Probe module and detection device
By designing a probe module with elastic deformation, the needle mold is in close contact with the side wall of the jack, the problem of the on-board FPC connector testing contacts located on the side wall is solved, and the detection speed and accuracy are improved.
Patent Information
- Application Number
- CN202323539023.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-22
- Publication Date
- 2025-01-10
- Estimated Expiration
- 2033-12-22
AI Technical Summary
Some of the on-board FPC connector test contacts on the market are located on the side walls of the jack, making it difficult for the probe to contact the detection point, reducing the detection speed and accuracy.
A probe module is designed, including a needle mold and a probe. The needle mold has elastically deformed projections and needle bodies. The projections are arranged in close contact with the side wall of the socket through the appropriate spacing between the needle body and the socket. This facilitates contact between the probe and the side wall detection point.
The detection speed and accuracy are improved, ensuring a firm contact between the probe and the side wall detection point, and avoiding deviations in the detection result caused by poor contact.
Smart Images
Figure CN222337246U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of circuit board production equipment, and in particular relates to a probe module and a detection device. Background Art
[0002] With the continuous development of science and technology, electronic products such as smart phones, smart watches, and tablet computers have become an important part of people's daily lives. Today's electronic products are pursuing high performance while also requiring smaller size and weight, which places higher requirements on product integration. Flexible circuit boards are widely used in circuit connections in electronic products due to their excellent flexibility.
[0003] In order to ensure the performance of the flexible circuit board, the corresponding circuit on the flexible circuit board needs to be tested. The circuit to be tested on the flexible circuit board usually includes two detection points. When testing a circuit to be tested, the detection device usually tests it at these two detection points.
[0004] In addition, the two detection points of the circuit to be tested of the flexible circuit board are located in the corresponding connector jack and on the bottom surface of the jack. During detection, the probe of the detection device moves along the axial direction of the jack and extends into the connector jack to achieve contact with the detection point.
[0005] However, if Figure 1 As shown, although the test contacts 202 of some vehicle-mounted FPC connectors 200 on the market are located in the socket 201, they are set on the side wall of the socket 201. After the probe is inserted into the socket 201 along the axial direction of the socket 201, it is difficult to contact the test point, thereby reducing the detection speed. Utility Model Content
[0006] The utility model provides a probe module and a detection device, aiming to facilitate the contact between the probe of the probe module and the detection point on the side wall of the plug hole of the connector.
[0007] In order to solve the above problems, on the one hand, an embodiment of the utility model provides a probe module, including a needle mold and a probe; the probe includes a needle body and a protrusion, the needle body has a first end and a second end arranged opposite to each other, and the first end is connected to the needle mold; the protrusion is arranged at the second end and is located on the side of the needle body; in the arrangement direction of the protrusion and the needle body, the needle body and / or the protrusion can be elastically deformed.
[0008] Optionally, the needle mold includes a mold core and a ring; in the arrangement direction of the first end and the second end, the mold core has a first surface and a second surface arranged opposite to each other, and the first surface and the second surface both intersect with the side of the mold core; a slot is provided on the side of the mold core; in the arrangement direction of the first end and the second end, the slot extends to the second surface; the needle body is installed in the slot and extends out of the slot from the second surface; the ring is sleeved on the mold core, and the slot is located at the side opening of the mold core, opposite to the needle body located in the slot, so as to limit the needle body in the slot.
[0009] Optionally, a limiting structure is provided on the needle body, and the limiting structure is in conflict with the second surface.
[0010] Optionally, the needle body includes a first section structure, a second section structure and a third section structure which are connected in sequence; wherein, in the arrangement direction of the first end and the second end, the first section structure and the third section structure are respectively located on opposite sides of the second section structure; and in the arrangement direction of the protrusion and the needle body, the first section structure and the third section structure are respectively located on opposite sides of the second section structure; the first section structure is located in the slot, the second section structure is in conflict with the second surface, the third section structure is located outside the slot, and the protrusion is arranged on the third section structure.
[0011] Optionally, the card slot extends to the first surface; the probe module further includes a circuit board, which is disposed on the first surface and electrically contacts the needle body.
