Galvanometer adjusting device and galvanometer adjusting equipment

Abstract

The embodiment of the utility model relates to the field of optical device manufacturing, in particular to a galvanometer adjusting device which comprises a rack assembly, a light emitting assembly and a light reflecting assembly. The rack assembly comprises a first base, a second base and a third base. The first base and the second base are arranged at an interval; the light emitting assembly and the third base are arranged on the two sides of the second base respectively, and the third base is used for installing a galvanometer; the light emitting assembly is provided with a light emitting hole and is used for emitting a correction light beam to the galvanometer through the light emitting hole; the light reflection assembly is arranged on the first base and used for reflecting the correction light beam passing through the galvanometer to form a reflection light beam, so that the reflection light beam passes through the galvanometer and then is transmitted to the light emission hole of the light emission assembly. The utility model further relates to galvanometer adjusting equipment. According to the technical scheme, the galvanometer debugging precision can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of optical device manufacturing, and in particular to a galvanometer adjustment device and a galvanometer adjustment equipment. Background Art

[0002] During the production process of the galvanometer, the center point of the galvanometer needs to be debugged. However, during the current galvanometer debugging, the error of the galvanometer is difficult to detect due to the short propagation distance of the light path used to calibrate the galvanometer light path, which leads to low debugging accuracy of the galvanometer. Utility Model Content

[0003] Based on this, the embodiments of the present application provide a galvanometer adjustment device and a galvanometer adjustment equipment.

[0004] In order to solve the above technical problems, the embodiment of the present application provides a galvanometer adjustment device, which adopts the following technical solution:

[0005] A galvanometer adjustment device, comprising:

[0006] The frame assembly comprises a first base, a second base and a third base; the first base and the second base are spaced apart from each other;

[0007] A light emitting assembly and the third base are respectively arranged on both sides of the second base, the third base is used to install the galvanometer; the light emitting assembly has a light emitting hole, and the light emitting assembly is used to emit a correction light beam to the galvanometer through the light emitting hole;

[0008] The light reflecting component is arranged on the first base, and is used for reflecting the correction light beam passing through the galvanometer to form a reflected light beam, so that the reflected light beam propagates to the light emitting hole of the light emitting component after passing through the galvanometer.

[0009] Further, the first base has a first area and a second area arranged along a first direction;

[0010] The second base is arranged in the first area; the light emitting assembly and the third base are arranged on both sides of the second base along the first direction, and the side of the third base away from the light emitting assembly is used to install the galvanometer;

[0011] The light reflecting component is disposed on the second area.

[0012] Further, the third base includes a connected bracket and a mounting plate;

[0013] The bracket is mounted on the second base;

[0014] The mounting plate has a side away from the light emitting component for mounting a galvanometer, and the mounting plate is provided with a through hole for the correction light beam or the reflection light beam to pass through.

[0015] Furthermore, the bracket is provided with a plurality of first adjustment holes;

[0016] The mounting plate is provided with second adjustment holes used in conjunction with at least part of the first adjustment holes, and the second adjustment holes are used to cooperate with the first adjustment holes to adjust the position of the mounting plate.

[0017] Furthermore, the galvanometer adjustment device further includes a first angle adjustment component and / or a second angle adjustment component;

[0018] The first angle adjustment component is installed between the light emitting component and the second base, and is used to adjust the angle of the light emitting component;

[0019] The second angle adjustment component is installed between the light reflection component and the first base, and is used for adjusting the angle of the light reflection component.

[0020] Further, the number of the first angle adjustment components is multiple, each of the first angle adjustment components is stacked and installed between the light emitting component and the second base, and each of the first angle adjustment components is used to adjust the angle position of the light emitting component in different directions; and / or,

[0021] There are multiple groups of the second angle adjustment components, each of which is stacked and installed between the light reflection component and the first base, and each of the second angle adjustment components is used to adjust the angle position of the light reflection component in different directions.

[0022] Further, the first angle adjustment component and / or the second angle adjustment component comprises a slider, a slide rail and a driving member;

[0023] The slide rail is provided with an arc-shaped notch;

[0024] The slider has a sliding portion slidably mounted on the arc-shaped notch;

[0025] The driving member is connected to the sliding part and is used for driving the sliding part to slide on the arc-shaped notch.

