Film thickness measuring device and detection equipment

Abstract

A film thickness measurement device and a detection device, the film thickness measurement device comprising: a light source module configured to provide an illumination beam in a preset wavelength range; the reflection assembly is configured to partially cut into the illumination light beam and partially reflect the illumination light beam; the transmission assembly is configured to receive the illumination light beam reflected by the reflection assembly and output the illumination light beam to a to-be-tested piece; receiving an information light beam formed by reflecting the illumination light beam by the to-be-detected piece, and outputting the information light beam to a first light beam detection module; and the first light beam detection module is configured to receive the information light beam output by the transmission assembly, at least detect the light intensity of the information light beam and output a corresponding first detection result. The device provided by the utility model does not need a beam splitter, the information light beam is not reflected or diffracted, the signal intensity of the information light beam received by the first light beam detection module is high, the measurement time is reduced, and the detection accuracy is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of film thickness measurement, in particular to a film thickness measuring device and a detection equipment. Background Art

[0002] Spectral reflectance is an important technology for thin film thickness analysis in industry and scientific research. This technology can analyze the thickness of thin films and complex refractive indices with high speed and repeatability. And it can use the complex matrix form of Fresnel equations to calculate reflectivity and transmittance. The basic principle is to calculate the ratio of the intensity of the reflected beam to the intensity of the incident beam.

[0003] Spectral reflection is a vertical incident and vertical receiving light path, which involves a beam splitter. The incident light is reflected by the beam splitter, and then transmitted through the beam splitter to the receiving detector. If the splitting ratio is 50:50, the final received light intensity is 25% of the incident light intensity, and the light intensity loss is large.

[0004] At the same time, the light source of spectral reflection technology is often a broadband spectrum light source from ultraviolet to infrared. The performance of the spectrometer in the wide spectrum is not good. It is difficult to achieve sufficient reflectivity in the ultraviolet or it is easy to cause diffraction and other unexpected phenomena to interfere with the results. Utility Model Content

[0005] The main technical problem solved by the utility model is that the existing film thickness detection uses a spectrometer, which has light intensity loss or insufficient reflection or diffraction of some bands, resulting in inaccurate measurement results.

[0006] According to the first aspect, an embodiment provides a film thickness measuring device, comprising:

[0007] A light source module configured to provide an illumination light beam in a preset wavelength range;

[0008] a reflective component configured to partially cut into the illumination beam and reflect a portion of the illumination beam;

[0009] The transmission component is configured to receive the illumination beam reflected by the reflection component and output it to the device under test; receive the information beam formed by the illumination beam reflected by the device under test, and output the information beam to the first beam detection module;

[0010] The first light beam detection module is configured to receive the information light beam output by the transmission component, at least detect the light intensity of the information light beam, and output a corresponding first detection result.

[0011] In one embodiment, the reflective assembly includes a reflective member having a smooth straight edge, and the straight edge of the reflective member is arranged parallel to the optical axis of the illumination light beam;

[0012] The reflector is located on one side of the optical axis of the transmission component, so that the reflected illumination light beam is input from one side of the optical axis, and the information light beam is emitted to the first light beam detection module through the other side of the optical axis.

[0013] In one embodiment, the straight edge of the reflective member is collinear with the optical axis of the illumination light beam.

[0014] In one embodiment, the illumination light beam reflected by the reflection component is parallel to the information light beam and is not colinear.

[0015] In one embodiment, the light source module includes a light source, a coupling assembly, and a first aperture stop;

[0016] The light source is configured to provide an illumination beam;

[0017] The coupling assembly is configured to receive the illumination beam and output it to the incident end of the first aperture stop;

[0018] The first aperture stop is configured to limit a beam size and / or a beam divergence angle of the illumination beam.

[0019] In one embodiment, the coupling assembly includes a coupling optical fiber and / or a coupling lens;

[0020] The coupling component is configured to couple out the illumination light beam provided by the light source.

[0021] In one embodiment, the first light beam detection module includes a spectrometer.

[0022] In one embodiment, the preset wavelength range is 190nm-1700nm.

[0023] In one embodiment, the transmission assembly includes a tube lens and an objective lens;

[0024] The tube lens is configured to modulate the illumination beam into parallel light;

[0025] The objective lens is configured to converge the modulated illumination light beam to the device under test; receive the information light beam reflected by the device under test, converge the information light beam into parallel light and output it to the first light beam detection module through the tube lens.

