Spectral ellipsometer with Mapping function

Abstract

The utility model provides a spectrum ellipsometer with a Mapping function, which comprises a door-type frame, a Mapping module and a vertical movement mechanism which are arranged on the door-type frame, and an optical component arranged on the vertical movement mechanism, the door-type frame comprises a bottom plate, upright posts arranged on two sides of the bottom plate, and a cross beam plate arranged at the upper ends of the upright posts, and a controller is fixedly mounted at the lower end of the bottom plate. The automatic multi-point measurement of the sample to be measured can be realized, the accurate focusing in the vertical direction is ensured, and the measurement accuracy is ensured; the testing capability of the spectrum ellipsometer is greatly improved, and the uniformity of a tested piece can be quickly measured; the operation steps of a user are simplified, and one-key multi-point testing is realized; test point positions can be freely set, and various test requirements can be met; and the appearance design is optimized, so that the equipment is attractive and durable, and has extremely high reliability.

Description

Technical Field

[0001] The utility model relates to the technical field of spectral ellipsometers, in particular to a spectral ellipsometer with a mapping function. Background Art

[0002] Ellipsometer is an optical measuring instrument used to detect film thickness, optical constants and material microstructure. Ellipsometer is an attractive measuring instrument due to its high measurement accuracy, applicability to ultra-thin films, non-contact with the sample, no damage to the sample and no need for vacuum.

[0003] The test tables of existing spectroscopic ellipsometers used for photovoltaic cell film thickness detection are only capable of vertical movement, can achieve height focus, and can only test the middle point of the table. To determine the uniformity within the sample, it is necessary to perform multi-point tests on the sample surface. The existing technology can only achieve multi-point testing of a single sample by manually moving the sample multiple times for measurement. However, the manual method not only affects work efficiency, but also increases the number of contacts between personnel and the sample, thereby contaminating or even damaging the sample. In addition, in manual multi-point testing, the test points are not fixed, which is not conducive to accurate analysis and judgment. Utility Model Content

[0004] The technical problem solved by the utility model is to provide a spectroscopic ellipsometer with a mapping function, which can realize automatic multi-point measurement of a sample to be measured, so as to solve the problems raised in the above-mentioned background technology.

[0005] The technical problem solved by the utility model is achieved by adopting the following technical scheme: a spectroscopic ellipsometer with mapping function, comprising a portal frame, a mapping module and a vertical motion mechanism installed on the portal frame, and an optical component arranged on the vertical motion mechanism, the portal frame comprising a bottom plate, columns installed on both sides of the bottom plate, and a crossbeam plate installed on the upper ends of the columns, a controller is fixedly installed at the lower end of the bottom plate, and supporting feet are distributed around the bottom plate located at the controller, the controller is electrically connected to the mapping module, the vertical motion mechanism and the optical component, and a fixing piece is provided at the upper end of the crossbeam plate, through which the vertical motion mechanism is installed;

[0006] The mapping module includes a Y-axis displacement component installed on a base plate, and an X-axis displacement component adjustably installed on the upper end of the Y-axis displacement component. A stage is adjustably installed on the X-axis displacement component to adjust the position of the sample on the stage for multi-point measurement.

[0007] As a further solution of the utility model:

[0008] The Y-axis displacement assembly includes a first seat plate installed on the upper end of the base plate, Y-axis guide rails symmetrically installed on both sides of the seat plate, and a Y-axis slider slidably installed on the Y-axis guide rails. The first seat plate is located between the Y-axis guide rails on both sides and is rotatably installed with a Y-axis screw. The lower end of the Y-axis slider is provided with a screw sleeve that is transmission-connected to the Y-axis screw. A Y-axis control box that controls the Y-axis screw is provided on one side of the seat plate. A motor that is transmission-connected to the Y-axis screw is provided in the Y-axis control box to control the movement of the Y-axis slider in the Y-axis direction.

