Optical detection device and optical apparatus

Abstract

The utility model discloses an optical detection device and optical equipment, comprising a first frame and an optical collector which are assembled together, a second frame and an optical detector which are assembled together, and a first regulation and control assembly, the optical collector is used for collecting signal light from an object to be detected; the light detector is used for receiving the signal light transmitted by the light collector; the first regulation and control assembly is connected with the first frame and the second frame, and the first regulation and control assembly is configured to regulate the second frame in the axial direction of the light collector. The light collector is arranged on the first frame, the light detector is arranged on the second frame, and the light collector and the light detector are equivalently integrated on a support formed by the first frame and the second frame, so that the matching precision between the light detector and the light collector is ensured when the first regulation and control assembly adjusts the position of the light detector through the second frame; the light detector can better receive the signal light transmitted by the light collector after being adjusted.

Description

Technical Field

[0001] The utility model relates to the technical field of optics, in particular to a light detection device and optical equipment. Background Art

[0002] At present, the commonly used technical means for wafer surface defect detection is optical detection technology, which has the advantages of fast detection speed and no pollution.

[0003] In the related technology, optical inspection equipment generally includes a laser, a light collector and a light detector, wherein the laser provides a detection light beam for the wafer to be inspected, and the detection light beam forms a signal light through the defects on the surface of the wafer to be inspected. The light collector collects the signal light and guides it to the light detector. After receiving the signal light, the light detector detects the signal light and obtains the defect information on the surface of the wafer to be inspected based on the signal light. Therefore, it is particularly important to ensure that the light detector accurately obtains the signal light transmitted by the light collector.

[0004] Among them, the light collector and the light detector are two separately arranged devices. The light collector and the light detector may be prone to large errors when adjusted due to the poor accuracy between the assembled components. For optical equipment with increasingly higher precision requirements, this can no longer meet the requirements. Utility Model Content

[0005] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a light detection device and an optical device to ensure the accuracy of the light detection device during adjustment.

[0006] In a first aspect, an embodiment of the present application provides a light detector, comprising:

[0007] A first frame and a light collector assembled together, wherein the light collector is used to collect signal light from the object to be measured;

[0008] A second frame and a light detector assembled together, wherein the light detector is used to receive the signal light transmitted by the light collector;

[0009] The first regulating component is connected to the first frame and the second frame, and the first regulating component is configured to adjust the second frame along the axial direction of the light collector.

[0010] According to some embodiments of the present invention, the first regulating component includes:

[0011] A first slide table is slidably disposed on the first frame along a first setting direction, wherein the first setting direction is perpendicular to the axial direction of the light collector;

[0012] a second slide table, slidably disposed on the first slide table along a second setting direction, wherein the second setting direction is inclined relative to the axial direction of the light collector;

[0013] A guide member connected to the first frame and the second slide, the guide member being used to enable the second slide to be slidably disposed on the first frame along the axial direction of the light collector;

[0014] A first regulating structure is provided on the first frame and the first slide, and the first regulating structure is configured to adjust the first slide along the first set direction; wherein, when the first regulating structure adjusts the first slide along the first set direction, the second slide is suitable for the first slide to slide along the axial direction of the light collector.

[0015] According to some embodiments of the present invention, the first regulating structure includes at least two first thread pairs and a first boss, the two first thread pairs are arranged on one of the first frame and the first slide along the first setting direction, and the first boss is arranged on the other and is located between the abutting ends of the two first thread pairs;

[0016] Alternatively, the first regulating structure includes an adjusting screw and a nut seat, the adjusting screw is arranged on the first frame along the first setting direction and is rotatably connected, and the nut seat is connected to the first slide and is threadedly connected to the adjusting screw.

[0017] According to some embodiments of the present utility model, the first regulating component further includes a first locking structure, and the first locking structure includes:

[0018] A connecting piece, the connecting piece is arranged on one of the first frame and the first slide, the connecting piece has a stopper portion attached to the other, and the stopper portion is provided with a waist-shaped groove along the first setting direction;

[0019] A fixing knob, a screw of which is passed through the waist-shaped groove and is threadedly connected to the other one, and the fixing knob is used to press the stopper.

[0020] According to some embodiments of the utility model, the first frame defines an installation space running through both ends thereof, the light collector is disposed in the installation space and extends from a port portion, the second frame is disposed at another port portion of the first frame, and the light detector is used to be disposed toward the port portion.

[0021] According to some embodiments of the present invention, the light detector further comprises:

[0022] A base, arranged on a side of the first frame away from the second frame;

[0023] The second regulating component is connected to the first frame and the base, and the second regulating component is configured to adjust the first frame along a third setting direction, and the third setting direction is vertically arranged relative to the axial direction of the light collector.

[0024] According to some embodiments of the present utility model, the base is arranged on a side of the first frame away from the second frame;

[0025] A bracket, located at the head of the light collector;

[0026] The support assembly includes a first adjustment member and an adjustment pad connected to each other, wherein the first adjustment member is arranged on the base and is configured to adjust the adjustment pad along the axial direction of the light collector, and the adjustment pad is used to abut against the surface of the bracket.

[0027] According to some embodiments of the present invention, the light detector further comprises:

[0028] A second adjusting member, disposed on the base;

[0029] The support pad is fixedly arranged on the surface of the bracket, and the second adjusting member can be adjusted along the axial direction of the light collector to abut against a side of the support pad away from the bracket, thereby padding the adjusting pad.

