Vertical developing equipment for fine circuit board

The vertical developing device with dual fluid modules and swing mechanisms addresses the challenge of uniform etching in fine circuit boards by ensuring precise spray control and mist-forming nozzles, achieving high-precision and cost-effective production.

CN222281049UActive Publication Date: 2024-12-31SUZHOU XUAN MINGSHI SEMICON EQUIP TECH CO LTD
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Patent Information

Application Number
CN202420915989.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-29
Publication Date
2024-12-31
Estimated Expiration
2034-04-29

AI Technical Summary

Technical Problem

Existing horizontal and vertical etching methods for circuit boards face challenges in achieving uniform etching and precision for fine circuit boards (line width and spacing less than 10um), with horizontal etching suffering from uneven liquid distribution and vertical etching using large particle sizes leading to poor etching and circuit failures.

Method used

A vertical developing device with dual fluid modules and swing mechanisms, featuring 100-1000um and 5-40um particle size sprays, and a conveying mechanism to ensure precise control over spray positions and uniform etching, using mist-forming nozzles for fine circuit gaps.

Benefits of technology

The device achieves high-precision, uniform etching with improved accuracy and consistency, suitable for fine circuit boards, eliminating the need for secondary etching and reducing circuit failures, thus enabling high-quality and cost-effective production.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides vertical developing equipment for a fine circuit board, which comprises a first fluid module and a second fluid module which are arranged in parallel, the particle size of liquid medicine particles sprayed by the first fluid module is 100-1000 microns, the particle size of liquid medicine particles sprayed by the second fluid module is 5-40 microns, and the vertical developing equipment comprises a clamp, a spraying disc and a swinging mechanism for driving the spraying disc to move, a circuit board is loaded on the clamp and moves in a vertical state between the first fluid module and the second fluid module through the conveying mechanism, the two spraying discs are symmetrically arranged on the front side and the rear side of the clamp, and each swinging mechanism independently drives the corresponding spraying disc to move up and down. According to the utility model, the high-precision development etching of the fine circuit board is realized, the cost is low, and the universality is wide.
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Description

Technical Field

[0001] The utility model relates to the technical field of circuit boards, in particular to a vertical developing device for fine circuit boards. Background Art

[0002] The production of circuit boards usually adopts the process of substrate dry film → exposure → development → etching → film stripping. Among them, development is one of the core processes of the circuit board wet process. Its working principle is to spray the etching solution evenly onto the surface of the copper foil through the nozzle, and react with the copper without etching resist protection to react and remove the unnecessary copper, exposing the substrate and then stripping the film to form the circuit.

[0003] The etching section of the development is an important reaction section, which can be roughly divided into horizontal and vertical types according to the way the circuit board is conveyed.

[0004] Among them, horizontal etching: the PCB substrate passes through the reaction tank horizontally through the conveyor wheel; the etching liquid is sprayed onto the surface of the copper plate through the upper and lower nozzles to eliminate unnecessary copper. This horizontal development and etching section has the following disadvantages: the liquid at the bottom of the substrate flows away quickly, and there is no pool effect. The liquid at the top of the substrate is not easy to flow away, resulting in the pool effect, and the liquid at the edge of the substrate is updated quickly, the etching speed is fast, and the liquid in the middle is updated slowly, and the etching speed is slow; making it difficult to control the uniformity of the upper board surface and side etching, which requires strong process capabilities. When the line is below 40um, the horizontal line can hardly be produced.