[0026] In one embodiment, the transmission assembly further comprises a second aperture stop;

[0027] The second aperture stop is provided between the tube lens and the objective lens, and is configured to limit the beam diameter of the illumination beam incident on the objective lens.

[0028] In one embodiment, it further includes:

[0029] The second light beam detection module is configured to receive a portion of the illumination light beam that is not reflected by the reflection component, detect at least the light intensity of the portion of the illumination light beam, and output a corresponding second detection result.

[0030] According to the second aspect, an embodiment provides a detection device, including:

[0031] Processing module;

[0032] and the film thickness measuring device described in the first aspect;

[0033] The processing module is configured to obtain a first test result corresponding to the test piece, obtain a third test result corresponding to the standard piece, and determine the thickness of the film layer on the test piece according to the first test result and the third test result;

[0034] The surface of the standard part has a film layer with a certain thickness, and the third detection result is output by measuring the standard part through a film thickness measuring device.

[0035] According to the film thickness measuring device and the detection equipment of the above-mentioned embodiments, the illumination light beam is reflected to the object to be tested by using a reflection component, and the information light beam formed by the reflection of the object to be tested is directly transmitted to the first light beam detection module. The light intensity of the information light beam is the same as the light intensity of the illumination light beam reflected to the object to be tested, and does not need to pass through a beam splitter. There is no reflection or diffraction in the information light beam, and the signal intensity of the information light beam received by the first light beam detection module is high, which is conducive to reducing the measurement time and improving the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a structural schematic diagram of an existing film thickness measuring device;

[0037] Figure 2 A schematic diagram of the structure of a film thickness measuring device and a detection device provided in one embodiment of the present application;

[0038] Figure 3 A schematic diagram of the structure of a film thickness measurement device provided in one embodiment of the present application (I);

[0039] Figure 4 A schematic diagram of light beam reflection of a reflection component provided in one embodiment of the present application;

[0040] Figure 5 A schematic diagram of the structure of a film thickness measuring device provided in one embodiment of the present application (II);

[0041] Figure 6 A schematic structural diagram of a film thickness measuring device provided in one embodiment of the present application (III).

[0042] Figure numerals: 10 - light source module; 11 - light source; 12 - coupling component; 13 - first aperture diaphragm; 20 - reflection component; 30 - transmission component; 31 - tube lens; 32 - second aperture diaphragm; 33 - objective lens; 40 - object to be tested; 50 - first light beam detection module; 60 - second light beam detection module; 70 - processing module. DETAILED DESCRIPTION

[0043] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present application to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, and methods. In some cases, some operations related to the present application are not shown or described in the specification, in order to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0044] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0045] The serial numbers of the components in this document, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0046] like Figure 1As shown, the existing film thickness measuring device uses a beam splitter to achieve vertical incidence of the illumination beam and vertical reception of the information beam. For example, a semi-transparent and semi-reflective beam splitter is used. In theory, the illumination beam provided by the light source (the light intensity is defined as 100% at this time) is reflected by the beam splitter and then incident on the piece to be tested. In theory, the light intensity of the illumination beam incident on the piece to be tested is 50%. Assuming that there is no light intensity loss, the light intensity of the information beam formed by the reflection of the piece to be tested is still 50%, so the light intensity after transmission through the beam splitter is 25%. However, since the reflectance and transmittance of the beam splitter are also related to the wavelength of the light beam, a 50:50 splitting cannot be achieved in some bands (such as the ultraviolet band), and the beam splitter also has diffraction phenomenon, resulting in the uncontrollable light intensity ratio between the illumination beam incident on the piece to be tested and the information beam reflected to the light beam detection module, and the detection result is not accurate enough.

[0047] In the embodiment of the present application, the test piece can be a product such as a wafer with a film structure on the surface, or a flat glass, which is generally coated on the surface. Of course, the test piece can also be other products with a film on the surface.

[0048] In the embodiment of the present application, the standard part is a product of the same type as the part to be tested, and has a film layer of a certain thickness on its surface. The standard part can be pre-measured by existing measuring means, such as scanning with an electron microscope.

