Vacuum pipeline system

Abstract

The utility model relates to the technical field of vacuum, and discloses a vacuum pipeline system which comprises at least two vacuum pumps, at least two vacuumizing pipelines and at least two cavities, wherein each vacuumizing pipeline is communicated with one corresponding cavity through one vacuum valve, and is communicated with the other adjacent vacuumizing pipeline through the other vacuum valve; and each vacuum pump is communicated with the corresponding vacuumizing pipeline. According to the vacuum pipeline system provided by the utility model, at least two vacuum pumps can control at least two cavities at the same time through ingenious design. By means of the innovative design, the problem that the vacuum degree of a cavity cannot be guaranteed in a traditional one-cavity one-pump mode is solved, the working capacity of the vacuum pumps can be fully utilized through cross operation of the different vacuum pumps, waiting time is avoided, and therefore waste of resources is avoided.

Description

Technical Field

[0001] The utility model relates to the field of vacuum technology, in particular to a vacuum pipeline system. Background Art

[0002] In the process of evacuating the cavity, multiple vacuum pumps are usually used to control different cavities. For example, three vacuum pumps control three different cavities respectively. In this process, valve switching is required, that is, opening or closing the vacuum valve to control the evacuation of different cavities.

[0003] However, the prior art has some defects in the following aspects:

[0004] (1) The traditional one-chamber-one-pump method cannot guarantee the vacuum degree of the chamber. Since each pump can only control one chamber, if a pump has a problem, the vacuum degree of the corresponding chamber will be insufficient.

[0005] (2) There is always a period of waiting between the completion of cavity bonding and the second bonding. If the vacuum pump is still working during this waiting time, it will cause waste and shorten the service life of the vacuum pump.

[0006] Therefore, it is necessary to improve the existing technology.

[0007] The above information is presented as background information only to assist with understanding the present disclosure and no determination or admission is made as to whether any of the above may be used as prior art with respect to the present disclosure. Utility Model Content

[0008] The utility model provides a vacuum pipeline system to solve the problems existing in the prior art.

[0009] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0010] A vacuum pipeline system comprises at least two vacuum pumps, at least two vacuum pipelines and at least two chambers; wherein:

[0011] Each of the vacuum pumping pipelines is connected to a corresponding cavity through a vacuum valve, and is connected to another adjacent vacuum pumping pipeline through another vacuum valve;

[0012] Each of the vacuum pumps is communicated with a corresponding one of the vacuum extraction pipelines.

[0013] Furthermore, in the vacuum pipeline system, each of the cavities is also connected to a vacuum breaking pipeline;

[0014] Each of the vacuum breaking pipelines is provided with a vacuum breaking valve.

[0015] Furthermore, in the vacuum pipeline system, an input end of the vacuum breaking pipeline is connected to the cavity, and an output end of the vacuum breaking pipeline is connected to the atmosphere.

[0016] Furthermore, the vacuum pipeline system further includes a controller;

[0017] The vacuum pump, vacuum valve and vacuum breaking valve are all electrically connected to the controller.

[0018] Furthermore, the vacuum pipeline system further includes a vacuum detection gauge;

[0019] A vacuum detector is provided in each cavity;

[0020] The vacuum detector is electrically connected to the controller.

[0021] Compared with the prior art, the utility model has the following beneficial effects:

[0022] The utility model provides a vacuum pipeline system, which realizes at least two vacuum pumps controlling at least two cavities at the same time through ingenious design. This innovative design not only overcomes the problem that the traditional one-cavity-one-pump mode cannot guarantee the vacuum degree of the cavity, but also makes full use of the working capacity of the vacuum pump through cross-operation of different vacuum pumps, avoids waiting time, and thus avoids waste of resources.