[0005] Among them, vertical etching: the PCB substrate is clamped by the clamping claws to clamp the circuit board to be processed, and passes vertically through the reaction tank; the etching liquid is sprayed onto the surface of the copper plate through the front and rear nozzles to eliminate unnecessary copper. During the reaction process, the faster the exchange of the medicinal liquid between the PCB and the carrier etching, the better the etching effect. The existing vertical etching adopts a fluid spray, and the particle size of the particles produced by its nozzle is more than 100um. For fine circuit boards (line width and line spacing less than 10um), the particle size is relatively large, and the circuit cannot be quickly etched, resulting in the inability to produce the circuit. Therefore, in the production process of fine circuit boards, it is necessary to etch the circuit by secondary infiltration after the fluid spray etching. The circuit etching factor is very poor, and the produced circuit has many burrs and cannot achieve the impedance and line shape desired by the customer. In addition, the spray discs on both sides of the existing fluid spray device can generally only swing synchronously. Although the spray position and start and stop position can be adjusted, the adjustment accuracy is not high, which is not suitable for the production of fine circuit boards. Utility Model Content

[0006] The utility model aims to provide a vertical developing device for a fine circuit board to overcome the shortcomings in the prior art.

[0007] In order to solve the above technical problems, the technical solution of the utility model is: a vertical developing device for fine circuit boards, comprising a fluid module and a second fluid module arranged in parallel, the fluid module being arranged upstream of the second fluid module, the particle size of the liquid medicine sprayed by the fluid module being 100-1000um, and the particle size of the liquid medicine sprayed by the second fluid module being 5-40um, comprising a fixture, a spray plate and a swing mechanism for driving the spray plate to move, the fixture is loaded with a circuit board, and moves in a vertical state between the fluid module and the second fluid module through a conveying mechanism, the spray plate is provided with two, symmetrically arranged on the front and rear sides of the fixture, the swing mechanism is also provided with two, arranged one-to-one corresponding to the two spray plates, and each swing mechanism individually drives the corresponding spray plate to move up and down.

[0008] Furthermore, in the vertical developing equipment for the above-mentioned fine circuit board, the two-fluid module also includes a base frame and an upper frame arranged above the base frame, the base frame is provided with a liquid storage tank inside, the front side of the upper frame is provided with a reaction tank for spraying, the rear side is provided with a cavity for the rotation of an unloaded fixture, and a conveying mechanism is also provided in the cavity, and the reaction tank is a closed cavity connected to a fluid module.

[0009] Furthermore, in the vertical developing device of the fine circuit board, the conveying mechanism is used to vertically convey the fixture, including a transmission assembly arranged at the bottom of the upper frame and a guide assembly arranged at the top of the upper frame, the transmission assembly is used to drive the fixture to move along the conveying direction, including a transmission seat, a transmission shaft, a driven shaft, a magnetic wheel 1, and a magnetic wheel 2, the transmission shaft is arranged along the conveying direction and is arranged parallel to the outside of the transmission seat, the transmission shaft is connected to the servo motor through a coupling, the driven shaft is provided with a plurality of, which are arranged inside the transmission seat and are rotatably connected to the transmission seat, and each of the driven shafts is provided with a plurality of A magnetic wheel 2 is fixed to one end of the shaft extending out of the transmission seat, and the transmission shaft is provided with multiple magnetic wheels 1 arranged corresponding to the two magnetic wheels, and the magnetic wheel 1 cooperates with the magnetic wheel 2. Each driven shaft is also provided with a roller located inside the transmission seat, and the bottom of the clamp is connected to the roller; the guide assembly is used for guiding, including a guide seat plate and an upper guide wheel, and the guide seat plate is a U-shaped groove plate arranged along the conveying direction, and multiple groups of upper guide wheels arranged in parallel in pairs are provided on both sides of the bottom, and the upper end of the clamp passes between the upper guide wheels arranged in parallel in pairs.

[0010] Furthermore, in the vertical developing device for the above-mentioned fine circuit board, the spray plate includes an outer frame and a plurality of spray pipes arranged inside the outer frame, the plurality of spray pipes are evenly arranged along the conveying direction of the fixture, the spray pipes are vertically arranged, and a plurality of evenly arranged nozzles are provided along the vertical direction.