[0049] The embodiment of the present application provides a reflective component, which reflects the illumination beam to the piece to be tested by partially cutting into the illumination beam. The information beam reflected by the piece to be tested will not be blocked by the reflective component. The intensity of the incident illumination beam is the same as the intensity of the reflected information beam, and there is no loss of light intensity. The detection of the first light beam detection module will not be disturbed by insufficient reflection or diffraction of the beam splitter, and the detection accuracy is high.

[0050] like Figure 2 As shown, a detection device provided in an embodiment of the present application may include: a processing module 70 and a film thickness measuring device. The film thickness measuring device provided in an embodiment of the present application may include: a light source module 10, a reflection component 20, a transmission component 30 and a first light beam detection module 50.

[0051] The light source module 10 is configured to provide an illumination beam in a preset wavelength range; the light source module 10 can be selected to provide a broadband spectrum from deep ultraviolet to visible light to infrared, such as a femtosecond laser, or a white light source, depending on the type of the device under test 40. In some embodiments, the preset wavelength range can be 190nm-1700nm.

[0052] The reflective assembly 20 is configured to partially cut into the illumination beam and reflect part of the illumination beam; Figure 3As shown, the reflective component 20 is disposed on one side of the optical axis of the illumination beam provided by the light source module 10, and is located on the same side of the optical axis as the device under test 40. The reflective component 20 has a reflective surface, which faces the device under test 40 and can reflect the illumination beam to the device under test 40. The reflective component 20 and the light source module 10 are respectively located on both sides of the optical axis of the transmission component 30, so that the information beam reflected by the device under test 40 and the illumination beam incident on the device under test 40 are transmitted on both sides of the optical axis of the transmission component 30.

[0053] It can be seen that the reflective component 20 can avoid the information beam setting, and the information beam is directly transmitted to the first beam detection module 50 without being reflected, transmitted or diffracted by the reflective component 20. At the same time, the reflective component 20 reflects part of the illumination beam to achieve the splitting / beam splitting of the beam without using a beam splitter, thereby avoiding the influence of the beam splitter in the vertical light path of the spectral reflection technology.

[0054] The transmission component 30 is configured to receive the illumination beam reflected by the reflection component 20 and output it to the DUT 40; receive the information beam formed by the illumination beam reflected by the DUT 40, and output the information beam to the first beam detection module 50. The optical axis of the transmission component 30 and the optical axis of the illumination beam provided by the light source module 10 can be arranged vertically.

[0055] The first light beam detection module 50 is configured to receive the information light beam output by the transmission component 30, at least detect the light intensity of the information light beam, and output a corresponding first detection result. In the embodiment of the present application, the first light beam detection module 50 can be a device that can measure light intensity, such as a light intensity meter, or a photoelectric detector.

[0056] In some embodiments, the first light beam detection module 50 may include a spectrometer. The spectrometer can measure a variety of optical parameters of the light beam / spot, and the user can set the optical parameters to be measured according to actual needs, which is more applicable.

[0057] The processing module 70 is configured to obtain a first test result corresponding to the test piece 40, obtain a third test result corresponding to the standard part, and determine the thickness of the film layer on the test piece 40 according to the first test result and the third test result; wherein, the surface of the standard part has a film layer of a determined thickness, and the third test result is output by measuring the standard part through a film thickness measuring device.

[0058] For example, the actual thickness of the film to be tested on a type of product may have deviations, but the overall thickness is still within a clear range. For example, if the theoretically designed film thickness is 50 microns, then the actual product film thickness is based on the processing accuracy, such as ±10 microns, so the film thickness of any test piece 40 may range from 40 microns to 60 microns. In order to ensure uncontrollable factors, this range can be expanded to 10 microns to 100 microns, which is defined as the measurement range. In other words, the thickness of the film to be tested of the test piece 40 corresponds to a certain measurement range.

[0059] Before measuring the test piece 40, multiple standard parts can be prepared or obtained, and the film thickness of the multiple standard parts is within the above measurement range, which can be set at multiple intervals of 10 microns, 20 microns...100 microns, and the size of the interval is not limited. The standard part is placed under the detection equipment, and the film thickness of the standard part is measured by the film thickness measurement equipment to obtain the corresponding third detection result.

[0060] For example, the light intensity of the information beam reflected by the standard part can be measured, and the light intensity measurement value corresponding to the 10-micron standard part is cd10, and the light intensity measurement value corresponding to the 20-micron standard part is cd20, and so on. Thus, a corresponding relationship table or fitting curve or calculation formula between the film thickness d and the light intensity cd can be obtained.