[0012] Optionally, a hollow structure is provided on the needle body, so that the needle body can be elastically deformed in the arrangement direction of the first end and the second end.
[0013] Optionally, a first guide surface is provided on the side of the protrusion facing away from the needle body, and along the direction from the first end to the second end, the first guide surface gradually approaches the needle body, and an end of the first guide surface facing away from the first end intersects with the needle body.
[0014] Optionally, the probe module also includes a shell, which is provided with a mounting hole; in the arrangement direction of the first end and the second end, the mounting hole passes through the shell; at least a portion of the needle module is located in the mounting hole; the second end is located in the mounting hole and does not extend out of the mounting hole.
[0015] Optionally, the probe module has a needle group, the needle group includes two probes, the two probes in the needle group are respectively a first probe and a second probe; along the arrangement direction of the protrusion and the needle body, the first probe and the second probe are arranged at intervals; the protrusion of the first probe is located on the side of the needle body of the first probe away from the second probe, and the protrusion of the second probe is located on the side of the needle body of the second probe away from the first probe.
[0016] In order to solve the above problems, on the other hand, an embodiment of the present invention provides a detection device, including any one of the probe modules described above.
[0017] In the probe module and detection device provided by the embodiment of the utility model, the probe can be driven to move along the first direction (i.e., the first direction is parallel to the arrangement direction of the first end and the second end) to extend into the jack of the connector (the axial direction of the jack can be parallel to the first direction), and by appropriately setting the spacing between the needle body and the hole wall of the jack, when the needle body extends into the jack, the protrusion contacts the side wall of the jack, so that the needle body and / or the protrusion can be elastically deformed, so that the protrusion can be in close contact with the side wall of the jack, and when the side wall of the jack is provided with a detection point, the protrusion can be in close contact with the detection point, so that it is more convenient for the probe to contact the detection point located on the side wall of the jack, thereby improving the detection speed. Moreover, the setting of this embodiment can also make the probe contact the detection point located on the side wall of the jack more firmly, thereby effectively avoiding the deviation of the detection result caused by poor contact, thereby improving the detection accuracy of the circuit board. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 It is a schematic diagram of the structure of the connector;
[0019] Figure 2 It is a structural schematic diagram of a probe module provided by an embodiment of the utility model;
[0020] Figure 3 It is a cross-sectional view of a probe module of a detection device provided by an embodiment of the utility model;
[0021] Figure 4 This is a schematic diagram of the structure of a probe of a probe module provided by an embodiment of the utility model;
[0022] Figure 5 This is a schematic diagram of the structure of the needle mold of the probe module provided by one embodiment of the utility model;
[0023] Figure 6 It is a structural schematic diagram of the first circuit board of a probe module provided by one embodiment of the utility model.
[0024] The reference numerals in the specification are as follows:
[0025] 100. Probe module;
[0026] 1. needle mold; 11. mold core; 111. first surface; 112. second surface; 113. side surface; 114. slot; 115. stopper; 12. collar;
[0027] 2. Probe; 21. Needle body; 211. First end; 212. Second end; 213. Position limiting structure; 214. First section structure; 215. Second section structure; 216. Third section structure; 217. Hollow structure; 22. Protrusion; 221. First guide surface; 222. Second guide surface;
[0028] 3. The first circuit board;
[0029] 4. Needle set;
[0030] 5. The second circuit board;
[0031] 6. housing; 61. mounting hole; 611. first hole; 612. second hole;
[0032] 7. Protective cover;
[0033] 8. Mounting plate;
[0034] 9. Connecting block;
[0035] 10. The first guide structure. DETAILED DESCRIPTION
[0036] In order to make the technical problems, technical solutions and beneficial effects solved by the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.
[0037] like Figures 2 to 4 As shown, in one embodiment, the probe module 100 includes a needle mold 1 and a probe 2, and the probe 2 is connected to the needle mold 1. The probe 2 includes a needle body 21 and a protrusion 22, and the needle body 21 has a first end 211 and a second end 212 that are arranged opposite to each other, and the first end 211 is connected to the needle mold 1; the protrusion 22 is arranged at the second end 212 and is located on the side of the needle body 21; in the arrangement direction of the protrusion 22 and the needle body 21, the needle body 21 and / or the protrusion 22 can be elastically deformed.
