Device for measuring thickness of tape-casting wet film of electrostatic chuck
By designing an adjustable secondary ruler structure, the accuracy and price of existing wet film measurement devices are solved, and the function of adjusting measurement accuracy according to needs is realized, which meets the wet film measurement needs of large thickness and high accuracy, and improves measurement Convenience and precision.
Patent Information
- Application Number
- CN202421172426.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-28
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2034-05-28
AI Technical Summary
The existing wet film measuring devices have shortcomings in accuracy and price, especially the requirements of large thickness and high accuracy cannot be met, and the measurement accuracy cannot be adjusted as needed.
A measuring device including a main measuring ruler, a first sub-size and a second sub-size are designed. Through a sliding connection and a limit slot card structure, the position of the sub-size is allowed to be adjusted to change the measurement accuracy and meet different accuracy requirements.
The function of adjusting measurement accuracy as needed is realized, the scope of use of the measurement device is expanded, and the convenience and accuracy of measurement are improved.
Smart Images
Figure CN222298688U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of measuring devices, in particular to a measuring device for the thickness of a wet film formed by electrostatic chuck casting. Background Art
[0002] Existing wet film measurement devices are mainly divided into two categories: one is high-precision laser or ray instruments, and the other is mechanical measurement of wet film combs. The former has high precision and high cost, and is mostly used in industries with thinner film thickness. The latter's accuracy deteriorates with increasing thickness, but it is cheap.
[0003] At present, wet film combs are generally hexagonal, and the height interval of the teeth gradually increases from the minimum 25um low-range area to the high-range area of 200um. When the wet film thickness is large and the precision is required, it obviously does not meet the production requirements, and the existing wet film measurement device cannot adjust the measurement accuracy according to the needs. Utility Model Content
[0004] The technical problem to be solved by the utility model is to provide a device for measuring the thickness of wet film during electrostatic chuck tape casting, which can measure the thickness of wet film during electrostatic chuck tape casting and adjust the measurement accuracy according to needs.
[0005] In order to solve the above technical problems, the technical solution of the utility model is:
[0006] A device for measuring the thickness of a wet film formed by electrostatic chuck casting, comprising a main measuring ruler, a first sub-rule and a second sub-rule, wherein the first sub-rule is arranged on one side of the main measuring ruler, and the second sub-rule is arranged on the other side of the main measuring ruler, and the first sub-rule and the second sub-rule are both slidably connected to the main measuring ruler, the main measuring ruler comprises a plurality of main measuring teeth arranged in steps, the first sub-rule comprises a plurality of first sub-teeth arranged in steps, and the second sub-rule comprises a plurality of second sub-teeth arranged in steps;
[0007] The first secondary ruler is provided with a first groove, the left side wall of the first groove is provided with a first left limit groove and a second left limit groove, the main measuring ruler is provided with a first left limit card matched with the first left limit groove and the second left limit groove, the right side wall of the first groove is provided with a first right limit groove and a second right limit groove, the main measuring ruler is provided with a first right limit card matched with the first right limit groove and the second right limit groove, and the first left limit card and the first right limit card are both slidably connected with the main measuring ruler;
[0008] The second secondary ruler is provided with a second groove, and the left side wall of the second groove is provided with a third left limit groove and a fourth left limit groove, the main measuring ruler is provided with a second left limit card that cooperates with the third left limit groove and the fourth left limit groove, the right side wall of the second groove is provided with a third right limit groove and a fourth right limit groove, the main measuring ruler is provided with a second right limit card that cooperates with the third right limit groove and the fourth right limit groove, and the second left limit card and the second right limit card are both slidably connected to the main measuring ruler.
[0009] Preferably, the number of the first auxiliary teeth and the number of the second auxiliary teeth are the same as the number of the main measuring teeth.
[0010] Preferably, the main measuring ruler comprises a left supporting block and a right supporting block, and the bottom of the left supporting block is flush with the bottom of the right supporting block.
[0011] Preferably, the first left limiting groove is aligned with the first right limiting groove, and the second left limiting groove is aligned with the second right limiting groove.
[0012] Preferably, the third left limiting groove is aligned with the third right limiting groove, and the fourth left limiting groove is aligned with the fourth right limiting groove.
[0013] Preferably, both sides of the first secondary ruler are provided with first sliding limit cards, both sides of the main measuring ruler are provided with first sliding grooves that cooperate with the first sliding limit cards, both sides of the second secondary ruler are provided with second sliding limit cards, and both sides of the main measuring ruler are provided with second sliding grooves that cooperate with the second sliding limit cards.