[0009] As a further solution of the utility model:

[0010] The X-axis displacement assembly includes a second seat plate fixedly mounted on the upper end of the Y-axis slider, the second seat plate is vertically arranged with the first seat plate, an X-axis guide rail is arranged in parallel on the upper end of the second seat plate, an X-axis slider is slidably mounted on the X-axis guide rail, an X-axis screw for driving the X-axis slider to move is arranged on the second seat plate, an X-axis control box for controlling the X-axis screw to control the movement of the X-axis slider in the X-axis direction is arranged on one side of the second seat plate, and the worktable is fixedly mounted on the upper end of the X-axis slider.

[0011] As a further solution of the utility model:

[0012] First zero position switches are respectively installed at corresponding positions of the first seat plate and the second seat plate.

[0013] As a further solution of the utility model:

[0014] The fixing member comprises an L-shaped fixing plate and a reinforcing plate connecting two sides of the fixing plate. One side of the fixing plate is fixedly mounted on the crossbeam plate, and the other side is used for mounting a vertical motion mechanism.

[0015] As a further solution of the utility model:

[0016] The vertical motion mechanism includes a back plate installed on a fixed plate and a straight-axis guide rail arranged thereon, a straight-axis slider is slidably installed on the straight-axis guide rail, a straight-axis screw is rotatably installed in the straight-axis guide rail, the straight-axis slider is threadedly connected to the straight-axis screw, and the upper end of the straight-axis screw is transmission-connected to the straight-axis motor through a reducer to control the lifting and lowering movement of the straight-axis slider, a second zero-position switch for determining the position of the straight-axis slider is provided at a corresponding position of the back plate, and a baffle is fixedly provided on one side of the outer end of the straight-axis slider corresponding to the second zero-position switch to trigger the second zero-position switch; an adapter plate is fixedly provided at the outer end of the straight-axis slider, and the optical component is fixedly installed on the adapter plate; the straight-axis motor and the second zero-position switch are electrically connected to the controller through a circuit board.

[0017] As a further solution of the utility model:

[0018] The optical assembly comprises an optical incident module and an optical output module which are obliquely arranged on the adapter plate, an output light lens is arranged on one side of the outer end of the optical incident module, and a light receiving lens is arranged on one side of the outer end of the optical output module.

[0019] As a further solution of the utility model:

[0020] The controller includes a direct current power supply module, a motor drive module, a power input module and an interface circuit module.

[0021] Compared with the prior art, the beneficial effects of the utility model are as follows: the test piece is placed on the stage, the Mapping module moves the test piece through the Y-axis displacement component and the X-axis displacement component, the vertical motion mechanism controls the optical component to rise and fall to the corresponding position, so that the optical component can be focused and the test piece can be detected, the Mapping module moves the test piece and performs multi-point measurement, which can realize automatic multi-point measurement of the sample to be tested, and ensure precise focusing in the vertical direction, and ensure measurement accuracy; the testing capability of the spectroscopic ellipsometer is greatly improved, and the uniformity of the tested piece can be quickly measured; the user's operating steps are simplified, and one-button multi-point testing is realized; the test points can be freely set, and can adapt to various testing needs; the appearance design is optimized, so that the equipment is both beautiful and durable, and has extremely high reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0023] Figure 2 This is a schematic diagram of the portal frame structure of the utility model;

[0024] Figure 3 This is a schematic diagram of the vertical motion mechanism structure of the utility model;

[0025] Figure 4 This is a schematic diagram of the structure of the adapter plate of the utility model;

[0026] Figure 5 This is a schematic diagram of the optical component structure of the utility model;

[0027] Figure 6 This is a schematic diagram of the Mapping module structure of the utility model;

[0028] Figure 7 This is a schematic diagram of the controller structure of the utility model;

