Argon pipeline and magnetron sputtering coating equipment

Abstract

The utility model discloses an argon gas pipeline and magnetron sputtering coating equipment, the argon gas pipeline comprises an argon gas pipe and a cooling pipe, the argon gas pipe is provided with a plurality of gas outlets, the cooling pipe is internally provided with a cooling cavity, the cooling pipe is provided with a liquid inlet and a liquid outlet which are communicated with the cooling cavity, and the liquid inlet and the liquid outlet are communicated with the cooling cavity. A containing groove is formed in the side wall of the cooling pipe in the length direction of the cooling pipe, the argon pipe is matched with the containing groove in shape, the argon pipe and the containing groove form an integrated semi-cylindrical structure when the argon pipe is installed in the containing groove, and the containing groove is used for limiting displacement of the argon pipe in the radial direction of the cooling pipe. The magnetron sputtering coating equipment comprises a vacuum coating chamber and an argon pipeline mounted in the vacuum coating chamber. According to the utility model, the liquid inlet pipeline and the liquid outlet pipeline of the argon pipe and the cooling pipe are integrated into an integrated semi-cylindrical structure, and the number of exposed pipelines in the coating chamber is reduced, so that the area of a pipe on which metal is deposited in the coating process is greatly reduced, and the cleaning difficulty is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to an argon gas pipeline and magnetron sputtering coating equipment. Background Art

[0002] Physical vapor deposition technology is a technology that uses physical methods to vaporize the surface of a material source (solid or liquid) into gaseous atoms, molecules or partial ions under vacuum conditions, and deposits a thin film with certain functions on the surface of the substrate. Physical vapor deposition mainly includes magnetron sputtering, vacuum evaporation, ion plating, etc.

[0003] Among them, magnetron sputtering coating is in a vacuum coating chamber, using low-pressure inert gas glow discharge to generate incident ions, bombarding the surface of the cathode target material, so that the atoms on the target surface gain enough energy to escape, sputtering onto the anode substrate to form a thin film layer. Specifically, 0.1 to 10Pa of argon or other inert gas is introduced into the coating chamber, and the cathode target material generates glow discharge under the action of 1-3KV DC negative high voltage or 13.56MHz radio frequency voltage, and the ionized argon ions bombard the target surface, so that the target atoms are sputtered and deposited on the substrate to form a thin film.

[0004] During the above magnetron sputtering process, some metal (target atoms) will be deposited on the argon tube and the cooling tube, which will fall off and contaminate the coating chamber over time. It is necessary to regularly remove the deposited metal on the pipe and clean the coating chamber.

[0005] Since the argon gas pipe and cooling pipe in the existing coating chamber are two separate independent pipes, and the cooling pipe includes a liquid inlet pipe and a liquid outlet pipe, there are relatively many pipes inside the coating chamber, so that the surfaces of more pipes in the coating chamber are deposited with metal coatings. At the same time, more detached metal coatings will pollute the coating chamber, resulting in a very large cleaning workload and very inconvenient cleaning. Utility Model Content

[0006] In order to overcome the shortcomings of the prior art, the utility model provides an argon gas pipeline and magnetron sputtering coating equipment, which integrate the liquid inlet pipe and liquid outlet pipe of the argon gas pipe and the cooling pipe into an integrated semi-cylindrical structure, reducing the number of exposed pipes in the coating chamber, thereby greatly reducing the pipe area where metal will be deposited during the coating process and reducing the difficulty of cleaning.

[0007] The technical solution adopted by the utility model to solve its technical problems is:

[0008] An argon gas pipeline comprises an argon gas pipe and a cooling pipe, wherein the argon gas pipe is provided with a plurality of gas outlets, a cooling cavity is provided inside the cooling pipe, the cooling pipe is provided with a liquid inlet and a liquid outlet communicated with the cooling cavity, a placement groove is provided on the side wall of the cooling pipe along its length direction, the argon gas pipe matches the shape of the placement groove, and the two form an integrated semi-cylindrical structure when the argon gas pipe is installed in the placement groove, and the placement groove is used to limit the displacement of the argon gas pipe along the radial direction of the cooling pipe.

[0009] As a further improvement of the above technical solution, the width of the placement groove gradually decreases along the direction of increasing radius of the cooling pipe.

