Superconducting probe station

Abstract

The utility model discloses a superconducting probe station, which relates to the technical field of probe stations and comprises a bearing frame, a detection device, a cold and hot station, a superconducting magnet device and a cooling box, the bearing frame comprises a first platform and a second platform, and the first platform is arranged above the second platform; the cold and hot table is arranged on the first platform and used for placing a to-be-detected chip, and the cold and hot table is used for adjusting the detection temperature of the chip; the detection device is arranged on the first platform, is connected with the cold and hot table and is used for detecting the to-be-detected chip in the cold and hot table; the superconducting magnet device is arranged on the second platform, penetrates through the first platform, is connected with the cold-hot table and is used for generating a magnetic field and enabling the magnetic field to penetrate through the cold-hot table; and the cooling box is arranged on the second platform, is connected with the superconducting magnet device and is used for generating a low-temperature environment required by superconducting. The superconducting magnet device is used for generating a magnetic field, so that a magnetic field with higher intensity and a more stable magnetic field can be generated, and more accurate chip detection can be carried out.

Description

Technical Field

[0001] The present application relates to the technical field of probe stations, and in particular to a superconducting probe station. Background Art

[0002] The probe station is a testing equipment used in the semiconductor industry, optoelectronics industry, integrated circuit and packaging industry. It is mainly used in the research and development of precision electrical measurements of complex and high-speed devices to ensure quality and reliability, and reduce R&D time and device manufacturing process costs.

[0003] At present, in order to detect the stability of the chip in a magnetic field environment, a probe station with a magnetic field is usually used for Hall effect testing. The utility model patent announcement number CN208239497U discloses a test probe station, the technical solution of which includes a chassis, a fixed cavity is opened on the chassis, a round wafer with a chip is fixedly connected to the fixed cavity, and a probe sheet is also installed in the fixed cavity. The probe sheet is provided with a probe on the side facing the round wafer, and an electromagnetic coil is provided on the side of the probe sheet facing away from the probe; this test probe station generates a magnetic field according to the chip requirements, so that the semiconductor chip can be successfully detected. However, due to the electrothermal effect, the electromagnetic coil cannot generate a strong magnetic field, and due to the magnetic loss generated by the heat and the change in resistance, the magnetic field generated by the electromagnetic coil has poor stability and cannot provide a stable magnetic field, resulting in poor accuracy of chip detection. Summary of the invention

[0004] In order to solve the problem of insufficient magnetic field strength and insufficient magnetic field stability of the probe station, the present application provides a superconducting probe station.

[0005] The superconducting probe station provided in this application adopts the following technical solution:

[0006] A superconducting probe station comprises a carrier, a detection device, a hot and cold stage, a superconducting magnet device and a cooling box; the carrier comprises a first platform and a second platform, the first platform is arranged above the second platform; the hot and cold stage is arranged on the first platform and is used to place a chip to be detected, and the hot and cold stage is used to adjust the temperature of chip detection; the detection device is arranged on the first platform, connected to the hot and cold stage, and is used to detect the chip to be detected in the hot and cold stage; the superconducting magnet device is arranged on the second platform, passes through the first platform and is connected to the hot and cold stage, and is used to generate a magnetic field and allow the magnetic field to pass through the hot and cold stage; the cooling box is arranged on the second platform, connected to the superconducting magnet device, and is used to generate a temperature environment required for superconductivity.

