Power supply cabinet of silicon carbide crystal growth furnace

Abstract

The utility model discloses a silicon carbide crystal growth furnace power supply cabinet, and relates to the field of power supply devices. The silicon carbide crystal growth furnace power supply cabinet comprises a cabinet body and a plurality of power supply modules, the cabinet body is provided with a plurality of assembly cavities, an AC input copper bar and a DC output copper bar are arranged in the cabinet body, the AC input copper bar is provided with a plurality of input claws corresponding to the plurality of assembly cavities, and the DC output copper bar is provided with a plurality of output claws corresponding to the plurality of assembly cavities; any power supply module is used for being inserted into or withdrawn from one of the plurality of assembly cavities, the power supply module is provided with an input plug and an output plug, and when any power supply module is inserted into any assembly cavity, the input plug is in inserted connection with the input clamping jaw corresponding to the assembly cavity, and the output plug is in inserted connection with the output clamping jaw corresponding to the assembly cavity. According to the silicon carbide crystal growth furnace power supply cabinet, the number of the power supply modules can be conveniently and rapidly adjusted, and the production efficiency of a silicon carbide crystal growth furnace is improved.

Description

Technical Field

[0001] The utility model relates to the field of power supply devices, in particular to a power supply cabinet for a silicon carbide crystal growth furnace. Background Art

[0002] The power of silicon carbide crystal growth furnace is relatively large, and a single power module usually cannot meet the requirements. Therefore, some power supply devices on the market are equipped with multiple power modules. Multiple power modules work together to rectify the input AC power to supply the crystal growth furnace with DC power to meet the needs.

[0003] During the operation of the crystal growth furnace, its power demand often changes, so it is necessary to frequently adjust the number of power modules involved in rectification, resulting in frequent power outages and shutdowns. The operation is cumbersome and complicated, which seriously affects production efficiency. Utility Model Content

[0004] The purpose of the utility model is to provide a power supply cabinet for a silicon carbide crystal growth furnace, which can conveniently and quickly adjust the number of power supply modules and improve the production efficiency of the silicon carbide crystal growth furnace.

[0005] The embodiment of the utility model provides a technical solution:

[0006] A power cabinet for a silicon carbide crystal growth furnace, comprising a cabinet body and a plurality of power modules, wherein the cabinet body has a plurality of assembly chambers, an AC input copper busbar and a DC output copper busbar are arranged in the cabinet body, a plurality of input claws are arranged on the AC input copper busbar corresponding to the plurality of assembly chambers, and a plurality of output claws are arranged on the DC output copper busbar corresponding to the plurality of assembly chambers;

[0007] Any of the power modules is used to insert into or withdraw from one of the multiple assembly chambers. The power module has an input plug and an output plug. When any of the power modules is inserted into any of the assembly chambers, the input plug is plugged into the input claw corresponding to the assembly chamber, and the output plug is plugged into the output claw corresponding to the assembly chamber.

[0008] In an optional embodiment, the cabinet is provided with an air inlet and an air outlet, and the power module is provided with an air inlet window and an air outlet window, and the air inlet window and the air outlet window are connected inside the power module; when the power module is inserted into any of the assembly chambers, the air inlet is connected to the air inlet window, and the air outlet window is connected to the air outlet.

[0009] In an optional embodiment, the air outlet is provided with an exhaust fan, and the exhaust fan is used to exhaust the air in the cabinet to the outside.

[0010] In an optional embodiment, the air inlet window is provided with an air inlet fan, and the air outlet window is provided with an air outlet fan. The air inlet fan is used to suck the outside air into the power module through the air inlet and the air inlet window in sequence, and the air outlet fan is used to blow the air entering the power module out of the cabinet through the air outlet window and the air outlet in sequence.

[0011] In an optional embodiment, the cabinet body includes a back panel and a side panel, the two side panels are spaced apart and arranged relatively on the same side of the back panel, the back panel and the two side panels together form a plurality of assembly chambers, and the opening of each assembly chamber faces away from the back panel; the side panel is provided with the air inlet, and the air outlet is arranged on the back panel.

[0012] In an optional embodiment, multiple areas on the two side panels that participate in enclosing the multiple assembly chambers are all provided with guide rails, and the side walls of the power module are provided with mating parts that selectively slide with the guide rails.

[0013] In an optional embodiment, an air outlet duct is provided inside the back panel, and multiple areas on the back panel that participate in enclosing the multiple assembly chambers are provided with air outlet transition windows, the air outlet is connected with the multiple air outlet transition windows through the air outlet duct, and when the power module is inserted into any of the assembly chambers, the air outlet transition window corresponding to the assembly chamber is connected with the air outlet window.