[0030] According to some embodiments of the present invention, a first slot extending through an edge of the base is formed on the bottom surface of the base, and the adjustment pad is at least partially embedded in the first slot.

[0031] According to some embodiments of the present utility model, the light detector further includes a light attenuation component, and the light attenuation component includes:

[0032] A bracket, wherein a channel is provided on the side of the light collector in a direction perpendicular to the axial direction thereof, a supporting portion of the bracket slides in the channel, and a plurality of light attenuation sheets of different specifications are sequentially loaded along the extending direction of the channel;

[0033] The switching adjustment member is arranged on the first frame and is used to adjust the bracket along the extension direction of the channel so that each of the light attenuation sheets is switched to a target position to attenuate the intensity of the signal light.

[0034] According to some embodiments of the utility model, the light detector also includes a detector body, a first adjustment module, a second adjustment module and a third adjustment module, wherein the first adjustment module rotates around the Z axis to adjust the detector body, the second adjustment module slides around the X axis and the Y axis to adjust the detector body, and the third adjustment module rotates around the X axis and the Y axis to adjust the detector body.

[0035] According to some embodiments of the utility model, the first adjustment module includes a first rotating table, a second rotating table, a third thread pair and a third boss, wherein the first rotating table is connected to the detector body, the second rotating table is connected to the second frame, the first rotating table and the second rotating table are rotatably connected around the Z axis, the two third thread pairs are arranged on one of the edges of the first rotating table and the edges of the second rotating table, and the third boss is arranged on the other one and is located between the abutting ends of the two third thread pairs.

[0036] According to some embodiments of the present utility model, two second adjustment modules are provided, for adjusting the detector body along the X-axis and the Y-axis respectively;

[0037] The second adjustment module includes a first sliding platform, a second sliding platform, a fourth thread pair and a fourth boss, wherein the first sliding platform is connected to the detector body, the second sliding platform is connected to the second frame, the first sliding platform and the second sliding platform are slidably connected, the two fourth thread pairs are arranged on one of the edges of the first sliding platform and the edges of the second sliding platform, the fourth boss is arranged on the other one, and is located between the abutting ends of the two fourth thread pairs.

[0038] According to some embodiments of the utility model, the third adjustment module includes a first turntable, a second turntable, a third turntable, a first elastic deformation portion extending along the X-axis, a second elastic deformation portion extending along the Y-axis, a first tension adjustment member and a second tension adjustment member, wherein the first turntable is connected to the detector body, the first elastic deformation portion is connected to the edge of the first turntable and the edge of the second turntable, the first tensioning adjustment member is connected to at least one of the first turntable and the second turntable for adjusting the tension of the two, the second elastic deformation portion is connected to the edge of the second turntable and the third turntable, the second tensioning adjustment member is connected to at least one of the second turntable and the third turntable for adjusting the tension of the two, and the third turntable is connected to the second frame.

[0039] In a second aspect, an embodiment of the present application provides an optical device, including:

[0040] A laser for emitting a detection beam toward the object to be measured;

[0041] The light detector described above.

[0042] It can be seen from the above technical scheme that the embodiment of the present application has the following advantages: the light collector is arranged on the first frame, the light detector is arranged on the second frame, and the first frame and the second frame are adjustably connected through the first regulating component. In this way, the light collector and the light detector are equivalent to being integrated into the bracket composed of the first frame and the second frame. Compared with the two being arranged separately, it is obvious that the matching accuracy between the light collector and the light detector in the scheme of the present application is improved, thereby ensuring the matching accuracy between the light detector and the light collector when the first regulating component adjusts the position of the light detector through the second frame, and the light detector can better receive the signal light transmitted by the light collector after adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 This is a schematic diagram of the overall structure of the light detector according to an embodiment of the utility model;

[0044] Figure 2 It is a structural schematic diagram of the first frame and the first regulating component of an embodiment of the utility model;

[0045] Figure 3 This is a schematic diagram of the structure of the first frame and the support assembly of an embodiment of the utility model;

[0046] Figure 4 for Figure 3 A magnified schematic diagram of the middle A area;

[0047] Figure 5 A schematic diagram of the structure of a bracket according to an embodiment of the utility model;

[0048] Figure 6 This is a schematic diagram of the overall structure of the light detector according to an embodiment of the utility model;

[0049] Figure 7 This is a schematic diagram of the structure of the first adjustment module of an embodiment of the utility model;

[0050] Figure 8 This is a schematic diagram of the structure of the second adjustment module of an embodiment of the utility model;

[0051] Fig. 9 It is a structural schematic diagram of the third adjustment module of an embodiment of the utility model.

