Device for detecting quartz boat

Abstract

The utility model discloses a device for detecting a quartz boat, which comprises a carrier positioning table used for bearing the quartz boat, the quartz boat comprises a boat column, and the boat column is provided with a plurality of boat teeth; the boat column detection device comprises detection tables located on the two opposite sides of the quartz boat, each detection table comprises a bearing piece, the bearing pieces are provided with detection rods making contact with the boat columns, and the detection rods do reciprocating motion in the extending direction of the boat columns. The device not only can assist operators in quickly distinguishing deformation screening operation of boat columns in the quartz boats, timely rejecting the deformed quartz boats, improving the utilization rate in the equipment production process, being beneficial to reducing the fragment rate subsequently, but also can replace a manual detection process, and improving the detection efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, and more specifically, to a device for detecting a quartz boat. Background Art

[0002] In the production process of solar cells, quartz boats are used to load silicon wafers. After the quartz boat is processed, it needs to be tested to ensure that the quartz boat meets the production requirements. The quartz boat includes a boat column, which needs to be tested. If there is a problem with the verticality of the boat column, it means that the quartz boat is deformed, which will increase the breakage rate of silicon wafers in the future. Therefore, it is a technical problem that needs to be solved urgently in this field. Utility Model Content

[0003] In view of this, the utility model provides a device for detecting a quartz boat, so as to solve the problem of how to detect the boat column of the quartz boat.

[0004] The present application provides a device for detecting a quartz boat, comprising:

[0005] A carrier positioning platform, used for carrying a quartz boat, wherein the quartz boat comprises a boat column, and the boat column is provided with a plurality of boat teeth;

[0006] The boat column detection device comprises detection platforms located at opposite sides of the carrier positioning platform, the detection platform comprises a bearing member, a detection rod in contact with the boat column is arranged on the bearing member, and the detection rod reciprocates along the extension direction of the boat column.

[0007] Optionally, the bearing member includes a first bearing plate, and an extending direction of the first bearing plate is the same as an extending direction of the detection rod;

[0008] The first carrying plate is provided with guide rods on opposite sides along the extension direction of the first carrying plate, and the extension direction of the guide rods intersects with the extension direction of the first carrying plate;

[0009] The detection rod is located on the guide rod and reciprocates along the extension direction of the guide rod. Optionally, the guide rod includes a guide rod body, a guide piece is sleeved on the guide rod body, the guide rod body is connected to the first bearing plate through a fixing seat, and the detection rod is located between the guide pieces in the two guide rods.

[0010] Optionally, a support seat is further included for supporting the carrier positioning platform and the boat column detection device.

[0011] Optionally, a boat tooth detection device is further included, wherein the boat tooth detection device includes a push plate assembly;

[0012] The push plate assembly is provided with a detection ruler for detecting the boat teeth, and the push plate assembly drives the detection ruler to reciprocate along the extension direction of the first bearing plate.

[0013] Optionally, the push plate assembly includes a guide rail assembly placed on the support seat, the guide rail assembly is connected to the bracket via a second bearing plate, a push plate is mounted on the bracket, and the detection ruler is located on a side of the push plate away from the bracket.

[0014] Compared with the prior art, the device for detecting a quartz boat provided by the utility model achieves at least the following beneficial effects:

[0015] The utility model provides a device for detecting a quartz boat, comprising: a carrier positioning platform for carrying a quartz boat, wherein the quartz boat comprises a boat column, and the boat column is provided with a plurality of boat teeth; a boat column detection device, comprising a detection platform located at two opposite sides of the quartz boat, wherein the detection platform comprises a bearing member, and a detection rod in contact with the boat column is arranged on the bearing member, and the detection rod reciprocates along the extension direction of the boat column. The above scheme can not only assist operating personnel in quickly identifying the deformation screening operation of the boat column in the quartz boat, and timely remove the deformed quartz boat, thereby improving the utilization rate of the equipment in the production process, and subsequently helping to reduce the fragmentation rate, but also can replace the manual detection process and improve the detection efficiency.

