Calibration device

Abstract

The utility model belongs to the technical field of battery piece production equipment in the photovoltaic industry, and relates to a calibration device, the calibration device comprises a rack, a bearing mechanism and a calibration mechanism, the bearing mechanism is fixedly arranged relative to the rack, and the bearing mechanism is configured to support and position a graphite boat; the calibration mechanism comprises an elastic assembly and a shaking assembly, and the elastic assembly and the shaking assembly are both installed on the rack and located on the peripheral side of the bearing mechanism. The loosening and tightening assembly is configured to unscrew or tighten the corresponding bolts, and the shaking assembly is configured to adjust the distance between the adjacent boat blades and / or the perpendicularity of the boat blades when the loosening and tightening assembly unscrews the bolts. According to the calibration device, through cooperative work of the elastic assembly and the shaking assembly, automatic calibration of the graphite boat can be achieved, manual adjustment is not needed, the automation degree and the calibration efficiency of graphite boat calibration are improved, and the labor intensity of technicians is relieved.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic industry cell production equipment, and in particular to a calibration device. Background Art

[0002] In the photovoltaic industry's cell manufacturing process, the carrier used for loading, transporting, and processing is called a tool. Various tools need to be calibrated and tested before loading cells online or after being used for a period of time. As a type of tool, the graphite boat is used as a carrier to carry silicon wafers in the PEVCD (Plasma Enhanced Chemical Vapor Deposition) coating process, so as to send the silicon wafers into the coating device and coat them in a high-temperature negative pressure environment. Load the cells into the equipment furnace tube.

[0003] The structure of the graphite boat directly affects the quality of silicon wafer coating. Good boat-blade spacing and boat-blade verticality in the graphite boat can make the silicon wafer coating uniform, improve the quality of the silicon wafer and conversion efficiency. However, under long-term high temperature and negative pressure environment, the boat blades of the graphite boat are easily deformed by stress, which not only affects the thickness of the silicon wafer coating, but also causes the silicon wafer to be misaligned if the boat blades are severely deformed, which in turn causes the boat blades and silicon wafers to be broken by the wafer removal robot, resulting in increased costs. Therefore, the graphite boat needs to be calibrated regularly.

[0004] However, in the existing graphite boat calibration device, workers usually manually adjust the tightness of the nuts of the graphite boat to adjust the boat-blade spacing and the boat-blade verticality of the graphite boat. However, when adjusting, workers usually only judge the tightness of the nuts by feel, which easily leads to inconsistent tightness of each nut, thus inevitably causing deviations in the boat-blade spacing and verticality of the graphite boat, making it impossible to accurately calibrate the graphite boat. Utility Model Content

[0005] In view of this, it is necessary to provide a calibration device to improve the technical problems of low automation, poor calibration efficiency and poor calibration quality of the existing graphite boat calibration.

[0006] The present application provides a calibration device for calibrating a graphite boat, wherein the graphite boat comprises a plurality of boat blades arranged in parallel and at intervals, and the plurality of boat blades are locked by bolts. The calibration device comprises a frame, a bearing mechanism and a calibration mechanism, wherein the bearing mechanism is fixedly arranged relative to the frame, and the bearing mechanism is configured to support and position the graphite boat; the calibration mechanism comprises a tensioning assembly and a shaking assembly, both of which are installed on the frame and located on the peripheral side of the bearing mechanism; the tensioning assembly is configured to loosen or tighten the corresponding bolts, and the shaking assembly is configured to adjust the spacing between adjacent boat blades and / or the verticality of the boat blades when the tensioning assembly loosens the bolts.

[0007] The calibration device described above can realize automatic calibration of the graphite boat through the coordinated work of the tensioning assembly and the shaking assembly, without relying on manual adjustment, thereby improving the automation degree and calibration efficiency of the graphite boat calibration and reducing the labor intensity of technicians. Specifically, the calibration device first supports and positions the graphite boat through the bearing mechanism, and after the positioning of the graphite boat is completed, the bolts in the graphite boat are loosened through the tensioning assembly, and the spacing between adjacent boat blades and / or the verticality of the boat blades are adjusted through the shaking assembly. After the adjustment is completed, the tensioning assembly tightens the bolts of the graphite boat to realize automatic calibration of the graphite boat.

[0008] In at least one embodiment, the shaking assembly includes a lifting member, a swinging platform and a first driving member, the lifting member is installed on a frame, and the swinging platform is connected to the lifting member; the lifting member is configured to drive the swinging platform to move toward or away from the supporting mechanism; the swinging platform is provided with a plurality of slots spaced apart along a first direction, the slots are configured to accommodate boat blades and correspond one-to-one to the boat blades; the first direction is the direction in which the boat blades are spaced apart; the first driving member is connected to the swinging platform and is configured to drive the swinging platform to reciprocate.

[0009] In at least one embodiment, the shaking assembly further includes a stopper, which is disposed at the end of the swinging platform and abuts against the boat blade accommodated in the slot.

