Cage frame mechanism of magnetron sputtering equipment and magnetron sputtering equipment

Abstract

The utility model belongs to the field of sputtering equipment, and discloses a cage frame mechanism of magnetron sputtering equipment and the magnetron sputtering equipment, and the cage frame mechanism of the magnetron sputtering equipment comprises a rotary drum; the upper mounting piece is arranged at the upper end of the rotary drum, an upper insertion hole group is formed in the upper mounting piece and comprises a first upper insertion hole, a second upper insertion hole and a third upper insertion hole, the first upper insertion hole and the second upper insertion hole are connected with the upper end of the first tool plate, and the first upper insertion hole and the third upper insertion hole are connected with the upper end of the second tool plate; the lower mounting piece is arranged at the lower end of the rotary drum, a lower inserting hole group is formed in the lower mounting piece and comprises a first lower inserting hole, a second lower inserting hole and a third lower inserting hole, the first lower inserting hole and the second lower inserting hole are connected with the lower end of the first tool plate, and the first lower inserting hole and the third lower inserting hole are connected with the lower end of the second tool plate. The corresponding inserting holes are formed in the upper mounting piece and the lower mounting piece correspondingly, so that the tool plates of different specifications can be mounted, and the overall utilization area of the tool plates is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of sputtering equipment, in particular to a cage mechanism of a magnetron sputtering equipment and the magnetron sputtering equipment. Background Art

[0002] Magnetron sputtering equipment is a physical vapor deposition (PVD) technology used for thin film preparation. Its working principle is to use electrons to collide with argon atoms under the action of an electric field to generate Ar positive ions and new electrons. Under the combined action of the electric field and the magnetic field, these electrons move in a circular motion on the target surface in a form similar to a cycloid, increasing the probability of collision with Ar atoms, thereby improving the sputtering efficiency and film quality. Magnetron sputtering technology is widely used in the microelectronics industry, the optical industry, the decoration and protection fields, and other special applications, such as the preparation of superconducting materials and biomedical materials.

[0003] Among them, the cage mechanism is an important component of the magnetron sputtering equipment. The cage mechanism is arranged in the coating chamber of the magnetron sputtering equipment. A number of tooling plates are arranged on the cage mechanism for placing a number of products to be coated. After one product to be coated is coated, the cage mechanism is rotated, and then the next product to be coated is coated until the coating of all products to be coated is completed.

[0004] The existing cage mechanism can only install tooling plates of one specification, and cannot install tooling plates of different specifications. When replacing different products to be coated, the overall utilization area of ​​the tooling plates will be low due to the mismatch between the specifications of the tooling plates and the products to be coated, resulting in low coating efficiency. Utility Model Content

[0005] The purpose of the present application is to provide a cage mechanism of a magnetron sputtering device and a magnetron sputtering device, so that the cage mechanism can be installed with tooling plates of different specifications.

[0006] The technical solutions provided by this application are as follows:

[0007] On the one hand, a cage mechanism of a magnetron sputtering device is provided, which is at least used to install a first tooling plate or a second tooling plate of different specifications, comprising:

[0008] Rotating drum;

[0009] An upper mounting member is arranged at the upper end of the rotating drum, and at least one upper socket group is arranged on the upper mounting member, and the upper socket group includes at least a first upper socket, a second upper socket and a third upper socket, and the spacing from the second upper socket to the first upper socket is different from the spacing from the third upper socket to the first upper socket, and the first upper socket and the second upper socket are used to connect the upper end of the first tooling plate, and the first upper socket and the third upper socket are used to connect the upper end of the second tooling plate;

[0010] A lower mounting member is arranged at the lower end of the rotating drum, and at least one group of lower sockets is provided on the lower mounting member, and the lower socket group includes at least a first lower socket, a second lower socket and a third lower socket, and the spacing from the second lower socket to the first lower socket is different from the spacing from the third lower socket to the first lower socket, the first lower socket and the second lower socket are used to connect the lower end of the first tooling plate, and the first lower socket and the third lower socket are used to connect the lower end of the second tooling plate.

[0011] In some embodiments, the distance between the third upper socket and the first upper socket is greater than the distance between the second upper socket and the first upper socket;

[0012] The distance between the third lower plug hole and the first lower plug hole is greater than the distance between the second lower plug hole and the first lower plug hole.