[0011] Furthermore, in the vertical developing device for the fine circuit board, the nozzles on adjacent nozzles are staggered.

[0012] Furthermore, in the vertical developing equipment for the above-mentioned fine circuit board, the nozzle is provided with a liquid inlet channel and an air inlet channel, the liquid inlet of the liquid inlet channel is connected to the module liquid inlet pipeline, the air inlet of the air inlet channel is connected to the module air inlet pipeline, the liquid inlet channel is provided with a plurality of liquid outlets connected to each nozzle, the air inlet channel is provided with a plurality of air outlets connected to each nozzle, the liquid in the liquid inlet channel and the gas in the air inlet channel enter the nozzle from the liquid outlet and the air outlet respectively and are mixed at the nozzle end of the nozzle and then sprayed out from the nozzle in the form of mist.

[0013] Furthermore, in the vertical developing device for the above-mentioned fine circuit board, the end face where the spray pipe is connected to the nozzle is provided with an annular air groove connected to the air outlet, the inside of the nozzle is provided with a plurality of air flow channels connected to the annular air groove, the middle part of the nozzle is provided with a liquid flow channel connected to the liquid outlet, and the plurality of air flow channels are evenly distributed with the liquid flow channel as the center.

[0014] Furthermore, in the above-mentioned vertical developing equipment for fine circuit boards, the swing mechanism includes a base plate, a servo electric cylinder, a drive plate, and a pull rod. The base plate is arranged on the top of the upper frame, and the servo electric cylinder is fixed above the base plate, and its output end is connected to the drive plate. Two symmetrically arranged pull rods are provided on both sides of the drive plate, and the pull rods extend into the interior of the reaction tank and are connected to the outer frame of the spray plate.

[0015] Furthermore, in the vertical developing device for the above-mentioned fine circuit board, the swing mechanism also includes an upper guide assembly and a lower guide assembly. The upper guide assembly is arranged on the base plate, and includes a column and a limit plate. The columns are provided with two, which are symmetrically arranged on both sides of the servo electric cylinder. The bottoms of the two columns are connected to the base plate, and the upper ends are connected to the limit plate through the linear bearings provided on the driving plate; the lower guide assembly includes a guide wheel seat and a sliding rod. The upper and lower ends of the two side surfaces of the spray disc are provided with guide wheel seats, and the guide wheel seat is provided with two guide wheels arranged in parallel. The sliding rod is provided on the upper frame, and passes through between the two guide wheels and is slidably connected to the guide wheels.

[0016] The utility model also provides a developing process for a vertical developing device applied to a fine circuit board, comprising the following steps:

[0017] S1. Before spraying, the liquid medicine is pumped out from the liquid medicine storage tank to the module liquid inlet pipeline of the first fluid module and the second fluid module by a magnetic pump. The liquid medicine pressure is 0.2MPa~0.26Mpa, and the temperature is 50℃~55℃; the gas is heated by the heating system and enters the module air inlet pipeline of the first fluid module and the second fluid module. The pressure is 0.25Mpa~0.3Mpa and the temperature is 50℃~55℃.

[0018] S2, the fixture is transported to a fluid module through a conveying structure, and the fluid module sprays and etches the circuit board on the fixture. The particle size of the sprayed liquid is 100-1000um. When the fixture passes through the fluid module completely through the conveying structure, one etching is completed;

[0019] S3. The fixture is transported to the two-fluid module through the conveying structure. The two-fluid module sprays and etches the circuit board on the fixture. The particle size of the sprayed liquid is 5-40um. During the spraying process, the two spray discs swing up and down. When the fixture completely passes through the two-fluid module through the conveying structure, the secondary etching is completed to obtain a complete circuit on the circuit board.