[0016] Of course, any product implementing the present utility model does not necessarily need to achieve all of the above-mentioned technical effects at the same time.

[0017] Other features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present invention and, together with the description, serve to explain the principles of the present invention.

[0019] Figure 1 It is a structural schematic diagram of a device for detecting a quartz boat provided by the utility model;

[0020] Figure 2 It is a top view of a device for detecting a quartz boat provided by the utility model;

[0021] Figure 3 It is a side view of a device for detecting a quartz boat provided by the utility model;

[0022] Figure 4 It is a structural schematic diagram of another direction of a device for detecting a quartz boat provided by the utility model;

[0023] Figure 5 It is a structural schematic diagram of a guide member provided by the utility model;

[0024] Figure 6 This is a structural schematic diagram of a part of a quartz boat, a bracket, a push rod, a detection ruler and a guide rod provided by the utility model;

[0025] Figure 7 It is a structural schematic diagram of a part of a quartz boat, a boat tooth detection device, a detection ruler and a part of a detection platform provided by the utility model;

[0026] Figure 8 yes Figure 6 Enlarged view of point A in the middle;

[0027] Fig. 9 The utility model provides a structural schematic diagram of a part of a quartz boat, a part of a boat tooth detection device, a detection ruler, a detection platform and a carrier positioning platform. DETAILED DESCRIPTION

[0028] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention.

[0029] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.

[0030] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered as part of the specification.

[0031] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0032] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0033] Figure 1 It is a structural schematic diagram of a device for detecting a quartz boat provided by the utility model; Figure 2 It is a top view of a device for detecting a quartz boat provided by the utility model; Figure 3 It is a side view of a device for detecting a quartz boat provided by the utility model; see Figure 1-Figure 3 This embodiment provides a device for detecting a quartz boat, comprising:

[0034] The carrier positioning platform 1 is used to carry the quartz boat 4, the quartz boat 4 includes a boat column 41, and the boat column 41 has a plurality of boat teeth 42; the boat column detection device 2 includes a detection platform 21 located on two opposite sides of the carrier positioning platform 1, the detection platform 21 includes a supporting member 210, and the supporting member 210 is provided with a detection rod 211 in contact with the boat column 41, and the detection rod 211 reciprocates along the extension direction of the boat column 41.

[0035] Specifically, see Figure 1 As shown, the device for detecting quartz boat can directly detect quartz boat 4, which is a device for carrying silicon wafers. Quartz boat is an essential tool for diffusion process. Whether it is the diffusion of semiconductor devices or the diffusion of solar energy process, quartz devices are widely used as carriers. Quartz boat has the advantages of high temperature resistance, no deformation, no pollution of devices and can be reused.

[0036] Combination Figure 1-Figure 3 As shown, the device for detecting the quartz boat includes a carrier positioning platform 1 and a boat column detection device 2, wherein the carrier positioning platform 1 is used to carry the quartz boat 4, and the quartz boat 4 includes a boat column 41, which can be a quartz column. The number of the boat columns 41 can be designed according to actual conditions. In this embodiment, the number of the boat columns 41 can be four, and the adjacent boat columns 41 can be in parallel. There are multiple boat teeth 42 on the quartz column, and the multiple adjacent boat teeth 42 can be designed to be equally spaced. Usually, end plates 44 are respectively installed at both ends of the boat column 41, and a quartz seat 43 is installed on one of the end plates 44 away from the boat column 41. The quartz seat 43 can directly contact the carrier positioning platform 1.