[0026] Furthermore, a locking portion is provided on one side of the slider;

[0027] The locking portion is used to lock or release the position of the sliding portion on the arc-shaped notch.

[0028] Further, the rack assembly includes a fourth base, and the light reflection assembly is arranged on the fourth base;

[0029] The first base is provided with a plurality of third adjustment holes, the fourth base is provided with fourth adjustment holes used in conjunction with at least some of the third adjustment holes, and the fourth adjustment holes are used to cooperate with the third adjustment holes to adjust the position of the fourth base.

[0030] In order to solve the above technical problems, the embodiment of the present application further provides a galvanometer adjustment device, which adopts the following technical solution:

[0031] A galvanometer adjustment device comprises the galvanometer adjustment device as described above.

[0032] Compared with the prior art, the embodiments of the present application have the following beneficial effects: the light beam path in the galvanometer debugging process of the present application goes back and forth and passes through the galvanometer, which increases the propagation distance of the light beam path and the number of reflections in the galvanometer, so that the deviation of the lens inside the galvanometer can be more easily detected and reflected in the light spot finally formed near the light reflection hole, thereby improving the galvanometer debugging accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the scheme of the present application, a brief introduction is given below to the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0034] Figure 1 is a schematic diagram of the three-dimensional structure of a galvanometer adjustment device according to an embodiment of the present application;

[0035] Figure 2 is a schematic diagram of the propagation of a correction light beam of the galvanometer adjustment device during galvanometer debugging according to an embodiment of the present application;

[0036] Figure 3 is a schematic diagram of the propagation of a reflected light beam of the galvanometer adjustment device during galvanometer debugging according to an embodiment of the present application;

[0037] Reference numerals:

[0038] 100, rack assembly; 110, first base; 111, first area; 112, second area; 113, third adjustment hole; 120, second base; 130, third base; 131, bracket; 1311, first adjustment hole; 132, mounting plate; 1321, through hole; 1322, second adjustment hole; 140, fourth base; 141, fourth adjustment hole; 150, stand; 200, light emitting assembly; 210, light emitting hole; 300, light reflecting assembly; 400A, first angle adjustment assembly; 400B, second angle adjustment assembly; 410, slider; 411, sliding portion; 412, locking portion; 420, slide rail; 421, arc-shaped notch; 430, driving member; 500, galvanometer. DETAILED DESCRIPTION

[0039] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by technicians in the technical field of this application; the terms used in the specification of the application herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, not to describe a specific order.

[0040] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0041] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings.

[0042] See also Figures 1 to 3The embodiment of the present application provides a galvanometer adjustment device, including a frame assembly 100, a light emitting assembly 200 and a light reflecting assembly 300; the frame assembly 100 includes a first base 110, a second base 120 and a third base 130; the first base 110 and the second base 120 are arranged at intervals; the light emitting assembly 200 and the third base 130 are respectively arranged on both sides of the second base 120, and the third base 130 is used to install the galvanometer 500; the light emitting assembly 200 has a light emitting hole 210, and the light emitting assembly 200 is used to emit a correction light beam to the galvanometer 500 through the light emitting hole 210; the light reflecting assembly 300 is arranged on the first base 110, and is used to reflect the correction light beam passing through the galvanometer 500 to form a reflected light beam, so that the reflected light beam passes through the galvanometer 500 and propagates to the light emitting hole 210 of the light emitting assembly 200.

[0043] The galvanometer adjustment device of this embodiment is applied to the debugging and detection of the galvanometer 500, specifically: Figure 2 When the galvanometer 500 is mounted on the third base 130 for debugging, the light emitting assembly 200 emits a correction light beam to the galvanometer 500 to be tested through the light emitting hole 210, and the galvanometer 500 deflects the correction light beam and propagates it to the light reflecting assembly 300, see Figure 3 At this time, the light reflection component 300 reflects the correction light beam to form a reflected light beam, and propagates it to the galvanometer 500. The galvanometer 500 deflects the reflected light beam and propagates it to the light emitting hole 210. At this time, by comparing whether the light spot formed by the reflected light beam near the light reflection hole of the light emitting component 200 is located in the light emitting hole 210, if so, the debugging of the galvanometer 500 is completed. If not, it indicates that the position of the lens in the galvanometer 500 needs to be debugged until the light spot position is located in the light emitting hole 210. After the debugging of the galvanometer 500 is completed, the galvanometer 500 currently installed on the third base 130 is disassembled and removed, and another galvanometer 500 can be installed on the third base 130 for the next round of debugging.