[0052] The meanings of the reference numerals are as follows:

[0053] 100, first frame; 110, installation space; 120, guide rail structure; 200, light collector; 210, channel; 300, second frame; 400, light detector; 410, detector body; 420, first adjustment module; 421, first rotating platform; 422, second rotating platform; 423, third thread pair; 424, third boss; 430, second adjustment module; 431, first moving platform; 432, second moving platform; 433, fourth thread pair; 434, fourth boss; 440, third adjustment module; 441, first rotating platform; 442, second rotating platform; 443, third rotating platform; 444, first elastic deformation part; 445, second elastic deformation part; 446, first tension adjustment member; 447, second tension adjustment member degree adjustment member; 500, first adjustment component; 510, first slide; 520, second slide; 530, guide member; 540, first adjustment structure; 541, first thread pair; 542, first boss; 550, first locking structure; 551, connecting piece; 552, fixing knob; 600, light attenuation component; 610, bracket; 611, supporting part; 620, switching adjustment member; 630, light attenuation sheet; 700, base; 710, first slot; 800, second adjustment component; 810, second thread pair; 820, second boss; 830, second locking structure; 101, supporting component; 1011, first adjustment member; 1012, adjustment pad; 201, supporting pad; 202, second adjustment member. DETAILED DESCRIPTION

[0054] For better understanding and implementation, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0055] In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc. indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0056] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0057] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0058] See also Figure 1 , an optical detection device provided by an embodiment of the utility model, includes a first frame 100 and a light collector 200 assembled together, a second frame 300 and a light detector 400 assembled together, and a first regulating component 500, wherein the light collector 200 is used to collect signal light from the object to be detected, the light detector 400 is used to receive the signal light transmitted by the light collector 200, the first regulating component 500 is connected to the first frame 100 and the second frame 300, and the first regulating component 500 is configured to adjust the second frame 300 along the axial direction of the light collector 200.

[0059] In a specific application process, an external laser emits a detection beam to the object to be measured, and the detection beam reflects a signal light after being irradiated to the object to be measured. The light collector 200 is used to receive the signal light reflected by the object to be measured and transmit it to the light detector 400. The light detector 400 receives the signal light transmitted by the light collector 200, and outputs corresponding signal light image information according to the signal light, thereby detecting defects of the object to be measured. Of course, the light detector 400 may also be used to detect the distance of the object to be measured, etc.

[0060] Among them, in order to enable the light detector 400 to better receive the signal light, a first regulating component 500 is arranged between the first frame 100 and the second frame 300. The first regulating component 500 can adjust the position of the second frame 300 along the axial direction of the light collector 200, thereby adjusting the spacing between the first frame 100 and the second frame 300. The distance of the light detector 400 relative to the light collector 200 is adjusted, thereby adjusting the focus of the light detector 400. The signal light transmitted by the light collector 200 can be better hit on the receiving surface of the light detector 400, so as to better detect the defects of the object to be measured.

[0061] It can be understood that the light collector 200 is arranged on the first frame 100, the light detector 400 is arranged on the second frame 300, and the first frame 100 and the second frame 300 are adjustably connected through the first regulating component 500. In this way, the light collector 200 and the light detector 400 are equivalent to being integrated into the bracket composed of the first frame 100 and the second frame 300. Compared with the two being arranged separately, it is obvious that the matching accuracy between the light collector 200 and the light detector 400 in the present application scheme is improved, thereby ensuring the matching accuracy between the light detector 400 and the light collector 200 when the first regulating component 500 adjusts the position of the light detector 400 through the second frame 300, and the light detector 400 can better receive the signal light transmitted by the light collector 200 after adjustment.

[0062] In one possible embodiment, referring to Figure 1 and Figure 2The first regulating assembly 500 includes a first slide 510, a second slide 520, a guide 530 and a first regulating structure 540, wherein a guide rail is provided on the top of the first frame 100, and the first slide 510 is slidably provided on the first frame 100 along the first setting direction through the guide rail. A guide rail is provided on the inclined surface of the first slide 510, and the second slide 520 is slidably provided on the first slide 510 along the second setting direction through the guide rail, and the second frame 300 is assembled and connected to the side of the second slide 520 away from the first slide 510. The guide 530 can be a telescopic kit, one end of the guide 530 is connected to the first frame 100, and the other end is connected to the second slide 520, thereby, the second slide 520 is slidably provided on the first frame 100 along the axial direction of the light collector 200 through the guide 530. Of course, the guide 530 can also be a guide column penetrating the second slide 520, which is not limited in this application. The first regulating structure 540 is provided on the first frame 100 and the first slide 510, and the first regulating structure 540 is used to regulate the first slide 510 along the first setting direction. When the first regulating structure 540 regulates the first slide 510 to slide along the first setting direction, the second slide 520 is adapted to the first slide 510 to slide along the axial direction of the light collector 200.

[0063] The first setting direction is perpendicular to the axial direction of the light collector 200, and the second setting direction is inclined relative to the axial direction of the light collector 200. For the convenience of describing the scheme, the axial direction of the light collector 200 can be understood as the up-down direction, the first setting direction can be understood as the left-right direction, and the second setting direction can be understood as the up-down inclined direction.

[0064] Specifically, when the first regulating structure 540 regulates the position of the first slide 510 to the left, the second slide 520 remains stationary in the left-right direction under the restriction of the guide member 530; at the same time, the connection position between the first slide 510 and the second slide 520 is lowered, the position of the second slide 520 is lowered, and the second frame 300 and the light detector 400 are lowered synchronously, thereby reducing the distance between the light collector 200 and the light detector 400. Conversely, when the first regulating structure 540 regulates the position of the first slide 510 to the right, the second slide 520 remains stationary in the left-right direction under the restriction of the guide member 530; at the same time, the connection position between the first slide 510 and the second slide 520 is raised, the position of the second slide 520 is raised, and the second frame 300 and the light detector 400 are raised synchronously, thereby increasing the distance between the light collector 200 and the light detector 400.