[0014] The above technical solution has the following beneficial effects:
[0015] By setting the first secondary ruler and the second secondary ruler, and the first secondary ruler and the second secondary ruler can slide up and down to adjust the position, the position of the first secondary ruler, the second secondary ruler and the main measuring ruler can be adjusted, and then the measurement accuracy can be set as needed to meet different accuracy requirements. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a three-dimensional structural schematic diagram of a device for measuring the thickness of a wet film in electrostatic chuck tape casting according to the utility model;
[0017] Figure 2 This is a schematic diagram of the main structure of a device for measuring the thickness of a wet film in electrostatic chuck tape casting according to the utility model;
[0018] Figure 3 The utility model is a rear view structural schematic diagram of a device for measuring the thickness of a wet film in electrostatic chuck tape casting. DETAILED DESCRIPTION
[0019] The specific implementation methods of the present invention are further described below in conjunction with the accompanying drawings. It should be noted that the description of these implementation methods is used to help understand the present invention, but does not constitute a limitation of the present invention. In addition, the technical features involved in each implementation method of the present invention described below can be combined with each other as long as they do not conflict with each other.
[0020] like Figure 1 to Figure 3 As shown, the device for measuring the thickness of the wet film for electrostatic chuck casting comprises a main measuring ruler 1, a first sub-rule 2 and a second sub-rule 3, wherein the first sub-rule 2 is arranged on one side of the main measuring ruler 1, and the second sub-rule 3 is arranged on the other side of the main measuring ruler 1, and the first sub-rule 2 and the second sub-rule 3 are both slidably connected with the main measuring ruler 1, the main measuring ruler 1 comprises a plurality of main measuring teeth 20 arranged in steps, the first sub-rule 2 comprises a plurality of first sub-teeth 17 arranged in steps, and the second sub-rule 3 comprises a plurality of second sub-teeth 16 arranged in steps;
[0021] The first secondary ruler 2 is provided with a first groove 24, and a first left limit groove 21 and a second left limit groove 25 are provided on the left side wall of the first groove 24. The main measuring ruler 1 is provided with a first left limit card 18 that matches the first left limit groove 21 and the second left limit groove 25, and a first right limit groove 22 and a second right limit groove 26 are provided on the right side wall of the first groove 24. The main measuring ruler 1 is provided with a first right limit card 19 that matches the first right limit groove 22 and the second right limit groove 26. The first left limit card 18 and the first right limit card 19 are both slidably connected to the main measuring ruler 1. After the position of the first secondary ruler 2 is adjusted to the right position, the first left limit card 18 and the first right limit card 19 are inserted to limit the height of the first secondary ruler 2, and the adjustment is completed;
[0022] The second secondary ruler 3 is provided with a second groove 23, and the left side wall of the second groove 23 is provided with a third left limit groove 12 and a fourth left limit groove 13. The main measuring ruler 1 is provided with a second left limit card 11 that matches the third left limit groove 12 and the fourth left limit groove 13, and the right side wall of the second groove 23 is provided with a third right limit groove 9 and a fourth right limit groove 10. The main measuring ruler 1 is provided with a second right limit card 8 that matches the third right limit groove 9 and the fourth right limit groove 10, and the second left limit card 11 and the second right limit card 8 are both slidably connected to the main measuring ruler 1;
[0023] Working principle: According to the measurement accuracy requirements, adjust the height of the first sub-rule 2 and the second sub-rule 3, such as adjusting the bottom height of the first sub-tooth 17 on the first sub-rule 2 to be higher than the bottom height of the corresponding main measuring tooth 20, and the bottom height of the second sub-tooth 16 on the second sub-rule 3 to be higher than the bottom height of the corresponding first sub-tooth 17. After adjusting to the right position, snap in the first left limit card 18, the first right limit card 19, the second left limit card 11, and the second right limit card 8 to limit the height position of the first sub-rule 2 and the second sub-rule 3. The corresponding tooth position setting forms the main measuring tooth 20, the first sub-tooth 17, and the second sub-tooth 16 step height, so that the measurement accuracy can be adjusted as needed, which is convenient for use during measurement;
[0024] The number of the first auxiliary teeth 17 and the number of the second auxiliary teeth 16 are the same as the number of the main measuring teeth 20, so that one group can be adjusted as a whole to meet the accuracy requirements;
[0025] The main measuring ruler 1 comprises a left support block 14 and a right support block 15, the bottom of the left support block 14 is flush with the bottom of the right support block 15, and is used for support when measuring the wet film thickness;
[0026] The first left limit slot 21 is aligned with the first right limit slot 22, and the second left limit slot 25 is aligned with the second right limit slot 26, so that the first secondary ruler 2 is more stable after the adjustment. In other implementations of this embodiment, the height of the first left limit slot 21 is not equal to the height of the first right limit slot 22, and the corresponding first left limit card 18 and first right limit card 19 work separately, so that the first secondary ruler 2 can be adjusted from one height to two heights;