[0014] In an optional embodiment, the AC input copper busbar and the DC output copper busbar are both disposed in the air outlet duct, and the plurality of input claws and the plurality of output claws are both correspondingly connected to the plurality of assembly chambers.

[0015] In an optional embodiment, an air inlet duct is provided inside the side panel, and multiple areas on the side panel that participate in enclosing the multiple assembly chambers are provided with air inlet transition windows, the air inlet is connected with the multiple air inlet transition windows through the air inlet duct, and when the power module is inserted into any of the assembly chambers, the air inlet transition window corresponding to the assembly chamber is connected with the air inlet window.

[0016] In an optional embodiment, a heat exchange component is provided in the air inlet duct of the two side panels, and the heat exchange component is used to exchange heat with the air flowing through.

[0017] Compared with the prior art, the power cabinet for the silicon carbide crystal growth furnace provided by the utility model has multiple power modules that selectively cooperate with the cabinet through a drawer-type structure, and can flexibly and quickly adjust the number of power modules according to the power demand changes of the crystal growth furnace. Through the multiple input claws set on the AC input copper busbar and the input plugs set on each power module, when the power module is inserted into any assembly chamber of the cabinet, it can automatically complete the electrical connection with the AC input copper busbar; through the multiple output claws set on the DC output copper busbar and the output plugs set on each power module, when the power module is inserted into any assembly chamber of the cabinet, it can automatically complete the electrical connection with the DC output copper busbar. It can be seen that there is no need to turn off the power during the process of increasing or decreasing the number of power modules, and the operation is convenient and quick. Therefore, the beneficial effects of the power cabinet for the silicon carbide crystal growth furnace provided by the utility model include: it is possible to conveniently and quickly complete the adjustment of the number of power modules, thereby improving the production efficiency of the silicon carbide crystal growth furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the utility model and should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can also be obtained based on these drawings without creative work.

[0019] Figure 1 A schematic diagram of the structure of a power cabinet for a silicon carbide crystal growth furnace provided in an embodiment of the utility model;

[0020] Figure 2 for Figure 1 A schematic diagram of the structure of the back panel in the first perspective;

[0021] Figure 3 for Figure 1 A schematic diagram of the structure of the back plate in the second viewing angle;

[0022] Figure 4 for Figure 1 The schematic diagram of the structure of the power module;

[0023] Figure 5 This is a schematic diagram of the structure before the power module is connected to the AC input copper busbar;

[0024] Figure 6 for Figure 1 A schematic diagram of the structure of the side panel in the first perspective;

[0025] Figure 7 for Figure 1 Schematic diagram of the structure of the side panel in the second perspective.

[0026] Icons: 100- power cabinet for silicon carbide crystal growth furnace; 110- cabinet body; 111- assembly chamber; 112- back panel; 1121- air outlet; 1122- air outlet transition window; 113- side panel; 1131- air inlet; 1132- guide rail; 1133- air inlet transition window; 1134- heat exchanger; 120- power module; 121- input plug; 122- output plug; 123- air inlet window; 124- air outlet window; 130- AC input copper busbar; 131- input claw; 140- DC output copper busbar; 141- output claw. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the embodiments of the present invention clearer, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0028] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0030] In the description of the present utility model, it should be understood that the terms "upper", "lower", "inside", "outside", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are directions or positional relationships in which the utility model product is usually placed when in use, or are directions or positional relationships that are usually understood by those skilled in the art. These directions or positional relationships are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present utility model.

[0031] Furthermore, the terms “first”, “second”, etc. are merely used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0032] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms such as "setting" and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] The specific implementation of the utility model is described in detail below in conjunction with the accompanying drawings.

[0034] Example

[0035] See also Figure 1 , Figure 1 Shown is a schematic structural diagram of a power supply cabinet 100 for a silicon carbide crystal growth furnace provided in this embodiment.

[0036] The power cabinet 100 for a silicon carbide crystal growth furnace provided in this embodiment is used to supply power to the silicon carbide crystal growth furnace, and includes a cabinet 110 and a plurality of power modules 120. The cabinet 110 has a plurality of assembly chambers 111, and any power module 120 can be inserted into or removed from any of the plurality of assembly chambers 111, thereby completing the increase or decrease adjustment of the number of power modules 120. It is understandable that the power module 120 can be an AC / DC module or an active filter module.

[0037] In this embodiment, the cabinet 110 includes a back panel 112 and a side panel 113. The two side panels 113 are spaced apart and arranged relatively on the same side of the back panel 112. The back panel 112 and the two side panels 113 together form a plurality of assembly chambers 111. The opening of each assembly chamber 111 faces away from the back panel 112.