[0061] When measuring the film layer of the test piece 40, the corresponding first detection result, such as the above-mentioned light intensity measurement value, is obtained, and the corresponding film layer thickness can be calculated through the corresponding relationship table or fitting curve or calculation formula obtained from the standard part.

[0062] Of course, the first detection result and the third detection result may include not only light intensity measurement, but also other related optical measurement parameters, which may be determined based on the object to be tested 40 and its film layer. The embodiment of the present application uses light intensity as an example, but does not limit the first detection result, the second detection result, and the third detection result to only light intensity.

[0063] Therefore, the processing module 70 provided in the present application can use a commonly used processor for the purpose of adapting to read the data of the first light beam detection module 50, and does not limit the specific implementation method. The third detection result obtained by the above-mentioned pre-measurement of the standard part can be used to calculate the thickness of the film layer on the test piece 40 by comparing or substituting into the above-mentioned corresponding relationship table or fitting curve or calculation formula. Of course, the user can manually calculate or look up the table by reading the first detection result and using the third detection result to manually calculate or look up the corresponding film layer thickness.

[0064] In some embodiments, such as Figure 4As shown, the light source module 10 provided in the embodiment of the present application, the light source 11 provided can be a parallel light beam or a three-dimensional light beam, such as Figure 4 As shown in (A), the illumination beam is a parallel beam with a uniform spatial diameter; Figure 4 As shown in (B), the illumination light beam may be a three-dimensional light beam having a preset first solid angle, and in the area where the reflective component 20 is located, the illumination light beam also has a corresponding spatial diameter.

[0065] In some embodiments, such as Figure 4 As shown, the reflective assembly 20 may include a reflective member having a smooth straight edge, and the straight edge of the reflective member is arranged parallel to the optical axis of the illumination light beam.

[0066] The parallel smooth straight edges will not reflect the illumination light beam, thus preventing the illumination light beam from being reflected into the first light beam detection module 50 and generating interference signals.

[0067] In some embodiments, the reflector may be located on one side of the optical axis of the transmission component 30 (eg, Figure 4 The light source module 10 is located on the other side of the optical axis of the transmission component 30 (eg, Figure 4 ), so that the reflected illumination light beam is input from one side of the optical axis, and the information light beam is emitted to the first light beam detection module 50 through the other side of the optical axis.

[0068] In some embodiments, such as Figure 3 and Figure 4 As shown, the illumination beam reflected by the reflective assembly 20 is parallel to the information beam and is not collinear. Figure 3 As shown, the illumination light beam reflected by the reflection component 20 is located on one side of the optical axis of the transmission component 30 , and the information light beam is located on the other side of the optical axis of the transmission component 30 .

[0069] In some embodiments, such as Figure 5 As shown, the straight edge of the reflector is colinear with the optical axis of the illumination beam provided by the light source module 10, and at this time, half of the illumination beam can be reflected to the DUT 40, achieving 50% light splitting. Figure 5 As shown, the end of the straight edge of the reflector (the left end in the figure) can also intersect with the optical axis of the transmission component 30, combined with Figure 4 and Figure 5 As shown, the distance of the reflector relative to the optical axis of the transmission component 30 can adjust the distance of the illumination light beam incident on the DUT 40 relative to the optical axis of the transmission component 30 .

[0070] It should be noted that the embodiments of the present application do not limit the specific implementation of the reflector. For example, a D-type reflector, a reflector with straight edges, or a silicon wafer with straight edges can be used to achieve high reflection over a wide spectrum. The surface of the reflector can be provided with a wide-spectrum total reflection film layer to achieve high reflection over a wide spectrum by coating.

[0071] In some embodiments, the reflective component 20 may further include a displacement actuator and / or a rotation actuator, wherein the displacement actuator is configured to adjust the spatial position of the reflective component to adjust the illumination beam incident on the DUT 40, and may adjust the light splitting ratio and the distance relative to the optical axis of the transmission component 30. The rotation actuator may adjust the spatial angle of the reflective component to ensure that the straight edge is parallel to the optical axis of the illumination beam provided by the light source module 10.

[0072] In some embodiments, such as Figure 5 As shown, the light source module 10 may include a light source 11 , a coupling component 12 and a first aperture stop 13 .

[0073] The light source 11 is configured to provide an illumination beam; for example, it is a femtosecond laser, or it can be a white light source.