[0013] In some embodiments, at least one of the first upper socket and at least one of the second upper socket are disposed between the second upper socket and the third upper socket, and the first upper socket and the second upper socket are alternately disposed;

[0014] At least one of the first lower plug hole and at least one of the second lower plug hole are arranged between the second lower plug hole and the third lower plug hole, and the first lower plug hole and the second lower plug hole are arranged alternately.

[0015] In some embodiments, the upper socket group further includes a fourth upper socket, and the fourth upper socket is arranged at an end of the third upper socket away from the second upper socket;

[0016] The lower plug hole group further includes a fourth lower plug hole, and the fourth lower plug hole is arranged at an end of the third lower plug hole away from the second lower plug hole.

[0017] In some embodiments, the upper mounting member is provided with a plurality of upper socket groups in sequence along the length direction;

[0018] The lower mounting member is provided with a plurality of lower plug hole groups in sequence along the length direction.

[0019] In some embodiments, the rotating drum includes a support frame and a plurality of enclosures, wherein the plurality of enclosures are spliced ​​and arranged around the outside of the support frame, and an upper mounting member and a lower mounting member are provided on the outer side wall of each enclosure.

[0020] In some embodiments, the enclosure, the upper mounting member, and the lower mounting member are respectively arc-shaped, and the inner side walls of the upper mounting member and the lower mounting member are respectively arranged to fit with the outer side wall of the enclosure.

[0021] In some embodiments, a turntable assembly is further included, wherein the turntable assembly includes an upper turntable and a lower turntable, and the support frame is disposed between the upper turntable and the lower turntable and connected to the upper turntable and the lower turntable.

[0022] On the other hand, a magnetron sputtering device is also provided, comprising a first tooling plate, a second tooling plate and a cage mechanism of the magnetron sputtering device described in any one of the above embodiments;

[0023] The upper end of the first tooling plate is provided with two first upper plug posts, and the lower end is provided with two first lower plug posts, the two first upper plug posts are respectively plugged into the first upper plug hole and the second upper plug hole, and the two first lower plug posts are respectively plugged into the first lower plug hole and the second lower plug hole;

[0024] Two second upper plug posts are provided at the upper end of the second tooling plate, and two second lower plug posts are provided at the lower end. The two second upper plug posts are respectively plugged into the first upper plug hole and the third upper plug hole, and the two second lower plug posts are respectively plugged into the first lower plug hole and the third lower plug hole.

[0025] In some embodiments, a third tooling plate is further included, wherein two third upper plug posts are provided at the upper end of the third tooling plate, and two third lower plug posts are provided at the lower end, the two third upper plug posts are respectively plugged into the first upper socket and the fourth upper socket on the upper mounting member, and the two third lower plug posts are respectively plugged into the first lower socket and the fourth lower socket on the lower mounting member.

[0026] The technical effect of the present application is that by arranging an upper mounting part and a lower mounting part outside the rotating drum, and respectively arranging corresponding sockets on the upper mounting part and the lower mounting part according to the width of tooling plates of different specifications, tooling plates of different specifications can be installed according to needs, which not only improves the applicability of the cage mechanism, but also matches the specifications of the tooling plates with the products to be coated, increases the overall utilization area of ​​the tooling plates, allows more products to be coated to be installed on the tooling plates, and thereby improves the coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The present application is further described in detail below with reference to the accompanying drawings and specific implementation methods:

[0028] Figure 1 It is a structural schematic diagram of a cage mechanism of a magnetron sputtering device provided in a specific embodiment of the present application;

[0029] Figure 2 yes Figure 1 Enlarged view of point A in the middle;

[0030] Figure 3 It is a structural schematic diagram of a cage mechanism of a magnetron sputtering device provided in a specific embodiment of the present application, in which a first tooling plate is installed;

[0031] Figure 4 yes Figure 3 Enlarged view of point B in the middle;

[0032] Figure 5 It is a structural schematic diagram of a cage mechanism of a magnetron sputtering device provided in a specific embodiment of the present application, in which a second tooling plate is installed;

[0033] Figure 6 yes Figure 5 Enlarged view of point C in the middle;

[0034] Figure 7 It is a structural schematic diagram of a cage mechanism of a magnetron sputtering device provided in a specific embodiment of the present application at a viewing angle.