[0010] In at least one embodiment, the tensioning assembly includes a second driving member and a floating bit, the second driving member is mounted on the frame and located on the side of the supporting mechanism, and the floating bit is connected to the second driving member; the second driving member is configured to drive the floating bit to move to the position of the corresponding bolt, and the floating bit is configured to loosen or tighten the bolt when the floating bit moves to the position of the corresponding bolt.

[0011] In at least one embodiment, the number of the elastic components is four, and each of the four elastic components forms a group of two, and the two groups of elastic components are respectively arranged on both sides of the supporting mechanism.

[0012] In at least one embodiment, the supporting mechanism includes a positioning plate, a pushing assembly and two support seats, the two support seats are arranged at intervals on the frame, and the support seats are configured to support the graphite boat; the positioning plate is installed on one of the support seats, and the pushing assembly is installed on the other support seat; the pushing assembly is configured to move in a direction close to or away from the positioning plate, and jointly position the graphite boat with the positioning plate.

[0013] In at least one embodiment, the pushing assembly includes a pushing member and a third driving member, the third driving member is installed on the support seat, and the pushing member is connected to the third driving member; the pushing member is configured to move toward or away from the positioning plate under the drive of the third driving member.

[0014] In at least one embodiment, the calibration device also includes a feeding mechanism and a transfer mechanism, both of which are arranged on the frame, the feeding mechanism is configured to transfer the graphite boat, and the transfer mechanism is configured to grab the graphite boat on the feeding mechanism and transfer it to the carrying mechanism.

[0015] In at least one embodiment, the transfer mechanism includes a fourth driving member and a clamping assembly, the fourth driving member is mounted on the frame, and the clamping assembly is mounted on the fourth driving member; the clamping assembly includes a fifth driving member and two clamping members, the two clamping members are spaced apart on the fifth driving member, the fifth driving member is connected to the clamping member, and is configured to drive the two clamping members to clamp or release the graphite boat.

[0016] In at least one embodiment, the calibration device further includes a detection component, which is installed on the frame and is configured to detect the calibration quality of the graphite boat after the calibration mechanism calibrates the graphite boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic diagram of the structure of a calibration device provided in one embodiment of the present application;

[0018] Figure 2 yes Figure 1 The internal structure diagram of the calibration device shown;

[0019] Figure 3 It is a schematic diagram of the structure of a graphite boat in one embodiment of the present application;

[0020] Figure 4 yes Figure 3 A partial enlarged view of the IV position;

[0021] Figure 5 yes Figure 2 The schematic diagram of the structure of the feeding mechanism and the graphite boat shown;

[0022] Figure 6 yes Figure 2 The structural schematic diagram of the feeding mechanism shown;

[0023] Figure 7 yes Figure 2 The schematic diagram of the structure of the transfer mechanism and the graphite boat shown;

[0024] Figure 8 yes Figure 2 The structural schematic diagram of the transfer mechanism shown;

[0025] Fig. 9 yes Figure 2 The structural schematic diagram of the supporting mechanism and the graphite boat shown;

[0026] Fig.10 yes Figure 2The structural schematic diagram of the carrying mechanism shown;

[0027] Fig.11 yes Figure 2 The schematic diagram of the structure of the calibration mechanism and the graphite boat shown;

[0028] Fig.12 yes Figure 2 The structural diagram of the calibration mechanism shown;

[0029] Fig.13 yes Fig.12 A partial enlarged view of position XIII in the middle;

[0030] Fig.14 yes Figure 2 The schematic diagram of the structure of the shaking assembly and the graphite boat shown;

[0031] Fig.15 yes Figure 2 The structural schematic diagram of the shaking assembly shown;

[0032] Fig.16 yes Fig.15 A partial enlarged view of point XVI in the figure.