[0007] By adopting the above technical solution, the carrier is the bearing structure of the probe station, and the other devices of the probe station are installed on the carrier. The carrier has two platforms. The hot and cold table and the detection device are arranged on the upper first platform. The hot and cold table is used to place the chip to be detected during detection. The temperature of the chip during detection can be controlled by the hot and cold table. The detection device is connected to the hot and cold table for detecting the chip placed in the hot and cold table. The hot and cold table and the detection device are arranged on the first platform together, so that the space above the hot and cold table can be vacated to place or remove the chip from the hot and cold table; the superconducting magnet device is installed on the second platform below the first platform, and passes through the first platform to be connected to the hot and cold table. The superconducting magnet device can be moved from the bottom to the top. The magnetic field is emitted, and the magnetic flux lines pass through the chip in the hot and cold table, so that the chip can be detected under the magnetic field to judge the performance of the chip. Compared with the traditional magnetic induction coil to generate the magnetic field, the superconducting magnet has no resistance during operation and will not generate heat loss. Therefore, it can consume less electricity to flow a larger current to generate a stronger magnetic field. In theory, the superconducting magnet does not need to be replenished with electricity after operation, which can save a lot of electricity. In addition, the superconducting magnet can repel external magnetic fields, thereby maintaining the stability of the magnetic field, which is beneficial to improve the accuracy of chip detection. Since the superconducting magnet needs to operate at low temperature, the superconducting magnet device is connected through a cooling box to maintain the low temperature state of the superconducting magnet device.

[0008] Optionally, the detection device is an optical detection device.

[0009] By adopting the above technical solution, since the chip in the hot and cold stage is subject to a strong magnetic field during the detection process, detecting the chip through an electrical detection device will lead to a large deviation in the detection result and the chip performance cannot be accurately detected. Therefore, using an optical detection device to detect the chip can avoid the influence of the strong magnetic field on the detection and ensure the accuracy of the detection.

[0010] Optionally, there are multiple optical detection devices, which are arranged around the hot and cold stages.

[0011] By adopting the above technical solution, since the optical detection equipment can only receive light from one direction, the detection has great limitations. And since the chips in the superconducting magnet device and the hot and cold stage are more difficult to adjust the direction, in order to obtain the optical detection data of the chip from multiple angles, the performance data of the chip can be obtained more completely.

[0012] Optionally, a feeding device is also included, which is arranged on the first platform and is used to install or remove the chip to be tested in the hot and cold platform.

[0013] By adopting the above technical solution, since the chip installation needs to be accurate and the chip is small in size and manual installation is difficult, a feeding device is used to install or remove the chip in the hot and cold table, so that the chip installation process can be accurate and fast.

[0014] Optionally, a stabilizing seat is further included, which is arranged below the second platform and is used to maintain the stability of the supporting frame.

[0015] By adopting the above technical solution, since the probe station is a precision instrument, it is necessary to avoid vibration and tilting as much as possible during testing or daily storage. Therefore, a stabilizing seat is added and installed under the second platform, which is the bottom of the carrier frame. The stabilizing seat has a large weight and can maintain the stability of the probe station under the action of gravity, thereby avoiding vibration or tilting of the probe station caused by external forces.

[0016] Optionally, the stabilizer seat includes a removable counterweight.

[0017] By adopting the above technical solution, when the probe station needs to be moved, the heavy stable seat will become a burden of movement, causing difficulty in movement. Therefore, the counterweight on the stable seat is set to be detachable. When the probe station needs to be moved, the heavy counterweight can be removed, making the movement of the probe station more convenient.

[0018] Optionally, the stabilizing base also includes shock-absorbing pulleys.

[0019] By adopting the above technical solution, the shock-absorbing pulley is used to reduce the vibration caused by uneven road surface during the movement of the probe station, thereby ensuring that the precision probe station will not cause deviations in the detection device due to vibration, thereby ensuring the inspection accuracy of the probe station.

[0020] Optionally, the support frame further includes a lifting device for lifting the frame body of the support frame.

[0021] By adopting the above technical solution, the lifting device can lift the frame of the carrier when the probe station needs to be fixed, so that the stabilizing seat provided on the carrier is also lifted, and the shock-absorbing pulley will leave the ground, completing the fixation of the probe station. When the probe station needs to be moved, the carrier is lowered by the lifting device, so that the probe station can be moved by the shock-absorbing pulley.

[0022] Optionally, a buffer device is also included, which is connected to the stabilizing seat and the second platform and is used to reduce the vibration of the equipment on the second platform when it moves.