[0035] Description of Figure Numbers:

[0036] 10. First tooling plate; 11. First upper plug column; 12. First lower plug column;

[0037] 20. Second tooling plate; 21. Second upper plug column; 22. Second lower plug column;

[0038] 100, rotating drum; 110, supporting frame; 120, enclosure; 130, upper rotating disk; 140, lower rotating disk;

[0039] 200, upper mounting member; 210, first upper socket; 220, second upper socket; 230, third upper socket; 300, lower mounting member; 310, first lower socket; 320, second lower socket; 330, third lower socket. DETAILED DESCRIPTION

[0040] In the following description, specific details such as specific system structures, technologies, etc. are provided for the purpose of illustration rather than limitation, so as to provide a thorough understanding of the embodiments of the present application. However, it should be clear to those skilled in the art that the present application may also be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, devices, circuits, and methods are omitted to prevent unnecessary details from obstructing the description of the present application.

[0041] In order to more clearly illustrate the application embodiments or technical solutions in the prior art, the specific implementation methods of the present application will be described below with reference to the accompanying drawings. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings and other implementation methods can be obtained based on these drawings without creative work.

[0042] In order to simplify the drawings, only the parts related to the present application are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, in order to simplify the drawings and facilitate understanding, in some figures, only one of the parts with the same structure or function is schematically drawn or marked. In this article, "one" not only means "only one", but also means "more than one".

[0043] It should be further understood that the term “and / or” used in the specification and appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0044] In this document, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0045] In the embodiments shown in the drawings, directional indications (such as up, down, left, right, front, and back, etc.) are not absolute but relative when describing the structure and movement of each component, and are not used to limit the direction of the product in actual use.

[0046] In addition, in the description of the present application, ordinal numbers, such as "first", "second", etc., are only used to distinguish and describe related objects, and cannot be understood as indicating or implying the relative importance or order between the related objects.

[0047] like Figures 1 to 6As shown, the present application provides an embodiment of a cage mechanism of a magnetron sputtering device, the cage mechanism is used at least to install a first tooling plate 10 or a second tooling plate 20 of different specifications, the cage mechanism includes a rotating drum 100, an upper mounting member 200 and a lower mounting member 300; the upper mounting member 200 is arranged at the upper end of the rotating drum 100, and at least one group of upper socket groups is provided on the upper mounting member 200, the upper socket group includes at least a first upper socket 210, a second upper socket 220 and a third upper socket 230, the spacing between the second upper socket 220 and the first upper socket 210 is different from the spacing between the third upper socket 230 and the first upper socket 210, and the first upper socket 210 and the second upper socket 220 are used to connect At the upper end of the first tooling plate 10, the first upper socket 210 and the third upper socket 230 are used to connect the upper end of the second tooling plate 20; the lower mounting member 300 is arranged at the lower end of the rotating drum 100, and at least one group of lower sockets is provided on the lower mounting member 300, and the lower socket group includes at least the first lower socket 310, the second lower socket 320 and the third lower socket 330, and the spacing from the second lower socket 320 to the first lower socket 310 is different from the spacing from the third lower socket 330 to the first lower socket 310, the first lower socket 310 and the second lower socket 320 are used to connect the lower end of the first tooling plate 10, and the first lower socket 310 and the third lower socket 330 are used to connect the lower end of the second tooling plate 20.

[0048] In the present application, an upper mounting member 200 and a lower mounting member 300 are arranged on the outer side of the drum 100, an upper socket group is arranged on the upper mounting member 200, and a lower socket group is arranged on the lower mounting member 300, and the upper socket group and the lower socket group can realize the detachable connection between the first tooling plate 10 or the second tooling plate 20 and the drum 100. Specifically, the upper socket group includes a first upper socket 210, a second upper socket 220, and a third upper socket 230, and the first upper socket 210, the second upper socket 220, and the third upper socket 230 can be arranged in sequence along the length direction of the upper mounting member 200, or the first upper socket 210, the third upper socket 230, and the second upper socket 220 are arranged in sequence along the length direction of the upper mounting member 200. The upper end of the first tooling plate 10 can be inserted into the first upper socket 210 and the second upper socket 220 to achieve the connection between the upper end of the first tooling plate 10 and the upper mounting member 200, and the upper end of the second tooling plate 20 can be inserted into the first upper socket 210 and the third upper socket 230 to achieve the connection between the upper end of the second tooling plate 20 and the upper mounting member 200. Because the spacing from the first upper socket 210 to the second upper socket 220 is different from the spacing from the first upper socket 210 to the third upper socket 230, the widths of the first tooling plate 10 and the second tooling plate 20 are different, that is, the upper mounting member 200 of the present application can install the first tooling plate 10 or the second tooling plate 20 of different widths (different specifications). Among them, the spacing between the first upper socket 210 and the second upper socket 220 is set according to the width of the first tooling plate 10, and the spacing between the first upper socket 210 and the third upper socket 230 is set according to the width of the second tooling plate 20.