[0033] Main component symbols

[0034] Calibration device 100

[0035] Rack 110

[0036] Frame 111

[0037] Sealing plate 112

[0038] Door panel 113

[0039] Carrying mechanism 120

[0040] Positioning plate 121

[0041] Push component 122

[0042] Pusher 1221

[0043] The third driving member 1222

[0044] Support seat 123

[0045] Protrusion 1231

[0046] Calibration Agency 130

[0047] Elastic component 131

[0048] The second driving member 1311

[0049] Y-axis moving part 13111

[0050] First X-axis moving part 13112

[0051] First Z-axis moving part 13113

[0052] Floating bit 1312

[0053] Rotating motor 13121

[0054] Batch head body 13122

[0055] Floating spring 13123

[0056] Shaking component 132

[0057] Lifting parts 1321

[0058] Lifting cylinder 13211

[0059] Substrate 13212

[0060] Lifting plate 13213

[0061] Guide sleeve 13214

[0062] Swinging platform 1322

[0063] Card slot 13221

[0064] Stopper 13222

[0065] First driving member 1323

[0066] Feeding mechanism 140

[0067] Bracket 141

[0068] Drive motor 142

[0069] Synchronous belt 143

[0070] Boat pallet 144

[0071] Guide plate 145

[0072] In-position sensor 146

[0073] Transfer mechanism 150

[0074] Fourth driving member 151

[0075] Second Z-axis moving part 1511

[0076] Linear guide 1512

[0077] Second X-axis moving part 1513

[0078] Clamping assembly 152

[0079] Fifth driving member 1521

[0080] Clamp 1522

[0081] Graphite Boat 200

[0082] Boat Leaf 210

[0083] scaphoid 220

[0084] Bolt 230

[0085] The following specific implementation methods will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0086] The following specific embodiments illustrate the implementation of the present application, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Although the description of the present application will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this application are limited to the implementation. On the contrary, the purpose of introducing the application in conjunction with the implementation is to cover other options or modifications that may be extended based on the claims of the present application. In order to provide a deep understanding of the present application, the following description will include many specific details. The present application can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present application, some specific details will be omitted in the description. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0087] Hereinafter, if used, the terms "first", "second", etc. are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the feature. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0088] In this application, if used, unless otherwise clearly specified and limited, the term "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium.

[0089] When the following embodiments are described in detail in conjunction with schematic diagrams, for ease of explanation, the diagrams showing the local structures of the devices will not be partially enlarged according to the general scale, and the schematic diagrams are only examples and should not limit the scope of protection of this application.

[0090] In order to make the objectives, technical solutions and advantages of the present application clearer, the implementation methods of the present application will be further described in detail below in conjunction with the accompanying drawings.

[0091] The embodiment of the present application provides a calibration device 100, which is used to calibrate a graphite boat 200. Specifically, Figure 3 and Figure 4 As shown, the graphite boat 200 includes a plurality of boat blades 210 arranged in parallel and at intervals, and the plurality of boat blades 210 are locked by bolts 230. In addition, the graphite boat 200 also includes boat feet 220, which are arranged at both ends of the boat blades 210, which are conducive to the fixation and transportation of the graphite boat 200. It should be noted that, in other embodiments, the calibration device 100 in the present application can also be used to calibrate other suitable products or workpieces, and the present application does not limit this.

[0092] like Figure 1 and Figure 2 As shown, the calibration device 100 includes a frame 110, a carrying mechanism 120 and a calibration mechanism 130. In one embodiment, the frame 110 includes a frame 111, a cover plate 112 and a door plate 113. The cover plate 112 is mounted on the frame 111 and forms a receiving cavity with an opening (not shown). At the opening, the door plate 113 is movably mounted on the frame 111 and is configured to be able to rotate relative to the frame 111 to open or close the opening.

[0093] The arrangement of the frame 111, the sealing plate 112 and the door panel 113 can not only provide support for other components (specifically the supporting mechanism 120 and the calibration mechanism 130, etc.), but also protect the stable operation and safe use of the calibration device 100 and increase its service life.

[0094] In other embodiments, the rack 110 may also be other suitable structures, which is not limited in the present application, and those skilled in the art may select according to actual conditions.

[0095] In one embodiment, the supporting mechanism 120 is fixedly mounted on the frame 110 and configured to support and position the graphite boat 200 , which helps to reduce the risk of the graphite boat 200 shifting or shaking during the calibration process, thereby improving the calibration quality of the graphite boat 200 by the calibration device 100 .

[0096] In one embodiment, if Figure 2As shown, the calibration mechanism 130 includes a tensioning assembly 131 and a shaking assembly 132, both of which are installed on the frame 110 and are located on the peripheral side of the supporting mechanism 120. The tensioning assembly 131 is configured to loosen or tighten the corresponding bolt 230, and the shaking assembly 132 is configured to adjust the spacing between adjacent boat blades 210 and / or the verticality of the boat blades 210 when the tensioning assembly 131 loosens the bolt 230.

[0097] It is understandable that when the graphite boat 200 needs to be calibrated, the graphite boat 200 is first positioned on the supporting mechanism 120 , and then the tensioning assembly 131 moves toward the graphite boat 200 until the tensioning assembly 131 moves to the position of the bolt 230 in the graphite boat 200 .

[0098] Subsequently, the tensioning assembly 131 loosens the bolts 230 in the graphite boat 200, and adjusts the spacing between adjacent boat blades 210 and / or the verticality of the boat blades 210 through the shaking assembly 132. After the shaking assembly 132 is adjusted, the tensioning assembly 131 tightens the bolts 230 in the graphite boat 200, and the graphite boat 200 can be automatically corrected.

[0099] Obviously, compared with the existing manual calibration method, the calibration device 100 of the present application can realize automatic calibration of the graphite boat 200 through the coordinated work of the tension component 131 and the shaking component 132, without relying on manual adjustment, thereby improving the automation level and calibration efficiency of the graphite boat 200 calibration and reducing the labor intensity of technicians.