[0065] It is understandable that, compared with directly adjusting the light detector 400 along the axial direction of the light collector 200 , the present application solution can more conveniently adjust the position of the first slide 510 through the first regulating structure 540 , thereby facilitating adjustment of the position of the light detector 400 through the second slide 520 .

[0066] In order to adjust the first slide 510 along the first setting direction, in a possible embodiment, the first regulating structure 540 includes at least two first thread pairs 541 and a first boss 542, wherein the two first thread pairs 541 are arranged on one of the first frame 100 and the first slide 510 along the first setting direction, for example, one first thread pair 541 is arranged on the front side of the first frame 100 along the left-right direction, and the abutting end of the first thread pair 541 is arranged to the right, and the other first thread pair 541 is arranged on the front side of the first frame 100 along the left-right direction, and the abutting end of the first thread pair 541 is arranged to the left. The first boss 542 is fixedly arranged on the front side of the first slide 510, and is at least partially located between the abutting ends of the two first thread pairs 541, and the abutting ends of the two first thread pairs 541 abut against the left and right sides of the first boss 542, respectively. Of course, the first thread pair 541 and the first boss 542 can be installed in a swapped position, that is, the first thread pair 541 is disposed on the first slide 510 , and the first boss 542 is disposed on the first frame 100 .

[0067] Specifically, when it is necessary to adjust the light detector 400 downward, the staff adjusts the abutting ends of the two first thread pairs 541 to the left, and the two first thread pairs 541 mobilize the first slide 510 to move to the left through the first boss 542, and the second slide 520 moves downward, thereby adjusting the light detector 400 downward. Conversely, when it is necessary to adjust the light detector 400 upward, the staff adjusts the abutting ends of the two first thread pairs 541 to the right, and the two first thread pairs 541 mobilize the first slide 510 to move to the right through the first boss 542, and the second slide 520 moves upward, thereby adjusting the light detector 400 upward.

[0068] It can be understood that the two first thread pairs 541 can keep the first boss 542 in the adjusted position, and the first slide 510 is kept in a position in the left and right directions, thereby maintaining the height position of the second slide 520, so that the light detector 400 remains unchanged in position relative to the light collector 200 after adjustment.

[0069] In other possible embodiments, the first regulating structure 540 includes an adjusting screw and a nut seat (not shown in the figure), wherein the adjusting screw is arranged on the front side of the first frame 100 along the left-right direction, and the two ends of the adjusting screw are rotatably connected to the first frame 100 through bearings. The nut seat is fixedly arranged on the front side of the first slide 510, and the adjusting screw is threadedly connected to the nut seat. Thus, the adjusting screw is manually or automatically controlled to rotate, and the adjusting screw drives the first slide 510 to move left and right, thereby controlling the second slide 520 to move up and down, and then controlling the light detector 400 to adjust up and down through the second frame 300.

[0070] In order to ensure that the first slide 510 can be kept in the adjusted position after left-right adjustment, in some embodiments, the first regulating component 500 further includes a first locking structure 550, which is connected to the first frame 100 and the first slide 510 and is used to maintain the position of the first slide 510. Specifically, the first locking structure 550 includes a connecting piece 551 and a fixing knob 552, wherein the connecting piece 551 is roughly L-shaped, and the connecting piece 551 is arranged on one of the first frame 100 and the first slide 510. For example, one part of the connecting piece 551 is fixed to the first frame 100 by screws, and the other part of the connecting piece 551 is a stopper, which is fitted on the side of the first slide 510, and the stopper is provided with a waist-shaped groove along the first set direction. The screw of the fixing knob 552 is passed through the waist-shaped groove and is threadedly connected to the first slide 510, and the fixing knob 552 is used to press the stopper. Specifically, when the fixing knob 552 is in a loose state, the friction resistance between the side of the stopper and the first slide 510 is small, the first slide 510 can slide left and right, and the fixing knob 552 slides in the waist-shaped groove. After the adjustment of the first slide 510 is completed, the fixing knob 552 is tightened. At this time, the stopper is tightly against the side of the first slide 510, and there is a large friction force between the first slide 510 and the stopper, thereby limiting the movement of the first slide 510.

[0071] In some embodiments, the first frame 100 defines an installation space 110 that runs through both ends thereof, the light collector 200 is disposed in the installation space 110, and the head of the light collector 200 extends from one end portion of the installation space 110. The first frame 100 is arranged in a gantry, the second frame 300 is assembled to another end portion of the first frame 100 through the first regulating component 500, and the light detector 400 is arranged toward the end portion. It can be understood that the light collector 200 is assembled in the installation space 110 of the first frame 100, so that the first frame 100, the light collector 200, the second frame 300 and the light detector 400 are assembled together more compactly, and the light detection device can be flexibly assembled in a limited application space.

[0072] In some embodiments, reference Figure 1 and Figure 2 The light detector 400 further includes a hollow base 700 and a second regulating component 800, wherein the base 700 is slidably arranged on a side of the first frame 100 away from the second frame 300 through a guide rail, and the second regulating component 800 is connected to the first frame 100 and the base 700, and the second regulating component 800 is used to adjust the first frame 100 along a third setting direction. The third setting direction is perpendicular to the axial direction of the light collector 200, and for the convenience of description, the third setting direction can also be understood as a left-right direction.