[0049] Similarly, the lower jack group includes a first lower jack 310, a second lower jack 320 and a third lower jack 330, and one lower jack group is arranged corresponding to one upper jack group. The first lower jack 310, the second lower jack 320 and the third lower jack 330 can be arranged in sequence along the length direction of the lower mounting member 300, or the first lower jack 310, the third lower jack 330 and the second lower jack 320 are arranged in sequence along the length direction of the lower mounting member 300, but it is necessary to ensure that the first lower jack 310 is arranged corresponding to the first upper jack 210, the second lower jack 320 is arranged corresponding to the second upper jack 220, and the third lower jack 330 is arranged corresponding to the third upper jack 230. The lower end of the first tooling plate 10 can be inserted into the first lower hole 310 and the second lower hole 320 to realize the connection between the lower end of the first tooling plate 10 and the lower mounting member 300, and the lower end of the second tooling plate 20 can be inserted into the first lower hole 310 and the third lower hole 330 to realize the connection between the lower end of the second tooling plate 20 and the lower mounting member 300. Because the spacing from the first lower hole 310 to the second lower hole 320 is different from the spacing from the first lower hole 310 to the third lower hole 330, the widths of the first tooling plate 10 and the second tooling plate 20 are different, that is, the lower mounting member 300 of the present application can install the first tooling plate 10 or the second tooling plate 20 with different widths (different specifications). The upper end of the first tooling plate 10 is connected to the upper mounting member 200, and the lower end is connected to the lower mounting member 300, so that the first tooling plate 10 can be fixed on the drum 100. Similarly, the upper end of the second tooling plate 20 is connected to the upper mounting member 200, and the lower end is connected to the lower mounting member 300, so that the second tooling plate 20 can be fixed on the drum 100. The spacing between the first lower plug hole 310 and the second lower plug hole 320 is set according to the width of the first tooling plate 10, and the spacing between the first lower plug hole 310 and the third lower plug hole 330 is set according to the width of the second tooling plate 20.

[0050] In the present application, by arranging an upper mounting member 200 and a lower mounting member 300 outside the drum 100, and respectively arranging corresponding sockets on the upper mounting member 200 and the lower mounting member 300 according to the width of tooling plates of different specifications, tooling plates of different specifications can be installed as needed, which not only improves the applicability of the cage mechanism, but also matches the specifications of the tooling plates with the products to be coated, thereby increasing the overall utilization area of ​​the tooling plates, allowing more products to be coated to be installed on the tooling plates, and thereby improving the coating efficiency.

[0051] It should be noted that the upper socket group may also include more upper sockets, and the lower socket group may also include more lower sockets, so that more tooling boards of different specifications can be installed on the upper mounting member 200 and the lower mounting member 300 as needed. Exemplarily, the upper socket group also includes a fourth upper socket, and when the first upper socket 210, the second upper socket 220 and the third upper socket 230 can be arranged in sequence along the length direction of the upper mounting member 200, the fourth upper socket is arranged at the end of the third upper socket 230 away from the second upper socket 220; the lower socket group also includes a fourth lower socket, and the fourth lower socket is arranged at the end of the third lower socket 330 away from the second lower socket 320. The first upper socket 210 and the fourth upper socket can be connected to the upper end of the third tooling board, and the first lower socket 310 and the fourth lower socket can be connected to the lower end of the third tooling board to realize the installation of the third tooling board, and the specifications of the third tooling board are different from those of the first tooling board 10 and the second tooling board 20.

[0052] By analogy, the upper jack group may further include a fifth upper jack, and the lower jack group may further include a fifth lower jack, so as to connect the upper end of the fourth tooling board through the first upper jack 210 and the fifth upper jack, and connect the lower end of the fourth tooling board through the first lower jack 310 and the fifth lower jack. The number of jacks in the upper jack group and the lower jack group is no longer exhaustively listed here. The present application does not limit the number of upper jacks in the upper jack group and the specific number and arrangement order of the lower jacks in the lower jack group. As long as upper jacks and lower jacks with different spacings are used to achieve the installation of tooling boards of different specifications, they all fall within the protection scope of the present application.