[0020] Compared with the prior art, the beneficial effects of the utility model are as follows: by driving each spray disc separately through two swing mechanisms, the start and stop positions and the spray position of the spray disc can be better controlled, so that the local etching rate is more uniform, the consistency of the etching of the whole surface is ensured, and the etching accuracy is improved; the secondary graded spray etching is adopted, so that the liquid particles can directly reach the fine circuit gaps, and the intermediate liquid produced due to gravity after the reaction can flow out quickly, ensuring that the etching solution with etching function always keeps in contact with the circuit board, which is suitable for high-requirement, fine circuit etching, development, and film removal; it solves the problem of severe side etching caused by insufficient exchange of horizontal etching solution and the problem of circuit failure due to the inability to produce circuits due to the inability to quickly bite the circuits due to the large particles of the solution sprayed from the nozzle, thereby realizing high-precision, low-cost, and widely applicable circuit board production. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a structural schematic diagram of the vertical developing device of the fine circuit board of the utility model;

[0023] Figure 2 It is a partial structural schematic diagram of a two-fluid module of a vertical developing device for fine circuit boards of the utility model;

[0024] Figure 3 This is a schematic diagram of the internal structure of the upper rack of the vertical developing device for fine circuit boards of the utility model;

[0025] Figure 4 It is a schematic diagram of the upper frame side view structure of the vertical developing device for fine circuit boards of the utility model;

[0026] Figure 5It is a structural schematic diagram of the spray plate and the swing mechanism of the vertical developing device of the fine circuit board of the utility model;

[0027] Figure 6 for Figure 5 Side view of

[0028] Figure 7 It is a top view of two spray plates of the vertical developing device for fine circuit boards of the utility model;

[0029] Figure 8 It is a schematic diagram of the structure of the spray plate of the vertical developing device of the fine circuit board of the utility model;

[0030] Fig. 9 It is a schematic diagram of the structure of the nozzle of the vertical developing device of the fine circuit board of the utility model;

[0031] Fig.10 for Fig. 9 A cross-sectional schematic diagram;

[0032] In the figure: 100, a fluid module; 200, a second fluid module;

[0033] 1. Fixture;

[0034] 2. spray plate; 21. outer frame; 22. spray pipe; 221. liquid inlet channel; 222. air inlet channel; 223. liquid inlet; 224. air inlet; 225. liquid outlet; 226. air outlet; 227. annular air groove; 23. nozzle; 231. air flow channel; 232. liquid flow channel;

[0035] 3. Swing mechanism; 31. Bottom plate; 32. Servo electric cylinder; 33. Drive plate; 34. Pull rod; 35. Upper guide assembly; 351. Column; 352. Limit plate; 36. Lower guide assembly; 361. Guide wheel seat; 362. Slide rod; 363. Guide wheel;

[0036] 4. Conveying mechanism; 41. Transmission assembly; 411. Transmission seat; 412. Transmission shaft; 413. Driven shaft; 414. Magnetic wheel 1; 415. Magnetic wheel 2; 416. Roller; 42. Guide assembly; 421. Guide seat plate; 422. Upper guide wheel;

[0037] 5. Base frame; 6. Upper frame; 61. Reaction tank; 62. Cavity; 7. Drug solution storage tank. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0039] Example 1