[0038] In fact, the multiple assembly chambers 111 are arranged in sequence in the vertical direction, and any assembly chamber 111 is located in the space surrounded by the back plate 112 and the two side plates 113. For any assembly chamber 111, since its opening is away from the back plate 112, when the power module 120 is inserted into the assembly chamber 111, the power module 120 gradually approaches the back plate 112; and when the power module 120 is withdrawn from the assembly chamber 111, the power module 120 gradually moves away from the back plate 112.

[0039] Please refer to Figure 2 and Figure 3 , Figure 2 FIG. 1 is a schematic diagram of the structure of the back plate 112 at a first viewing angle. Figure 3 FIG. 1 is a schematic structural diagram of the back plate 112 at a second viewing angle.

[0040] An air outlet duct is provided inside the back plate 112 , and multiple areas on the back plate 112 that form multiple assembly chambers 111 are all provided with air outlet transition windows 1122 , and the air outlet 1121 is connected to the multiple air outlet transition windows 1122 through the air outlet duct.

[0041] It can be understood that the multiple air outlet transition windows 1122 correspond to the multiple assembly chambers 111, that is, the multiple air outlet transition windows 1122 are arranged in sequence along the vertical direction on the back plate 112. The multiple air outlet transition windows 1122 are connected to the air outlet 1121 through the air outlet duct provided inside the back plate 112, that is, the multiple assembly chambers 111 are all connected to the air outlet 1121.

[0042] In this embodiment, an AC input copper bar 130 and a DC output copper bar 140 are arranged in the air outlet duct, the AC input copper bar 130 is externally connected to an AC cable, and the DC output copper bar 140 is externally connected to a crystal growth furnace. When the power module 120 is inserted into any assembly chamber 111, the power module 120 synchronously completes the electrical connection with the AC input copper bar 130 and the DC output copper bar 140.

[0043] Please refer to Figure 4 and Figure 5 , Figure 4 FIG. 1 is a schematic diagram of the structure of the power module 120. Figure 5 It is a schematic structural diagram before the power module 120 is connected to the AC input copper bus 130 .

[0044] In this embodiment, a plurality of input claws 131 are provided on the AC input copper busbar 130 corresponding to the plurality of assembly chambers 111, and a plurality of output claws 141 are provided on the DC output copper busbar 140 corresponding to the plurality of assembly chambers 111. The plurality of input claws 131 and the plurality of output claws 141 are respectively exposed in the plurality of assembly chambers 111 through a plurality of air outlet transition windows 1122.

[0045] The power module 120 has an input plug 121 and an output plug 122. When any power module 120 is inserted into any assembly cavity 111, the input plug 121 is plugged into the input claw 131 corresponding to the assembly cavity 111, and the output plug 122 is plugged into the output claw 141 corresponding to the assembly cavity 111.

[0046] In this embodiment, the input claw 131 has the same structure as the output claw 141, and the input plug 121 has the same structure as the output plug 122. The input claw 131 is a conductive metal with a certain elastic deformation ability. When the input plug 121 and the input claw 131 are plugged in, the input claw 131 clamps the input plug 121 and is electrically connected to the input plug 121, that is, the electrical connection between the power module 120 and the AC input copper bus 130 is established.

[0047] It can be understood that there are multiple AC input copper bars 130, which are multi-phase inputs, and the number of corresponding input claws 131 in any assembly chamber 111 is also multiple, and the number of input plugs 121 on the power module 120 is also multiple. There are two DC output copper bars 140, which are positive and negative. The number of corresponding output claws 141 in any assembly chamber 111 is also two, and the number of input plugs 121 on the power module 120 is also two. When multiple power modules 120 are inserted into multiple assembly chambers 111, the multiple power modules 120 are connected in parallel.

[0048] In the process of inserting the power module 120 into any assembly chamber 111, the input plug 121 of the power module 120 is aligned with the input claw 131 corresponding to the assembly chamber 111 and gradually approaches, and the output plug 122 of the power module 120 is aligned with the output claw 141 corresponding to the assembly chamber 111 and gradually approaches. When the power module 120 is completely inserted, the input plug 121 is plugged into the input claw 131, and the output plug 122 is plugged into the output claw 141. In the process of withdrawing any power module 120 from the assembly chamber 111, its input plug 121 is synchronously withdrawn from the corresponding input claw 131, and the output plug 122 is synchronously withdrawn from the corresponding output claw 141.

[0049] Please refer to Figure 6 and Figure 7 , Figure 6 The figure is a schematic diagram of the structure of the side panel 113 at a first viewing angle. Figure 7 FIG. 1 is a schematic structural diagram of the side panel 113 at a second viewing angle.