[0037] The boat column detection device 2 is used to detect the boat column 41 of the quartz boat 4. For example, the boat column detection device 2 can detect the verticality of the four boat columns 41 of the quartz boat 4. The boat column detection device 2 includes a detection platform 21. The detection platform 21 is used to detect the boat column 41. For example, the detection platform 21 is used to detect the two boat columns 41 located on one side of the quartz boat 4. The detection platform 21 can be located on the opposite sides of the carrier positioning platform 1. Since the quartz boat 4 is vertically placed on the carrier positioning platform 1, the detection platform 21 can be located on the opposite sides of the quartz boat 4 to facilitate the detection of the boat column 41. The detection platform 21 includes a supporting member 210, on which a detection rod 211 is arranged. The detection rod 211 can directly contact the boat column 41. The supporting member 210 is used to support the detection rod 211. The extension direction of the detection rod 211 can intersect with the extension direction of the boat column 41. Optionally, the extension direction of the detection rod 211 can be perpendicular to the extension direction of the boat column 41, and the detection rod 211 can reciprocate along the extension direction of the boat column 41.

[0038] When used specifically, Figure 1As shown, the quartz boat 4 is placed vertically on the carrier positioning platform 1, and the detection rod 211 is in direct contact with the two boat columns 41 on the corresponding side. The detection rod 211 can make reciprocating motion along the extension direction of the boat column 41, which means that the boat column 41 has not been deformed; if the reciprocating motion of the detection rod 211 along the extension direction of the boat column 41 is hindered, and the detection rod 211 cannot reciprocate normally along the extension direction of the boat column 41, it means that the verticality of the boat column 41 has been deformed, that is, there is an abnormality in the boat column 41 in the quartz boat 4, and the boat column 41 can be detected conveniently and quickly, which is beneficial to saving time cost and improving detection efficiency as a whole.

[0039] Compared with the prior art, the device for detecting a quartz boat provided in this embodiment achieves at least the following beneficial effects:

[0040] The device for detecting a quartz boat provided in this embodiment includes: a carrier positioning platform 1 for carrying a quartz boat 4, wherein the quartz boat 4 includes a boat column 41, and the boat column 41 has a plurality of boat teeth 42; a boat column detection device 2, including a detection platform 21 located on opposite sides of the quartz boat 4, wherein the detection platform 21 includes a carrier 210, and a detection rod 211 in contact with the boat column 41 is provided on the carrier 210, and the detection rod 211 reciprocates along the extension direction of the boat column 41. The above scheme can not only assist operators in quickly identifying the deformation screening operation of the boat column 41 in the quartz boat 4, and timely remove deformed quartz boats 4, thereby improving the utilization rate of the equipment during the production process, which is subsequently beneficial to reducing the fragmentation rate, but also improves the detection efficiency.

[0041] In an alternative embodiment, Figure 4 This is a schematic diagram of the structure of a device for detecting a quartz boat provided by the utility model in another direction; Figure 4 As shown, the supporting member 210 includes a first supporting plate 2101, and the extension direction of the first supporting plate 2101 is the same as the extension direction of the detection rod 211; the first supporting plate 2101 is provided with guide rods 213 on opposite sides along the extension direction of the first supporting plate 2101, and the extension direction of the guide rods 213 intersects with the extension direction of the first supporting plate 2101; the detection rod 211 is located on the guide rod 213, and reciprocates along the extension direction of the guide rod 213.

[0042] Specifically, continue to refer to Figure 4As shown, the bearing member 210 includes a first bearing plate 2101, which can be a rectangular plate. The extension direction of the first bearing plate 2101 is the same as the extension direction of the detection rod 211. The detection rod 211 can be a slender round rod. Of course, it can also be designed according to actual conditions. As long as the detection rod 211 can directly contact the boat column 41 and detect the boat column 41, this embodiment does not make specific restrictions. The first bearing plate 2101 is provided with guide rods 213 on opposite sides along the extension direction of the first bearing plate 2101. The guide rods 213 have a guiding function and a supporting function. The supporting function is used to guide or control the detection rod 211 to make reciprocating motion along the extension direction of the guide rod 213, and the extension direction of the guide rod 213 intersects with the extension direction of the first bearing plate 2101; the detection rod 211 can be fixed on the guide rod 213, and slide up and down along the extension direction of the guide rod 213. During specific use, when the detection rod 211 contacts the corresponding two boat columns 41, the detection rod 211 is slid along the extension direction of the guide rod 213. If the verticality of the boat column 41 is deformed, the detection rod 211 will be hindered during sliding and cannot slide normally. Otherwise, it means that the verticality of the boat column 41 is not deformed.