[0100] In one embodiment, if Figure 2 , Fig.14 , Fig.15 and Fig.16 As shown, the shaking assembly 132 includes a lifting member 1321, a swinging platform 1322 and a first driving member 1323. The lifting member 1321 is installed on the frame 110, and the swinging platform 1322 is connected to the lifting member 1321. The lifting member 1321 is configured to drive the swinging platform 1322 to move toward or away from the supporting mechanism 120.

[0101] In one embodiment, the first direction is defined as the direction in which the boat blades 210 are arranged at intervals, and the swing platform 1322 is provided with a plurality of slots 13221 at intervals along the first direction, and the slots 13221 are configured to accommodate the boat blades 210 of the graphite boat 200, and the slots 13221 correspond to the boat blades 210 one by one. In other words, each boat blade 210 in the graphite boat 200 corresponds to a slot 13221 in the swing platform 1322. The first driving member 1323 is connected to the swing platform 1322, and is configured to drive the swing platform 1322 to reciprocate.

[0102] It can be understood that when the tensioning assembly 131 loosens the bolt 230, the lifting member 1321 drives the swing platform 1322 to move toward the direction close to the supporting mechanism 120. At this time, the boat blades 210 of the graphite boat 200 are accommodated in the corresponding slots 13221, thereby realizing the adjustment of the verticality of each boat blade 210.

[0103] Subsequently, the first driving member 1323 drives the swing platform 1322 to move back and forth. If some boat blades 210 are not matched to enter the corresponding slots 13221, the swing platform 1322 will drive the boat blades 210 that have not entered the slots 13221 to fall into the slots 13221 during the process of the first driving member 1323 driving the swing platform 1322 to swing. When all the boat blades 210 are accommodated in the corresponding slots 13221, the distance between adjacent boat blades 210 meets the preset requirements, thereby achieving the adjustment of the distance between two adjacent boat blades 210.

[0104] In one embodiment, preferably, the first driving member 1323 is a cylinder. The telescopic movement of the cylinder drives the swing platform 1322 to shake, thereby driving the graphite boat 200 to shake. It should be noted that the operator can change the shaking amplitude and shaking frequency of the swing platform 1322 by modifying the telescopic amount and telescopic speed of the electric cylinder. The shaking frequency and shaking amplitude obtained by this control method are controllable, the loosening effect produced by the shaking is better, and the graphite boat 200 can obtain a better unloading effect.

[0105] In other embodiments, the shaking mode of the shaking assembly 132 can be vibration generated by the rotation of the eccentric wheel structure, or can be shaking driven by a reciprocating motion mechanism such as a cylinder or a piston, and the present application does not limit this.

[0106] In one embodiment, if Fig.15 As shown, the shaking assembly 132 also includes a stopper 13222, which is disposed at the end of the swinging platform 1322 and abuts against the boat blade 210 accommodated in the slot 13221 to stop the boat blade 210 when the swinging platform 1322 reciprocates, thereby reducing the risk of the graphite boat 200 falling from the swinging platform 1322 due to excessive swinging of the swinging platform 1322, thereby helping to improve the correction stability of the calibration device 100.

[0107] It should be noted that the end of the swing platform 1322 specifically refers to the position of the first card slot 13221 or the last card slot 13221 among the multiple card slots 13221 in the first direction.

[0108] In one embodiment, if Fig.14As shown, the lifting member 1321 includes a lifting cylinder 13211, a base plate 13212, a lifting plate 13213 and a guide sleeve 13214. The base plate 13212 is installed on the frame 110. The lifting plate 13213 is slidably installed on the base plate 13212 through the guide sleeve 13214. The lifting cylinder 13211 is installed on the base plate 13212 and connected to the lifting plate 13213.

[0109] The swing platform 1322 is movably mounted on the lifting plate 13213, and the first driving member 1323 is mounted on the lifting plate 13213. When the tensioning assembly 131 loosens the bolt 230 in the graphite boat 200, the lifting cylinder 13211 drives the lifting plate 13213 to move toward the graphite boat 200, and then drives the swing platform 1322 to move toward the graphite boat 200, so that the boat blade 210 in the graphite boat 200 is accommodated in the corresponding slot 13221.

[0110] Through the cooperation of the lifting cylinder 13211, the guide sleeve 13214 and the lifting plate 13213, the swing platform 1322 can be accurately moved to the position of the graphite boat 200, that is, the boat blade 210 in the graphite boat 200 is accommodated in the corresponding slot 13221, thereby improving the calibration quality.

[0111] In one embodiment, if Figure 2 , Fig.11 , Fig.12 and Fig.13 As shown, the tensioning assembly 131 includes a second driving member 1311 and a floating bit 1312. The second driving member 1311 is mounted on the frame 110 and is located on the side of the supporting mechanism 120. The floating bit 1312 is connected to the second driving member 1311. The second driving member 1311 is configured to drive the floating bit 1312 to move to a position corresponding to the bolt 230. The floating bit 1312 is configured to loosen or tighten the bolt 230 when the floating bit 1312 moves to a position corresponding to the bolt 230.