[0010] As a further improvement of the above technical solution, the placement groove includes a first inclined surface, a bottom plane and a second inclined surface connected in sequence, and the first inclined surface, the bottom plane and the second inclined surface form a contact surface between the cooling tube and the argon gas tube.

[0011] As a further improvement of the above technical solution, the cross-section of the argon tube is triangular, the bottom surface and two waist surfaces of the argon tube are in contact with the contact surface, and the argon tube is provided with a plurality of gas outlets along the length direction of the argon tube away from the corners of the cooling tube.

[0012] As a further improvement of the above technical solution, the cross-section of the argon tube is trapezoidal, and the lower bottom surface and two waist surfaces of the argon tube are in contact with the contact surface, the upper bottom surface of the argon tube is an arc surface, and the argon tube is provided with a plurality of gas outlets along the length direction of the argon tube away from the upper bottom surface of the cooling tube.

[0013] As a further improvement of the above technical solution, a plurality of the gas outlets are arranged in a straight line along the length direction of the argon gas tube.

[0014] As a further improvement of the above technical solution, the argon tube is a hollow shell structure, and an air inlet is provided at one end of the argon tube. The air inlet and a plurality of air outlets are all connected to the hollow inner cavity of the argon tube.

[0015] As a further improvement of the above technical solution, the cooling tube is a hollow shell structure, and the hollow inner cavity of the cooling tube is the cooling cavity, so a plurality of interfering flow heat conducting plates are provided on the installation side wall of the cooling cavity, and the installation side wall is located on the back side of the contact surface.

[0016] As a further improvement of the above technical solution, the liquid inlet and the liquid outlet are respectively located at two ends of the cooling pipe, and the liquid inlet is close to the contact surface.

[0017] As a further improvement of the above technical solution, the liquid inlet and the liquid outlet are respectively close to the first inclined surface and the second inclined surface.

[0018] The utility model also provides the following technical solutions:

[0019] A magnetron sputtering coating device comprises a vacuum coating chamber and an argon gas pipeline installed in the vacuum coating chamber.

[0020] The beneficial effect of the utility model is that the liquid inlet pipe and the liquid outlet pipe of the argon gas pipe and the cooling pipe are integrated into an integrated semi-cylindrical structure, the number of exposed pipes in the coating chamber is reduced, thereby greatly reducing the pipe area where metal will be deposited during the coating process and reducing the difficulty of cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0022] Figure 1 This is a schematic diagram of the assembly of an argon gas pipeline of the utility model;

[0023] Figure 2 This is a structural disassembly diagram of an argon gas pipeline of the utility model;

[0024] Figure 3 It is a top view of an argon gas pipeline of the utility model;

[0025] Figure 4 yes Figure 3 Sectional view of AA in the middle;

[0026] Figure 5 This is a front view of a cooling tube in an argon gas pipeline of the utility model;

[0027] Figure 6 This is a front view of an argon gas tube in an argon gas pipeline of the utility model;

[0028] Figure 7 yes Figure 5 Cross-sectional view of BB.

[0029] Figure numerals: 10, cooling tube; 11, liquid inlet; 12, placement groove; 121, first inclined surface; 122, second inclined surface; 123, bottom plane; 13, liquid outlet; 14, cooling chamber; 15, spoiler and heat conducting plate; 20, argon gas tube; 21, air inlet; 22, air outlet; 23, lower bottom surface; 24, first waist surface; 25, second waist surface; 26, upper bottom surface. DETAILED DESCRIPTION

[0030] The following will be combined with the embodiments and drawings to clearly and completely describe the concept, specific structure and technical effects of the utility model, so as to fully understand the purpose, characteristics and effects of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, other embodiments obtained by technicians in this field without creative work are all within the scope of protection of the utility model. In addition, all the connection / connection relationships involved in the patent do not refer to the direct connection of components, but refer to the fact that according to the specific implementation situation, a better connection structure can be formed by adding or reducing connection accessories. For example, fixed connection / fixed installation can be selected according to the needs of screw connection, bolt connection, pin connection, key connection, bonding, mortise and tenon connection, welding, riveting and other methods. For example, detachable connection can be selected according to the needs of screw connection, bolt connection, threaded connection, snap connection, mortise and tenon connection, Velcro connection and other methods. The various technical features in the creation of the utility model can be combined interactively without conflicting with each other.