[0050] An air inlet duct is provided inside the side plate 113 , and multiple areas on the side plate 113 that form multiple assembly chambers 111 are all provided with air inlet transition windows 1133 , and the air inlet 1131 is connected to the multiple air inlet transition windows 1133 through the air inlet duct.

[0051] It can be understood that the multiple air inlet transition windows 1133 correspond to the multiple assembly chambers 111, that is, the multiple air inlet transition windows 1133 are arranged in sequence along the vertical direction on the side plate 113. The multiple air inlet transition windows 1133 are connected to the air inlet 1131 through the air inlet duct provided inside the side plate 113, that is, the multiple assembly chambers 111 are connected to the air inlet 1131.

[0052] In this embodiment, an air inlet window 123 and an air outlet window 124 are provided on the power module 120, and the air inlet window 123 and the air outlet window 124 are connected inside the power module 120. There are two air inlet windows 123, which are respectively provided on two opposite sides of the power module 120, and the two air inlet windows 123 correspond to the two air inlet transition windows 1133 on the opposite sides of the assembly chamber 111.

[0053] The air outlet window 124 is provided on the side where the input plug 121 and the output plug 122 are located, and corresponds to the air outlet transition window 1122 facing away from the outlet of the assembly chamber 111. When the power module 120 is inserted into any assembly chamber 111, the air inlet transition window 1133 corresponding to the assembly chamber 111 is connected to the air inlet window 123, and the corresponding air outlet transition window 1122 is connected to the air outlet window 124.

[0054] In this embodiment, the air inlet window 123 is provided with an air inlet fan, and the air outlet window 124 is provided with an air outlet fan. The air inlet fan is used to suck the outside air into the power module 120 through the air inlet 1131 and the air inlet window 123 in sequence, and the air outlet fan is used to blow the air entering the power module 120 out of the cabinet 110 through the air outlet window 124 and the air outlet 1121 in sequence.

[0055] In actual application, after inserting any power module 120 into any assembly chamber 111, the air inlet fan and the air outlet fan of the power module 120 are operated, and the outside air is sucked into the air inlet duct in the side panel 113 through the air inlet 1131, and then flows into the power module 120 through the air inlet transition window 1133 and the air inlet window 123, and then flows into the air outlet duct in the back panel 112 through the air outlet window 124 and the air outlet transition window 1122, and finally leaves the cabinet 110 through the air outlet 1121. In this process, the airflow completes the heat dissipation of the power module 120 and the AC input copper busbar 130 and the DC output copper busbar 140.

[0056] In order to improve the heat dissipation effect, in this embodiment, the air outlet 1121 is provided with an exhaust fan, which is used to exhaust the air in the cabinet 110 to the outside. It can be understood that in actual applications, the operation of the exhaust fan can further guide the airflow direction in the air outlet duct, increase the air flow and flow rate, and thus improve the heat dissipation effect.

[0057] In order to further improve the heat dissipation effect, in this embodiment, heat exchangers 1134 are provided in the air inlet ducts of the two side panels 113, and the heat exchangers 1134 are used to exchange heat with the air flowing through. In fact, the heat exchangers 1134 are provided with water cooling channels to achieve water cooling of the airflow flowing through the air inlet ducts, actively reduce the airflow temperature in advance, and thus improve the heat dissipation effect of the airflow on the power module 120.

[0058] Regarding the movement of the power module 120 in the assembly chamber 111, in this embodiment, multiple areas on the two side panels 113 that participate in enclosing multiple assembly chambers 111 are provided with guide rails 1132, and the side walls of the power module 120 are provided with matching parts that selectively slide with the guide rails 1132. The guide rails 1132 extend in a direction perpendicular to the back panel 112. In the process of inserting or withdrawing the power module 120 from the assembly chamber 111, the power module 120 slides along the guide rails 1132 provided on the side panels 113, ensuring a smooth disassembly and assembly process of the power module 120.

[0059] In summary, the power cabinet 100 for the silicon carbide crystal growth furnace provided in this embodiment can automatically complete the electrical connection with the AC input copper bus 130 and the DC output copper bus 140 during the process of inserting the power module 120 into any assembly chamber 111 of the cabinet 110, and there is no need to cut off the power during the process, so the operation is convenient and fast. In addition, the power cabinet 100 for the silicon carbide crystal growth furnace combines air cooling with water cooling for better heat dissipation and higher safety.

[0060] Therefore, the power cabinet 100 for the silicon carbide crystal growth furnace provided in this embodiment can easily and quickly adjust the number of power modules 120, improve the production efficiency of the silicon carbide crystal growth furnace, and have higher safety.