[0074] The coupling component 12 is configured to receive the illumination light beam and output it to the incident end of the first aperture stop 13; in some embodiments, the coupling component 12 may include a coupling optical fiber and / or a coupling lens; the coupling component 12 is configured to couple the illumination light beam provided by the light source 11 to output.

[0075] For example, the coupling component 12 can be a lens group or an optical fiber, which couples out the light output by the light source 11 to adjust the illumination beam to be input to the first aperture stop 13, such as adjusting the beam size and / or beam divergence angle of the illumination beam provided by the light source 11.

[0076] The first aperture stop 13 is configured to limit the beam size and / or the beam divergence angle of the illumination beam, such as Figure 4 As shown, the illumination light beam emitted through the first aperture stop 13 may have a preset light beam size and / or a light beam divergence angle.

[0077] In some embodiments, such as Figure 5 As shown, the transmission component 30 may include a tube lens 31 and an objective lens 33 .

[0078] The tube lens 31 is configured to modulate the illumination light beam into parallel light. The tube lens 31 can ensure that the illumination light beam is vertically incident on the DUT 40, and can also ensure that the information light beam is vertically emitted.

[0079] The objective lens 33 is configured to converge the modulated illumination light beam to the DUT 40 , which is placed on the focal plane of the objective lens 33 ; receive the information light beam reflected by the DUT 40 , converge the information light beam into parallel light and output it to the first light beam detection module 50 through the tube lens 31 .

[0080] In some embodiments, such as Figure 5 As shown, the transmission component 30 may further include a second aperture stop 32 .

[0081] The second aperture stop 32 is disposed between the tube lens 31 and the objective lens 33 , and is configured to limit the beam diameter of the illumination beam incident on the objective lens 33 . The size of the detection spot required for detecting the object to be tested 40 can be adjusted by the second aperture stop 32 .

[0082] In some embodiments, such as Figure 6 As shown, the above-mentioned film thickness measurement device may further include: a second light beam detection module 60.

[0083] The second light beam detection module 60 is configured to receive a portion of the illumination light beam that is not reflected by the reflective component 20, detect at least the light intensity of the portion of the illumination light beam, and output a corresponding second detection result. The second light beam detection module 60 can be implemented in the same or different manner as the first light beam detection module 50, detect the portion that is not reflected by the reflective component 20, and can be used as a monitoring portion to monitor the output of the light source module 10.

[0084] For example, if the second detection result in the current detection is different from the second detection result in the previous detection, it indicates that the illumination beam provided by the light source module 10 has changed. At this time, the problem can be checked to help discover abnormal situations.

[0085] In summary, the film thickness measuring device and the detection equipment provided by the embodiment of the present application can be seen that in the spectral reflection technology, a beam splitter is not used to realize a vertical optical path, and a broadband spectrum from deep ultraviolet to visible light to infrared can be reflected by the reflection component 20; the optical reflection component 20 with a smooth cross section can realize 50% reflection of the incident light, and after the surface of the object to be tested 40 (such as a wafer) is mirror-reflected, the reflected light (information beam) is emitted from one side of the reflection component 20 and reaches the receiving first beam detection module 50. The final received light intensity of the first beam detection module 50 is 50% of the incident light intensity. The light intensity is improved, which helps to improve the signal strength, reduce the measurement time, and improve the performance of the instrument.

[0086] This document is described with reference to various exemplary embodiments. However, those skilled in the art will recognize that changes and modifications may be made to the exemplary embodiments without departing from the scope of this document. For example, various operating steps and components for performing the operating steps may be implemented in different ways (e.g., one or more steps may be deleted, modified, or incorporated into other steps) depending on the specific application or considering any number of cost functions associated with the operation of the system.

[0087] Although the principles of this invention have been shown in various embodiments, many modifications of structures, arrangements, proportions, elements, materials and components particularly suitable for specific environments and operational requirements can be used without departing from the principles and scope of this invention. The above modifications and other changes or amendments will be included in the scope of this invention.