[0043] In an alternative embodiment, Figure 5 This is a structural schematic diagram of a guide member provided by the utility model; Figure 4 and Figure 5 As shown, the guide rod 213 includes a guide rod body 2130 , on which a guide member 2131 is sleeved. The guide rod body 2130 is connected to the first supporting plate 2101 via a fixing seat 2132 , and the detection rod 211 is located between the guide members 2131 in the two guide rods 213 .

[0044] Specifically, continue to refer to Figure 4 As shown, each guide rod 213 includes a guide rod body 2130, a guide member 2131 and a fixed seat 2132, wherein the guide rod body 2130 is the core part of the entire guide rod 213, and is a rod-shaped structure for bearing loads and guiding movement. The guide member 2131 is installed on the guide rod body 2130, and the guide member 2131 can reciprocate along the extension direction of the guide rod body 2130. The guide member 2131 can be a rectangular rod. According to actual conditions, the guide member can also be a cylinder. This embodiment does not make specific restrictions on this. One end of the guide member 2131 is sleeved on the guide rod body 2130, and the other end of the guide member 2131 is connected to the detection rod 211. The detection rod 211 is installed between the guide members 2131 in the two guide rods 213. The detection rod 211 can slide up and down along the extension direction of the guide rod body 2130 through the guide member 2131. The guide rod body 2130 is fixed to the first bearing plate 2101 through the fixed seat 2132 to ensure its stability and accuracy; combined with Figure 5As shown, a first through hole 2131a and a second through hole 2131b are provided on the guide member 2131, and the first through hole 2131a and the second through hole 2131b are respectively located on two opposite sides of the guide member 2131, and the first through hole 2131a can penetrate the guide member 2131 along the extension direction of the guide rod body 2130, and the second through hole 2131b can penetrate the guide member 2131 along the extension direction perpendicular to the guide rod body 2130. The guide member 2131 is sleeved on the guide rod body 2130 through the first through hole 2131a, and the detection rod 211 is inserted into the guide member 2131 through the second through hole 2131b. The overall structure is simple, easy to disassemble and assemble, and has strong practicality.

[0045] In an optional embodiment, a support seat 5 is further included for supporting the carrier positioning platform 1 and the boat column detection device 2 .

[0046] Specifically, continue to refer to Figure 4 As shown, the device for detecting the quartz boat also includes a support seat 5. The shape of the support seat 5 can be a rectangular plate. The upper surface of the rectangular plate can be a plane. The support seat 5 can be placed on the surface of an object, such as the ground. The carrier positioning platform 1 and the boat column detection device 2 can be placed directly on the support seat 5. Usually, the support seat 5 can place the carrier positioning platform 1 and the boat column detection device 2 on the same plane, which is conducive to the detection of the boat column 41 in the quartz boat 4.

[0047] The inventors also found that the existing quartz boat has boat teeth evenly distributed along the length of the quartz boat, and the tooth spacing between adjacent boat teeth is used to accommodate silicon wafers. Silicon wafers are usually inserted into the tooth spacing of the quartz boat (also called inserting wafers) by a robot or the like. If the size of the tooth spacing is deviated, the inserting wafer may fail and thus cause the silicon wafer to break.

[0048] In an alternative embodiment, Figure 6 This is a structural schematic diagram of a part of a quartz boat, a bracket, a push rod, a detection ruler and a guide rod provided by the utility model; Figure 7 This is a structural diagram of a part of a quartz boat, a boat tooth detection device, a detection ruler and a part of a detection platform provided by the utility model; Figure 4 , Figure 6 and Figure 7 As shown, based on the above problems, the device for detecting the quartz boat also includes a boat tooth detection device 3, and the boat tooth detection device 3 includes a push plate assembly 31; a detection ruler 32 for detecting the boat teeth 42 is arranged on the push plate assembly 31, and the push plate assembly 31 drives the detection ruler 32 to reciprocate along the extension direction of the first supporting plate 2101.