[0112] It can be understood that after the graphite boat 200 is positioned on the supporting mechanism 120, the second driving member 1311 drives the floating screwdriver bit 1312 to move toward the graphite boat 200 until the floating screwdriver bit 1312 moves to the position of the bolt 230 in the graphite boat 200. Subsequently, the floating screwdriver bit 1312 rotates or tightens the bolt 230 corresponding to the graphite boat 200, thereby locking or loosening the boat blade 210 to facilitate subsequent correction of the graphite boat 200.

[0113] In one embodiment, the length direction of the frame 110 is defined as the Y-axis direction, and the Y-axis direction is perpendicular to the Z-axis direction and the X-axis direction. The second driving member 1311 includes a Y-axis moving part 13111, a first X-axis moving part 13112, and a first Z-axis moving part 13113. The Y-axis moving part 13111 is installed on the frame 110, the first Z-axis moving part 13113 is installed on the Y-axis moving part 13111, the first X-axis moving part 13112 is installed on the first Z-axis moving part 13113, and is connected to the floating bit 1312.

[0114] The Y-axis moving part 13111 is configured to drive the floating bit 1312 to move along the Y-axis direction, the first X-axis moving part 13112 is configured to drive the floating bit 1312 to move along the X-axis direction, and the first Z-axis moving part 13113 is configured to drive the floating bit 1312 to move along the Z-axis direction. By setting the Y-axis moving part 13111, the first Z-axis moving part 13113 and the first X-axis moving part 13112, it is possible to ensure that the floating bit 1312 accurately moves to the corresponding bolt 230 position in the graphite boat 200, thereby improving the calibration accuracy of the calibration device 100.

[0115] In other embodiments, the second driving member 1311 may also be other suitable driving mechanisms, which is not limited in the present application and those skilled in the art may select according to actual conditions.

[0116] In one embodiment, if Fig.11 and Fig.13 As shown, the floating screwdriver bit 1312 includes a rotating motor 13121 and a screwdriver bit body 13122. The rotating motor 13121 is mounted on the second driving member 1311, and the screwdriver bit body 13122 is connected to the output shaft of the rotating motor 13121. Specifically, when the bolt 230 in the graphite boat 200 needs to be tightened, the rotating motor 13121 is driven by the second driving member 1311 to move toward the direction close to the graphite boat 200, so that the screwdriver bit body 13122 can cover the bolt 230 of the graphite boat 200.

[0117] Then, the rotating motor 13121 rotates, driving the screwdriver body 13122 to rotate, thereby loosening or tightening the bolt 230 of the graphite boat 200. After the bolt 230 of the graphite boat 200 is loosened or tightened, the second driving member 1311 drives the rotating motor 13121 to move away from the graphite boat 200, so that the screwdriver body 13122 is separated from the bolt 230 of the graphite boat 200.

[0118] Preferably, the rotating motor 13121 is a servo motor. It should be noted that by using a servo motor, the torque of all bolts 230 can be precisely controlled, thereby ensuring the quality of tightening the bolts 230 in the graphite boat 200, that is, ensuring the calibration quality of the graphite boat 200.

[0119] In one embodiment, the floating bit 1312 further includes a floating spring 13123, and the floating spring 13123 is installed between the rotating motor 13121 and the bit body 13122. It should be noted that, since the second driving member 1311 drives the bit body 13122 to move toward the graphite boat 200, the bit body 13122 may move too far, so the floating spring 13123 can buffer the bit body 13122, thereby protecting the floating bit 1312 and extending the service life of the calibration device 100.

[0120] Of course, in other embodiments, the elastic component 131 may also be other suitable structures, which is not limited in the present application, and those skilled in the art may choose according to actual conditions.

[0121] In one embodiment, if Figure 2 As shown, there are four tensioning assemblies 131, two of which form a group, and two groups of tensioning assemblies 131 are respectively arranged on both sides of the supporting mechanism 120. In this way, the bolts 230 on both sides of the graphite boat 200 can be loosened or tightened at four positions at the same time, saving calibration time and improving the working efficiency of the calibration device 100.

[0122] In other implementations, the number of the elastic components 131 may also be five, six, or other numbers, which is not limited in the present application and those skilled in the art may select according to actual conditions.

[0123] In one embodiment, if Figure 2 , Fig. 9 and Fig.10 As shown, the bearing mechanism 120 includes a positioning plate 121 , a pushing assembly 122 and two support seats 123 . The two support seats 123 are spaced apart from each other on the frame 110 . The support seats 123 are configured to support the boat feet 220 of the graphite boat 200 .

[0124] Specifically, the two support seats 123 are provided with protrusions 1231 facing each other, and the protrusions 1231 match the boat feet 220 of the graphite boat 200. When the transfer mechanism 150 grabs the graphite boat 200 and transfers it to the supporting mechanism 120, the boat feet 220 at opposite ends of the graphite boat 200 respectively abut against the corresponding protrusions 1231, so that the supporting mechanism 120 supports the graphite boat 200.

