flow-adjustable stratified exhaust device provided in this example are:

[0050] First: exhaust stratification, from the original single-layer single-channel to multi-layer multi-channel (can be layered according to needs, 1 layer, 2 layers, 3 layers or more);

[0051] Second: Each layer can adjust the air flow rate of the air inlet during exhaust;

[0052] Third: Change and modify the original single-layer structure to save design and material costs;

[0053] Fourth: The structure maintains the assembly method of the original structure, and there is no need to consider the installation method separately;

[0054] Fifth: Due to the relatively independent characteristics of each channel, flow sensors, differential pressure sensors, wind speed sensors or other devices can be independently installed in each channel for data monitoring, etc., without affecting each other.

[0055] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A flow-adjustable layered exhaust device, characterized in that: It includes an exhaust chamber, a flow regulating module, and an exhaust collecting pipe. A plurality of partitions are arranged in the exhaust chamber, and the plurality of partitions divide the exhaust chamber into a plurality of exhaust spaces. The exhaust space has an air inlet and an air outlet. The air inlets of the plurality of exhaust spaces are all located at one side of the exhaust chamber, and the air outlets of the plurality of exhaust spaces are all located at the upper end of the exhaust chamber. The air outlets of the exhaust spaces are provided with an air outlet channel communicating therewith. The exhaust collecting pipe is arranged at the upper end of the exhaust chamber and covers at least a part of the air outlet channel. The exhaust collecting pipe is provided with an exhaust hole communicating with the air outlet channel. The flow regulating module is connected to the air outlet channel, and the flow regulating module is used to regulate the gas flow from the exhaust space to the exhaust collecting pipe.

2. The flow-adjustable stratified exhaust device according to claim 1, characterized in that: The flow regulating module includes a sleeve, a rotating shaft, and a baffle. One end of the rotating shaft passes through the opposite sides of the air outlet channel in sequence, and the two ends of the rotating shaft are respectively located on the opposite sides of the air outlet channel; the baffle is connected to the rotating shaft, and the baffle is located in the air outlet channel. The sleeve is fixedly arranged on the outside of the air outlet channel. The middle part of the sleeve has a center hole for the rotating shaft to pass through. The outer periphery of the sleeve is provided with a through hole that penetrates the center hole. The rotating shaft can rotate around its own axis relative to the sleeve. One end of a fastener can extend into the through hole of the sleeve and resist the rotating shaft to limit the rotation of the rotating shaft.

3. The flow-adjustable stratified exhaust device according to claim 2, characterized in that: The baffle is a square plate.

4. The flow-adjustable stratified exhaust device according to claim 2, characterized in that: There are two sleeves, and the two sleeves are respectively located on two opposite sides of the air outlet channel.

5. The flow-adjustable layered exhaust device according to claim 2, characterized in that: The device also includes a connecting plate arranged outside the air outlet channel, a plurality of the air outlet channels are connected to the connecting plate, and the sleeve is fixedly arranged on a side of the connecting plate away from the air outlet channel.

6. The flow-adjustable layered exhaust device according to claim 2, characterized in that: A slot recessed toward the center of the rotating shaft is provided in the middle of the rotating shaft, and the baffle is arranged in the slot.

7. The flow-adjustable layered exhaust device according to claim 1, characterized in that: The air outlet channel is a vertically arranged cylindrical structure with an opening at the top and an opening at the bottom, and the cross section of the air outlet channel is square.

8. The flow-adjustable stratified exhaust device according to claim 1, characterized in that: The exhaust chamber has a bottom surface and an annular side surface perpendicular to the bottom surface. The annular side surface is connected to the bottom surface and surrounds a storage space with a top opening. The partition is L-shaped.

9. The flow-adjustable layered exhaust device according to claim 8, characterized in that: The partition includes a connected longitudinal plate and a transverse plate, and first plates are respectively arranged on the opposite sides of the longitudinal plate facing the transverse plate, and the first plates are perpendicular to the longitudinal plate, and second plates are respectively arranged on the opposite sides of the transverse plate facing the longitudinal plate, and the second plates are perpendicular to the transverse plate, and the first plate and the second plate are abutted against the inner wall of the storage space and connected to the annular side surface; a space for accommodating an air outlet channel is formed between the first partition and one side of the annular side surface, a space for accommodating an air outlet channel is formed between the last partition and the other side of the annular side surface, and a space for accommodating the air outlet channel is formed between the partition located between the first partition and the last partition and the partition adjacent to it.

10. The flow-adjustable stratified exhaust device according to claim 1, characterized in that: The exhaust collecting pipe includes a first section and a second section connected to each other, the first section is a square cylindrical structure with a top opening and a bottom opening arranged vertically, and the first section covers at least a portion of the exhaust channel; the second section includes a first part and a second part, the first part is a cylindrical structure with a top opening and a bottom opening arranged vertically, the second part is arranged at the bottom of the first part and around the outer circumference of the first part, and the second part is arranged on the top surface of the first section and connected to the top surface of the first section.

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