[0023] By adopting the above technical solution, during the movement of the probe station, although the shock-absorbing pulley can alleviate some vibrations, the pulley is small in size and the shock-absorbing capacity of the shock-absorbing components that can be installed is also weak. Therefore, it is necessary to add a buffer device with better shock-absorbing capacity. The buffer device is installed between the stable seat and the second platform, so that the shock-absorbing pulley on the stable seat can reduce the vibration caused to other equipment installed on the carrier when moving.

[0024] In summary, the present application includes at least one of the following beneficial technical effects:

[0025] 1. By using a superconducting magnet device to generate a magnetic field, a stronger and more stable magnetic field can be generated, so that more accurate chip detection can be performed. By passing the magnetic field through a hot and cold stage and using the hot and cold stage to control the temperature of chip detection, the probe station can meet various chip detection conditions;

[0026] 2. The use of an optical detection device can prevent the magnetic field generated by the superconducting magnet device from interfering with the electrical detection device during the detection process, thereby ensuring that the chip can be accurately detected in a strong magnetic environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic diagram of the overall structure of the first angle of the embodiment of the present application;

[0028] Figure 2 It is a front view of the overall structure of the embodiment of the present application;

[0029] Figure 3 It is a schematic diagram of the overall structure from the second angle of the embodiment of the present application.

[0030] Figure numerals: 1. Carrying frame; 11. First platform; 12. Second platform; 13. Lifting device; 14. Auxiliary pulley; 2. Hot and cold table; 3. Detection device; 4. Superconducting magnet device; 5. Cooling box; 6. Feeding device; 7. Stable seat; 71. Counterweight; 72. Shock-absorbing pulley; 8. Buffer device; 81. Buffer adjustment device. DETAILED DESCRIPTION

[0031] The following is combined with Figure 1 To Attachment Figure 3 , further details of this application are given.

[0032] A superconducting probe station, referring to Figure 1 and Figure 2, including a carrier 1, a hot and cold table 2, a detection device 3, a superconducting magnet device 4, a cooling box 5, a feeding device 6, a stabilizing seat 7 and a buffer device 8; the carrier 1 includes a first platform 11 and a second platform 12, the first platform 11 is arranged above the second platform 12, the hot and cold table 2, the detection device 3 and the feeding device 6 are arranged on the first platform 11, the hot and cold table 2 is arranged in the middle of the first platform, when the chip is detected, the chip is set in the hot and cold table 2, and the temperature change inside the hot and cold table 2 is adjusted to provide different temperature environments for chip detection, the detection device 3 surrounds the hot and cold table 2, and is used to detect the chip from multiple angles, so that the chip detection can be more complete and detailed The feeding device 6 is arranged on one side of the hot and cold table 2. The feeding device 6 is a mechanical arm structure. The feeding device 6 can be inserted into the hot and cold table 2 after fixing and clamping the chip, and the position of the feeding device 6 is kept unchanged. After the chip detection is completed, the feeding device 6 clamps the chip and takes it out of the hot and cold table 2, thereby completing the detection; a superconducting magnet device 4 and a cooling box 5 are installed on the second platform 12. The superconducting magnet device 4 extends from the second platform 12 to the first platform 11 and is connected to the lower part of the hot and cold table 2. The superconducting magnet device 4 can generate a strong and stable magnetic field, so that the chip detection is more accurate. The cooling box 5 is connected to the superconducting magnet device 4, so as to cool the superconducting magnet device 4 so that it can maintain a superconducting state.