[0053] In a specific embodiment, Figure 2As shown, the upper jack group may further include a plurality of first upper jacks 210 and a plurality of second upper jacks 220. Similarly, the lower jack group may further include a plurality of first lower jacks 310 and a plurality of second lower jacks 320. Exemplarily, assuming that the distance between the third upper jack 230 and the first upper jack 210 is greater than the distance between the second upper jack 220 and the first upper jack 210; the distance between the third lower jack 330 and the first lower jack 310 is greater than the distance between the second lower jack 320 and the first lower jack 310, that is, when the width of the second tooling plate 20 is greater than the width of the first tooling plate 10, more than two first tooling plates 10 may be installed between the first upper jack 210 and the third upper jack 230, and at least one first tooling plate 10 may be installed between the second upper jack 220 and the third upper jack 230. The upper socket 210 and at least one second upper socket 220 are alternately arranged, and the first upper socket 210 and the second upper socket 220 are used to connect the upper end of the first tooling board 10; at least one first lower socket 310 and at least one second lower socket 320 are also arranged between the second lower socket 320 and the third lower socket 330, and the first lower socket 310 and the second lower socket 320 are alternately arranged, and the first lower socket 310 and the second lower socket 320 are respectively used to connect the lower end of the first tooling board 10. The number of the first upper socket 210 and the second upper socket 220 between the second upper socket 220 and the third upper socket 230 is set according to the number of the first tooling boards 10 that can be installed, and similarly, the number of the first lower socket 310 and the second lower socket 320 between the second lower socket 320 and the third lower socket 330 is set according to the width of the first tooling board 10 that can be installed.

[0054] Exemplarily, assuming that the width of the second tooling plate 20 is 25 mm, the width of the first tooling plate 10 is 10 mm, and the gap between the tooling plates is ignored, two first upper sockets 210 and one second upper socket 220 may be alternately arranged between the second upper socket 220 and the third upper socket 230, and the arrangement of the upper sockets in the upper socket group is: the first upper socket 210, the second upper socket 220, the first upper socket 210, the second upper socket 220, the first upper socket 210 and the third upper socket 230, and the last first upper socket 210 may cooperate with the second upper socket 220 in another upper socket group to install the first tooling plate 10. Of course, in another example, two first upper sockets 210 and two second upper sockets 220 may be alternately arranged between the second upper socket 220 and the third upper socket 230. The arrangement of the lower jacks in the lower jack group is the same as the arrangement of the upper jacks in the upper jack group, and will not be described in detail here.

[0055] In a specific embodiment, the upper mounting member 200 is provided with a plurality of groups of upper socket groups in sequence along the length direction; the lower mounting member 300 is provided with a plurality of groups of lower socket groups in sequence along the length direction. The plurality of upper socket groups and the plurality of lower socket groups are arranged in a one-to-one correspondence, so as to realize the simultaneous installation of more tooling plates of the same specification on the upper mounting member 200 and the lower mounting member 300, so as to install more products to be coated and improve the coating efficiency. Exemplarily, two groups of upper socket groups are provided on an upper mounting member 200, and the two groups of upper socket groups can be symmetrically arranged. Assuming that the width of the second tooling plate 20 is 25 mm, the width of the first tooling plate 10 is 10 mm, and the gap between the tooling plates is ignored, then the arrangement order of all upper sockets on an upper mounting member 200 can be: first upper socket 210, second upper socket 220, first upper socket 210, second upper socket 220, first upper socket 210, third upper socket 230, third upper socket 2 30. A first upper socket 210, a second upper socket 220, a first upper socket 210, a second upper socket 220 and a first upper socket 210; wherein, one of the two middle first upper sockets 210 is equivalent to the second upper socket 220, that is, the two middle first upper sockets 210 are used to connect the upper end of the first tooling plate 10, that is, an upper mounting member 200 and a lower mounting member 300 can cooperate to install five first tooling plates 10 or two second tooling plates 20.

[0056] In a specific embodiment, Figure 1 As shown, the drum 100 includes a support frame 110 and a plurality of enclosures 120, wherein the plurality of enclosures 120 are spliced ​​to form an annular structure and are arranged around the outside of the support frame 110, and an upper mounting member 200 and a lower mounting member 300 are arranged on the outer side wall of each enclosure 120. The length direction of the upper mounting member 200 and the lower mounting member 300 is the circumferential direction of the drum 100.