[0073] It can be understood that during the application of the optical detection device, the position of the first frame 100 is adjusted left and right through the second adjustment component 800, and the light collector 200 and the light detector 400 are adjusted left and right synchronously, wherein the field of view of the light collector 200 is adjusted so as to better receive the signal light reflected from the object to be measured.

[0074] Further, the second regulating component 800 includes a second thread pair 810 and a second boss 820, wherein the two second thread pairs 810 are arranged on one of the base 700 and the first frame 100 along the third setting direction, for example, one second thread pair 810 is arranged on the front side of the base 700 along the left-right direction, and the abutting end of the second thread pair 810 is arranged to the right, and the other second thread pair 810 is arranged on the front side of the base 700 along the left-right direction, and the abutting end of the second thread pair 810 is arranged to the left. The second boss 820 is fixedly arranged on the front side of the first frame 100, and is at least partially located between the abutting ends of the two second thread pairs 810, and the abutting ends of the two second thread pairs 810 are respectively abutted on the left and right sides of the second boss 820. Of course, the second thread pair 810 and the second boss 820 can be installed in a swapped position, that is, the second thread pair 810 is arranged on the first frame 100, and the second boss 820 is arranged on the base 700. It is understandable that the staff manually adjusts the positions of the abutting ends of the two second thread pairs 810 , thereby adjusting the position of the first frame 100 , and further adjusting the positions of the light collector 200 and the light detector 400 .

[0075] Furthermore, the second regulating component 800 also includes a second locking structure 830. The second locking structure 830 and the first locking structure 550 have the same structure. The second locking structure 830 is used to maintain the position between the base 700 and the first frame 100, which will not be described in detail.

[0076] In some embodiments, reference Figures 3 to 5The optical detector 400 further includes a bracket and a support assembly 101, wherein the bracket may be a dark field protection cover, which is located at the head of the optical collector 200 and is used to provide a dark field environment for the optical collector 200 so that the optical collector 200 can better receive signal light. The support assembly 101 includes a first adjustment member 1011 and an adjustment pad 1012 connected to each other, wherein the first adjustment member 1011 may be a threaded pair, a differential head, etc. The first adjustment member 1011 is disposed on the base 700, and the adjustment pad 1012 is connected to the movable end of the first adjustment member 1011, and the first adjustment member 1011 is used to adjust the adjustment pad 1012 along the axial direction of the optical collector 200 and abut against the surface of the dark field protection cover. It is understandable that by adjusting the extension distance of the first adjusting member 1011 , the height of the first frame 100 is adjusted by adjusting the pad 1012 , thereby adjusting the object distance of the light collector 200 , so that the light collector 200 can better receive the signal light reflected by the object to be measured.

[0077] Furthermore, the optical detector 400 further includes a second adjusting member 202 (see Figure 2 ) and the support pad 201, wherein the second adjustment member 202 can be a threaded pair, a micrometer head or a bolt, etc., and the second adjustment member 202 is arranged on the base 700. The material of the support pad 201 is relatively hard, and the support pad 201 is fixedly arranged on the surface of the dark field protection cover. The second adjustment member 202 can be adjusted along the axial direction of the light collector 200 to abut against the side of the support pad 201 away from the dark field protection cover, thereby padding the adjustment pad 1012. It can be understood that when the support pad 201 needs to be replaced, the staff adjusts the second adjustment member 202 to extend downward and abut against the support pad 201, and the height of the first frame 100 is increased. When the second frame 300 is high enough, the staff can easily replace the adjustment pad 1012 of other thicknesses to adapt to the height of the first frame 100. Among them, a supporting pad 201 is set on the dark field protection cover. During the adjustment process, the second adjusting member 202 is replaced by the second adjusting member 202 to abut against the surface of the dark field protection cover, and the second adjusting member 202 abuts against the supporting pad 201, thereby effectively protecting the dark field protection cover; and the supporting pad 201 is not easy to generate waste, thereby ensuring the cleanliness of the optical environment.

[0078] Furthermore, a first card slot 710 is provided on the bottom surface of the base 700, and the first card slot 710 extends to the edge of the base 700, and the adjustment pad 1012 is at least partially embedded in the first card slot 710. Also, a second card slot is provided on the surface of the dark field protection cover, and the adjustment pad 1012 is at least partially embedded in the second card slot. Of course, it is also possible that one of the base 700 and the dark field protection cover is provided with a card slot, which is not limited in this application. It can be understood that through the provision of the first card slot 710 and the second card slot, the adjustment pad 1012 is embedded in the first card slot 710 and the second card slot, and the adjustment pad 1012 further defines the position between the base 700 and the dark field protection cover to ensure the stability between the two.

[0079] In some embodiments, reference Figure 1 and Figure 6 The light detector 400 further includes a light attenuation assembly 600, which includes a bracket 610 and a switching adjustment member 620, wherein a channel 210 is provided on the side of the light collector 200 in a direction perpendicular to the axial direction thereof, the bracket 610 is slidably disposed on the first frame through the guide rail structure 120, the supporting portion 611 of the bracket 610 slides on the channel 210, and a plurality of light attenuation sheets 630 of different specifications are sequentially loaded on the upper side of the supporting portion 611 along the extension direction of the channel 210. The switching adjustment member 620 may be a linear motor or other structure, the switching adjustment member 620 is disposed on the inner side of the first frame 100, and the driving portion of the switching adjustment member 620 is connected to the bracket 610, and is used to adjust the bracket 610 along the extension direction of the channel 210, so that each light attenuation sheet 630 on the bracket 610 can be switched to a target position, more specifically, each light attenuation sheet 630 is switched to the optical path at the center position of the light collector 200. When the signal light passes through the light attenuation sheet 630 , the light attenuation sheet 630 attenuates the intensity of the signal light.

