Ultra-precise air floatation moving rotating platform

Abstract

The utility model discloses an ultra-precise air floatation moving rotating platform which comprises a base, supporting frames are fixedly connected to the two ends of the lower portion of the base, a first driving motor is fixedly connected to the interior of each supporting frame, and the output end of each first driving motor is fixedly connected with a screw. The upper end of the supporting frame penetrates through the base and is upwards provided with a movable frame, the screw rod is in threaded connection with the movable frame, sliding grooves are formed in the two ends of the outer side of the movable frame, and lifting adjustment operation of the whole air floating platform can be achieved by arranging a first driving motor, the screw rod, the sliding grooves and third sliding blocks; and meanwhile, by arranging a fourth driving motor, a first lead screw, a third driving motor and a second lead screw, transverse and longitudinal adjusting operation of the workbench can be achieved, the convenience and practicability of the whole air floating platform in the using process are ensured, and sliding rod limiting assemblies are arranged at one ends of the two moving assemblies correspondingly, so that the stability of the air floating platform in the moving process is ensured.

Description

Technical Field

[0001] The utility model relates to the field of air-floating mobile rotating platforms, in particular to an ultra-precision air-floating mobile rotating platform. Background Art

[0002] The air-floating motion platform is one of the key components in precision machinery. It provides a carrier platform that can achieve precise positioning and accurate movement in the fields of microlithography, CNC machining, biotechnology, IC packaging equipment, nano-surface morphology measurement, etc.; it is widely used in advanced electronic manufacturing equipment, such as photolithography machines and chip mounters, and the high-performance motion platform is the main mechanism for its work; in the prior art, the entire air-floating mobile platform is usually of a fixed height, and its height cannot be adjusted during use, resulting in high limitations in workpiece processing; and the workbench used to fix the workpiece can only move forward, backward, left, and right, and cannot drive the workpiece to rotate. Utility Model Content

[0003] The utility model aims to provide an ultra-precision air-floating mobile rotating platform, which solves the problem in the prior art that the entire air-floating mobile platform is usually of a fixed height and cannot be adjusted during use, resulting in high limitations in workpiece processing.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an ultra-precision air-floating mobile rotating platform, comprising a base, two ends of the lower side of the base are fixedly connected to a support frame, a first drive motor is fixedly connected inside the support frame, a screw is fixedly connected to the output end of the first drive motor, and a movable frame is arranged upward through the upper end of the support frame through the base;

[0005] The screw rod is threadedly connected to the movable frame, two outer ends of the movable frame are provided with sliding grooves, two inner ends of the support frame are fixedly connected with third sliding blocks, and the upper end of the movable frame is fixedly connected with a connecting seat.

[0006] As a further description of the above technical solution: the upper end of the connecting seat is fixedly connected to the connecting seat, and the upper end of the connecting seat is fixedly connected to the fixing seat.

[0007] As a further description of the above technical solution: a fourth drive motor is arranged at one end of the fixed seat, an output end of the fourth drive motor passes through the fixed seat and a first lead screw is arranged inwardly, and a first air bearing is threadedly connected to the first lead screw.

[0008] As a further description of the above technical solution: the upper end of the first air bearing is fixedly connected to the first connecting plate, the other upper end of the connecting seat is fixedly connected to the first sliding rod, the lower end of the first connecting plate is fixedly connected to the first sliding block, and the first sliding block is slidably connected to the first sliding rod.

[0009] As a further description of the above technical solution: the other upper end of the first air bearing is fixedly connected to a second connecting plate, and the inner end of the second connecting plate is fixedly connected to a connecting frame.

[0010] As a further description of the above technical solution: a second drive motor is arranged at one end of the inner side of the connecting frame, a second lead screw is arranged inwardly through the output end of the second drive motor, a second air bearing is threadedly connected to the second lead screw, the upper end of the second air bearing is fixedly connected to a mounting seat, a workbench is arranged at the upper end of the mounting seat, one end of the connecting frame is fixedly connected to a second sliding rod, one end of the second air bearing is fixedly connected to a second slider, and the second slider is slidably connected to the second sliding rod.

[0011] As a further description of the above technical solution: a third drive motor is arranged inside the mounting seat, the output end of the third drive motor is fixedly connected to the workbench, a pulley is arranged at the lower end of the workbench, a slide rail is provided at the upper end of the mounting seat, and a plurality of mounting holes are provided on the workbench.

[0012] The utility model has the following beneficial effects:

[0013] 1. Compared with the prior art, the ultra-precision air-floating mobile rotating platform can realize the lifting and lowering adjustment of the entire air-floating platform by setting the first drive motor, the screw, the slide groove and the third slider, and can realize the horizontal and vertical adjustment of the workbench by setting the fourth drive motor, the first lead screw, the third drive motor and the second lead screw, thereby ensuring the convenience and practicality of the entire air-floating platform during use, and one end of each of the two moving components is provided with a slide rod limit component to ensure its stability during movement;

[0014] 2. Compared with the prior art, this ultra-precision air-floating mobile rotating platform can realize 360-degree rotation of the workbench by setting a third drive motor, a slide rail and a pulley. While ensuring the forward, backward, left and right movement of the workpiece, it can also be adjusted at multiple angles and in multiple directions.