[0049] Specifically, combined Figure 4 , Figure 6 and Figure 7As shown, the device for detecting the quartz boat also includes a boat tooth detection device 3, which can detect the boat teeth 42 of the quartz boat 4, such as the boat tooth detection device 3 performs a passability detection on the boat teeth 42 of the quartz boat 4. The boat tooth detection device 3 includes a push plate assembly 31, which can reciprocate along the extension direction of the first bearing plate 2101; the push plate assembly 31 is provided with a detection ruler 32 for detecting the boat teeth 42, the detection ruler 32 can be a boat tooth ruler, the boat tooth ruler can be a standard boat tooth ruler, the detection ruler 32 can be replaced with a reference ruler according to different models of quartz boats 4, so as to be compatible with different models of quartz boats 4 for inspection operations; the push plate assembly 31 and the detection ruler 32 can be detachably connected, and the push plate assembly 31 and the detection ruler 32 are detachably connected to facilitate the disassembly and assembly between the push plate assembly 31 and the detection ruler 32, so that different models of detection rulers 32 can be replaced. The push plate assembly 31 can drive the detection ruler 32 to make reciprocating motion along the extension direction of the first supporting plate 2101; first assemble the detection ruler 32 and the push plate assembly 31, and then make a comparative comparison with the boat teeth 42 in the boat column 41 through the detection ruler 32. If the detection ruler 32 can pass through the tooth spacing in the boat teeth 42, it means that the quartz boat 4 is a normal quartz boat; if the detection ruler 32 cannot pass through the tooth spacing in the boat teeth 42, it means that the quartz boat 4 is an abnormal quartz boat. The boat tooth detection device 3 can detect whether the tooth spacing of the boat teeth 42 in the boat column 41 is deformed. If the boat teeth 42 are found to be abnormal, the deformed quartz boat needs to be removed to more effectively improve the fragmentation rate.

[0050] In an optional embodiment, the push plate assembly 31 includes a guide rail assembly 310 placed on the support seat 5, the guide rail assembly 310 is connected to the bracket 312 through the second bearing plate 311, a push plate 313 is installed on the bracket 312, and the detection ruler 32 is located on the side of the push plate 313 away from the bracket 312.

[0051] Specifically, continue to refer to Figure 4As shown, the push plate assembly 31 includes a guide rail assembly 310, the number of the guide rail assembly 310 can be 2, and the two guide rail assemblies 310 can be directly assembled on the support seat 5. The running direction of the guide rail assembly 310 can be the extension direction of the first bearing plate 2101. The guide rail assembly 310 is connected to the bracket 312 through the second bearing plate 311. The second bearing plate 311 can be a rectangular plate, and can also be designed according to actual conditions. This embodiment does not make specific restrictions on this. Optionally, the running direction of the guide rail assembly 310 is perpendicular to the extension direction of the second bearing plate 311. The two guide rail assemblies 31 0 can be located on opposite sides of the extension direction of the second bearing plate 311, so that the bracket 312 can travel stably on the guide rail assembly 310. A push plate 313 is installed on the bracket 312. The push plate 313 can be a rectangular plate. The detection ruler 32 is fixed on the side of the push plate 313 away from the bracket 312. The guide rail assembly 310 drives the bracket 312 to reciprocate along the running direction of the guide rail assembly 310 through the second bearing plate 311, so that the bracket 312 drives the detection ruler 32 to reciprocate along the running direction of the guide rail assembly 310 through the push plate 313, thereby completing the detection of the boat tooth 42 in the boat column 41.

[0052] Optionally, combined Figure 4 and Figure 7 As shown, the width extension direction of the push plate 313 can be perpendicular to the width extension direction of the second supporting plate 311 , which is beneficial to increase the contact area between the push plate 313 and the detection ruler 32 and more stably fix the detection ruler 32 .