[0038] The arrangement direction of the first end 211 and the second end 212 is defined as the first direction, and the arrangement direction of the protrusion 22 and the needle body 21 is defined as the second direction. The angle between the first direction and the second direction is greater than 0 degree and less than 180 degrees. Usually, the first direction is perpendicular to the second direction.
[0039] When working, the probe 2 can be driven to move along the first direction to extend into the socket 201 of the connector 200 (the axial direction of the socket 201 can be parallel to the first direction). By appropriately setting the distance between the needle body 21 and the hole wall of the socket 201, when the needle body 21 extends into the socket 201, the protrusion 22 contacts the hole wall of the socket 201, so that the needle body 21 and / or the protrusion 22 can be elastically deformed, so that the protrusion 22 can be in close contact with the hole wall of the socket 201. When the side wall of the socket 201 is provided with a detection point, the protrusion 22 can be in close contact with the detection point, so that it is more convenient for the probe 2 to contact the detection point on the side wall of the socket 201, thereby improving the detection speed. Moreover, the setting of this embodiment can also make the probe 2 contact the detection point on the side wall of the socket 201 more firmly, thereby effectively avoiding the deviation of the detection result caused by poor contact, thereby improving the detection accuracy of the circuit board.
[0040] It should be noted that "a detection point is provided on the side wall of the socket 201" may mean that the detection point is set inside the socket 201 and not on the side wall of the socket 201; it may also mean that the detection point is set inside the socket 201 and close to the side wall of the socket 201. In this case, the detection point and the side wall of the socket 201 may be disconnected.
[0041] In addition, it should be understood that the appropriate setting of the distance between the needle body 21 and the hole wall of the hole 201 is mainly the appropriate setting of the distance between the needle body 21 and the inner side of the hole 201, and the distance can be set by the operator according to actual needs.
[0042] In one embodiment, the needle body 21 and the protrusion 22 can be made of metal, such as copper, silver, etc. The protrusion 22 and the needle body 21 are an integrally formed structure, for example, a metal plate can be cut by laser cutting or other processes to obtain the probe 2. Moreover, usually, it is the needle body 21 that can produce elastic deformation in the second direction. Of course, in other embodiments, the protrusion 22 can also produce elastic deformation in the second direction, for example, the protrusion 22 can be a metal spring arranged on the needle body 21, etc. Of course, in other embodiments, the protrusion 22 and the needle body 21 can both produce elastic deformation in the second direction.
[0043] like Figure 3 and Figure 5As shown, in one embodiment, the needle mold 1 includes a core 11 and a collar 12; in the arrangement direction of the first end 211 and the second end 212, the core 11 has a first surface 111 and a second surface 112 arranged opposite to each other, and the first surface 111 and the second surface 112 both intersect with the side 113 of the core 11; the side 113 of the core 11 is provided with a slot 114; in the arrangement direction of the first end 211 and the second end 212, the slot 114 extends to the second surface 112; the needle body 21 is installed in the slot 114 and extends out of the slot 114 from the second surface 112; the collar 12 is sleeved on the core 11, and the slot 114 is located at the opening of the side 113 of the core 11, opposite to the needle body 21 located in the slot 114, so as to limit the needle body 21 in the slot 114.
[0044] The mold core 11 may be a rectangular block, in which case the first surface 111 and the second surface 112 are both planes, and the side surface 113 of the mold core 11 is an annular surface. Moreover, the sleeve ring 12 is also a square ring.
[0045] The first end 211 of the needle body 21 may be installed in the slot 114 , the second end 212 of the needle body 21 is located outside the slot 114 , and the protrusion 22 is located on a side of the second surface 112 away from the first surface 111 .
[0046] Assume that the slot 114 forms a first opening on the side surface 113 of the core 11, and the collar 12 surrounds the side surface of the core 11, and the inner surface of the collar 12 may be in contact with the side surface 113 of the core 11. The collar 12 may protrude from both ends of the core 11 in the first direction, and in this case, the collar 12 is only opposite to a part of the first opening; or, in the first direction, the collar 12 may not protrude from both ends of the core 11, and in this case, all areas of the first opening may be opposite to the collar 12; or, in the first direction, one of the two ends of the core 11 may protrude from the collar 12, and the other end may not protrude from the collar 12, and in this case, the collar 12 is also only opposite to a part of the first opening.