[0125] In one embodiment, the positioning plate 121 is mounted on one of the support seats 123, and the pushing assembly 122 is mounted on the other support seat 123. The pushing assembly 122 is configured to move toward or away from the positioning plate 121, and to position the graphite boat 200 together with the positioning plate 121, so as to ensure that the graphite boat 200 maintains a stable position during the calibration process.

[0126] It can be understood that when the graphite boat 200 is placed on the support seat 123, one end of the graphite boat 200 is against the positioning plate 121, pushing the component 122 to move toward the positioning plate 121 to butt against the other end of the graphite boat 200, thereby achieving the positioning of the graphite boat 200, that is, clamping the graphite boat 200 from both ends of the graphite boat 200.

[0127] Through the cooperation among the support seat 123, the positioning plate 121 and the pushing assembly 122, the graphite boat 200 assembly can be supported and positioned, reducing the risk of the graphite boat 200 being offset or dropped during the calibration process, thereby improving the calibration accuracy and calibration quality.

[0128] It should be noted that, after the calibration of the graphite boat 200 is completed, the pushing assembly 122 only needs to move away from the positioning plate 121 to release the positioning of the graphite boat 200 , so as to facilitate the subsequent transfer of the calibrated graphite boat 200 .

[0129] In one embodiment, if Fig. 9 and Fig.10 As shown, the pushing assembly 122 includes a pushing member 1221 and a third driving member 1222. The third driving member 1222 is mounted on the support seat 123, and the pushing member 1221 is connected to the third driving member 1222. The pushing member 1221 is configured to move toward or away from the positioning plate 121 under the drive of the third driving member 1222.

[0130] Specifically, after the graphite boat 200 is placed on the support seat 123, one end of the graphite boat 200 abuts against the positioning plate 121, and the third driving member 1222 drives the pushing member 1221 to move toward the positioning plate 121, so that the pushing member 1221 abuts against the other end of the graphite boat 200, thereby achieving the positioning of the graphite boat 200, that is, clamping the graphite boat 200 from both ends of the graphite boat 200. After the calibration of the graphite boat 200 is completed, the third driving member 1222 drives the pushing member 1221 to move away from the positioning plate 121 to release the positioning of the graphite boat 200.

[0131] Preferably, the third driving member 1222 is a push cylinder. It should be noted that the push cylinder can provide a fast and stable driving force to improve the efficiency of the positioning process of the graphite boat 200. In addition, the push cylinder can accurately control the moving speed and position of the push member 1221, ensuring that the push member 1221 can accurately press the graphite boat 200, which helps to improve the accuracy of subsequent calibration of the graphite boat 200.

[0132] In other embodiments, the supporting mechanism 120 may also be other suitable structures, which is not limited in the present application, and those skilled in the art may select according to actual conditions.

[0133] In one embodiment, if Figure 2 , Figure 5 and Figure 6 As shown, the calibration device 100 further includes a feeding mechanism 140, which is mounted on the frame 110 and is configured to transfer the graphite boat 200. Specifically, the feeding mechanism 140 includes a bracket 141, a driving motor 142, a synchronous belt 143, a boat support plate 144 and a guide plate 145.

[0134] The bracket 141 is installed in the accommodating cavity and connected to the frame 111. The driving motor 142 is installed on the bracket 141, and the synchronous belt 143 is connected to the output shaft of the driving motor 142 through the transmission assembly. The driving motor 142 is configured to drive the synchronous belt 143 to move. In addition, the boat support plate 144 is installed on the top of the synchronous belt 143 to support the boat foot 220 of the graphite boat 200. The guide plate 145 is installed on both sides of the synchronous belt 143.

[0135] It can be understood that when feeding and discharging, the operator first places the graphite boat 200 on the corresponding boat support plate 144, and then starts the drive motor 142. The drive motor 142 drives the synchronous belt 143 to rotate, thereby driving the graphite boat 200 placed on the synchronous belt 143 to move to the target position (specifically, the position for the transfer mechanism 150 to grab).

[0136] Obviously, compared with manually carrying the graphite boat 200 for loading and unloading, the calibration device 100 in the present application can realize automatic loading or unloading of the graphite boat 200 through the feeding mechanism 140, thereby reducing the labor intensity of the operator and improving the calibration efficiency.

[0137] Preferably, there are two feeding mechanisms 140, one of which is used for loading (specifically, transferring the graphite boat 200 to be calibrated to the target position), and the other is used for unloading (specifically, transferring the calibrated graphite boat 200 to an external storage mechanism). By providing two feeding mechanisms 140, the graphite boat 200 calibration device 100 can simultaneously realize automatic loading and unloading of the graphite boat 200, thereby further improving the automation degree and work efficiency of the graphite boat 200 calibration device 100.

[0138] In one embodiment, if Figure 6 As shown, the feeding mechanism 140 also includes an in-position sensor 146, which is installed at one end of the bracket 141. When the in-position sensor 146 detects the graphite boat 200, the graphite boat 200 moves to the target position. By setting the in-position sensor 146, the accuracy of the feeding mechanism 140 in conveying the graphite boat 200 can be improved.