[0053] In an optional embodiment, the guide rail assembly 310 includes a guide rail 3101 and a slider 3102 slidably connected to the guide rail 3101 , the slider 3102 is placed on the bottom surface of the second supporting plate 311 , and the second supporting plate 311 reciprocates along the extension direction of the guide rail 3101 .

[0054] Specifically, combined Figure 4 and Figure 7 As shown, the number of guide rail assemblies 310 can be two, each guide rail assembly 310 includes a guide rail 3101 and a slider 3102, the slider 3102 can be directly assembled on the guide rail 3101, and reciprocates in the extension direction of the guide rail 3101, the sliders 3102 in the two guide rail assemblies 310 are assembled on a second supporting plate 311, and the second supporting plate 311 reciprocates on the guide rail 3101 along the extension direction of the guide rail 3101 through the slider 3102. With this solution, the guide rail 3101 and the slider 3102 cooperate with each other, which is conducive to the reciprocating movement of the second supporting plate 311 along the extension direction of the guide rail 3101.

[0055] In an optional embodiment, the bracket 312 includes a vertical plate 3120 and a support plate 3121 connected to the vertical plate 3120, and the extension direction of the vertical plate 3120 intersects with the extension direction of the support plate 3121; the push plate 313 is placed on the side of the support plate 3121 away from the vertical plate 3120; and a first reinforcement member 3122 is arranged between the vertical plate 3120 and the second supporting plate 311.

[0056] Specifically, continue to refer to Figure 7 As shown, the bracket 312 includes a vertical plate 3120 and a support plate 3121. The vertical plate 3120 and the support plate 3121 can be a rectangular plate respectively. One end of the vertical plate 3120 can be fixedly connected to the second bearing plate 311, and the other end of the vertical plate 3120 is fixedly connected to one end of the support plate 3121. The other end of the support plate 3121 is fixedly connected to the side of the push plate 313 close to the bracket 312. An inverted L-shaped structure can be formed between the vertical plate 3120 and the support plate 3121. When the push plate 313 and the detection ruler 32 are assembled together, the push plate 313 is assembled in the middle of the detection ruler 32 as much as possible, which is conducive to the detection ruler 32 to detect the tooth spacing between two adjacent boat teeth 42. A first reinforcement member 3122 is arranged between the side of the vertical plate 3120 away from the support plate 3121 and the second bearing plate 311, and the bracket 312 and the second bearing plate 311 can be fixed more firmly by the first reinforcement member 3122. Optionally, along the width direction of the second bearing plate 311, the width of the first reinforcement member 3122 on the side of the second bearing plate 311 close to the guide rail assembly 310 is greater than the width of the first reinforcement member 3122 on the side of the second bearing plate 311 away from the guide rail assembly 310, which is beneficial to increase the contact area between the first reinforcement member 3122 and the second bearing plate 311, and is beneficial to reinforce the bracket 312. The shape of the first reinforcement member 3122 can be trapezoidal, and according to actual conditions, the shape of the first reinforcement member 3122 can also be triangular, rectangular, etc., which is not specifically limited in this application.

[0057] In an alternative embodiment, Figure 8 yes Figure 6 Enlarged view of A in the middle; combined Figure 4 , Figure 6 and Figure 8 As shown, the detecting ruler 32 includes a first detecting ruler 321 and a second detecting ruler 322. The first detecting ruler 321 and the second detecting ruler 322 each include at least two detecting teeth 3221. The at least two detecting teeth 3221 are arranged along the extension direction of the detecting ruler 32. The detecting teeth 3221 of the first detecting ruler 321 and the detecting teeth 3221 of the second detecting ruler 322 are mirror-symmetrical. The first detecting ruler 321 and the second detecting ruler 322 are located on both sides of the extension direction of the push plate 313. Along the extension direction of the guide rail 3101, the detecting teeth 3221 in the first detecting ruler 321 and the second detecting ruler 322 do not overlap with the boat teeth 42.