[0044] In this way, the light beam path during the debugging process of the galvanometer 500 goes back and forth and passes through the galvanometer 500, which increases the propagation distance of the light beam path and the number of reflections in the galvanometer 500, so that the deviation of the lens inside the galvanometer 500 can be more easily detected and reflected in the light spot finally formed near the light reflection hole, thereby improving the debugging accuracy of the galvanometer 500.

[0045] In some embodiments, see Figures 1 to 3 The light emitting assembly 200 includes a light source emitter, which is used to emit infrared light or laser, and the light source emitter can be mounted on the second base 120 by bonding, welding or by an angle adjustment assembly.

[0046] In some embodiments, see Figures 1 to 3 The light reflecting assembly 300 includes a reflector, which can be mounted on the first base 110 by bonding, welding or by an angle adjustment assembly.

[0047] In some embodiments, see Figures 1 to 3 The first base 110 and the second base 120 are connected via a stand 150 , so that the first base 110 and the second base 120 are spaced apart to facilitate the coordinated use of the light emitting assembly 200 and the light reflecting assembly 300 .

[0048] In some embodiments, see Figures 1 to 3 The first base 110 has a first area 111 and a second area 112 arranged along a first direction; the second base 120 is arranged in the first area 111; the light emitting component 200 and the third base 130 are respectively arranged on both sides of the second base 120 along the first direction, and the side of the third base 130 away from the light emitting component 200 is used to install the galvanometer 500; the light reflecting component 300 is arranged on the second area 112.

[0049] In this embodiment, the third base 130 and the light emitting component 200 are respectively arranged on both sides of the second base 120 along the first direction to increase the light beam propagation distance between the third base 130 and the light emitting component 200, so that the deviation changes in the position on the third base 130 and / or the light emitting component 200 accumulate with the increase of the propagation distance, so that these deviation changes can be more easily reflected in the light spot finally formed near the light reflection hole, thereby further improving the accuracy of the debugging of the galvanometer 500.

[0050] In some embodiments, see Figures 1 to 3 The third base 130 includes a connected bracket 131 and a mounting plate 132; the bracket 131 is mounted on the second base 120; the mounting plate 132 has a side away from the light emitting assembly 200 for mounting the galvanometer 500, and the mounting plate 132 is provided with a through hole 1321 for the correction beam or the reflected beam to pass through. In this way, there is sufficient space on the mounting surface for the galvanometer 500 to be installed, so that the galvanometer adjustment device of the present application can be adapted to the debugging of galvanometers 500 of different types and sizes, and has wide applicability.

[0051] Furthermore, a fixing hole is provided on the mounting plate 132, and the fixing hole is used to cooperate with the hole position on the galvanometer 500 to realize the installation of the galvanometer 500 on the mounting plate 132; for example, when the galvanometer 500 is installed on the mounting plate 132, the hole position on the galvanometer 500 is matched with the position of the fixing hole on the mounting plate 132, and then screws are passed through the hole position of the galvanometer 500 and the fixing hole on the mounting plate 132 to realize the connection and fixation of the two.

[0052] In some embodiments, see Figures 1 to 3 The bracket 131 is provided with a plurality of first adjustment holes 1311 ; the mounting plate 132 is provided with second adjustment holes 1322 used in conjunction with at least some of the first adjustment holes 1311 , and the second adjustment holes 1322 are used to cooperate with the first adjustment holes 1311 to adjust the position of the mounting plate 132 .