[0080] In actual application, if the intensity of the signal light is large, the light detector 400 may be saturated when receiving the signal light, resulting in image distortion. In the present application, a light attenuation sheet 630 is provided on the optical path of the light collector 200. When the signal light passes through the light attenuation sheet 630, the light attenuation sheet 630 can reduce the intensity of the signal light, thereby effectively avoiding the problem of saturation of the light detector 400 when receiving the signal light.

[0081] Among them, the bracket 610 is equipped with light attenuation plates 630 of different specifications, and each light attenuation plate 630 has a different attenuation effect on light intensity. Therefore, during the use of the light detection device, the light attenuation plate 630 at the target position can be adjusted by using the switching adjustment member 620, so as to select the light attenuation plate 630 with a suitable attenuation rate to ensure that the signal light is transmitted to the light detector 400 with a suitable light intensity.

[0082] In some embodiments, reference Figure 6 The optical detector 400 also includes a detector body 410, a first adjustment module 420, a second adjustment module 430 and a third adjustment module 440, wherein the first adjustment module 420 rotates and adjusts the detector body 410 around the Z axis, the second adjustment module 430 slides and adjusts the detector body 410 around the X axis and the Y axis, and the third adjustment module 440 rotates and adjusts the detector body 410 around the X axis and the Y axis.

[0083] Among them, the first adjustment module 420, the second adjustment module 430 and the third adjustment module 440 are connected in sequence, the first adjustment module 420 is connected to the detector body 410, and the third adjustment module 440 is connected to the second frame 300. Of course, the first adjustment module 420, the second adjustment module 430 and the third adjustment module 440 can be arbitrarily exchanged, and this application is not limited.

[0084] Furthermore, the X-axis and the Y-axis are arranged perpendicularly, and can be understood as an extension line parallel to the receiving surface of the detector body 410 , and the Z-axis can be understood as an extension line perpendicular to the X-axis and the Y-axis.

[0085] It can be understood that during the application of the optical detector 400, the staff can flexibly adjust the posture of the detector body 410 through the first adjustment module 420, the second adjustment module 430 and the third adjustment module 440, so that the signal light transmitted by the light collector 200 can be better hit on the receiving surface of the detector body 410, so as to more completely generate image information of the object to be tested and detect defects of the object to be tested.

[0086] In one possible embodiment, referring to Figure 6 and Figure 7 The first adjustment module 420 includes a first rotating platform 421, a second rotating platform 422, a third thread pair 423 and a third boss 424, wherein the first rotating platform 421 is connected to the detector body 410, the second rotating platform 422 is connected to the second adjustment module 430, and the first rotating platform 421 and the second rotating platform 422 are connected to rotate around the Z axis through an annular boss. Two third thread pairs 423 are arranged at the edge of the second rotating platform 422, and the third boss 424 is arranged at the edge of the first rotating platform 421 and is located between the abutting ends of the two third thread pairs 423, and the abutting ends of the two third thread pairs 423 abut against the opposite side of the third boss 424. Of course, the third thread pair 423 and the third boss 424 can be installed in a swapped position, that is, the third thread pair 423 is arranged at the edge of the first rotating platform 421, and the third boss 424 is arranged at the edge of the second rotating platform 422.

[0087] In the specific adjustment process, the position of the third boss 424 is adjusted by adjusting the extension distance of the two third thread pairs 423, and then the angle of the first rotating platform 421 is adjusted by rotation, and the detector body 410 is adjusted synchronously. It can be understood that the first adjustment module 420 adopts the above-mentioned structural form, and in the thickness direction of the first adjustment module 420, the first adjustment module 420 occupies a smaller space, thereby reducing the occupied space of the light detector 400.

[0088] In one possible embodiment, referring to Figure 6 and Figure 8 There are two second adjustment modules 430, which are assembled and connected, one second adjustment module 430 is assembled on the first adjustment module 420, and the other second adjustment module 430 is assembled on the third adjustment module 440. One second adjustment module 430 is used to slide and adjust the detector body 410 around the X-axis, and the other second adjustment module 430 is used to slide and adjust the detector body 410 along the Y-axis.

[0089] The second adjustment module 430 includes a first moving platform 431, a second moving platform 432, a fourth thread pair 433 and a fourth boss 434, wherein the first moving platform 431 is connected to the first adjustment module 420, the second moving platform 432 is directly or indirectly connected to the third adjustment module 440, and the first moving platform 431 is slidably connected to the second moving platform 432. Two fourth thread pairs 433 are arranged at the edge of the second moving platform 432, and the fourth boss 434 is arranged at the first moving platform 431 and is located between the abutting ends of the two fourth thread pairs 433. Of course, the fourth thread pair 433 and the fourth boss 434 can be installed in a swapped position, that is, the fourth thread pair 433 is arranged at the edge of the first moving platform 431, and the fourth boss 434 is arranged at the edge of the second moving platform 432.