[0047] In addition, the slot 114 extends from the side 113 of the core mold 11 along the second direction. After assembly, in the second direction, the needle body 21 can also be pressed against the bottom surface of the slot 114 by the ring 12, wherein the bottom surface of the slot 114 is opposite to the first opening.
[0048] In one embodiment, the core 11 is made of an insulating material, and the collar 12 can also be made of an insulating material. The core 11 and the collar 12 are fixed together by interference fit. In order to facilitate the collar 12 to be sleeved on the core 11, the collar 12 can have a certain elasticity, or the core 11 has a certain elasticity, or both the collar 12 and the core 11 have elasticity.
[0049] like Figure 4As shown, in one embodiment, a limiting structure 213 is provided on the needle body 21 , and the limiting structure 213 abuts against the second surface 112 to limit the position of the needle body 21 relative to the mold core 11 in the first direction.
[0050] like Figure 4 As shown, in one embodiment, the needle body 21 includes a first section structure 214, a second section structure 215 and a third section structure 216 which are connected in sequence; wherein, in the arrangement direction of the first end 211 and the second end 212, the first section structure 214 and the third section structure 216 are respectively located on opposite sides of the second section structure 215; and in the arrangement direction of the protrusion 22 and the needle body 21, the first section structure 214 and the third section structure 216 are respectively located on opposite sides of the second section structure 215; that is, the needle body 21 is a Z-shaped structure as a whole. The first section structure 214 is the first end 211, and the second end 212 is the end of the third section structure 216 away from the second section structure 215. Of course, in other embodiments, the first end 211 may also be only a part of the first section structure. In this case, the first end 211 is the end of the first section structure 214 away from the second section structure 215
[0051] In addition, after assembly, the first section structure 214 is located in the slot 114, the second section structure 215 is in contact with the second surface 112, the third section structure 216 is located outside the slot 114, the protrusion 22 is arranged on the third section structure 216, the protrusion 22 is arranged at a distance from the second section structure, and in the second direction, the protrusion 22 is located on the surface of the third section structure 216 close to the first section structure 214. In addition, the first section structure 214, the second section structure 215 and the third section structure 216 can all be flat plate structures.
[0052] like Figure 5 and Figure 6 As shown, in one embodiment, the card slot 114 extends to the first surface 111; the probe module 100 further includes a first circuit board 3, which is disposed on the first surface 111 and electrically contacts the needle body 21. The first circuit board 3 is electrically connected to the corresponding detector to thereby realize the electrical connection between the needle body 21 and the detector, so that the detector can be electrically connected to the detection point of the circuit board to be tested through the needle body 21, so as to detect the circuit board to be tested.
[0053] In this embodiment, the position of the needle body 21 in the first direction can be limited by the contact between the limiting structure 213 and the second surface 112 , so that the needle body 21 can be more conveniently contacted electrically with the first circuit board 3 .
[0054] like Figure 4As shown, in one embodiment, a hollow structure 217 is provided on the needle body 21, and the hollow structure 217 enables the needle body 21 to be elastically deformed in the arrangement direction of the first end 211 and the second end 212, so that the needle body 21 can be more tightly in contact with the first circuit board 3. The hollow structure 217 can be arranged on the first section structure 214.
[0055] The hollow structure 217 may penetrate the needle body 21 in the third direction, wherein the third direction is perpendicular to the first direction and the second direction. The hollow structure may make the needle body in the area where it is located thinner in the second direction, so that the needle body may be deformed there.
[0056] like Figure 4 As shown, in one embodiment, a first guide surface 221 is provided on a side of the protrusion 22 facing away from the needle body 21, that is, in the second direction, the surface of the protrusion 22 facing away from the needle body 21 has the first guide surface 221. Along the direction from the first end 211 to the second end 212, the first guide surface 221 gradually approaches the needle body 21, and the end of the first guide surface 221 facing away from the first end 211 intersects with the needle body 21. This makes it easier for the probe 2 to enter the insertion hole 201.