[0053] In this embodiment, the position of the mounting plate 132 on the bracket 131 can be changed by moving the mounting plate 132. After the mounting plate 132 is moved to the target position and the second adjustment hole 1322 on the mounting plate 132 corresponds to the position of at least part of the first adjustment hole 1311, a plurality of fixing components are respectively passed through the first adjustment holes 1311 and the second adjustment holes 1322 corresponding to each position, so that the mounting plate 132 is fixed on the bracket 131, thereby realizing the adjustment of the position of the mounting plate 132. This can meet the light beam passing requirements in different debugging requirements and the debugging requirements of galvanometers 500 of different types and / or sizes, and has a wide range of applicability.

[0054] In some embodiments, see Figures 1 to 3 A plurality of first adjustment holes 1311 can be arranged in an array along the length direction of the bracket 131, and one or at least two first adjustment holes 1311 form a primary position, so that the bracket 131 has multi-level position adjustment. In practical applications, the second adjustment hole 1322 on the mounting plate 132 can correspond to the position of the first adjustment hole 1311 at any primary position on the bracket 131, and the two can be locked by the first fixing component, thereby realizing the adjustment of different positions of the mounting plate 132, which has wide applicability.

[0055] Furthermore, the first fixing component is a screw, a bolt, a fixing shaft, etc., which is not specifically limited here.

[0056] Preferably, the first fixing component may be a screw, in which case the first adjustment hole 1311 and the second adjustment hole 1322 are threaded holes, and the screw passes through the first adjustment hole 1311 and the second adjustment hole 1322 and is threadedly connected to the first adjustment hole 1311 and the second adjustment hole 1322, thereby achieving connection and fixation between the mounting plate 132 and the bracket 131.

[0057] In some embodiments, see Figures 1 to 3The galvanometer adjustment device also includes a first angle adjustment component 400A and / or a second angle adjustment component 400B; the first angle adjustment component 400A is installed between the light emitting component 200 and the second base 120, and is used to adjust the angle of the light emitting component 200; the second angle adjustment component 400B is installed between the light reflecting component 300 and the first base 110, and is used to adjust the angle of the light reflecting component 300.

[0058] It can be understood that when the galvanometer adjustment device includes a first angle adjustment component 400A, the angle of the light emitting component 200 can be adjusted by the first angle adjustment component 400A to adjust the emission direction of the correction light beam of the light emitting component 200, so that it can be adapted to the debugging of different types of galvanometers 500, ensuring that the correction light beam can be deflected to the light reflecting component 300 through the galvanometer 500, and that different types of light emitting components 200 can be adapted to be installed on the second base 120, and the assembly and processing errors of the first base 110, the second base 120, and the third base 130 can be eliminated, thereby ensuring the debugging accuracy of the galvanometer adjustment device of the present application.

[0059] Secondly, when the galvanometer adjustment device includes a second angle adjustment component 400B, the angle of the light reflecting component 300 can be adjusted by the second angle adjustment component 400B to adjust the direction of the light beam reflected by the light reflecting component 300, so that different types of galvanometers 500 can be adapted for debugging, ensuring that the reflected light beam can be deflected to the light emitting component 200 through the galvanometer 500, and different types of light reflecting components 300 can be adapted for installation on the first base 110, and the assembly and processing errors of the first base 110, the second base 120, and the third base 130 can be eliminated, thereby ensuring the debugging accuracy of the galvanometer adjustment device of the present application.

[0060] In some embodiments, see Figures 1 to 3 , the number of the first angle adjustment components 400A is multiple groups, and each of the first angle adjustment components 400A is stacked and installed between the light emitting component 200 and the second base 120, so as to ensure the compactness of the structure of each first angle adjustment component 400A after stacking, and facilitate the stacking installation or disassembly of the first angle adjustment components 400A; and, each of the first angle adjustment components 400A is used to adjust the angular position of the light emitting component 200 in different directions, so that each first angle adjustment component 400A is independent of each other and has different angle adjustment directions, with strong flexibility, so that the light emitting component 200 can adapt to more types of galvanometer 500 debugging, and further improve the debugging accuracy of the adjustment device of the galvanometer 500.

[0061] For example, there are two groups of the first angle adjustment components 400A, which are used to adjust the angles of the light emitting component 200 in the X direction and the Y direction respectively. The two groups of first angle adjustment components 400A are stacked on the second base 120, and the light emitting component 200 is stacked on the topmost first angle adjustment component 400A. In this way, in actual applications, the angle position adjustment of the light emitting component 200 in the corresponding direction can be achieved by adjusting one of the first angle adjustment components 400A.