[0061] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A power cabinet for a silicon carbide crystal growth furnace, characterized in that: The invention comprises a cabinet (110) and a plurality of power modules (120), wherein the cabinet (110) has a plurality of assembly chambers (111), an AC input copper busbar (130) and a DC output copper busbar (140) are arranged in the cabinet (110), a plurality of input claws (131) are arranged on the AC input copper busbar (130) corresponding to the plurality of assembly chambers (111), and a plurality of output claws (141) are arranged on the DC output copper busbar (140) corresponding to the plurality of assembly chambers (111); Any of the power modules (120) is used to be inserted into or withdrawn from one of the multiple assembly chambers (111). The power module (120) has an input plug (121) and an output plug (122). When any of the power modules (120) is inserted into any of the assembly chambers (111), the input plug (121) is plugged into the input claw (131) corresponding to the assembly chamber (111), and the output plug (122) is plugged into the output claw (141) corresponding to the assembly chamber (111).

2. The power supply cabinet for the silicon carbide crystal growth furnace according to claim 1, characterized in that: The cabinet (110) is provided with an air inlet (1131) and an air outlet (1121); the power module (120) is provided with an air inlet window (123) and an air outlet window (124); the air inlet window (123) and the air outlet window (124) are connected inside the power module (120); when the power module (120) is inserted into any of the assembly chambers (111), the air inlet (1131) is connected with the air inlet window (123), and the air outlet window (124) is connected with the air outlet (1121).

3. The power supply cabinet for the silicon carbide crystal growth furnace according to claim 2, characterized in that: The air outlet (1121) is provided with an exhaust fan, and the exhaust fan is used to discharge the air in the cabinet (110) to the outside.

4. The power cabinet for the silicon carbide crystal growth furnace according to claim 2, characterized in that: The air inlet window (123) is provided with an air inlet fan, and the air outlet window (124) is provided with an air outlet fan. The air inlet fan is used to suck outside air into the power module (120) through the air inlet (1131) and the air inlet window (123) in sequence, and the air outlet fan is used to blow the air entering the power module (120) out of the cabinet (110) through the air outlet window (124) and the air outlet (1121) in sequence.

5. The power cabinet for the silicon carbide crystal growth furnace according to claim 2, characterized in that: The cabinet (110) comprises a back panel (112) and a side panel (113); the two side panels (113) are spaced apart and arranged opposite to each other on the same side of the back panel (112); the back panel (112) and the two side panels (113) together form a plurality of assembly chambers (111); the opening of each assembly chamber (111) faces away from the back panel (112); the side panel (113) is provided with the air inlet (1131); and the air outlet (1121) is arranged on the back panel (112).

6. The power supply cabinet for the silicon carbide crystal growth furnace according to claim 5, characterized in that: Multiple areas on the two side panels (113) that form the multiple assembly chambers (111) are provided with guide rails (1132), and a matching portion that selectively slides with the guide rails (1132) is provided on the side wall of the power module (120).

7. The power cabinet for the silicon carbide crystal growth furnace according to claim 5, characterized in that: An air outlet duct is provided inside the back plate (112), and multiple areas on the back plate (112) that participate in enclosing the multiple assembly chambers (111) are all provided with air outlet transition windows (1122); the air outlet (1121) is connected to the multiple air outlet transition windows (1122) through the air outlet duct; when the power module (120) is inserted into any of the assembly chambers (111), the air outlet transition window (1122) corresponding to the assembly chamber (111) is connected to the air outlet window (124).

8. The power supply cabinet for the silicon carbide crystal growth furnace according to claim 7, characterized in that: The AC input copper bar (130) and the DC output copper bar (140) are both arranged in the air outlet duct, and the plurality of input claws (131) and the plurality of output claws (141) are both correspondingly connected to the plurality of assembly chambers (111).

9. The power cabinet for silicon carbide crystal growth furnace according to claim 5, characterized in that: An air inlet duct is arranged inside the side panel (113), and multiple areas on the side panel (113) that participate in enclosing the multiple assembly chambers (111) are all provided with air inlet transition windows (1133); the air inlet (1131) is connected to the multiple air inlet transition windows (1133) through the air inlet duct; when the power module (120) is inserted into any of the assembly chambers (111), the air inlet transition window (1133) corresponding to the assembly chamber (111) is connected to the air inlet window (123).

10. The power cabinet for the silicon carbide crystal growth furnace according to claim 9, characterized in that: A heat exchange component (1134) is provided in the air inlet duct of the two side plates (113), and the heat exchange component (1134) is used to exchange heat with the air flowing through.

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