Groove type machine basket detection structure

The detection mechanism keeps the detection rod out of the alkaline solution, using a spring-activated design and elastic ring to prevent adherence, ensuring smooth operation and accurate signal transmission, thus enhancing silicon wafer production efficiency.

CN222259610UActive Publication Date: 2024-12-27ANHUI SHIJING GUANGNENG TECH CO LTD
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Patent Information

Application Number
CN202421012891.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-11
Publication Date
2024-12-27
Estimated Expiration
2034-05-11

AI Technical Summary

Technical Problem

The immersion of the basket detection rod in an alkaline solution leads to adherence of alkaline liquid crystals, increasing friction and causing blockages, jamming, and delayed sensor signal induction, resulting in machine alarms and reduced workshop yield in silicon wafer production.

Method used

A detection mechanism is arranged on a hook to keep the detection rod out of the alkaline solution, using a spring-activated detection rod and an elastic ring to ensure smooth movement and prevent alkaline liquid adherence, with a sensor embedded in the fixed cylinder to transmit signals.

Benefits of technology

Prevents blockages and delays, ensuring accurate sensor signal transmission and maintaining continuous robot arm operations, thereby improving workshop yield by avoiding alkaline liquid adherence and friction-related issues.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of single crystal battery manufacture procedures, in particular to a groove type machine basket detection structure which comprises a mechanical arm and a groove type machine, and an alkaline solution is arranged in the groove type machine. Hanging rods are fixedly connected to the upper ends of the lifting baskets; the tail end of the mechanical arm is fixedly connected with a plurality of connecting plates in one-to-one correspondence with the lifting baskets, and the side walls of the connecting plates are fixedly connected with hooks. According to the utility model, the detection mechanism is arranged on the hook, so that the detection rod cannot be soaked in an alkaline solution, thereby avoiding the phenomenon that in the prior art, the basket detection rod is in an alkaline solution environment for a long time, alkaline solution crystals are attached to the basket detection rod, and the friction force between the basket detection rod and the sleeve is increased; a lifting basket detection rod is blocked and blocked when sliding downwards, signal induction of an inductor is delayed, error information is transmitted, a machine alarm stops running, the next action of a mechanical arm is influenced, overtime of a groove silicon wafer is caused, isolation rework is needed due to abnormal weight reduction, and the yield index of a workshop is seriously influenced.
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Description

Technical Field

[0001] The utility model relates to the technical field of single crystal battery manufacturing process, in particular to a trough type machine basket detection structure. Background Art

[0002] Currently, in the production process of silicon wafers, they need to be placed in a basket, and then the basket is immersed in a trough machine filled with alkaline solution through a robotic arm, and a basket detection rod and a sleeve are set at the bottom of the trough machine, and a sensor is set in the sleeve, so that the basket moves downward to squeeze the basket detection rod into the sleeve, so that the sensor senses the basket detection rod, thereby realizing self-detection of the basket.

[0003] However, when the robot arm performs the normal basket lifting and placing action, since the basket lifting detection rod has been in an alkaline solution environment for a long time, alkaline liquid crystals adhere to the basket lifting detection rod, increasing the friction between the basket lifting detection rod and the sleeve, causing blockage and jamming in the downward movement of the basket lifting detection rod, delaying the sensor signal induction, transmitting error information, and causing the machine to alarm and stop running, affecting the next action of the robot arm, causing the trough silicon wafer to time out, and the weight loss abnormality requires isolation and rework, which seriously affects the workshop yield indicators. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and proposes a trough type machine basket detection structure.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A trough type machine basket detection structure, comprising:

[0007] A mechanical arm and a slot machine, wherein the slot machine is provided with an alkaline solution;

[0008] A plurality of baskets, wherein the upper ends of the baskets are fixedly connected with hanging rods;

[0009] The end of the mechanical arm is fixedly connected with a plurality of connecting plates corresponding to the plurality of baskets one by one, the side wall of the connecting plate is fixedly connected with a hook, and the hanging rod is sleeved on the hook;

[0010] The detection mechanism includes a fixed cylinder fixedly connected to the upper end of the hook, a detection rod slidably connected to the inner wall of the fixed cylinder, a base fixedly connected to the lower end of the detection rod, an upper end of the detection rod is elastically connected to the top of the fixed cylinder through a spring, a sensor is embedded in the inner wall of the fixed cylinder, and a detection block facing the sensor is embedded in the side wall of the detection rod.