[0062] In some embodiments, see Figures 1 to 3 , the number of the second angle adjustment components 400B is multiple groups, and each of the second angle adjustment components 400B is stacked and installed between the light reflecting component 300 and the first base 110, so as to ensure the compactness of the structure of each second angle adjustment component 400B after stacking, and facilitate the stacking installation or disassembly of the second angle adjustment components 400B; and, each of the second angle adjustment components 400B is used to adjust the angular position of the light reflecting component 300 in different directions, so that each second angle adjustment component 400B is independent of each other and has different angle adjustment directions, with strong flexibility, so that the light reflecting component 300 can be adapted to more types of galvanometer 500 debugging, and further improve the debugging accuracy of the adjustment device of the galvanometer 500.

[0063] For example, there are two groups of the second angle adjustment components 400B, which are respectively used to adjust the angles of the light reflecting component 300 in the X direction and the Y direction. The two groups of second angle adjustment components 400B are stacked on the first base 110, and the light reflecting component 300 is stacked on the topmost second angle adjustment component 400B. In this way, in actual applications, the angle position adjustment of the light reflecting component 300 in the corresponding direction can be achieved by adjusting one of the second angle adjustment components 400B.

[0064] In some embodiments, see Figures 1 to 3 The first angle adjustment component 400A and / or the second angle adjustment component 400B includes a slider 410, a slide rail 420 and a driving member 430; the slide rail 420 is provided with an arc-shaped notch 421; the slider 410 has a sliding portion 411 slidably mounted on the arc-shaped notch 421; the driving member 430 is connected to the sliding portion 411, and is used to drive the sliding portion 411 to slide on the arc-shaped notch 421.

[0065] When the angular position of the light emitting component 200 or the light reflecting component 300 needs to be adjusted, the sliding portion 411 of the slider 410 is driven by the driving portion to slide along the surface of the arc-shaped notch 421 on the slide rail 420. Such a sliding structure can ensure the accuracy of the sliding position of the sliding portion 411, thereby ensuring the accuracy of the light emitting component 200 or the light reflecting component 300, and makes the surface of the slider 410 away from the arc-shaped notch 421 tilt as the slider 410 slides, thereby tilting the light emitting component 200 or the light reflecting component 300 arranged on the surface of the slider 410 away from the arc-shaped notch 421, thereby realizing the angular position adjustment of the light emitting component 200 or the light reflecting component 300, with a compact structure and strong reliability.

[0066] In some embodiments, the driving member 430 is a worm, one end of which is a screwing portion disposed on the outside of the slide rail 420, and the other end of the worm extends into the slide rail 420. Accordingly, a tooth pattern is formed on the sliding portion 411 that is meshed with the worm located in the slide rail 420. In actual applications, the worm is rotated by screwing the screwing portion on the worm, and the sliding portion 411 is driven to slide on the arc-shaped notch 421, thereby realizing the angular position adjustment of the light emitting component 200 or the light reflecting component 300 on the slider 410. The operation is simple, and the transmission method of the worm and the tooth pattern on the sliding portion 411 has high transmission accuracy, which effectively ensures the accuracy of the sliding position of the sliding portion 411.

[0067] In some embodiments, see Figures 1 to 3 , a locking portion 412 is provided on one side of the slider 410; the locking portion 412 is used to lock or release the position of the sliding portion 411 on the arc-shaped notch 421. In this way, after adjusting the position of the slider 410, the position of the sliding portion 411 on the arc-shaped notch 421 is locked by the locking portion 412 to prevent the sliding portion 411 from sliding during the subsequent debugging of the galvanometer 500, thereby ensuring the stability of the angle position after adjustment; and when adjusting the position of the slider 410, the sliding portion 411 is released by the locking portion 412, so that the sliding portion 411 can slide on the arc-shaped notch 421.