[0090] In the specific adjustment process, the position of the fourth boss 434 is adjusted by adjusting the extension distance of the two fourth thread pairs 433, thereby adjusting the position of the first moving stage 431 on the X-axis or Y-axis, and the detector body 410 is adjusted synchronously. It can be understood that the second adjustment module 430 adopts the above-mentioned structural form, and in the thickness direction of the second adjustment module 430, the second adjustment module 430 occupies a smaller space, thereby reducing the occupied space of the light detector 400.

[0091] In some embodiments, reference Figure 6 and Fig. 9The third adjustment module 440 includes a first turntable 441, a second turntable 442, a third turntable 443, a first elastic deformation portion 444 extending along the X axis, a second elastic deformation portion 445 extending along the Y axis, a first tension adjustment member 446 and a second tension adjustment member 447, wherein the first turntable 441 is connected to the second adjustment module 430, the first elastic deformation portion 444 is connected to the edge of the first turntable 441 and the edge of the second turntable 442, the first tension adjustment member is connected to at least one of the first turntable 441 and the second turntable 442, and is used to adjust the tension of the two. The second elastic deformation portion 445 is connected to the edge of the second turntable 442 and the third turntable 443, the second tension adjustment member is connected to at least one of the second turntable 442 and the third turntable 443, and is used to adjust the tension of the two. The third turntable 443 is connected to the second frame 300.

[0092] Specifically, the first tension adjustment member 446 is a screw threadedly connected to the edge of the first turntable 441, and the end of the first tension adjustment member 446 acts on the inclined surface inside the second turntable 442. When the first tension adjustment member 446 moves to the space between the first turntable 441 and the second turntable 442, the first tension adjustment member 446 acts on the second turntable 442 through the inclined surface, and the first turntable 441 and the second turntable 442 are elastically deformed at the position of the first elastic deformation portion 444, so that the detector body 410 is adjusted with the first elastic deformation portion 444 as the rotation center; similarly, the second tension adjustment member 447 is a screw threadedly connected to the edge of the second turntable 442, and the end of the second tension adjustment member 447 acts on the inclined surface inside the third turntable 443. When the second tension adjustment member 447 moves to the space between the second rotating table 442 and the third rotating table 443, the second tension adjustment member 447 acts on the third rotating table 443 through the inclined surface, and the second rotating table 442 and the third rotating table 443 are elastically deformed at the position of the second elastic deformation portion 445, so that the detector body 410 is adjusted with the second elastic deformation portion 445 as the rotation center. It can be understood that the third adjustment module 440 adopts the above-mentioned structural form, and in the thickness direction of the third adjustment module 440, the third adjustment module 440 occupies less space, thereby reducing the occupied space of the light detector 400.

[0093] The present application also discloses an optical device, referring to Figure 1 , comprising a laser and the above-mentioned light detection device, wherein the laser is used to emit a detection light beam toward the object to be detected.

[0094] In a specific application process, the laser emits a detection beam to the object to be measured, and the detection beam reflects signal light after being irradiated to the object to be measured. The light collector 200 is used to collect the signal light reflected by the object to be measured and transmit it to the light detector 400. The light detector 400 receives the signal light transmitted by the light collector 200, and outputs corresponding signal light image information according to the signal light, thereby detecting defects of the object to be measured. Of course, the light detector 400 may also be used to detect the distance of the object to be measured, etc.

[0095] It can be understood that the optical device adopts the above-mentioned light detection device, the light collector 200 is arranged on the first frame 100, the light detector 400 is arranged on the second frame 300, and the first frame 100 and the second frame 300 are adjustably connected through the first regulating component 500. In this way, the light collector 200 and the light detector 400 are equivalent to being integrated into the bracket composed of the first frame 100 and the second frame 300. Compared with the two being arranged separately, it is obvious that the matching accuracy between the light collector 200 and the light detector 400 in the present application scheme is improved, thereby ensuring the matching accuracy between the light detector 400 and the light collector 200 when the first regulating component 500 adjusts the position of the light detector 400 through the second frame 300. After adjustment, the light detector 400 can better receive the signal light transmitted by the light collector 200, thereby ensuring that the optical device can better detect the defects of the object to be measured.

[0096] The technical means disclosed in the solution of the utility model are not limited to the technical means disclosed in the above-mentioned implementation mode, but also include technical solutions composed of any combination of the above technical features. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the utility model, and these improvements and modifications are also regarded as the protection scope of the utility model.

Claims

1. A light detection device, characterized in that include: A first frame and a light collector assembled together, wherein the light collector is used to collect signal light from the object to be measured; A second frame and a light detector assembled together, wherein the light detector is used to receive the signal light transmitted by the light collector; The first regulating component is connected to the first frame and the second frame, and the first regulating component is configured to adjust the second frame along the axial direction of the light collector.

2. The light detection device according to claim 1, characterized in that The first regulatory component comprises: A first slide table is slidably disposed on the first frame along a first setting direction, wherein the first setting direction is perpendicular to the axial direction of the light collector; a second slide table, slidably disposed on the first slide table along a second setting direction, wherein the second setting direction is inclined relative to the axial direction of the light collector; A guide member connected to the first frame and the second slide, the guide member being used to enable the second slide to be slidably disposed on the first frame along the axial direction of the light collector; The first regulating structure is configured to adjust the first slide table along the first set direction; wherein, when the first regulating structure adjusts the first slide table to slide along the first set direction, the second slide table is suitable for the first slide table to slide along the axial direction of the light collector.