[0029] Markings in the figure: 1. Gantry frame; 2. Mapping module; 3. Vertical motion mechanism; 4. Optical component; 5. Controller; 6. Stage; 11. Bottom plate; 12. Column; 13. Crossbeam plate; 14. Support foot; 15. First zero position switch; 16. Fixed plate; 20. X-axis control box; 21. First seat plate; 22. Y-axis guide rail; 23. Y-axis slider; 24. Y-axis screw; 25. Y-axis control box; 26. Second seat plate; 27. X-axis guide rail ; 28. X-axis slider; 29. ​​X-axis screw; 31. Back plate; 32. Straight-axis guide rail; 33. Straight-axis slider; 34. Straight-axis screw; 35. Reducer; 36. Straight-axis motor; 37. Second zero position switch; 38. Baffle; 39. Adapter plate; 41. Optical incident module; 42. Optical output module; 43. Output light lens; 44. Receiving light lens; 51. DC power supply module; 52. Motor drive module; 53. Power input module; 54. Interface circuit module. DETAILED DESCRIPTION

[0030] In order to make the technical means for realizing the utility model, creative features, objectives and effects easy to understand, the utility model is further explained below with reference to specific illustrations.

[0031] like Figures 1 to 7 As shown,

[0032] The present embodiment provides a spectroscopic ellipsometer with a mapping function, comprising a portal frame 1, a mapping module 2 and a vertical motion mechanism 3 installed on the portal frame 1, and an optical component 4 arranged on the vertical motion mechanism 3, wherein the portal frame 1 comprises a base plate 11, columns 12 installed on both sides of the base plate 11, and a crossbeam plate 13 installed on the upper ends of the columns 12, a controller 5 is fixedly installed on the lower end of the base plate 11, and supporting feet 14 are distributed around the base plate 11 located around the controller 5, the controller 5 is electrically connected to the mapping module 2, the vertical motion mechanism 3 and the optical component 4, and a fixing piece is provided on the upper end of the crossbeam plate 13, through which the vertical motion mechanism 3 is installed;

[0033] The Mapping module 2 includes a Y-axis displacement component installed on the bottom plate 11 and an X-axis displacement component adjustably installed on the upper end of the Y-axis displacement component. The X-axis displacement component is adjustably mounted with a stage 6 to adjust the position of the sample on the stage 6 for multi-point measurement.

[0034] like Figure 1 and Figure 6As shown, in this embodiment, the Y-axis displacement assembly includes a first seat plate 21 installed on the upper end of the base plate 11, Y-axis guide rails 22 symmetrically installed on both sides of the seat plate, and a Y-axis slider 23 slidably installed on the Y-axis guide rails 22. The first seat plate is located between the Y-axis guide rails 22 on both sides and is rotatably installed with a Y-axis screw 24. The lower end of the Y-axis slider 23 is provided with a screw sleeve that is transmission-connected to the Y-axis screw 24. A Y-axis control box 25 for controlling the Y-axis screw 24 is provided on one side of the seat plate. A motor that is transmission-connected to the Y-axis screw 24 is provided in the Y-axis control box 25 to control the movement of the Y-axis slider 23 in the Y-axis direction.

[0035] The X-axis displacement assembly includes a second seat plate 26 fixedly mounted on the upper end of the Y-axis slider 23. The second seat plate 26 is vertically arranged with the first seat plate 21. X-axis guide rails 27 are arranged in parallel on the upper end of the second seat plate 26. An X-axis slider 28 is slidably mounted on the X-axis guide rails 27. An X-axis screw 29 for driving the X-axis slider 28 to move is provided on the second seat plate 26. An X-axis control box 20 for controlling the X-axis screw 29 is provided on one side of the second seat plate 26 to control the X-axis slider 28 to move in the X-axis direction. The worktable 6 is fixedly mounted on the upper end of the X-axis slider 28.

[0036] First zero position switches 15 are installed at corresponding positions of the first seat plate 21 and the second seat plate 26 to respectively determine the positive limit position, negative limit position and zero position of the Y-axis slider 23 and the X-axis slider 28 .

[0037] like Figure 2 As shown, in this embodiment, the fixing member includes an L-shaped fixing plate 16 and reinforcing plates connecting both sides of the fixing plate 16 . One side of the fixing plate 16 is fixedly mounted on the crossbeam plate 13 , and the other side is used to install the vertical motion mechanism 3 .