[0023] The present invention has other characteristics and advantages, which will be apparent from the accompanying drawings and subsequent specific embodiments incorporated herein, or will be described in detail in the accompanying drawings and subsequent specific embodiments incorporated herein, which together are used to explain the specific principles of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 This is a structural schematic diagram of a vacuum pipeline system provided in Embodiment 1 of the present utility model;

[0026] Figure 2 This is a structural schematic diagram of a vacuum pipeline system provided in Embodiment 1 of the present utility model;

[0027] Figure 3 This is a structural schematic diagram of a vacuum pipeline system provided in Embodiment 1 of the present utility model;

[0028] Figure 4 It is a structural schematic diagram of a vacuum pipeline system provided in Example 1 of the utility model.

[0029] Reference numerals:

[0030] Vacuum pump 1, vacuum extraction pipeline 2, cavity 3, vacuum valve 4, vacuum breaking pipeline 5, vacuum breaking valve 6. DETAILED DESCRIPTION

[0031] In order to explain in detail the possible application scenarios, technical principles, specific schemes that can be implemented, and the purposes and effects that can be achieved, the following is a detailed description of the specific embodiments listed in conjunction with the accompanying drawings. The embodiments described herein are only used to more clearly illustrate the technical solutions of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0032] Reference to "embodiment" herein means that the specific features, structures or characteristics described in conjunction with the embodiment may be included in at least one embodiment of the present application. The term "embodiment" appearing in various places in the specification does not necessarily refer to the same embodiment, nor does it particularly limit its independence or association with other embodiments. In principle, in the present application, as long as there is no technical contradiction or conflict, the various technical features mentioned in the embodiments can be combined in any way to form a corresponding implementable technical solution.

[0033] Unless otherwise defined, the technical terms used in this document have the same meanings as those generally understood by those skilled in the art to which this application belongs; the use of relevant terms in this document is only for describing specific embodiments and is not intended to limit this application.

[0034] In the description of this application, the term "and / or" is an expression used to describe the logical relationship between objects, indicating that three relationships may exist, for example, A and / or B, which means: A exists, B exists, and A and B exist at the same time. In addition, the character " / " in this article generally indicates that the objects before and after are in an "or" logical relationship.

[0035] In the present application, terms such as “first” and “second” are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship of quantity, priority or sequence between these entities or operations.

[0036] Without further limitations, in this application, the words "include", "comprises", "has" or other similar expressions used in the sentences are intended to cover non-exclusive inclusion. These expressions do not exclude the presence of additional elements in the process, method or product including the elements, so that the process, method or product including a series of elements may include not only those limited elements, but also other elements not explicitly listed, or also include elements inherent to such process, method or product.

[0037] Similar to the understanding in the Examination Guidelines, in this application, expressions such as "greater than", "less than", "exceed" and the like are understood to exclude the number itself; expressions such as "above", "below", "within" and the like are understood to include the number itself. In addition, in the description of the embodiments of this application, "multiple" means more than two (including two), and similar expressions related to "multiple" are also understood in this way, such as "multiple groups", "multiple times", etc., unless otherwise clearly and specifically limited.

[0038] In the description of the embodiments of the present application, space-related expressions used, such as "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "vertical", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicate the orientation or position relationship based on the orientation or position relationship shown in the specific embodiments or drawings, and are only for the convenience of describing the specific embodiments of the present application or facilitating the reader's understanding, and do not indicate or imply that the referred device or component must have a specific position, a specific orientation, or be constructed or operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0039] Unless otherwise expressly specified or limited, in the description of the embodiments of the present application, the terms such as "install", "connect", "connect", "fix", "set", etc. used should be understood in a broad sense. For example, the "connection" can be a fixed connection, a detachable connection, or an integrated setting; it can be a mechanical connection, an electrical connection, or a communication connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. For technicians in the technical field to which the present application belongs, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0040] Embodiment 1

[0041] In view of the defects of the above-mentioned prior art, the applicant, based on many years of rich practical experience and professional knowledge in the design and manufacture of such products, and in conjunction with the application of theory, actively conducts research and innovation in the hope of creating a technology that can solve the defects of the prior art. After continuous research and design, and after repeated trial samples and improvements, the present utility model with real practical value was finally created.