3. The light detection device according to claim 2, characterized in that The first regulating structure includes at least two first thread pairs and a first boss, the two first thread pairs are arranged on one of the first frame and the first slide along the first setting direction, and the first boss is arranged on the other and is located between the abutting ends of the two first thread pairs; Alternatively, the first regulating structure includes an adjusting screw and a nut seat, the adjusting screw is arranged on the first frame along the first setting direction and is rotatably connected, and the nut seat is connected to the first slide and is threadedly connected to the adjusting screw.

4. The light detection device according to claim 2 or 3, characterized in that: The first regulating component further includes a first locking structure, and the first locking structure includes: A connecting piece, the connecting piece is arranged on one of the first frame and the first slide, the connecting piece has a stopper portion attached to the other, and the stopper portion is provided with a waist-shaped groove along the first setting direction; A fixing knob, a screw rod of which is passed through the waist-shaped groove and is threadedly connected with the other one, and the fixing knob is used to press the stopper.

5. The light detection device according to claim 1, characterized in that The first frame defines an installation space that passes through both ends thereof. The light collector is disposed in the installation space and extends from a port portion. The second frame is disposed at another port portion of the first frame. The light detector is used to be disposed toward the port portion.

6. The light detection device according to claim 1, characterized in that The light detector further comprises: A base, arranged on a side of the first frame away from the second frame; The second regulating component is connected to the first frame and the base, and the second regulating component is configured to adjust the first frame along a third setting direction, and the third setting direction is vertically arranged relative to the axial direction of the light collector.

7. The light detection device according to claim 1, characterized in that The light detector further comprises: A base, arranged on a side of the first frame away from the second frame; The support assembly includes a first adjustment member and an adjustment pad connected to each other, wherein the first adjustment member is arranged on the base and is configured to adjust the adjustment pad along the axial direction of the light collector, and the adjustment pad is used to abut against the surface of the bracket.

8. The light detection device according to claim 7, characterized in that The light detector also includes: A second adjusting member, disposed on the base; The support pad is fixedly arranged on the surface of the bracket, and the second adjusting member can be adjusted along the axial direction of the light collector to abut against a side of the support pad away from the bracket, thereby padding the adjusting pad.

9. The light detection device according to claim 7, characterized in that: The bottom surface of the base is provided with a first slot extending through the edge of the base, and the adjustment pad is at least partially embedded in the first slot.

10. The light detection device according to claim 1, characterized in that The optical detector further comprises a light attenuation component, wherein the light attenuation component comprises: A bracket, wherein a channel is provided on the side of the light collector in a direction perpendicular to the axial direction thereof, a supporting portion of the bracket slides in the channel, and a plurality of light attenuation sheets of different specifications are sequentially loaded along the extending direction of the channel; The switching adjustment member is arranged on the first frame and is used to adjust the bracket along the extension direction of the channel so that each of the light attenuation sheets is switched to a target position to attenuate the intensity of the signal light.

11. The light detection device according to claim 1, characterized in that The optical detector also includes a detector body, a first adjustment module, a second adjustment module and a third adjustment module, wherein the first adjustment module rotates around the Z axis to adjust the detector body, the second adjustment module slides around the X axis and the Y axis to adjust the detector body, and the third adjustment module rotates around the X axis and the Y axis to adjust the detector body.

12. The light detection device according to claim 11, characterized in that The first adjustment module includes a first rotating table, a second rotating table, a third thread pair and a third boss, wherein the first rotating table is connected to the detector body, the second rotating table is connected to the second frame, the first rotating table and the second rotating table are rotatably connected around the Z axis, the two third thread pairs are arranged on one of the edges of the first rotating table and the edges of the second rotating table, and the third boss is arranged on the other and is located between the abutting ends of the two third thread pairs.

13. The light detection device according to claim 11, characterized in that The second adjustment modules are provided with two, and are used to adjust the detector body along the X-axis and the Y-axis respectively; The second adjustment module includes a first sliding platform, a second sliding platform, a fourth thread pair and a fourth boss, wherein the first sliding platform is connected to the detector body, the second sliding platform is connected to the second frame, the first sliding platform and the second sliding platform are slidably connected, the two fourth thread pairs are arranged on one of the edges of the first sliding platform and the edges of the second sliding platform, the fourth boss is arranged on the other one, and is located between the abutting ends of the two fourth thread pairs.

14. The light detection device according to claim 11, characterized in that The third adjustment module includes a first turntable, a second turntable, a third turntable, a first elastic deformation portion extending along the X-axis, a second elastic deformation portion extending along the Y-axis, a first tension adjustment member and a second tension adjustment member, wherein the first turntable is connected to the detector body, the first elastic deformation portion is connected to the edge of the first turntable and the edge of the second turntable, the first tension adjustment member is connected to at least one of the first turntable and the second turntable for adjusting the tension of the two, the second elastic deformation portion is connected to the edge of the second turntable and the third turntable, the second tension adjustment member is connected to at least one of the second turntable and the third turntable for adjusting the tension of the two, and the third turntable is connected to the second frame.

15. An optical device, characterized in that include: A laser for emitting a detection beam toward the object to be measured; A light detection device as claimed in any one of claims 1 to 14.

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