[0040] like Figure 1-10 As shown, a vertical developing device for a fine circuit board comprises a first fluid module 100 and a second fluid module 200 arranged in parallel, wherein the first fluid module 100 is arranged upstream of the second fluid module 200. It should be noted that since the main structure of the first fluid module 100 is the prior art, it is not described in detail in this embodiment. The particle size of the liquid medicine sprayed by the first fluid module 100 is 100-1000um, and the particle size of the liquid medicine sprayed by the second fluid module 200 is 5-40um. The second etching is performed in stages. The second fluid module 200 comprises a fixture 1, a spray disc 2 and a swing mechanism 3 for driving the spray disc 2 to move. The fixture 1 is loaded with a circuit board and moves vertically between the first fluid module 100 and the second fluid module 200 through a conveying mechanism 4. Two spray discs 2 are provided, symmetrically arranged on the front and rear sides of the fixture 1. Two swing mechanisms 3 are also provided, corresponding to the two spray discs 2 one by one, and each swing mechanism 3 drives the corresponding spray disc 2 to move up and down separately. By driving each spray disc 2 separately through two swing mechanisms 3, the start and stop positions and the spray position of the spray disc 2 can be better controlled, so that the local etching rate is more uniform, the consistency of the whole surface etching is ensured, and the etching accuracy is improved; the secondary graded spray etching is adopted, so that the liquid particles can directly reach the fine circuit gap, and the intermediate liquid produced due to gravity after the reaction can flow out quickly, ensuring that the etching solution with etching function always keeps in contact with the circuit board, and there is no need to etch the circuit by secondary immersion, which is suitable for high-requirement, fine circuit etching, development, and film removal; it solves the problem of severe side etching caused by insufficient exchange of horizontal etching solution and the problem of circuit failure due to the inability to quickly bite the circuit due to the large particles of the solution sprayed from the nozzle, thus realizing high-precision, low-cost and widely used circuit board production.

[0041] In the above structure, if Figure 5 , 8 As shown, the spray plate 2 includes an outer frame 21 and a plurality of spray pipes 22 disposed inside the outer frame 21. The plurality of spray pipes 22 are evenly arranged along the conveying direction of the fixture 1. The spray pipes 22 are vertically arranged, and a plurality of evenly arranged nozzles 23 are disposed along the vertical direction. The nozzles 23 on adjacent spray pipes 23 are staggered. This arrangement can ensure the uniformity of etching of the circuit board, and the two sides of the circuit board are evenly stressed, and will not shake back and forth during spraying.

[0042] In addition, if Figure 9-10 As shown, the nozzle 22 is provided with a liquid inlet channel 221 and an air inlet channel 222. The liquid inlet 223 of the liquid inlet channel 221 is connected to the module liquid inlet pipeline (not shown in the figure), and the air inlet 224 of the air inlet channel 222 is connected to the module air inlet pipeline (not shown in the figure). The liquid inlet channel 221 is also provided with a plurality of liquid outlets 225 connected to each nozzle 23, and the air inlet channel 222 is also provided with a plurality of air outlets 226 connected to each nozzle 23. The liquid in the liquid inlet channel 221 and the gas in the air inlet channel 222 enter the nozzle 23 from the liquid outlet 223 and the air outlet 224 respectively, and are mixed at the nozzle end of the nozzle 23 and then sprayed out from the nozzle in a mist form. A control valve is provided for one nozzle 22. According to the process requirements, the particle size of the sprayed liquid can be controlled by controlling the pressure and flow of each nozzle 22, so as to better control the spraying effect.

[0043] To ensure that the liquid medicine sprayed from the nozzle 23 is sprayed in a mist form, Fig.10 As shown, the end surface where the nozzle 22 is connected to the nozzle 23 is provided with an annular air groove 227 connected to the air outlet 226, and the nozzle 23 is provided with a plurality of air flow channels 231 connected to the annular air groove 227. In this embodiment, three air flow channels 231 are provided, and a liquid flow channel 232 connected to the liquid outlet 225 is provided in the middle of the nozzle 23, and the plurality of air flow channels 231 are evenly distributed with the liquid flow channel 232 as the center.

[0044] Example 2

[0045] Based on the structure of Example 1, Figure 2-4 As shown, the two-fluid module 200 also includes a base frame 5 and an upper frame 6 arranged above the base frame 5. The base frame 1 is provided with a liquid medicine storage tank 7 to save space and reduce liquid medicine connection pipelines. The front side of the upper frame 6 is provided with a reaction tank 61 for spraying, and the rear side is provided with a cavity 62 for the unloaded fixture 1 to rotate. A conveying mechanism 4 is also provided in the cavity 62. Through this arrangement, the fixture 1 can circulate on the production line of the circuit board, with a high degree of automation and increased utilization rate of the fixture. The reaction tank 61 is a closed cavity connected to a fluid module 100, and the closed cavity can better ensure the etching effect of the liquid medicine.