[0031] The embodiment of the utility model provides an argon gas pipeline, referring to Figure 1-Figure 4 The argon gas pipeline includes an argon gas pipe 20 and a cooling pipe 10, wherein the argon gas pipe 20 is provided with a plurality of gas outlets 22, wherein a cooling chamber 14 is provided inside the cooling pipe 10, wherein the cooling pipe 10 is provided with a liquid inlet 11 and a liquid outlet 13 which are connected with the cooling chamber 14, and a placement groove 12 is provided on the side wall of the cooling pipe 10 along its length direction, wherein the shape of the argon gas pipe 20 matches that of the placement groove 12, and when the argon gas pipe 20 is installed in the placement groove 12, the two form an integrated semi-cylindrical structure, thereby reducing the number of exposed pipes in the coating chamber, thereby greatly reducing the pipe area where metal will be deposited during the coating process, and reducing the difficulty of cleaning.

[0032] In this embodiment, refer to Figure 1-Figure 4 After the argon tube 20 is loaded into the placement groove 12, the placement groove 12 can prevent the argon tube 20 from being displaced radially along the cooling tube 10, and the argon pipeline is placed horizontally in the vacuum coating chamber, so the argon tube 20 can be prevented from being separated from the cooling tube 10. In this way, the detachable fixation of the argon tube 20 and the cooling tube 10 can be achieved without the need for an additional locking mechanism, which is convenient and quick and simplifies the structure.

[0033] Specifically, refer to Figure 5 and Figure 6, the width of the placement groove 12 gradually decreases along the increasing direction of the radius of the cooling tube 10, that is, the placement groove 12 is a trapezoidal shape with a small top and a large bottom, and accordingly, the argon tube 20 is also a trapezoidal shape with a small top and a large bottom. By fitting the two trapezoidal shapes, the argon tube 20 can be prevented from being separated from the cooling tube 10 in the diameter direction. Further, the placement groove 12 includes a first inclined surface 121, a bottom plane 123, and a second inclined surface 122 connected in sequence, and the first inclined surface 121, the bottom plane 123, and the second inclined surface 122 form a contact surface between the cooling tube 10 and the argon tube 20; the argon tube 20 includes a lower bottom surface 23, a first waist surface 24, a second waist surface 25, and an upper bottom surface 26, the lower bottom surface 23 is in contact with the ground plane, and the first waist surface 24 and the second waist surface 25 are in contact with the first inclined surface 121 and the second inclined surface 122, respectively, so that the cooling tube 10 is in full contact with the argon tube 20, which is conducive to improving the cooling effect of the argon tube 20.

[0034] The upper bottom surface 26 is the side of the argon tube 20 away from the cooling tube 10. The upper bottom surface 26 is provided with a plurality of air outlets 22 along the length direction of the argon tube 20, and the plurality of air outlets 22 are arranged in a straight line. In addition, the upper bottom surface 26 of the argon tube 20 is an arc-shaped surface, and the air outlet 22 is located at the midpoint of the arc of the upper bottom surface 26, which can avoid stress concentration and facilitate the opening of the air outlet 22.

[0035] In some embodiments, the opening width of the placement groove 12 can be set as needed. When the opening width of the placement groove 12 is very small, the upper bottom surface 26 of the argon tube 20 disappears, that is, the argon tube 20 is triangular in shape, and a plurality of the gas outlets 22 are arranged on the corners of the argon tube 20 away from the cooling tube 10, and are arranged in a straight line along the length direction of the argon tube 20.

[0036] In this embodiment, refer to Figure 2 and Figure 6 The argon tube 20 is a hollow shell structure, and an air inlet 21 is provided on the argon tube 20. The air inlet 21 and a plurality of air outlets 22 are connected to the hollow inner cavity of the argon tube 20. Argon or other inert gas enters through the air inlet 21 and is discharged from the air outlet 22. The air inlet 21 is provided at both ends of the argon tube 20 to improve the uniformity and strength of the exhaust of the air outlet 22.

[0037] In this embodiment, refer to Figure 2 and Figure 5The cooling tube 10 is a hollow shell structure, and the hollow inner cavity of the cooling tube 10 is the cooling cavity 14, so a number of turbulent heat conductive sheets 15 are arranged on the installation side wall of the cooling cavity 14, and the installation side wall is located on the back side of the contact surface. The turbulent heat conductive sheet 15 and the tube wall of the cooling tube 10 located on the contact surface are made of stainless steel to improve the heat conduction effect and further improve the cooling effect of the argon gas tube 20. In addition, there is a gap between the turbulent heat conductive sheet 15 and the other side walls of the cooling cavity 14, that is, the turbulent heat conductive sheet 15 will not block the coolant flow path of the liquid inlet 11 and the liquid outlet 13, and at the same time can play a role in enhancing the heat exchange efficiency, and play a turbulent stirring role on the coolant in the cooling tube 10, so as to maintain the utilization efficiency of the coolant in the cooling tube 10.