[0057] In addition, the first guide surface 221 may intersect with the end surface of the second end 212 , and there may be a smooth transition between the two.
[0058] like Figure 4 As shown, in one embodiment, a second guide surface 222 is provided on the side of the protrusion 22 facing away from the needle body 21, and the second guide surface 222 intersects with the first guide surface 221 and is located on the side of the first guide surface 221 close to the first end 211. In addition, along the direction from the first end 211 to the second end 212, the first guide surface 221 gradually moves away from the needle body 21. In addition, there can also be a smooth transition between the first guide surface 221 and the second guide surface 222.
[0059] like Figure 5 As shown, in one embodiment, the probe module 100 has a needle group 4, the needle group 4 includes two probes 2, the two probes 2 in the needle group 4 are respectively a first probe 2a and a second probe 2b; along the arrangement direction of the protrusion 22 and the needle body 21, the first probe 2a and the second probe 2b are arranged at intervals; the protrusion 22 of the first probe 2a is located on the side of the needle body 21 of the first probe 2a away from the second probe 2b, and the protrusion 22 of the second probe 2b is located on the side of the needle body 21 of the second probe 2b away from the first probe 2a. When working, the first probe 2a and the second probe 2b can be inserted into a socket 201 at the same time, and the two probes 2 elastically conflict with the side wall of the socket 201, so as to electrically conflict with two detection points in the socket 201 at the same time, wherein the two detection points can be located on the side wall of the socket 201.
[0060] In one embodiment, a plurality of needle groups 4 are provided, and the needle groups 4 are spaced apart along the third direction.
[0061] like Figure 5 As shown, in one embodiment, a stopper 115 is provided on the second surface 112 of the mold core 11, and the stopper 115 is disposed between the first probe 2a and the second probe 2b, and along the first direction, the protrusion 22 of the first probe 2a and the protrusion 22 of the second probe 2b are both spaced a certain distance from the stopper 115, and along the second direction, the needle body 21 of the first probe 2a and the needle body 21 of the second probe 2b are both spaced a certain distance from the stopper 115. In this way, electrical contact between the first probe 2a and the second probe 2b can be avoided, and adverse effects on elastic deformation of the first probe 2a and the second probe 2b can be avoided.
[0062] like Figure 2 As shown, in one embodiment, the probe module 100 further includes a second circuit board 5, which is electrically connected to the first circuit board 3, wherein both the first circuit board 3 and the second circuit board 5 can be hard circuit boards, and the arrangement direction of the circuits can be adjusted through the two circuit boards. Figure 3 In the illustrated embodiment, the first circuit board 3 is arranged vertically, and the second circuit board 5 is arranged horizontally, and the two circuit boards may be electrically connected by a conductive wire or the like. Figure 3 In the illustrated embodiment, the first direction is a horizontal direction, and the second direction is a vertical direction.
[0063] like Figure 1 and Figure 2 As shown, in one embodiment, the probe module further includes a housing 6, and a mounting hole 61 is provided on the housing 6; in the arrangement direction of the first end and the second end, the mounting hole 61 penetrates the housing 6; at least a portion of the needle mold is located in the mounting hole 61; the second end is located in the mounting hole 61 and does not extend out of the mounting hole 61. After assembly, the protrusion does not extend out of the mounting hole 61.
[0064] When in use, the connector 200 can extend into the mounting hole 61 .
[0065] like Figure 2 As shown, the mounting hole 61 is a stepped hole. Along the direction from the first end to the second end, the mounting hole 61 has a first hole 611 and a second hole 612. The size of the first hole 611 is larger than the size of the second hole 612, and a step surface is formed therebetween. The mold core is installed in the first hole 611 and abuts against the step surface, and the portion of the probe 2 protruding from the second surface of the mold core is located in the second hole 612.
[0066] like Figure 1 and Figure 2As shown, in one embodiment, the probe module 100 further includes a protective cover 7, which is arranged at the junction of the first circuit board 3 and the second circuit board 5 to prevent the area from being hit by foreign objects. At the same time, the junction of the first circuit board 3 and the needle body 21 is also blocked by the protective cover 7, so that the area can also be protected by the protective cover 7. In addition, the protective cover 7 can be connected to the housing 6.