[0058] Specifically, continue to refer to Figure 6 As shown, the detection ruler 32 includes a first detection ruler 321 and a second detection ruler 322. The first detection ruler 321 and the second detection ruler 322 can be arranged in a mirror-symmetrical manner. The first detection ruler 321 and the second detection ruler 322 are both standard detection rulers. The standard detection ruler can be replaced as a reference ruler according to different models of quartz boats 4 to be compatible with different models of quartz boats 4 for inspection operations. The first detection ruler 321 and the second detection ruler 322 both include a plurality of detection teeth 3221. The plurality of detection teeth 3221 can be arranged along the extension direction of the detection ruler 32. The plurality of adjacent detection teeth 3221 can be designed to be equidistant. The detection teeth 3221 of the first detection ruler 321 and the detection teeth 3221 of the second detection ruler 322 can be arranged in a mirror-symmetrical manner. The first detection ruler 321 and the second detection ruler 322 can be assembled on both sides of the push plate 313. Along the extension direction of the guide rail 3101, the detection teeth 3221 of the first detection ruler 321 and the second detection ruler 322 have no contact with the boat teeth 42. Overlap, so that the detection teeth 3221 in the first detection ruler 321 and the second detection ruler 322 can pass between two adjacent boat teeth in the boat column 41; the detection teeth 3221 of the first detection ruler 321 and the detection teeth 3221 of the second detection ruler 322 can pass through the tooth spacing between the boat teeth 42 of the two boat columns 41, which means that there is no abnormality in the tooth spacing between the boat teeth 42 of the boat column 41; if the detection teeth 3221 of the first detection ruler 321 and the detection teeth 3221 of the second detection ruler 322 cannot pass through the tooth spacing between the boat teeth 42 of the two boat columns 41, which means that there is an abnormality in the tooth spacing between the boat teeth 42 of the boat column 41.

[0059] In an alternative embodiment, Fig. 9 This is a structural schematic diagram of a part of a quartz boat, a part of a boat tooth detection device, a detection ruler, a detection platform and a carrier positioning platform provided by the utility model; see Fig. 9 As shown, a second reinforcement member 3123 is provided between the support plate 3121 and the vertical plate 3120 , and / or between the support plate 3121 and the push plate 313 , and the second reinforcement member 3123 is helpful to strengthen the stability between the support plate 3121 and the vertical plate 3120 , and / or between the support plate 3121 and the push plate 313 .

[0060] Optionally, continue to see Fig. 9As shown, the shape of the second reinforcement 3123 can be a trapezoid, a rectangle or a triangle, etc., and this embodiment does not make any specific limitation on this. Along the width direction of the push plate 313, the width of the second reinforcement 3123 between the support plate 3121 and the vertical plate 3120 is greater than the width on the side away from the vertical plate 3120; and / or, along the width direction of the push plate 313, the width of the second reinforcement 3123 between the support plate 3121 and the push plate 313 is greater than the width on the side away from the push plate 313. By adopting the above scheme, the contact area between the vertical plate 3120 and / or the push plate 313 and the second reinforcement 3123 can be increased, thereby strengthening the stability between the support plate 3121 and the vertical plate 3120, and / or, between the support plate 3121 and the push plate 313.

[0061] Optionally, the material of the carrier positioning platform 1, the boat column detection device 2 and the boat tooth detection device 3 can be metal, such as aluminum material structure.

[0062] Continue to refer to Fig. 9 As shown, the carrier positioning platform 1 includes a third carrier plate 11 and a support block 12 connected to the third carrier plate 11. The third carrier plate 11 and the support block 12 can be an integrated structure. The integrated structure between the third carrier plate 11 and the support block 12 reduces the manufacturing cost while increasing the stability of the carrier positioning platform 1. An inverted T-shaped structure can be formed between the third carrier plate 11 and the support block 12 to facilitate carrying the quartz boat 4. The support block 12 can be processed in proportion to the quartz seat 4.