[0068] In some embodiments, the locking portion 412 is a locking screw, one end of which is a nut disposed outside the slider 410, and the other end of the locking screw is threadedly connected to the threaded portion and passes through the slider 411 to abut against the track of the slider 420 located in the arc-shaped notch 421. In this way, the locking screw locks the position of the slider 411 on the arc-shaped notch 421 by utilizing the threaded connection structure of the locking screw and the slider 411, and the abutment force between the other end of the locking screw and the track of the slider 420 located in the arc-shaped notch 421; when the slider 411 needs to be driven to slide, the locking screw is reversely screwed so that the other end of the locking screw is not in abutment with the track of the slider 420 located in the arc-shaped notch 421, thereby releasing the slider 411. At this time, the driving portion can drive the slider 411 to slide on the arc-shaped notch 421 to adjust the angle of the slider 410.

[0069] In some embodiments, see Figures 1 to 3 The rack assembly 100 includes a fourth base 140, and the light reflecting assembly 300 is arranged on the fourth base 140; the first base 110 is provided with a plurality of third adjustment holes 113, and the fourth base 140 is provided with fourth adjustment holes 141 used in conjunction with at least some of the third adjustment holes 113, and the fourth adjustment holes 141 are used to cooperate with the third adjustment holes 113 to adjust the position of the fourth base 140.

[0070] In this embodiment, the position of the fourth base 140 on the first base 110 can be changed by moving it. After the fourth base 140 is moved to the target position and the fourth adjustment hole 141 on the fourth base 140 corresponds to the position of at least part of the third adjustment hole 113, a plurality of second fixing components are respectively passed through the third adjustment holes 113 and the fourth adjustment holes 141 corresponding to each position, so that the fourth base 140 is fixed on the first base 110, thereby realizing the adjustment of the position of the fourth base 140, which can meet the light beam reflection requirements in different debugging requirements and the debugging requirements of galvanometers 500 of different types and / or sizes, and has wide applicability.

[0071] In some embodiments, the second fixing component is a screw, a bolt, a fixing shaft, etc., which is not specifically limited here.

[0072] Preferably, the second fixing component may be a screw, in which case the first adjustment hole 1311 and the second adjustment hole 1322 are threaded holes, and the screw passes through the first adjustment hole 1311 and the second adjustment hole 1322 and is threadedly connected to the first adjustment hole 1311 and the second adjustment hole 1322, thereby achieving connection and fixation between the mounting plate 132 and the bracket 131.

[0073] An embodiment of the present application also provides a galvanometer adjustment device, including the galvanometer adjustment device as described above.

[0074] In this embodiment, the galvanometer adjustment device further includes a control component for controlling the movement of the galvanometer 500. Understandably, when the galvanometer 500 is mounted on the third base 130 for debugging, the light emitting component 200 emits a correction light beam to the galvanometer 500 to be tested through the light emitting hole 210, and the galvanometer 500 deflects the correction light beam and propagates it to the light reflecting component 300. At this time, the light reflecting component 300 reflects the correction light beam to form a reflected light beam and propagates it into the galvanometer 500. The galvanometer 500 deflects the reflected light beam and propagates it to the light emitting hole 210. At this time, by comparing whether the light spot formed by the reflected light beam near the light reflecting hole of the light emitting component 200 is located If it is in the light emitting hole 210, the debugging of the galvanometer 500 is completed; if not, it indicates that the position of the lens in the galvanometer 500 needs to be debugged, and the movement of the lens in the galvanometer 500 is controlled by the control component to change the beam directions of the correction light beam and the reflected light beam, until the position of the final formed light spot is located in the light emitting hole 210, and the debugging of the galvanometer 500 is completed; after the debugging of the galvanometer 500 is completed, the galvanometer 500 currently installed on the third base 130 is disassembled and removed, and another galvanometer 500 can be installed on the third base 130 for the next round of debugging.

[0075] In this way, the light beam path during the debugging process of the galvanometer 500 goes back and forth and passes through the galvanometer 500, which increases the propagation distance of the light beam path and the number of reflections in the galvanometer 500, so that the deviation of the lens inside the galvanometer 500 can be more easily detected and reflected in the light spot finally formed near the light reflection hole, thereby improving the debugging accuracy of the galvanometer 500.

[0076] In some embodiments, the control component may be a central processing unit (CPU), a controller, a microcontroller, a microprocessor, a PLC or other data processing chip, which is not specifically limited herein.