[0027] The third left limit groove 12 is aligned with the third right limit groove 9, and the fourth left limit groove 13 is aligned with the fourth right limit groove 10, so that the second secondary ruler 3 is more stable after adjustment;
[0028] Both sides of the first secondary ruler 2 are provided with first sliding limit cards 5, both sides of the main measuring ruler 1 are provided with first sliding grooves 4 matched with the first sliding limit cards 5, both sides of the second secondary ruler 3 are provided with second sliding limit cards 6, and both sides of the main measuring ruler 1 are provided with second sliding grooves 7 matched with the second sliding limit cards 6, so that the first secondary ruler 2 and the second secondary ruler 3 can move up and down, so as to facilitate the height adjustment of the first secondary ruler 2 and the second secondary ruler 3 to meet the use requirements;
[0029] By setting the first sub-rule 2 and the second sub-rule 3, and the first sub-rule 2 and the second sub-rule 3 can be slid up and down to adjust the position, the position of the first sub-rule 2 and the second sub-rule 3 relative to the main measuring ruler 1 can be adjusted, and then the accuracy can be set as needed to meet different accuracy requirements, expand the scope of use of the measuring ruler, and improve the convenience of measurement.
[0030] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions and variations of these embodiments are made without departing from the principles and spirit of the present invention, and still fall within the scope of protection of the present invention.
Claims
1. A device for measuring the thickness of wet film in electrostatic chuck tape casting, characterized in that: It comprises a main measuring scale, a first secondary scale and a second secondary scale, wherein the first secondary scale is arranged on one side of the main measuring scale, and the second secondary scale is arranged on the other side of the main measuring scale, and the first secondary scale and the second secondary scale are both slidably connected to the main measuring scale, the main measuring scale comprises a plurality of main measuring teeth arranged in steps, the first secondary scale comprises a plurality of first secondary teeth arranged in steps, and the second secondary scale comprises a plurality of second secondary teeth arranged in steps; The first secondary ruler is provided with a first groove, the left side wall of the first groove is provided with a first left limit groove and a second left limit groove, the main measuring ruler is provided with a first left limit card matched with the first left limit groove and the second left limit groove, the right side wall of the first groove is provided with a first right limit groove and a second right limit groove, the main measuring ruler is provided with a first right limit card matched with the first right limit groove and the second right limit groove, and the first left limit card and the first right limit card are both slidably connected with the main measuring ruler; The second secondary ruler is provided with a second groove, and the left side wall of the second groove is provided with a third left limit groove and a fourth left limit groove, the main measuring ruler is provided with a second left limit card that cooperates with the third left limit groove and the fourth left limit groove, the right side wall of the second groove is provided with a third right limit groove and a fourth right limit groove, the main measuring ruler is provided with a second right limit card that cooperates with the third right limit groove and the fourth right limit groove, and the second left limit card and the second right limit card are both slidably connected to the main measuring ruler.
2. A device for measuring the thickness of a wet film in electrostatic chuck tape casting according to claim 1, characterized in that: The number of the first auxiliary teeth and the number of the second auxiliary teeth are both the same as the number of the main measuring teeth.
3. A device for measuring the thickness of a wet film in electrostatic chuck tape casting according to claim 1, characterized in that: The main measuring ruler comprises a left supporting block and a right supporting block, and the bottom of the left supporting block is flush with the bottom of the right supporting block.
4. A device for measuring the thickness of a wet film in electrostatic chuck tape casting according to claim 1, characterized in that: The first left limiting groove is aligned with the first right limiting groove, and the second left limiting groove is aligned with the second right limiting groove.
5. The device for measuring the thickness of a wet film in electrostatic chuck tape casting according to claim 1, characterized in that: The third left limiting groove is aligned with the third right limiting groove, and the fourth left limiting groove is aligned with the fourth right limiting groove.
6. A device for measuring the thickness of a wet film in electrostatic chuck tape casting according to claim 1, characterized in that: Both sides of the first secondary ruler are provided with first sliding limit cards, both sides of the main measuring ruler are provided with first sliding grooves that cooperate with the first sliding limit cards, both sides of the second secondary ruler are provided with second sliding limit cards, and both sides of the main measuring ruler are provided with second sliding grooves that cooperate with the second sliding limit cards.