[0139] In other embodiments, the feeding mechanism 140 may also be other suitable structures, which is not limited in the present application, and those skilled in the art may choose according to actual conditions.

[0140] In one embodiment, if Figure 2 , Figure 7 and Figure 8 As shown, the calibration device 100 further includes a transfer mechanism 150, which is installed on the frame 110. The transfer mechanism 150 is configured to grab the graphite boat 200 on the feeding mechanism 140 and transfer it to the carrying mechanism 120. By setting the transfer mechanism 150, the graphite boat 200 can be automatically transported, the automation level of the graphite boat 200 calibration device 100 is improved, and the labor intensity of the operator is reduced.

[0141] It is understandable that when the graphite boat 200 needs to be calibrated, the transfer mechanism 150 first grabs the graphite boat 200 on the feeding mechanism 140 and transfers it to the carrying mechanism 120. Subsequently, the carrying mechanism 120 supports and positions the graphite boat 200 to facilitate the subsequent calibration process of the graphite boat 200. It should be noted that the transfer mechanism 150 can also be configured to grab the calibrated graphite boat 200 on the carrying mechanism 120 and transfer it to the feeding mechanism 140.

[0142] In one embodiment, if Figure 2 , Figure 7 and Figure 8As shown, the transfer mechanism 150 includes a fourth driving member 151 and a clamping assembly 152, wherein the fourth driving member 151 is mounted on the frame 110, and the clamping assembly 152 is mounted on the fourth driving member 151. The clamping assembly 152 includes a fifth driving member 1521 and two clamping members 1522, wherein the two clamping members 1522 are spaced apart and arranged on the fourth driving member 151, and the fifth driving member 1521 is connected to the clamping members 1522 and is configured to drive the two clamping members 1522 to clamp or release the graphite boat 200.

[0143] It can be understood that when the graphite boat 200 needs to be transported from one station to another, the fourth driving member 151 first drives the clamping assembly 152 to move to the first station (specifically, the position of the feeding mechanism 140), and then the fifth driving member 1521 drives the clamping member 1522 to clamp the boat feet 220 at both ends of the graphite boat 200. After the clamping assembly 152 clamps the graphite boat 200, the fourth driving member 151 drives the clamping assembly 152 to move to another station (specifically, the position of the supporting mechanism 120), and the fifth driving member 1521 drives the clamping member 1522 to release the graphite boat 200.

[0144] Through the cooperation of the fourth driving member 151 and the clamping assembly 152 , the graphite boat 200 calibration device 100 in the present application can realize automatic transportation of the graphite boat 200 , further improve the degree of automation and calibration efficiency, and reduce the labor intensity of operators.

[0145] In one embodiment, the Z axis is defined as the height direction of the frame 110, the X axis is defined as the width direction of the frame 110, and the Z axis direction is perpendicular to the X axis direction. The fourth driving member 151 includes a second Z axis moving portion 1511, a linear guide rail 1512, and a second X axis moving portion 1513. The second Z axis moving portion 1511 is vertically mounted on the frame 110 and connected to the linear guide rail 1512.

[0146] The two second X-axis moving parts 1513 are installed on both sides of the second Z-axis moving part 1511 and connected to the two ends of the slider (not shown) in the second Z-axis moving part 1511. The two second X-axis moving parts 1513 are connected by a synchronous belt 143. The two clamping members 1522 are slidably installed on the linear guide rail 1512, and the fifth driving member 1521 is installed on the linear guide rail 1512 and connected to the two clamping members 1522. The second driving member 15211311 drives the two clamping members 1522 to move in opposite directions or back directions to clamp or release the graphite boat 200.

[0147] The second Z-axis moving part 1511 is configured to drive the clamping assembly 152 to move along the Z-axis direction, and the second X-axis moving part 1513 is configured to drive the clamping assembly 152 to move along the X-axis direction. By setting the second Z-axis moving part 1511 and the second X-axis moving part 1513, the clamping assembly 152 can move in multiple directions to accurately grasp the graphite boat 200 at different positions, thereby improving the calibration efficiency of the graphite boat 200 calibration device 100.

[0148] In other embodiments, the fourth driving member 151 may also be other suitable driving mechanisms, which is not limited in the present application and those skilled in the art may select according to actual conditions.

[0149] In one embodiment, the graphite boat 200 calibration device 100 further includes a detection component (not shown), which is mounted on the frame 110 and configured to detect the calibration quality of the graphite boat 200 after the calibration mechanism 130 calibrates the graphite boat 200. Specifically, the detection component includes a camera (not shown) and a processor (not shown), both of which are mounted on the frame 110, and the processor is connected to the camera.