[0077] Obviously, the embodiments described above are only some embodiments of the present application, rather than all embodiments. The preferred embodiments of the present application are given in the accompanying drawings, but they do not limit the patent scope of the present application. The present application can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present application more thorough and comprehensive. Although the present application is described in detail with reference to the aforementioned embodiments, for those skilled in the art, it is still possible to modify the technical solutions recorded in the aforementioned specific implementation methods, or to perform equivalent replacement of some of the technical features therein. Any equivalent structure made using the contents of the specification and drawings of this application, directly or indirectly used in other related technical fields, is similarly within the scope of patent protection of this application.

Claims

1. A galvanometer adjustment device, characterized in that: include: A rack assembly, comprising a first base, a second base and a third base; The first base and the second base are spaced apart from each other; A light emitting assembly and the third base are respectively arranged on both sides of the second base, the third base is used to install the galvanometer; the light emitting assembly has a light emitting hole, and the light emitting assembly is used to emit a correction light beam to the galvanometer through the light emitting hole; The light reflecting component is arranged on the first base, and is used for reflecting the correction light beam passing through the galvanometer to form a reflected light beam, so that the reflected light beam propagates to the light emitting hole of the light emitting component after passing through the galvanometer.

2. The galvanometer adjustment device according to claim 1, characterized in that: The first base has a first area and a second area arranged along a first direction; The second base is arranged in the first area; the light emitting assembly and the third base are arranged on both sides of the second base along the first direction, and the side of the third base away from the light emitting assembly is used to install the galvanometer; The light reflecting component is disposed on the second area.

3. The galvanometer adjustment device according to claim 1, characterized in that: The third base includes a connected bracket and a mounting plate; The bracket is mounted on the second base; The mounting plate has a side away from the light emitting component for mounting a galvanometer, and the mounting plate is provided with a through hole for the correction light beam or the reflection light beam to pass through.

4. The galvanometer adjustment device according to claim 3, characterized in that: The bracket is provided with a plurality of first adjustment holes; The mounting plate is provided with second adjustment holes used in conjunction with at least part of the first adjustment holes, and the second adjustment holes are used to cooperate with the first adjustment holes to adjust the position of the mounting plate.

5. The galvanometer adjustment device according to any one of claims 1 to 4, characterized in that: The galvanometer adjustment device further includes a first angle adjustment component and / or a second angle adjustment component; The first angle adjustment component is installed between the light emitting component and the second base, and is used to adjust the angle of the light emitting component; The second angle adjustment component is installed between the light reflection component and the first base, and is used for adjusting the angle of the light reflection component.

6. The galvanometer adjustment device according to claim 5, characterized in that: The number of the first angle adjustment components is multiple, each of the first angle adjustment components is stacked and installed between the light emitting component and the second base, and each of the first angle adjustment components is used to adjust the angle position of the light emitting component in different directions; and / or, There are multiple groups of the second angle adjustment components, each of which is stacked and installed between the light reflection component and the first base, and each of the second angle adjustment components is used to adjust the angle position of the light reflection component in different directions.

7. The galvanometer adjustment device according to claim 5, characterized in that: The first angle adjustment assembly and / or the second angle adjustment assembly comprises a slider, a slide rail and a driving member; The slide rail is provided with an arc-shaped notch; The slider has a sliding portion slidably mounted on the arc-shaped notch; The driving member is connected to the sliding part and is used for driving the sliding part to slide on the arc-shaped notch.

8. The galvanometer adjustment device according to claim 7, characterized in that: A locking portion is provided on one side of the slider; The locking portion is used to lock or release the position of the sliding portion on the arc-shaped notch.

9. The galvanometer adjustment device according to any one of claims 1 to 4, characterized in that: The frame assembly includes a fourth base, and the light reflection assembly is arranged on the fourth base; The first base is provided with a plurality of third adjustment holes, the fourth base is provided with fourth adjustment holes used in conjunction with at least some of the third adjustment holes, and the fourth adjustment holes are used to cooperate with the third adjustment holes to adjust the position of the fourth base.

10. A galvanometer adjustment device, characterized in that: It comprises the galvanometer adjustment device as claimed in any one of claims 1 to 9.

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