[0063] It can be seen from the above embodiments that the device for detecting a quartz boat provided by the utility model achieves at least the following beneficial effects:

[0064] The utility model provides a device for detecting a quartz boat, comprising: a carrier positioning platform for carrying a quartz boat, wherein the quartz boat comprises a boat column, and the boat column is provided with a plurality of boat teeth; a boat column detection device, comprising a detection platform located at two opposite sides of the quartz boat, wherein the detection platform comprises a bearing member, and a detection rod in contact with the boat column is arranged on the bearing member, and the detection rod reciprocates along the extension direction of the boat column. The above scheme can not only assist operating personnel in quickly identifying the deformation screening operation of the boat column in the quartz boat, and timely remove the deformed quartz boat, thereby improving the utilization rate of the equipment in the production process, and subsequently helping to reduce the fragmentation rate, but also can replace the manual detection process and improve the detection efficiency.

[0065] Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A device for detecting a quartz boat, characterized in that: include: A carrier positioning platform, used for carrying a quartz boat, wherein the quartz boat comprises a boat column, and the boat column is provided with a plurality of boat teeth; The boat column detection device comprises detection platforms located at opposite sides of the carrier positioning platform, the detection platform comprises a bearing member, a detection rod in contact with the boat column is arranged on the bearing member, and the detection rod reciprocates along the extension direction of the boat column.

2. The device for detecting a quartz boat according to claim 1, characterized in that: The bearing member comprises a first bearing plate, and the extension direction of the first bearing plate is the same as the extension direction of the detection rod; The first carrying plate is provided with guide rods on opposite sides along the extension direction of the first carrying plate, and the extension direction of the guide rods intersects with the extension direction of the first carrying plate; The detection rod is located on the guide rod and performs reciprocating motion along the extending direction of the guide rod.

3. The device for detecting a quartz boat according to claim 2, characterized in that: The guide rod comprises a guide rod body, a guide piece is sleeved on the guide rod body, the guide rod body is connected to the first bearing plate through a fixing seat, and the detection rod is located between the guide pieces in the two guide rods.

4. The device for detecting a quartz boat according to claim 2, characterized in that: It also includes a support base for carrying the carrier positioning platform and the boat column detection device.

5. The device for detecting a quartz boat according to claim 4, characterized in that: Also included is a boat tooth detection device, the boat tooth detection device including a push plate assembly; The push plate assembly is provided with a detection ruler for detecting the boat teeth, and the push plate assembly drives the detection ruler to reciprocate along the extension direction of the first bearing plate.

6. The device for detecting a quartz boat according to claim 5, characterized in that: The push plate assembly includes a guide rail assembly placed on the support seat, the guide rail assembly is connected to the bracket through a second bearing plate, a push plate is installed on the bracket, and the detection ruler is located on the side of the push plate away from the bracket.

7. The device for detecting a quartz boat according to claim 6, characterized in that: The guide rail assembly comprises a guide rail and a slider slidably connected to the guide rail. The slider is disposed on the bottom surface of the second bearing plate, and the second bearing plate reciprocates along the extending direction of the guide rail.

8. The device for detecting a quartz boat according to claim 7, characterized in that: The bracket includes a vertical plate and a support plate connected to the vertical plate, and the extension direction of the vertical plate intersects with the extension direction of the support plate; The push plate is placed on a side of the support plate away from the vertical plate; A first reinforcement member is arranged between the vertical plate and the second bearing plate.

9. The device for detecting a quartz boat according to claim 8, characterized in that: The detection ruler comprises a first detection ruler and a second detection ruler, each of the first detection ruler and the second detection ruler comprises at least two detection teeth, at least two of the detection teeth are arranged along the extension direction of the detection ruler, and the detection teeth of the first detection ruler and the detection teeth of the second detection ruler are mirror-symmetrical; The first detection ruler and the second detection ruler are located on both sides of the extension direction of the push plate; Along the extending direction of the guide rail, the detection teeth and the boat teeth in the first detection ruler and the second detection ruler do not overlap.

10. The device for detecting a quartz boat according to claim 8, characterized in that: A second reinforcement member is provided between the support plate and the vertical plate, and / or between the support plate and the push plate.

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