[0046] like Figure 3-4As shown, the conveying mechanism 4 is used to vertically convey the fixture 1, including a transmission component 41 arranged at the bottom of the upper frame 6 and a guide component 42 arranged at the top of the upper frame 6. The transmission component 41 is used to drive the fixture 1 to move along the conveying direction, including a transmission seat 411, a transmission shaft 412, a driven shaft 413, a magnetic wheel 1 414, and a magnetic wheel 2 415. The transmission shaft 412 is arranged along the conveying direction and is arranged parallel to the outside of the transmission seat 411. The transmission shaft 412 is connected to a servo motor (not shown in the figure) through a coupling. A plurality of driven shafts 413 are provided, which are arranged inside the transmission seat 411 and are rotatably connected to the transmission seat 411. A magnetic wheel 2 415 is fixed to one end of each driven shaft 413 extending out of the transmission seat 411. A plurality of magnetic wheels 415 are provided on the transmission shaft 412. Two pairs of magnetic wheels 414 are correspondingly arranged, and the magnetic wheel 1 414 cooperates with the magnetic wheel 2 415. Each of the driven shafts 413 is also provided with a roller 416 located inside the transmission seat 411. The bottom of the clamp 1 is connected to the roller 416, and the outer side of the roller 416 is also provided with a guide groove that cooperates with the clamp 1 to further ensure the movement stability; the guide assembly 42 is used for guiding, including a guide seat plate 421 and an upper guide wheel 422. The guide seat plate 421 is a U-shaped groove plate arranged along the conveying direction, and multiple groups of upper guide wheels 422 arranged in parallel are arranged on both sides of the bottom. The upper end of the clamp 1 passes between the upper guide wheels 422 arranged in parallel in pairs. The guide assembly 42 can guide the movement of the clamp 1 and prevent the upper end of the clamp 1 from swaying during the movement of the clamp 1. During operation, the servo motor drives the transmission shaft 412 to drive the magnetic wheel 1 414 to rotate, and the magnetic wheel 1 414 drives the magnetic wheel 2 415 matched therewith to rotate, so that the driven shaft 413 and the roller 416 arranged on the driven shaft 413 rotate, and the rotation of the plurality of rollers 416 drives the clamp 1 to move, and the structure is simple and compact, and the conveying is stable. In the utility model, the conveying mechanism 4 of the first fluid module 100 and the second fluid module 200 is shared. During the spray etching process, the conveying mechanism 4 keeps the working state, and the reaction time of the liquid medicine is controlled by controlling the conveying speed, thereby improving the production efficiency.

[0047] like Figure 5 As shown, the swing mechanism 3 includes a bottom plate 31, a servo electric cylinder 32, a driving plate 33, and a pull rod 34. The bottom plate 31 is arranged on the top of the upper frame 6. The servo electric cylinder 32 is fixed above the bottom plate 31, and its output end is connected to the driving plate 33. Two symmetrically arranged pull rods 34 are arranged on both sides of the driving plate 33. The pull rods 34 extend into the reaction tank 61 and are connected to the outer frame 21 of the spray plate 2. Compared with the cam swing structure, the servo electric cylinder of the swing mechanism of the utility model can control the up and down swing amplitude of each spray plate 2 with high precision, improve the etching precision, and provide a larger adjustment space for matching different swing amplitudes for different products, and is widely used.

