Double-area high-temperature heater

Abstract

The utility model discloses a double-zone high-temperature heater which comprises a heater body, a middle heating zone and an external heating zone are arranged on the heater body, a middle heating element groove and an external heating element groove are arranged in the middle heating zone and the external heating zone, and a middle heating element and an external heating element are respectively arranged in the middle heating zone and the external heating zone. And the middle heating element and the external heating element are connected with conductive columns. Compared with the prior art, the utility model has the advantages that the conventional single-zone heating is changed into double-zone heating, the double-zone heating is divided into the middle heating zone and the external heating zone, the heating of each zone can be independently controlled, and the temperature difference of the surface of the heater is reduced, so that the stability and the uniformity of the process are improved. Meanwhile, a purging air channel is formed inside, so that the heating element is prevented from being oxidized.

Description

Technical Field

[0001] The utility model relates to a heater, in particular to a double-zone high-temperature heater. Background Art

[0002] In the field of wafer manufacturing, the wafer needs to reach a certain set temperature before plasma stripping and plasma etching processes, and then process processing can be carried out; the conventional method is to heat the heater to a certain temperature, place the wafer on the upper surface of the heater, and heat the wafer through heat conduction. When the wafer reaches the set temperature, process testing can be carried out; high temperature may also occur in the existing process requirements, and the heater heating temperature must reach more than 700 degrees. Conventional high-temperature heaters use single-zone heating (such as Figure 7 ), high temperature heating is achieved by connecting the middle heating element A through two conductive columns. Single-zone heating is prone to large temperature differences between the middle area and the edge area, resulting in poor process uniformity and stability. Therefore, the development of a dual-zone high temperature heater has become an urgent problem to be solved by those skilled in the art. Utility Model Content

[0003] In order to solve the above-mentioned shortcomings, the utility model provides a dual-zone high-temperature heater, so that the temperature of the middle and outer parts of the heater can be controlled separately, reducing the temperature difference between the inside and the outside, improving the uniformity and stability of the process, and at the same time, a purge air duct is provided inside to prevent oxidation of the heating element.

[0004] The above-mentioned purpose of the utility model is achieved through the following technical scheme: a dual-zone high-temperature heater, including a heater body, on which a central heating zone and an external heating zone are provided, and the central heating zone and the external heating zone are internally provided with a central heating element slot and an external heating element slot, and the central heating element and the external heating element are respectively installed, and the central heating element and the external heating element are both connected to a conductive column.

[0005] Furthermore, the middle heating element and the outer heating element are made of metal material or non-metal material.

[0006] Furthermore, the metal material is tungsten, molybdenum, rhenium or titanium.

[0007] Furthermore, the non-metallic material is graphite or silicon carbide, etc., and can also be a heating wire or a heating tube.

[0008] Furthermore, a purge air passage is provided on the heater body, and the purge air passage is connected with the middle heating element groove and the outer heating element groove.

[0009] Furthermore, a thermocouple is provided on the heater body.

[0010] Furthermore, the heater body comprises a heating base and a heating panel, and the middle heating element slot and the outer heating element slot are arranged on the heating base.

[0011] Furthermore, a heat insulation element is provided in the heating base.

[0012] Compared with the prior art, the utility model has the following advantages: the utility model changes the conventional single-zone heating into a double-zone heating, which is divided into a central heating zone and an outer heating zone, and can control the heating of each zone separately, reducing the temperature difference on the heater surface, thereby improving the stability and uniformity of the process. At the same time, a purge airway is provided inside to prevent oxidation of the heating element. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the utility model.

[0014] Figure 2 It is a structural schematic diagram of the heating base in the utility model.

[0015] Figure 3 It is a top view of the heating base equipped with the heating element in the utility model.

[0016] Figure 4 It is a top view of the utility model.

[0017] Figure 5 yes Figure 4 Cross-sectional view at the middle BB.

[0018] Figure 6 yes Figure 4 Cross-sectional view at CC.

[0019] Figure 7 It is a schematic diagram of the top view structure of a conventional high temperature heater. DETAILED DESCRIPTION

[0020] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0021] like Figures 1 to 6As shown, a dual-zone high-temperature heater comprises a heater body 1, wherein the heater body 1 is provided with a central heating zone 2 and an external heating zone 3, wherein the central heating zone 2 and the external heating zone 3 are provided with a central heating element slot 4 and an external heating element slot 5, and are respectively provided with a central heating element 6 and an external heating element 7, wherein the central heating element 6 and the external heating element 7 are both connected with a conductive column 8; the heater body 1 comprises a heating base 101 and a heating panel 102, wherein the heating panel 102 is fixed on the upper part of the heating base 101, wherein the central heating element slot 4 and the external heating element slot 5 are provided on the heating base 101, and wherein the heating base 101 is provided with a heat insulating element 9. The central heating element 6 and the external heating element 7 are made of metal material or non-metal material, wherein the metal material is tungsten, molybdenum, rhenium or titanium, etc., and the non-metal material is graphite or silicon carbide, etc., and may also be a heating wire or a heating tube.

[0022] The heating element is in a high-temperature heating state for a long time. If there is air inside, the element will be oxidized. It is necessary to use a non-oxidizing gas for purging to prevent the heating element from oxidizing. Therefore, a purge air duct 10 is provided on the heater body 1. One end of the purge air duct 10 is connected to the middle heating element groove 4 and the external heating element groove 5, and one end of the purge air duct 10 is connected to a gas source. The gas source is a non-oxidizing gas, including but not limited to nitrogen, helium, and argon.

[0023] When working, the heater of the utility model can heat to above 900 degrees. The heater body 1 is provided with a thermocouple 11 for monitoring the temperature and realizing temperature control.

[0024] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A dual-zone high temperature heater, comprising a heater body, characterized in that: The heater body is provided with a central heating zone and an external heating zone, the central heating zone and the external heating zone are provided with a central heating element slot and an external heating element slot inside, and the central heating element and the external heating element are respectively installed, and the central heating element and the external heating element are both connected with conductive columns.

2. A dual-zone high temperature heater according to claim 1, characterized in that: The middle heating element and the outer heating element are made of metal material or non-metal material.

3. A dual-zone high temperature heater according to claim 2, characterized in that: The metal material is tungsten, molybdenum, rhenium or titanium.

4. A dual-zone high temperature heater according to claim 2, characterized in that: The non-metallic material is graphite or silicon carbide.

5. The dual-zone high temperature heater according to claim 1, characterized in that: The heater body is provided with a purge air passage, which is communicated with the middle heating element groove and the outer heating element groove.

6. A dual-zone high temperature heater according to claim 1, characterized in that: The heater body is provided with a thermocouple.

7. The dual-zone high temperature heater according to claim 1, characterized in that: The heater body comprises a heating base and a heating panel, and the middle heating element slot and the outer heating element slot are arranged on the heating base.

8. A dual-zone high temperature heater according to claim 7, characterized in that: A heat insulation element is arranged in the heating base.

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