[0011] Preferably, the sensor transmits the detection result signal to an external PLC, converts the signal and transmits it to an external human-machine interface through a network cable.

[0012] Preferably, an elastic ring is fixedly connected to the lower end of the fixing tube, and the lower end of the elastic ring is fixedly connected to the upper end of the base.

[0013] The utility model has the following beneficial effects:

[0014] 1. The detection mechanism is arranged on the hook so that the detection rod will not be immersed in the alkaline solution, thereby avoiding the problem in the prior art that the basket detection rod is in an alkaline solution environment for a long time, the alkaline liquid crystal adheres to the basket detection rod, and the friction between the basket detection rod and the sleeve is increased, causing blockage and jamming of the downward movement of the basket detection rod, delaying the induction of the sensor signal, transmitting error information, causing the machine alarm to stop running, affecting the next action of the robot arm, causing the trough silicon wafer to time out, and the weight loss abnormality needs to be isolated and reworked, which seriously affects the workshop yield index.

[0015] 2. An elastic ring is provided to protect the side wall of the detection rod to prevent alkaline liquid crystal from adhering to the side wall of the detection rod, thereby affecting its normal up and down sliding. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a structural schematic diagram of a trough type machine basket detection structure proposed by the utility model;

[0017] Figure 2 for Figure 1 A schematic diagram of the enlarged structure at point A in the middle.

[0018] In the figure: 1. Robotic arm; 2. Trough machine; 3. Basket; 4. Hanging rod; 5. Connecting plate; 6. Hook; 7. Fixing cylinder; 8. Detection rod; 9. Base; 10. Spring; 11. Sensor; 12. Detection block; 13. Elastic ring. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0020] Reference Figure 1-2 A slot machine basket detection structure includes a mechanical arm 1 and a slot machine 2, wherein the slot machine 2 is provided with an alkaline solution.

[0021] A plurality of baskets 3 are provided, and a hanging rod 4 is fixedly connected to the upper end of the baskets 3.

[0022] At the end of the robotic arm 1, a plurality of connecting plates 5 corresponding to the plurality of baskets 3 are fixedly connected, and a hook 6 is fixedly connected to the side wall of the connecting plate 5. The hanging rod 4 is sleeved on the hook 6. The basket 3 can be moved up, down, left, right, forward and backward by the robotic arm 1, which is the prior art.

[0023] The detection mechanism includes a fixed cylinder 7 fixedly connected to the upper end of the hook 6, a detection rod 8 is slidably connected to the inner wall of the fixed cylinder 7, a base 9 is fixedly connected to the lower end of the detection rod 8, the upper end of the detection rod 8 is elastically connected to the top of the fixed cylinder 7 through a spring 10, a sensor 11 is embedded in the inner wall of the fixed cylinder 7, and a detection block 12 facing the sensor 11 is embedded in the side wall of the detection rod 8.

[0024] Furthermore, the detection mechanism is arranged on the hook 6 so that the detection rod 8 will not be immersed in the alkaline solution, thereby avoiding the prior art that the basket detection rod is in an alkaline solution environment for a long time, the alkaline liquid crystal is attached to the basket detection rod, the friction between the basket detection rod and the sleeve is increased, and the downward movement of the basket detection rod is blocked and stuck, causing the sensor signal induction delay, transmitting error information, the machine alarm stops running, affecting the next action of the robot arm, causing the trough body silicon wafer to time out, and the abnormal weight loss needs to be isolated and reworked, which seriously affects the workshop yield index;

[0025] At the same time, when there is no hanging rod 4 on the hook 6, the detection rod 8 moves downward under the elastic force of the spring 10, so that the detection block 12 is separated from the sensor 11, and there is no sensing signal on the sensor 11. When the hanging rod 4 is mounted on the hook 6, the lower end of the base 9 is fitted with the upper end of the hanging rod 4, pushing the detection rod 8 upward. At this time, the detection block 12 is facing the sensor 11, and there is a sensing signal on the sensor 11, and then subsequent operations are performed.