[0042] Please refer to Figure 1-2 The embodiment of the utility model provides a vacuum pipeline system, including at least two vacuum pumps 1, at least two vacuum pipelines 2 and at least two chambers 3; wherein,

[0043] Each of the vacuum pumping pipelines 2 is connected to a corresponding cavity 3 through a vacuum valve 4, and is connected to another adjacent vacuum pumping pipeline 2 through another vacuum valve 4;

[0044] Each of the vacuum pumps 1 is connected to a corresponding vacuum extraction pipeline 2 .

[0045] It should be noted that, through ingenious design, the vacuum pipeline system provided in this embodiment realizes the function of at least two vacuum pumps 1 controlling at least two chambers 3 at the same time, further improving the flexibility and efficiency of the system. This design allows each vacuum pump 1 to participate in and complete the task together at any time, no matter which chamber 3 is being vacuumed.

[0046] The core advantage of this innovative design is that it overcomes the problem that the traditional one-chamber-one-pump mode cannot guarantee the vacuum degree of the cavity 3. In the traditional mode, if a vacuum pump 1 fails or its performance deteriorates, the cavity 3 controlled by it cannot reach the required vacuum degree. In this embodiment, since multiple vacuum pumps 1 work at the same time, even if a pump has a problem, other pumps can fill in the gap in time to ensure that each cavity 3 can reach the required vacuum degree.

[0047] In addition, by cross-operating different vacuum pumps 1, the system can fully utilize the working capacity of the vacuum pump 1 and avoid waiting time. In the traditional one-chamber-one-pump mode, when a cavity 3 is vacuumed, it is necessary to wait for the next cavity 3 to be ready before the next vacuuming can be performed. In the embodiment, since multiple vacuum pumps 1 work at the same time, after a cavity 3 is vacuumed, it can immediately switch to the next cavity 3 for operation, thereby achieving seamless connection and greatly improving work efficiency.

[0048] In summary, the vacuum pipeline system provided in this embodiment not only ensures the vacuum degree of the cavity 3 through clever design and innovative application, but also makes full use of the working capacity of the vacuum pump 1 and avoids waste of resources. This design not only improves product quality and production efficiency, but also saves costs for enterprises, showing extremely high practical value and broad application prospects.

[0049] Please refer again Figure 1 In this embodiment, each of the cavities 3 is also connected to a vacuum breaking pipeline 5;

[0050] Each of the vacuum breaking pipelines 5 is provided with a vacuum breaking valve 6 .

[0051] It should be noted that each of the cavities 3 is not only connected to the corresponding vacuum pump 1 through the vacuum pumping line 2, but also connected to a vacuum breaking line 5. The function of the vacuum breaking line 5 is to quickly reduce the vacuum degree in the cavity 3 when needed, such as when the cavity 3 needs to be opened or replaced.

[0052] Each of the vacuum breaking pipelines 5 is provided with a vacuum breaking valve 6. The vacuum breaking valve 6 is used to control the opening or closing of the vacuum breaking pipeline 5. When vacuum breaking is required, the operator can open the vacuum breaking valve 6 to allow outside air to enter the cavity 3, thereby quickly reducing the vacuum degree in the cavity 3.

[0053] The advantage of this design is that when the chamber 3 does not need to work or needs to be replaced or repaired, the operator can quickly open the vacuum valve 6 to quickly reduce the vacuum degree in the chamber 3, thereby facilitating shutdown or replacement or repair operations. At the same time, this design also helps to protect the vacuum pump 1 and other pipeline equipment, avoiding damage that may be caused by maintaining a high vacuum state for a long time.

[0054] In summary, by introducing the vacuum breaking pipeline 5 and the vacuum breaking valve 6, the vacuum pipeline system of the utility model is more complete and flexible, can better adapt to various usage scenarios and needs, and further improves the practicality and reliability of the system.

[0055] Please refer again Figure 1 In this embodiment, the input end of the vacuum breaking pipeline 5 is connected to the cavity 3, and the output end of the vacuum breaking pipeline 5 is connected to the atmosphere.