[0015] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The utility model is further described below in conjunction with the accompanying drawings and embodiments;

[0017] Figure 1 It is a schematic diagram of the overall front structure of the utility model.

[0018] Figure 2 It is a top view of the utility model.

[0019] Figure 3It is a structural schematic diagram of the support frame of the utility model.

[0020] Figure 4 It is a schematic diagram of the connecting seat structure of the utility model.

[0021] Legend:

[0022] 1. Workbench; 2. Connecting seat; 3. Connecting frame; 4. First air bearing; 5. First slider; 6. First slide bar; 7. Connecting seat; 8. Movable frame; 9. Base; 10. Support frame; 11. First drive motor; 12. Screw; 13. First lead screw; 14. First connecting plate; 15. Second connecting plate; 16. Second drive motor; 17. Second lead screw; 18. Second slide bar; 19. Second slider; 20. Second air bearing; 21. Slide groove; 22. Third slider; 23. Slide rail; 24. Third drive motor; 25. Pulley; 26. Mounting hole; 27. Fixed seat; 28. Fourth drive motor. DETAILED DESCRIPTION

[0023] This section will describe in detail the specific embodiments of the utility model. The preferred embodiments of the utility model are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the utility model, but it cannot be understood as a limitation on the protection scope of the utility model.

[0024] Reference Figure 1-4 The utility model provides an embodiment of an ultra-precision air-floating mobile rotating platform, characterized in that the two ends of the lower side of the base 9 are fixedly connected with a support frame 10, and the entire device can be stably supported by the support frame 10, and the interior of the support frame 10 is fixedly connected with a first drive motor 11, and the output end of the first drive motor 11 is fixedly connected with a screw 12, and the upper end of the support frame 10 passes through the base 9 and is upwardly provided with a movable frame 8, and the screw 12 can be rotated by starting the first drive motor 11, and the movable frame 8 can be driven to perform lifting operations under the action of the threaded connection, and four lifting adjustment components are provided, and the four first drive motors 11 are all uniformly controlled;

[0025] The screw rod 12 is threadedly connected to the movable frame 8, and the outer ends of the movable frame 8 are provided with slide grooves 21. The inner ends of the support frame 10 are fixedly connected with third sliders 22, and the upper end of the movable frame 8 is fixedly connected with the connecting seat 7. The movable frame 8 can be restricted by providing the third slider 22 and the slide groove 21, so as to ensure its stability during height adjustment;

[0026] The upper end of the connecting seat 7 is fixedly connected to the connecting seat 7, and the upper end of the connecting seat 7 is fixedly connected to the fixing seat 27, and one end of the fixing seat 27 is provided with a fourth driving motor 28, and the output end of the fourth driving motor 28 passes through the fixing seat 27 and is provided with a first lead screw 13 inwardly, and the first lead screw 13 is threadedly connected to the first air bearing 4. After the height adjustment is completed, starting the fourth driving motor 28 on one side can make the internal first lead screw 23 rotate, and under the action of the threaded connection, the first air bearing 4 and the workbench 1 can be driven to move longitudinally;

[0027] The upper end of the first air-floating bearing 4 is fixedly connected to a first connecting plate 14, the other upper end of the connecting seat 7 is fixedly connected to a first sliding bar 6, the lower end of the first connecting plate 14 is fixedly connected to a first sliding block 5, and the first sliding block 5 is slidably connected to the first sliding bar 6. By setting the first sliding bar 6 and the first sliding block 5, the first air-floating bearing 4 can be restricted to ensure the stability of the first air-floating bearing 4 when sliding;

[0028] The other end above the first air bearing 4 is fixedly connected with a second connecting plate 15, the inner end of the second connecting plate 15 is fixedly connected with a connecting frame 3, a second driving motor 16 is arranged at an inner end of the connecting frame 3, a second lead screw 17 is arranged inwardly through the output end of the second driving motor 16, a second air bearing 20 is threadedly connected to the second lead screw 17, the upper end of the second air bearing 20 is fixedly connected with a mounting seat 2, a workbench 1 is arranged at the upper end of the mounting seat 2, one end of the connecting frame 3 is fixedly connected with a second sliding bar 18, one end of the second air bearing 20 is fixedly connected with a second slider 19, the second slider 19 is slidably connected to the second sliding bar 18, starting the internal second driving motor 16 can make the second lead screw 17 rotate, under the action of the threaded connection It can drive the second air bearing 20 and the upper workbench 1 to move horizontally, so as to adjust the workpiece to the front, back, left, and right, which is convenient for the overall processing operation. Similarly, by setting the second slide bar 18 and the second slide block 19, the limiting effect on the second air bearing 20 can be achieved, ensuring the stability of the second air bearing 20 when sliding. When the processing angle of the workpiece needs to be adjusted, starting the internal third drive motor 24 can drive the upper workbench 1 to rotate, realizing a 360-degree rotation of the workbench. While ensuring the front, back, left, and right movement of the workpiece, it can also be adjusted at multiple angles and in multiple directions to improve its processing efficiency. In addition, under the action of the pulley 25 and the slide rail 23, the stability of the entire workbench 1 during rotation can be ensured;