[0088] The foregoing specific description has been described with reference to various embodiments. However, those skilled in the art will recognize that various modifications and changes can be made without departing from the scope of the present disclosure. Therefore, the consideration of the present disclosure will be illustrative rather than restrictive, and all these modifications will be included in its scope. Similarly, the advantages, other advantages and solutions to the problems of various embodiments have been described above. However, the benefits, advantages, solutions to the problems and any elements that can produce these, or make them more clear, should not be interpreted as critical, necessary or necessary. The term "include" and any other variants used in this article are all non-exclusive inclusions, so that the process, method, article or device including the list of elements not only includes these elements, but also includes other elements that are not explicitly listed or do not belong to the process, method, system, article or device. In addition, the term "coupled" and any other variants used in this article refer to physical connections, electrical connections, magnetic connections, optical connections, communication connections, functional connections and / or any other connections.

[0089] Those skilled in the art will appreciate that many changes can be made to the details of the above embodiments without departing from the basic principles of the present invention. Therefore, the scope of the present invention should be determined only by the claims.

Claims

1. A film thickness measuring device, characterized in that: include: A light source module (10) configured to provide an illumination light beam in a preset wavelength range; A reflective component (20) is configured to partially cut into the illumination light beam and reflect part of the illumination light beam; The transmission component (30) is configured to receive the illumination light beam reflected by the reflection component (20) and output it to the device under test (40); receive the information light beam formed by the device under test (40) reflecting the illumination light beam, and output the information light beam to the first light beam detection module (50); The first light beam detection module (50) is configured to receive the information light beam output by the transmission component (30), at least detect the light intensity of the information light beam, and output a corresponding first detection result.

2. The film thickness measuring device according to claim 1, characterized in that: The reflective assembly (20) comprises a reflective member, the reflective member has a smooth straight edge, and the straight edge of the reflective member is arranged parallel to the optical axis of the illumination light beam; The reflector is located on one side of the optical axis of the transmission component (30), so that the reflected illumination light beam is input from one side of the optical axis, and the information light beam is emitted to the first light beam detection module (50) through the other side of the optical axis.

3. The film thickness measuring device according to claim 2, characterized in that: The straight edge of the reflector is collinear with the optical axis of the illumination light beam.

4. The film thickness measuring device according to any one of claims 1 to 3, characterized in that: The illumination light beam reflected by the reflection component (20) is parallel to and not colinear with the information light beam.

5. The film thickness measuring device according to claim 1, characterized in that: The light source module (10) comprises a light source (11), a coupling component (12) and a first aperture stop (13); The light source (11) is configured to provide an illumination beam; The coupling component (12) is configured to receive the illumination light beam and output it to the incident end of the first aperture stop (13); The first aperture stop (13) is configured to limit the beam size and / or the beam divergence angle of the illumination beam.

6. The film thickness measuring device according to claim 5, characterized in that: The coupling component (12) comprises a coupling optical fiber and / or a coupling lens; The coupling component (12) is configured to couple out the illumination light beam provided by the light source (11).

7. The film thickness measuring device according to claim 5, characterized in that: The first light beam detection module (50) comprises a spectrometer.

8. The film thickness measuring device according to claim 1, characterized in that: The preset wavelength range is 190nm-1700nm.

9. The film thickness measuring device according to claim 1, characterized in that: The transmission component (30) comprises a tube lens (31) and an objective lens (33); The tube lens (31) is configured to modulate the illumination light beam into parallel light; The objective lens (33) is configured to converge the modulated illumination light beam to the device under test (40); receive the information light beam reflected by the device under test (40), converge the information light beam into parallel light, and output it to the first light beam detection module (50) through the tube lens (31).

10. The film thickness measuring device according to claim 9, characterized in that: The transmission assembly (30) further comprises a second aperture stop (32); The second aperture stop (32) is disposed between the tube lens (31) and the objective lens (33), and is configured to limit the beam diameter of the illumination beam incident on the objective lens (33).

11. The film thickness measuring device according to claim 1, characterized in that: Also includes: The second light beam detection module (60) is configured to receive a portion of the illumination light beam that is not reflected by the reflection component (20), detect at least the light intensity of the portion of the illumination light beam, and output a corresponding second detection result.

12. A detection device, characterized in that: include: Processing module (70); And the film thickness measuring device according to any one of claims 1 to 11; The processing module (70) is configured to obtain a first test result corresponding to the test piece (40), obtain a third test result corresponding to the standard piece, and determine the thickness of the film layer on the test piece (40) according to the first test result and the third test result; The surface of the standard part has a film layer with a certain thickness, and the third detection result is output by measuring the standard part through the film thickness measuring device.

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