[0056] It should be noted that the input end of the vacuum breaking pipeline 5 is connected to the cavity 3, which means that when the vacuum breaking valve 6 is opened, the gas in the cavity 3 can flow out through the vacuum breaking pipeline 5. At the same time, the output end of the vacuum breaking pipeline 5 is connected to the atmosphere, which ensures that the gas flowing out of the cavity 3 can be smoothly discharged into the atmosphere without accumulating inside the system or causing other adverse effects.

[0057] This design is essential to ensure the safe and stable operation of the system. When the chamber 3 needs to be opened for maintenance, cleaning or replacement of internal components, the vacuum breaker line 5 provides an effective way to quickly release the vacuum state in the chamber 3. By opening the vacuum breaker valve 6, the pressure in the chamber 3 can be quickly balanced to the atmospheric pressure, which greatly reduces the risk and difficulty of opening the chamber 3.

[0058] In addition, the design of the vacuum breaking pipeline 5 also takes into account the requirements of environmental protection and energy saving. By directly discharging the gas into the atmosphere, the system avoids the use of additional processing equipment to treat the gas, thereby reducing energy consumption.

[0059] In this embodiment, the vacuum pipeline system further includes a controller;

[0060] The vacuum pump 1 , the vacuum valve 4 and the vacuum breaking valve 6 are all electrically connected to the controller.

[0061] It should be noted that the vacuum pipeline system also includes a controller, which is used to monitor and control the operation of the entire system. Through the controller, the operator can remotely control the opening and closing of the vacuum pump 1, the vacuum valve 4 and the vacuum breaker valve 6, thereby realizing automated and intelligent operation.

[0062] The vacuum pump 1, vacuum valve 4 and vacuum breaker valve 6 are all electrically connected to the controller. This design enables the controller to monitor the status of each device in real time and send control signals as needed. For example, when the controller detects that the vacuum degree of a cavity 3 is insufficient, it can automatically open the corresponding vacuum pump 1 and vacuum valve 4 to start the vacuum operation. Similarly, when a cavity 3 needs to be opened for maintenance or replacement, the controller can automatically open the corresponding vacuum breaker valve 6 to reduce the vacuum degree in the cavity 3.

[0063] By introducing the controller, the vacuum pipeline system of the utility model not only realizes automatic and intelligent operation, but also greatly improves the reliability and stability of the system. At the same time, this design also saves labor costs for enterprises and improves production efficiency.

[0064] In this embodiment, the vacuum pipeline system further includes a vacuum detection gauge;

[0065] A vacuum detector is provided in each cavity 3;

[0066] The vacuum detector is electrically connected to the controller.

[0067] It should be noted that the vacuum pipeline system further includes a vacuum detector for real-time monitoring of the vacuum degree in each cavity 3. A vacuum detector is provided in each cavity 3 to ensure that the vacuum degree of the cavity 3 can be accurately measured.

[0068] The vacuum detector is electrically connected to the controller, which means that the detector can transmit the vacuum degree data monitored in real time to the controller. After receiving this data, the controller can analyze and process it to determine whether the current vacuum degree meets the requirements. If the vacuum degree of a cavity 3 is insufficient, the controller can automatically take measures, such as opening the corresponding vacuum pump 1 and vacuum valve 4 to start the vacuum operation.

[0069] This design improves the intelligence and automation of the entire vacuum pipeline system. By monitoring the vacuum level of each cavity 3 in real time, the system can quickly respond to any abnormal situation and ensure that each cavity 3 can achieve the required vacuum level. In addition, this design reduces the need for manual intervention and improves the stability and reliability of the system.

[0070] Please refer to Figure 3-4 Taking three vacuum pumps 1, three vacuum pipelines 2, and three chambers 3 as an example, the working process of the vacuum pipeline system provided in this embodiment is briefly described.

[0071] Three chambers and three vacuum pumps work in a cross-operation manner without stopping. No matter which chamber needs to be vacuumed, all three vacuum pumps can do it. There is no waiting and no waste.