[0048] like Figure 5-6As shown, the swing mechanism 3 also includes an upper guide assembly 35 and a lower guide assembly 36. The upper guide assembly is arranged on the bottom plate 31, including a column 351 and a limit plate 352. There are two columns 351, which are symmetrically arranged on both sides of the servo electric cylinder 32. The bottoms of the two columns 351 are connected to the bottom plate 31, and the upper ends are connected to the limit plate 352 through the linear bearings arranged on the driving plate 33; the lower guide assembly 36 includes a guide wheel seat 361 and a slide bar 362. The upper and lower ends of the two sides of the spray disc 2 are provided with guide wheel seats 361. The guide wheel seat 361 is provided with two parallel guide wheels 363. The slide bar 362 is arranged on the upper frame 6 and passes through between the two guide wheels 353 to be slidably connected with the guide wheel 363. The stability of the up and down movement of the spray disc 2 is ensured by the arrangement of the upper guide assembly 35 and the lower guide assembly 36. It should be noted that in order to improve the etching uniformity of a fluid module, the conventional fluid module can be improved and the above-mentioned swing mechanism can be applied to the fluid module.

[0049] The utility model also provides a development process for a fine circuit board, comprising the following steps:

[0050] S1. Before spraying, the liquid medicine is pumped from the liquid medicine storage tank to the module liquid inlet pipeline of the first fluid module 100 and the second fluid module 200 by a magnetic pump. The liquid medicine pressure is 0.2MPa~0.26Mpa, and the temperature is 50℃~55℃; the gas is heated by the heating system and enters the module air inlet pipeline of the first fluid module 100 and the second fluid module 200. The pressure is 0.25Mpa~0.3Mpa and the temperature is 50℃~55℃.

[0051] S2, the fixture 1 is transported to a fluid module 100 via the transport structure 4, and the fluid module 100 sprays and etches the circuit board on the fixture 1, and the particle size of the sprayed liquid is 100-1000um. When the fixture 1 completely passes through the fluid module 100 via the transport structure 4, one etching is completed;

[0052] S3, the fixture 1 is transported to the two-fluid module 200 through the conveying structure 4, and the two-fluid module 200 sprays and etches the circuit board on the fixture 1. The particle size of the sprayed liquid is 5-40um. During the spraying process, the two spray discs 2 swing up and down. When the fixture 1 completely passes through the two-fluid module 200 through the conveying structure 4, the secondary etching is completed to obtain a complete circuit on the circuit board.

[0053] During the spraying process, the conveying mechanism is kept in the conveying state, and the reaction time of the liquid medicine is controlled by controlling the conveying speed. It can run continuously and improve the production efficiency.

[0054] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0055] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A vertical developing device for fine circuit boards, characterized in that: It comprises a first fluid module and a second fluid module which are arranged in parallel, the first fluid module is arranged upstream of the second fluid module, the particle size of the liquid medicine sprayed by the first fluid module is 100-1000um, the particle size of the liquid medicine sprayed by the second fluid module is 5-40um, the second fluid module comprises a fixture, a spray plate and a swing mechanism for driving the spray plate to move, the fixture is loaded with a circuit board, and moves vertically between the first fluid module and the second fluid module through a conveying mechanism, two spray plates are provided, which are symmetrically arranged on the front and rear sides of the fixture, and two swing mechanisms are also provided, which are arranged one by one corresponding to the two spray plates, and each swing mechanism individually drives the corresponding spray plate to move up and down.

2. The vertical developing device for fine circuit boards according to claim 1, characterized in that: The two-fluid module also includes a base frame and an upper frame arranged above the base frame. The base frame is provided with a liquid medicine storage tank, the front side of the upper frame is provided with a reaction tank for spraying, and the rear side is provided with a cavity for the rotation of an unloaded fixture. A conveying mechanism is also provided in the cavity. The reaction tank is a closed cavity connected to a fluid module.