[0026] The sensor 11 transmits the detection result signal to the external PLC, and then transmits the converted signal to the external human-machine interface through the network cable. At this time, the external human-machine interface displays the alarm information and the buzzer alarm emits an audible and visual alarm to give the current state of the robot 1, complete the detection effect output, and realize the automatic processing of the work flow. This processing flow is a prior art and will not be repeated here.

[0027] The lower end of the fixing tube 7 is fixedly connected with an elastic ring 13, and the lower end of the elastic ring 13 is fixedly connected to the upper end of the base 9, which can protect the side wall of the detection rod 8 and prevent the alkaline liquid crystal from adhering to the side wall of the detection rod 8, thereby affecting its normal up and down sliding.

[0028] When soaking the silicon wafers, first, the hanging rod 4 on the basket 3 containing the silicon wafers is sleeved on the hook 6. At this time, the lower end of the base 9 is fitted with the upper end of the hanging rod 4, and the detection rod 8 is pushed upward. At this time, the detection block 12 is directly opposite to the sensor 11, and there is an induction signal on the sensor 11. Then the sensor 11 transmits the detection result signal to the external PLC and converts the signal to the external human-machine interface through the network cable. At this time, the external human-machine interface displays the alarm information and the buzzer alarm emits an audible and visual alarm to give the state of the robot arm 1 at this time, complete the detection effect output, and realize the automatic processing of the work process;

[0029] In addition, the detection mechanism is arranged on the hook 6, so that the detection rod 8 will not be immersed in the alkaline solution, thereby avoiding the problem in the prior art that the basket detection rod is in an alkaline solution environment for a long time, the alkaline liquid crystal is attached to the basket detection rod, the friction between the basket detection rod and the sleeve is increased, and the downward movement of the basket detection rod is blocked and stuck, which causes the sensor signal induction delay and transmits error information. The machine alarm stops running, affecting the next action of the robot arm, causing the trough silicon wafer to time out, and the weight loss abnormality needs to be isolated and reworked, which seriously affects the workshop yield index.

[0030] The above are only preferred specific implementation methods of the utility model, but the protection scope of the utility model is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the utility model, who makes equivalent replacements or changes based on the technical scheme and utility model concept of the utility model, should be covered by the protection scope of the utility model.

Claims

1. A trough machine basket detection structure, characterized in that: include: A mechanical arm (1) and a slot machine (2), wherein an alkaline solution is provided in the slot machine (2); A plurality of baskets (3), wherein the upper ends of the baskets (3) are fixedly connected to hanging rods (4); A plurality of connecting plates (5) corresponding one to one with the plurality of baskets (3) are fixedly connected to the end of the mechanical arm (1); a hook (6) is fixedly connected to the side wall of the connecting plate (5); and the hanging rod (4) is sleeved on the hook (6); The detection mechanism comprises a fixed cylinder (7) fixedly connected to the upper end of a hook (6), a detection rod (8) being slidably connected to the inner wall of the fixed cylinder (7), a base (9) being fixedly connected to the lower end of the detection rod (8), an upper end of the detection rod (8) being elastically connected to the top of the fixed cylinder (7) via a spring (10), a sensor (11) being embedded in the inner wall of the fixed cylinder (7), and a detection block (12) being embedded in the side wall of the detection rod (8) and facing the sensor (11).

2. A trough type machine basket detection structure according to claim 1, characterized in that: The sensor (11) transmits the detection result signal to an external PLC, converts the signal, and then transmits it to an external human-machine interface through a network cable.

3. A trough type machine basket detection structure according to claim 1, characterized in that: The lower end of the fixed cylinder (7) is fixedly connected to an elastic ring (13), and the lower end of the elastic ring (13) is fixedly connected to the upper end of the base (9).