[0072] 1# Vacuuming the cavity:

[0073] The large vacuum pump I is turned on, the vacuum valve No. 2 is opened, and the 1# chamber is evacuated;

[0074] The large vacuum pump II is turned on, vacuum valves No. 2 and No. 7 are opened, and the No. 1 chamber is evacuated;

[0075] The large vacuum pump III is turned on, vacuum valves No. 2, 7, and 8 are opened, and the No. 1 chamber is evacuated.

[0076] 2# Vacuuming the cavity:

[0077] The large vacuum pump I is turned on, the vacuum valves No. 4 and No. 7 are opened, and the 2# chamber is evacuated;

[0078] The large vacuum pump II is turned on, the vacuum valve No. 4 is opened, and the 2# chamber is evacuated;

[0079] The large vacuum pump III is turned on, vacuum valves No. 4 and 8 are opened, and the 2# chamber is evacuated.

[0080] 3# Vacuuming the cavity:

[0081] The large vacuum pump I is turned on, vacuum valves No. 6, 8, and 7 are opened, and the 3# chamber is evacuated;

[0082] The large vacuum pump II is turned on, vacuum valves No. 6 and 8 are opened, and the 3# chamber is evacuated;

[0083] The large vacuum pump III is turned on, the vacuum valve No. 6 is opened, and the 2# chamber is evacuated.

[0084] Breaking the vacuum:

[0085] Vacuum valve No. 1 is opened, and the vacuum in chamber No. 1 is broken;

[0086] Vacuum valve No. 3 is opened, and the vacuum in chamber No. 2 is broken;

[0087] Vacuum valve No. 5 is opened and the vacuum in cavity No. 3 is broken.

[0088] Although the terms such as vacuum pump, vacuum pipeline, chamber, vacuum valve, etc. are used more frequently in this application, the possibility of using other terms is not excluded. These terms are used only to more conveniently describe and explain the essence of the utility model; interpreting them as any additional restrictions is contrary to the spirit of the utility model.

[0089] The utility model provides a vacuum pipeline system, which realizes at least two vacuum pumps controlling at least two cavities at the same time through ingenious design. This innovative design not only overcomes the problem that the traditional one-cavity-one-pump mode cannot guarantee the vacuum degree of the cavity, but also makes full use of the working capacity of the vacuum pump through cross-operation of different vacuum pumps, avoids waiting time, and thus avoids waste of resources.

[0090] Finally, it should be noted that although the above embodiments have been described in the specification and drawings of this application, this does not limit the scope of patent protection of this application. All technical solutions generated by replacing or modifying equivalent structures or equivalent processes based on the essential concept of this application using the contents recorded in the specification and drawings of this application, as well as directly or indirectly implementing the technical solutions of the above embodiments in other related technical fields, are included in the scope of patent protection of this application.

Claims

1. A vacuum pipeline system, characterized in that: It comprises at least two vacuum pumps (1), at least two vacuum extraction pipelines (2) and at least two chambers (3); wherein: Each of the vacuum pipelines (2) is connected to a corresponding cavity (3) via a vacuum valve (4), and is connected to another adjacent vacuum pipeline (2) via another vacuum valve (4); Each of the vacuum pumps (1) is in communication with a corresponding vacuum extraction pipeline (2).

2. The vacuum pipeline system according to claim 1, characterized in that: Each of the cavities (3) is also connected to a vacuum breaking pipeline (5); Each of the vacuum breaking pipelines (5) is provided with a vacuum breaking valve (6).

3. The vacuum pipeline system according to claim 2, characterized in that: The input end of the vacuum breaking pipeline (5) is in communication with the cavity (3), and the output end of the vacuum breaking pipeline (5) is in communication with the atmosphere.

4. The vacuum pipeline system according to claim 2, characterized in that: Also includes a controller; The vacuum pump (1), the vacuum valve (4) and the vacuum breaking valve (6) are all electrically connected to the controller.

5. The vacuum pipeline system according to claim 4, characterized in that: Also includes a vacuum test gauge; A vacuum detector is arranged in each cavity (3); The vacuum detector is electrically connected to the controller.

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