3. The vertical developing device for fine circuit boards according to claim 1, characterized in that: The conveying mechanism is used for vertically conveying the fixture, including a transmission assembly arranged at the bottom of the upper frame and a guide assembly arranged at the top of the upper frame. The transmission assembly is used to drive the fixture to move along the conveying direction, including a transmission seat, a transmission shaft, a driven shaft, a magnetic wheel 1, and a magnetic wheel 2. The transmission shaft is arranged along the conveying direction and is arranged parallel to the outer side of the transmission seat. The transmission shaft is connected to the servo motor through a coupling. There are multiple driven shafts, which are arranged inside the transmission seat and are rotatably connected to the transmission seat. A magnetic wheel 2 is fixed to one end of each driven shaft extending out of the transmission seat. A plurality of magnetic wheels 1 arranged corresponding to the magnetic wheels 2 are arranged on the transmission shaft. The magnetic wheel 1 cooperates with the magnetic wheel 2. Each driven shaft is also provided with a roller located inside the transmission seat, and the bottom of the fixture is connected to the roller; the guide assembly is used for guiding, including a guide seat plate and an upper guide wheel. The guide seat plate is a U-shaped groove plate arranged along the conveying direction, and multiple groups of upper guide wheels arranged in parallel in pairs are arranged on both sides of its bottom. The upper end of the fixture passes between the upper guide wheels arranged in parallel in pairs.

4. The vertical developing device for fine circuit boards according to claim 1, characterized in that: The spray plate includes an outer frame and a plurality of spray pipes arranged inside the outer frame. The plurality of spray pipes are evenly arranged along the conveying direction of the fixture. The spray pipes are vertically arranged and a plurality of evenly arranged nozzles are provided along the vertical direction.

5. The vertical developing device for fine circuit boards according to claim 4, characterized in that: The nozzles on adjacent nozzles are arranged in a staggered manner.

6. The vertical developing device for fine circuit boards according to claim 4, characterized in that: The nozzle is provided with a liquid inlet channel and an air inlet channel. The liquid inlet of the liquid inlet channel is connected to the module liquid inlet pipeline, and the air inlet of the air inlet channel is connected to the module air inlet pipeline. The liquid inlet channel is provided with a plurality of liquid outlets connected to each nozzle, and the air inlet channel is provided with a plurality of air outlets connected to each nozzle. The liquid medicine in the liquid inlet channel and the gas in the air inlet channel enter the nozzle from the liquid outlet and the air outlet respectively and are mixed at the nozzle end of the nozzle and then sprayed out from the nozzle in the form of mist.

7. The vertical developing device for fine circuit boards according to claim 6, characterized in that: The end surface where the spray pipe is connected to the nozzle is provided with an annular air groove connected to the air outlet, the inside of the nozzle is provided with a plurality of air flow channels connected to the annular air groove, the middle of the nozzle is provided with a liquid flow channel connected to the liquid outlet, and the plurality of air flow channels are evenly distributed with the liquid flow channel as the center.

8. The vertical developing device for fine circuit boards according to claim 1, characterized in that: The swing mechanism includes a base plate, a servo electric cylinder, a drive plate, and a pull rod. The base plate is arranged on the top of the upper frame, and the servo electric cylinder is fixed above the base plate. Its output end is connected to the drive plate. Two symmetrically arranged pull rods are provided on both sides of the drive plate. The pull rods extend into the interior of the reaction tank and are connected to the outer frame of the spray plate.

9. The vertical developing device for fine circuit boards according to claim 8, characterized in that: The swing mechanism also includes an upper guide assembly and a lower guide assembly. The upper guide assembly is arranged on the base plate and includes a column and a limit plate. There are two columns, which are symmetrically arranged on both sides of the servo electric cylinder. The bottoms of the two columns are connected to the base plate, and the upper ends are connected to the limit plate through linear bearings arranged on the driving plate; the lower guide assembly includes a guide wheel seat and a sliding rod. The upper and lower ends of the two side surfaces of the spray disc are provided with guide wheel seats, and two guide wheels arranged in parallel are provided on the guide wheel seat. The sliding rod is arranged on the upper frame, and passes through between the two guide wheels and is slidably connected to the guide wheels.