[0038] Refer to 4 and Figure 7 The liquid inlet 11 and the liquid outlet 13 are respectively located at the two ends of the cooling tube 10, and the liquid inlet 11 is close to the contact surface, and the liquid inlet 11 and the liquid outlet 13 are respectively close to the first inclined surface 121 and the second inclined surface 122, thereby improving the flow and stirring effect of the coolant in the cooling tube 10 and further improving the utilization efficiency of the coolant in the cooling tube 10.

[0039] An embodiment of the utility model provides a magnetron sputtering coating device, including a vacuum coating chamber and an argon gas pipeline installed in the vacuum coating chamber. By setting the argon gas pipeline with an integrated semi-cylindrical structure, the tube area where metal will be deposited during the coating process is greatly reduced, the cleaning difficulty is reduced, the cleaning time is reduced, and the coating efficiency is improved.

[0040] The above is a specific description of the preferred implementation of the utility model, but the invention of the utility model is not limited to the described embodiments. Technical personnel familiar with the field can also make various equivalent deformations or substitutions without violating the spirit of the utility model. These equivalent deformations or substitutions are all included in the scope defined by the claims of this application.

Claims

1. An argon gas pipeline, comprising an argon gas pipe and a cooling pipe, wherein the argon gas pipe is provided with a plurality of gas outlets, a cooling cavity is provided inside the cooling pipe, and the cooling pipe is provided with a liquid inlet and a liquid outlet connected to the cooling cavity, characterized in that: A placement groove is provided on the side wall of the cooling tube along its length direction. The shape of the argon tube matches that of the placement groove. When the argon tube is installed in the placement groove, the two form an integrated semi-cylindrical structure, and the placement groove is used to limit the radial displacement of the argon tube along the cooling tube.

2. The argon gas pipeline according to claim 1, characterized in that: The width of the placement groove gradually decreases along the direction in which the radius of the cooling pipe increases.

3. The argon gas pipeline according to claim 2, characterized in that: The placement groove includes a first inclined surface, a bottom plane, and a second inclined surface which are connected in sequence, and the first inclined surface, the bottom plane, and the second inclined surface form a contact surface between the cooling tube and the argon gas tube.

4. The argon gas pipeline according to claim 3, characterized in that: The cross section of the argon tube is triangular, the bottom surface and two waist surfaces of the argon tube are in contact with the contact surface, and the corners of the argon tube away from the cooling tube are provided with a plurality of gas outlets along the length direction of the argon tube.

5. The argon gas pipeline according to claim 3, characterized in that: The cross section of the argon tube is trapezoidal, and the lower bottom surface and two waist surfaces of the argon tube are in contact with the contact surface. The upper bottom surface of the argon tube is an arc surface. The argon tube is away from the upper bottom surface of the cooling tube and is provided with a plurality of gas outlets along the length direction of the argon tube.

6. An argon gas pipeline according to claim 4 or 5, characterized in that: The plurality of gas outlets are arranged in a straight line along the length direction of the argon gas tube.

7. The argon gas pipeline according to claim 6, characterized in that: The argon gas tube is a hollow shell structure. An air inlet is arranged at one end of the argon gas tube. The air inlet and a plurality of air outlets are all connected to the hollow inner cavity of the argon gas tube.

8. An argon gas pipeline according to any one of claims 3 to 5 or 7, characterized in that: The cooling tube is a hollow shell structure, and the hollow inner cavity of the cooling tube is the cooling cavity, so a plurality of interfering flow heat conducting sheets are arranged on the installation side wall of the cooling cavity, and the installation side wall is located on the back side of the contact surface.

9. The argon gas pipeline according to claim 8, characterized in that: The liquid inlet and the liquid outlet are respectively located at two ends of the cooling pipe, and the liquid inlet is close to the contact surface.

10. A magnetron sputtering coating device, comprising a vacuum coating chamber, characterized in that: The vacuum coating chamber is installed with an argon gas pipeline as described in any one of claims 1 to 9.

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