[0033] Reference Figure 2 and Figure 3 A buffer device 8 is installed under the second platform 12, and the other end of the buffer device 8 is connected to a stable seat 7. The buffer device 8 is a spring-like structure that can be compressed or stretched. The stable seat 7 is stuck on the cross bar of the carrier frame 1, thereby limiting the downward movement of the stable seat 7 and the downward stretching of the buffer device 8. The buffer device 8 also includes a buffer adjustment device 81, and the buffer adjustment device 81 can adjust the softness and hardness of the buffer device 8. Removable counterweights 71 are provided on both sides of the stable seat 7. The counterweight 71 can increase the weight of the stable seat 7, and when the probe station needs to be moved, the counterweight 71 is taken out to reduce the weight of the probe station, thereby facilitating movement. A shock-absorbing pulley 72 is also provided under the stable seat 7 to reduce the vibration during the movement of the probe station. The shock-absorbing pulley 72 is connected to the stabilizing seat 7, and the stabilizing seat 7 is connected to the second platform 12 through the buffer device 8. The second platform 12 and the carrier frame 1 are an integral whole. Therefore, the double shock absorption of the shock-absorbing pulley 72 and the buffer device 8 can make the instrument on the carrier frame 1 be subjected to less vibration; a lifting device 13 and an auxiliary pulley 14 are also provided under the carrier frame 1. When fixing the probe station, the lifting device 13 is against the ground to lift the carrier frame 1, and the carrier frame 1 lifts the stabilizing seat 7 through the cross bar, so that the shock-absorbing pulley 72 is lifted off the ground, so that the probe station is fixed, and the auxiliary pulley 14 can play a supporting role when moving on a relatively flat road, disperse the gravity borne by the auxiliary pulley 14, and reduce the load of the shock-absorbing pulley 72.

[0034] The implementation principle of the embodiment of the present application is as follows: the chip to be detected is installed in the feeding device 6, the feeding device 6 accurately transmits the chip to the hot and cold table 2, the hot and cold table 2 adjusts the internal temperature so that the temperature reaches the detection temperature of the chip, the superconducting magnet device 4 forms a stable strong magnetic field in the hot and cold table 2 through the superconducting magnet, and when the detection environment of the chip is adjusted to a suitable one, the detection device 3 starts to detect the chip. After the detection is completed, the feeding device 6 takes the chip out of the hot and cold table 2 to complete the chip detection process. When the probe station needs to be moved, the lifting device 13 is lowered to make the shock-absorbing pulley 72 at the bottom of the stabilizing seat 7 contact the ground, and the carrier frame 1 is lifted by the stabilizing seat 7, so that the probe station can be moved through the shock-absorbing pulley 72.

[0035] The embodiments of this specific implementation are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. The same components are represented by the same figure marks. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A superconducting probe station, characterized in that: include: A carrier frame (1) comprises a first platform (11) and a second platform (12), wherein the first platform (11) is arranged above the second platform (12); A hot and cold stage (2), arranged on the first platform (11), used for placing the chip to be tested, and the hot and cold stage (2) is used for adjusting the temperature of chip testing; A detection device (3), arranged on the first platform (11), connected to the hot and cold stage (2), and used for detecting the chip to be detected in the hot and cold stage (2); A superconducting magnet device (4), arranged on the second platform (12), passing through the first platform (11) to connect to the hot and cold platform (2), and used for generating a magnetic field and allowing the magnetic field to pass through the hot and cold platform (2); A cooling box (5) is arranged on the second platform (12) and connected to the superconducting magnet device (4) and is used to generate a temperature environment required for superconductivity.

2. A superconducting probe station according to claim 1, characterized in that: The detection device (3) is an optical detection device (3).

3. A superconducting probe station according to claim 2, characterized in that: The optical detection devices (3) are multiple in number and are arranged around the cold and hot stage (2).

4. A superconducting probe station according to claim 1, characterized in that: It also comprises a feeding device (6), which is arranged on the first platform (11) and is used to install or remove the chip to be tested in the hot and cold stage (2).

5. A superconducting probe station according to claim 1, characterized in that: It also comprises a stabilizing seat (7), which is arranged below the second platform (12), and is used to maintain the stability of the supporting frame (1).

6. A superconducting probe station according to claim 5, characterized in that: The stabilizing seat (7) comprises a detachable counterweight (71).

7. A superconducting probe station according to claim 5, characterized in that: The stabilizing seat (7) further comprises a shock-absorbing pulley (72).

8. A superconducting probe station according to claim 1, characterized in that: The support frame (1) further comprises a lifting device (13) for lifting the frame body of the support frame (1).

9. A superconducting probe station according to claim 5, characterized in that: It also includes a buffer device (8), which is connected to the stabilizing seat (7) and the second platform (12) and is used to reduce the vibration of the equipment on the supporting frame (1) when it moves.

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