[0038] like Figure 1 , Figure 2 and Figure 3 As shown, in this embodiment, the vertical motion mechanism 3 includes a back plate 31 mounted on the fixed plate 16 and a straight axis guide rail 32 arranged thereon, a straight axis slider 33 is slidably mounted on the straight axis guide rail 32, a straight axis screw 34 is rotatably mounted in the straight axis guide rail 32, the straight axis slider 33 is threadedly connected to the straight axis screw 34, the upper end of the straight axis screw 34 is transmission-connected to the straight axis motor 36 through a reducer 35 to control the lifting and lowering movement of the straight axis slider 33, a second zero position switch 37 for determining the position of the straight axis slider 33 is provided at a corresponding position of the back plate 31, a baffle 38 is fixedly provided on one side of the outer end of the straight axis slider 33 corresponding to the second zero position switch 37, for triggering the second zero position switch 37; an adapter plate 39 is fixedly provided at the outer end of the straight axis slider 33, and the optical component 4 is fixedly mounted on the adapter plate 39. The straight axis motor 36 and the second zero position switch 37 are electrically connected to the controller 5 through a circuit board.

[0039] like Figure 1 and Figure 5 As shown, in this embodiment, the optical component 4 includes an optical incident module 41 and an optical exit module 42 obliquely arranged on the adapter plate, an exit light lens 43 is provided on one side of the outer end of the optical incident module 41, and a light receiving lens 44 is provided on one side of the outer end of the optical exit module 42. Specifically, the light source enters from the right end of the incident module 41, and after being adjusted by the internal optical path, it is irradiated onto the test piece through the exit light lens 43, and the optical fiber is reflected by the test piece and enters the light receiving lens 44, and after being adjusted by the optical exit module, it is emitted from the left side to the detector to test and analyze the optical signal.

[0040] like Figure 1 and Figure 7 As shown, in this embodiment, the controller 5 includes a DC power supply module 51, a motor drive module 52, a power input module 53 and an interface circuit module 54. The motor drive module 52 is used to drive each motor used in the device. The interface circuit module 54 realizes connection and interaction with each electrical component, and at the same time realizes signal interaction with the computer control software, thereby realizing control of the entire device.

[0041] The working principle of the utility model is as follows: the test piece is placed on the stage 6, the Mapping module 2 moves the test piece through the Y-axis displacement component and the X-axis displacement component, the vertical motion mechanism 3 controls the optical component 4 to rise and fall to the corresponding position so that the optical component 4 can focus and detect the test piece, and the Mapping module 2 moves the test piece to perform multi-point measurement.

[0042] The controller 5 is installed under the bottom plate 11 to control the motor, signal conditioning and transmission in the whole device. Four support legs 14 are fixed on the bottom plate 11 to support the whole device, and shock-absorbing pads and leveling mechanisms are added to ensure the stability of the device.

[0043] Spectroscopic ellipsometer is an ellipsometer that uses a wide-band light source and a wide-band spectrometer to transmit and collect optical signals. It has extremely high testing accuracy because the information collected is comprehensive and accurate.

[0044] Mapping function: It can realize the function of fast and accurate movement of the test object in the horizontal plane X and Y directions. The moving position, moving trajectory and moving speed can be freely set within the range.

[0045] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. The technicians in this industry should understand that the utility model is not limited by the above embodiments. The above embodiments and the description only illustrate the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model will also have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents. It should be noted that in this article, if there are first and second relationship terms such as only used to distinguish one entity or operation from another entity or operation, it does not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the term "include", "comprise" or any other variant thereof is intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements includes not only those elements, but also includes other elements that are not explicitly listed, or also includes elements inherent to such process, method, article or equipment. Without more constraints, an element defined by the phrase "comprising a..." does not exclude the existence of other identical elements in the process, method, article or apparatus comprising the element.