[0029] A third driving motor 24 is arranged inside the mounting seat 2, and an output end of the third driving motor 24 is fixedly connected to the workbench 1, a pulley 25 is arranged at the lower end of the workbench 1, a slide rail 23 is provided at the upper end of the mounting seat 2, and a plurality of mounting holes 26 are provided on the workbench 1, through which the workpiece can be mounted to ensure its stability during processing.

[0030] Working principle: When the device is in use, the workpiece to be processed is first installed on the workbench 1 through the mounting hole 26, and then the internal first drive motor 11 is started to rotate the screw 12. Under the action of the threaded connection, the movable frame 68 can drive the upper air floating platform to adjust the height. After the height adjustment is completed, the fourth drive motor 28 on one side is started to rotate the internal first lead screw 23, and under the action of the threaded connection, the first air floating bearing 4 and the workbench 1 can be driven to move longitudinally, and the internal second drive motor 16 is started to rotate the second lead screw 17, and under the action of the threaded connection, the second air floating bearing 20 and the upper workbench 1 can be driven to move horizontally, thereby realizing the front and back left and right adjustment of the workpiece, which is convenient for the overall processing operation. Finally, when the processing angle of the workpiece needs to be adjusted, the internal third drive motor 24 is started to drive the upper workbench 1 to rotate, realizing a 360-degree rotation of the workbench. While ensuring the front and back left and right movement of the workpiece, it can also be adjusted at multiple angles and in multiple directions to improve its processing efficiency.

[0031] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments. Various changes can be made within the knowledge scope of ordinary technicians in the technical field without departing from the purpose of the present invention.

Claims

1. An ultra-precision air-floating mobile rotating platform, comprising a base (9), characterized in that: The two ends of the lower side of the base (9) are fixedly connected to a support frame (10), the interior of the support frame (10) is fixedly connected to a first drive motor (11), the output end of the first drive motor (11) is fixedly connected to a screw rod (12), and the upper end of the support frame (10) passes through the base (9) and is provided with a movable frame (8) upwardly; The screw rod (12) is threadedly connected to the movable frame (8); two outer ends of the movable frame (8) are provided with sliding grooves (21); two inner ends of the support frame (10) are fixedly connected with third sliding blocks (22); and the upper end of the movable frame (8) is fixedly connected with a connecting seat (7).

2. The ultra-precision air-floating mobile rotating platform according to claim 1, characterized in that: The upper end of the connecting seat (7) is fixedly connected to the connecting seat (7), and the upper end of the connecting seat (7) is fixedly connected to the fixing seat (27).

3. The ultra-precision air-floating mobile rotating platform according to claim 2, characterized in that: A fourth drive motor (28) is disposed at one end of the fixed seat (27), and a first lead screw (13) is disposed inwardly of the output end of the fourth drive motor (28) through the fixed seat (27), and a first air bearing (4) is threadedly connected to the first lead screw (13).

4. The ultra-precision air-floating mobile rotating platform according to claim 3, characterized in that: The upper end of the first air bearing (4) is fixedly connected to a first connecting plate (14), the other upper end of the connecting seat (7) is fixedly connected to a first sliding rod (6), the lower end of the first connecting plate (14) is fixedly connected to a first sliding block (5), and the first sliding block (5) is slidably connected to the first sliding block (6).

5. The ultra-precision air-floating mobile rotating platform according to claim 3, characterized in that: The other upper end of the first air bearing (4) is fixedly connected to a second connecting plate (15), and the inner end of the second connecting plate (15) is fixedly connected to a connecting frame (3).

6. The ultra-precision air-floating mobile rotating platform according to claim 5, characterized in that: A second drive motor (16) is arranged at one end of the inner side of the connecting frame (3); a second lead screw (17) is arranged inwardly through the output end of the second drive motor (16); a second air bearing (20) is threadedly connected to the second lead screw (17); an upper end of the second air bearing (20) is fixedly connected to a mounting seat (2); a workbench (1) is arranged at the upper end of the mounting seat (2); one end of the connecting frame (3) is fixedly connected to a second slide bar (18); one end of the second air bearing (20) is fixedly connected to a second slider (19); the second slider (19) is slidably connected to the second slide bar (18).

7. The ultra-precision air-floating mobile rotating platform according to claim 6, characterized in that: A third drive motor (24) is arranged inside the mounting seat (2), the output end of the third drive motor (24) is fixedly connected to the workbench (1), a pulley (25) is arranged at the lower end of the workbench (1), a slide rail (23) is provided at the upper end of the mounting seat (2), and a plurality of mounting holes (26) are provided on the workbench (1).

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