[0057] Further, the enclosure 120, the upper mounting member 200 and the lower mounting member 300 are respectively arc-shaped, and the inner side walls of the upper mounting member 200 and the lower mounting member 300 are respectively arranged to fit the outer side walls of the enclosure 120. The upper mounting member 200 and the lower mounting member 300 are respectively strip-shaped structures. When the first tooling plate 10 is installed on the upper mounting member 200 and the lower mounting member 300, the first tooling plates 10 with smaller widths can be spliced ​​to form an arc to better utilize the installation space so as to install more first tooling plates 10. The second tooling plate 20 has a larger width, and the second tooling plate 20 can be an arc-shaped structure. The second tooling plate 20 can also be a flexible plate.

[0058] Further, such as Figure 7As shown, the rotary disc assembly also includes an upper rotary disc 130 and a lower rotary disc 140, and the support frame 110 is disposed between the upper rotary disc 130 and the lower rotary disc 140 and connected to the upper rotary disc 130 and the lower rotary disc 140. The upper rotary disc 130 and the lower rotary disc 140 can be driven by a driving mechanism such as a motor, and when the upper rotary disc 130 and the lower rotary disc 140 rotate, the rotating drum 100 is driven to rotate.

[0059] The present application also provides an embodiment of a magnetron sputtering device, comprising a first tooling plate 10, a second tooling plate 20 and a cage mechanism of the magnetron sputtering device described in any of the above embodiments; Figures 3 to 6 As shown, the upper end of the first tooling plate 10 is provided with two first upper plug posts 11, and the lower end is provided with two first lower plug posts 12, the two first upper plug posts 11 are respectively plugged with the first upper plug hole 210 and the second upper plug hole 220, and the two first lower plug posts 12 are respectively plugged with the first lower plug hole 310 and the second lower plug hole 320;

[0060] Two second upper plug posts 21 are provided at the upper end of the second tooling plate 20, and two second lower plug posts 22 are provided at the lower end. The two second upper plug posts 21 are respectively plugged into the first upper plug hole 210 and the third upper plug hole 230, and the two second lower plug posts 22 are respectively plugged into the first lower plug hole 310 and the third lower plug hole 330.

[0061] When installing the first tooling plate 10, first insert a first lower plug post 12 into the first lower plug hole 310, insert another first lower plug post 12 into the second lower plug hole 320, then insert a first upper plug post 11 into the first upper plug hole 210, and insert another first upper plug post 11 into the second upper plug hole 220, so that the installation of the first tooling plate 10 can be achieved. When disassembling the first tooling plate 10, move the first tooling plate 10 upward to disengage the first lower plug post 12 from the first lower plug hole 310 and the second lower plug hole 320, and then disengage the first upper plug post 11 from the first upper plug hole 210 and the second upper plug hole 220. In order to facilitate the disassembly and assembly of the first tooling plate 10, an opening is also provided at the lower end of the first tooling plate 10, and the opening can facilitate the operator to hold the first tooling plate 10 to disassemble and assemble the first tooling plate 10. The installation method of the second tooling plate 20 is the same as that of the first tooling plate 10 , which will not be described again. The second tooling plate 20 is also provided with an opening for the operator to hold the second tooling plate 20 .

[0062] The present application sets plug posts on the first tooling plate 10 and the second tooling plate 20. The cooperation between the plug posts and the sockets can facilitate the installation and disassembly of the first tooling plate 10 and the second tooling plate 20, so as to facilitate the replacement of the first tooling plate 10 or the second tooling plate 20 and improve work efficiency.

[0063] Furthermore, a third tooling plate is included, and two third upper plug posts are provided at the upper end of the third tooling plate, and two third lower plug posts are provided at the lower end, and the two third upper plug posts are respectively plugged with the first upper plug hole 210 and the fourth upper plug hole on the upper mounting member 200, and the two third lower plug posts are respectively plugged with the first lower plug hole 310 and the fourth lower plug hole on the lower mounting member 300. By providing more plug holes on the upper mounting member 200 and the lower mounting member 300, the cage mechanism can be installed with more tooling plates of different specifications, thereby improving the applicability of the cage mechanism.

[0064] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0065] It should be noted that the above embodiments can be freely combined as needed. The above is only the preferred implementation of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present application, and these improvements and modifications should also be regarded as the protection scope of the present application.