[0067] like Figure 1 and Figure 2 As shown, in one embodiment, the probe module 100 further includes a mounting plate 8 , and the needle mold 1 , the housing 6 , the first circuit board 3 , and the second circuit board 5 etc. can all be mounted on the mounting plate 8 .
[0068] like Figure 1 As shown, in one embodiment, the probe module 100 further includes a connecting block 9, which is connected to the needle mold 1, and a first guide structure 10 is provided on the connecting block 9, and the first guide structure 10 is used to cooperate with a second guide structure on the circuit board to be tested, so as to guide the movement of the probe module 100 along the first direction. The first guide structure 10 can be a guide column, and the second guide structure is a guide hole. In addition, the connecting block 9 can be installed on the mounting plate 8.
[0069] The embodiment of the utility model further provides a detection device, which includes the probe module 100 described in any one of the above embodiments. In addition, the detection device also includes a detector, which is electrically connected to the probe 2 of the probe module 100.
[0070] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0071] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A probe module, characterized in that: Includes needle mold and probe; The probe comprises a needle body and a protrusion, wherein the needle body has a first end and a second end disposed opposite to each other, and the first end is connected to the needle mold; The protrusion is arranged at the second end and is located on the side of the needle body; in the arrangement direction of the protrusion and the needle body, the needle body and / or the protrusion can be elastically deformed.
2. The probe module according to claim 1, characterized in that: The needle mold includes a mold core and a sleeve ring; In the arrangement direction of the first end and the second end, the mold core has a first surface and a second surface that are arranged opposite to each other, and both the first surface and the second surface intersect with the side surface of the mold core; A slot is provided on the side of the mold core; in the arrangement direction of the first end and the second end, the slot extends to the second surface; The needle body is installed in the slot and extends out of the slot from the second surface; The collar is sleeved on the mold core and is located at the side opening of the mold core at the slot, opposite to the needle body located in the slot, so as to limit the needle body in the slot.
3. The probe module according to claim 2, characterized in that: The needle body is provided with a limiting structure, and the limiting structure conflicts with the second surface.
4. The probe module according to claim 3, characterized in that: The needle body comprises a first section structure, a second section structure and a third section structure which are connected in sequence; Wherein, in the arrangement direction of the first end and the second end, the first section structure and the third section structure are respectively located on two opposite sides of the second section structure; In the arrangement direction of the protrusions and the needle bodies, the first section structure and the third section structure are respectively located on opposite sides of the second section structure; The first section structure is located in the slot, the second section structure is in contact with the second surface, the third section structure is located outside the slot, and the protrusion is arranged on the third section structure.
5. The probe module according to any one of claims 2 to 4, characterized in that: The card slot extends to the first surface; The probe module further includes a circuit board, which is disposed on the first surface and electrically contacts the needle body.
6. The probe module according to claim 5, characterized in that: The needle body is provided with a hollow structure, so that the needle body can be elastically deformed in the arrangement direction of the first end and the second end.
7. The probe module according to claim 1, characterized in that: A first guide surface is provided on a side of the protrusion away from the needle body. Along the direction from the first end to the second end, the first guide surface gradually approaches the needle body, and an end of the first guide surface away from the first end intersects with the needle body.
8. The probe module according to claim 1, characterized in that: The probe module also includes a housing, and a mounting hole is provided on the housing; In the arrangement direction of the first end and the second end, the mounting hole penetrates the housing; At least a portion of the needle mold is located in the mounting hole; The second end is located in the mounting hole and does not extend out of the mounting hole.
9. The probe module according to claim 1, characterized in that: The probe module has a needle group, the needle group includes two probes, and the two probes in the needle group are respectively a first probe and a second probe; Along the arrangement direction of the protrusions and the needle bodies, the first probe and the second probe are arranged at intervals; The protrusion of the first probe is located at a side of the needle body of the first probe facing away from the second probe, and the protrusion of the second probe is located at a side of the needle body of the second probe facing away from the first probe.
10. A detection device, characterized in that: A probe module comprising any one of claims 1 to 9.