Claims

1. A spectroscopic ellipsometer with mapping function, characterized in that: It includes a portal frame, a Mapping module and a vertical motion mechanism installed on the portal frame, and an optical component arranged on the vertical motion mechanism. The portal frame includes a bottom plate, columns installed on both sides of the bottom plate, and a crossbeam plate installed on the upper ends of the columns. A controller is fixedly installed at the lower end of the bottom plate, and supporting feet are distributed around the bottom plate located at the controller. The controller is electrically connected to the Mapping module, the vertical motion mechanism and the optical component. A fixing piece is provided at the upper end of the crossbeam plate, and the vertical motion mechanism is installed through the fixing piece. The mapping module includes a Y-axis displacement component installed on a base plate, and an X-axis displacement component adjustably installed on the upper end of the Y-axis displacement component. A stage is adjustably installed on the X-axis displacement component to adjust the position of the sample on the stage for multi-point measurement.

2. The spectroscopic ellipsometer with mapping function according to claim 1, characterized in that: The Y-axis displacement assembly includes a first seat plate installed on the upper end of the base plate, Y-axis guide rails symmetrically installed on both sides of the seat plate, and a Y-axis slider slidably installed on the Y-axis guide rails. The first seat plate is located between the Y-axis guide rails on both sides and is rotatably installed with a Y-axis screw. The lower end of the Y-axis slider is provided with a screw sleeve that is transmission-connected to the Y-axis screw. A Y-axis control box that controls the Y-axis screw is provided on one side of the seat plate. A motor that is transmission-connected to the Y-axis screw is provided in the Y-axis control box to control the movement of the Y-axis slider in the Y-axis direction.

3. The spectroscopic ellipsometer with mapping function according to claim 2, characterized in that: The X-axis displacement assembly includes a second seat plate fixedly mounted on the upper end of the Y-axis slider, the second seat plate is vertically arranged with the first seat plate, an X-axis guide rail is arranged in parallel on the upper end of the second seat plate, an X-axis slider is slidably mounted on the X-axis guide rail, an X-axis screw for driving the X-axis slider to move is arranged on the second seat plate, an X-axis control box for controlling the X-axis screw to control the movement of the X-axis slider in the X-axis direction is arranged on one side of the second seat plate, and the worktable is fixedly mounted on the upper end of the X-axis slider.

4. The spectroscopic ellipsometer with mapping function according to claim 3, characterized in that: First zero position switches are respectively installed at corresponding positions of the first seat plate and the second seat plate.

5. The spectroscopic ellipsometer with mapping function according to claim 1, characterized in that: The fixing member comprises an L-shaped fixing plate and a reinforcing plate connecting two sides of the fixing plate. One side of the fixing plate is fixedly mounted on the crossbeam plate, and the other side is used for mounting a vertical motion mechanism.

6. The spectroscopic ellipsometer with mapping function according to claim 5, characterized in that: The vertical motion mechanism includes a back plate installed on a fixed plate and a straight-axis guide rail arranged thereon, a straight-axis slider is slidably installed on the straight-axis guide rail, a straight-axis screw is rotatably installed in the straight-axis guide rail, the straight-axis slider is threadedly connected to the straight-axis screw, and the upper end of the straight-axis screw is transmission-connected to the straight-axis motor through a reducer to control the lifting and lowering movement of the straight-axis slider, a second zero-position switch for determining the position of the straight-axis slider is provided at a corresponding position of the back plate, and a baffle is fixedly provided on one side of the outer end of the straight-axis slider corresponding to the second zero-position switch to trigger the second zero-position switch; an adapter plate is fixedly provided at the outer end of the straight-axis slider, and the optical component is fixedly installed on the adapter plate; the straight-axis motor and the second zero-position switch are electrically connected to the controller through a circuit board.

7. The spectroscopic ellipsometer with mapping function according to claim 6, characterized in that: The optical assembly comprises an optical incident module and an optical output module which are obliquely arranged on the adapter plate, an output light lens is arranged on one side of the outer end of the optical incident module, and a light receiving lens is arranged on one side of the outer end of the optical output module.

8. The spectroscopic ellipsometer with mapping function according to claim 1, characterized in that: The controller includes a direct current power supply module, a motor drive module, a power input module and an interface circuit module.

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