Claims

1. A cage mechanism of a magnetron sputtering device, at least used for mounting a first tooling plate or a second tooling plate of different specifications, characterized in that: include: Rotating drum; An upper mounting member is arranged at the upper end of the rotating drum, and at least one upper socket group is arranged on the upper mounting member, and the upper socket group includes at least a first upper socket, a second upper socket and a third upper socket, and the spacing from the second upper socket to the first upper socket is different from the spacing from the third upper socket to the first upper socket, and the first upper socket and the second upper socket are used to connect the upper end of the first tooling plate, and the first upper socket and the third upper socket are used to connect the upper end of the second tooling plate; A lower mounting member is arranged at the lower end of the rotating drum, and at least one group of lower sockets is provided on the lower mounting member, and the lower socket group includes at least a first lower socket, a second lower socket and a third lower socket, and the spacing from the second lower socket to the first lower socket is different from the spacing from the third lower socket to the first lower socket, the first lower socket and the second lower socket are used to connect the lower end of the first tooling plate, and the first lower socket and the third lower socket are used to connect the lower end of the second tooling plate.

2. The cage mechanism of a magnetron sputtering device according to claim 1, characterized in that: The distance between the third upper plug hole and the first upper plug hole is greater than the distance between the second upper plug hole and the first upper plug hole; The distance between the third lower plug hole and the first lower plug hole is greater than the distance between the second lower plug hole and the first lower plug hole.

3. The cage mechanism of a magnetron sputtering device according to claim 2, characterized in that: At least one of the first upper socket and at least one of the second upper socket are disposed between the second upper socket and the third upper socket, and the first upper socket and the second upper socket are alternately disposed; At least one of the first lower plug hole and at least one of the second lower plug hole are arranged between the second lower plug hole and the third lower plug hole, and the first lower plug hole and the second lower plug hole are arranged alternately.

4. The cage mechanism of a magnetron sputtering device according to claim 2, characterized in that: The upper socket group further includes a fourth upper socket, and the fourth upper socket is arranged at an end of the third upper socket away from the second upper socket; The lower plug hole group further includes a fourth lower plug hole, and the fourth lower plug hole is arranged at an end of the third lower plug hole away from the second lower plug hole.

5. The cage mechanism of a magnetron sputtering device according to any one of claims 1 to 4, characterized in that: The upper mounting member is provided with a plurality of upper plug hole groups in sequence along the length direction; The lower mounting member is provided with a plurality of lower plug hole groups in sequence along the length direction.

6. The cage mechanism of a magnetron sputtering device according to any one of claims 1 to 4, characterized in that: The rotating drum includes a support frame and a plurality of enclosures, wherein the plurality of enclosures are spliced ​​and arranged around the outside of the support frame, and an upper mounting member and a lower mounting member are provided on the outer side wall of each enclosure.

7. The cage mechanism of a magnetron sputtering device according to claim 6, characterized in that: The enclosure, the upper mounting member and the lower mounting member are respectively arc-shaped, and the inner side walls of the upper mounting member and the lower mounting member are respectively arranged to fit with the outer side wall of the enclosure.

8. The cage mechanism of a magnetron sputtering device according to claim 6, characterized in that: It also includes a turntable assembly, which includes an upper turntable and a lower turntable. The support frame is arranged between the upper turntable and the lower turntable and is connected to the upper turntable and the lower turntable.

9. A magnetron sputtering device, characterized in that: A cage mechanism comprising a first tooling plate, a second tooling plate and a magnetron sputtering device according to any one of claims 1 to 8; The upper end of the first tooling plate is provided with two first upper plug posts, and the lower end is provided with two first lower plug posts, the two first upper plug posts are respectively plugged into the first upper plug hole and the second upper plug hole, and the two first lower plug posts are respectively plugged into the first lower plug hole and the second lower plug hole; Two second upper plug posts are provided at the upper end of the second tooling plate, and two second lower plug posts are provided at the lower end. The two second upper plug posts are respectively plugged into the first upper plug hole and the third upper plug hole, and the two second lower plug posts are respectively plugged into the first lower plug hole and the third lower plug hole.

10. The magnetron sputtering device according to claim 9, characterized in that: It also includes a third tooling plate, wherein two third upper plug posts are provided at the upper end of the third tooling plate, and two third lower plug posts are provided at the lower end, the two third upper plug posts are respectively plugged into the first upper socket and the fourth upper socket on the upper mounting member, and the two third lower plug posts are respectively plugged into the first lower socket and the fourth lower socket on the lower mounting member.

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