[0150] It can be understood that after the calibration mechanism 130 calibrates the graphite boat 200, the operator obtains the image information of the calibrated graphite boat 200 through the camera and transmits it to the processor. The processor then analyzes the image information of the graphite boat 200 to detect the size, verticality and other defects of the graphite boat 200. In this way, the calibration quality of the graphite boat 200 calibration device 100 can be guaranteed to prevent problematic graphite boats 200 from entering the production line.

[0151] In one embodiment, the detection assembly further includes a light source (not shown), which is disposed on the frame 110 and configured to illuminate the calibrated graphite boat 200. It should be noted that by supplementing the calibrated graphite boat 200 with the light source, the clarity of the image captured by the camera can be improved, thereby improving the accuracy of the detection of the detection assembly.

[0152] For example, the calibration process of the graphite boat 200 by the calibration device 100 of the present application is as follows: the operator first places the graphite boat 200 on the feeding mechanism 140, and then starts the feeding mechanism 140, so that the feeding mechanism 140 drives the graphite boat 200 to move to the target position. Subsequently, the transfer mechanism 150 grabs the graphite boat 200 on the feeding mechanism 140 and transfers it to the carrying mechanism 120.

[0153] Then, the supporting mechanism 120 positions the graphite boat 200 to ensure that the graphite boat 200 is positioned accurately. At the same time, the tensioning assembly 131 moves toward the direction close to the graphite boat 200 and loosens the bolts 230 in the graphite boat 200 to prepare for the subsequent calibration operation. After the tensioning assembly 131 loosens the bolts 230 in the graphite boat 200, the shaking assembly 132 moves toward the direction close to the supporting mechanism 120, so that the boat blade 210 of the graphite boat 200 is accommodated in the corresponding slot 13221 in the shaking mechanism.

[0154] Subsequently, the shaking mechanism shakes the graphite boat 200 for multiple times to adjust the spacing between adjacent boat blades 210 and the verticality of each boat blade 210. After the shaking assembly 132 is adjusted, the tightening assembly 131 tightens the bolts 230 in the graphite boat 200, thus completing the calibration of the graphite boat 200. Finally, the calibrated graphite boat 200 is inspected by the inspection assembly to evaluate the quality and accuracy of the calibration.

[0155] Compared with the existing calibration device 100, the calibration device 100 of the present application can automatically complete the loading and unloading, transportation, positioning, calibration, stress removal and detection of the graphite boat 200 through the coordinated work of the feeding mechanism 140, the supporting mechanism 120, the transfer mechanism 150, the calibration mechanism 130 and the detection mechanism, without relying on manual adjustment, thereby improving the automation degree and calibration efficiency of the graphite boat 200 calibration device 100 and reducing the labor intensity of technicians.

[0156] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present application should be included in the disclosure scope of the present application.

Claims

1. A calibration device for calibrating a graphite boat, wherein the graphite boat comprises a plurality of boat blades arranged in parallel and at intervals, wherein the plurality of boat blades are locked by bolts, wherein: The calibration device comprises: frame; A bearing mechanism is fixedly arranged relative to the frame; the bearing mechanism is configured to support and position the graphite boat; The calibration mechanism includes a tensioning assembly and a shaking assembly, wherein the tensioning assembly and the shaking assembly are both mounted on the frame and located on the peripheral side of the supporting mechanism; the tensioning assembly is configured to loosen or tighten the corresponding bolts, and the shaking assembly is configured to adjust the spacing between adjacent boat blades and / or the verticality of the boat blades when the tensioning assembly loosens the bolts.

2. The calibration device according to claim 1, characterized in that: The shaking assembly includes a lifting member, a swinging platform and a first driving member, wherein the lifting member is mounted on the frame, and the swinging platform is connected to the lifting member; the lifting member is configured to drive the swinging platform to move toward or away from the bearing mechanism; The swing platform is provided with a plurality of slots spaced apart along a first direction, the slots are configured to accommodate the boat blades and correspond one-to-one with the boat blades, and the first direction is the direction in which the boat blades are spaced apart; the first driving member is connected to the swing platform and is configured to drive the swing platform to reciprocate.

3. The calibration device according to claim 2, characterized in that: The shaking assembly also includes a stopper, which is arranged at the end of the swing platform and abuts against the boat blade accommodated in the slot.

4. The calibration device according to any one of claims 1 to 3, characterized in that: The tensioning assembly includes a second driving member and a floating bit, the second driving member is mounted on the frame and located on the side of the bearing mechanism, and the floating bit is connected to the second driving member; The second driving member is configured to drive the floating bit to move to a position corresponding to the bolt, and the floating bit is configured to loosen or tighten the bolt when the floating bit moves to the position corresponding to the bolt.

5. The calibration device according to claim 4, characterized in that: The number of the elastic components is four, and each two of the four elastic components form a group, and the two groups of elastic components are respectively arranged on both sides of the supporting mechanism.

6. The calibration device according to any one of claims 1 to 3, characterized in that: The bearing mechanism comprises a positioning plate, a pushing assembly and two supporting seats, the two supporting seats are arranged at intervals on the frame, and the supporting seats are configured to support the graphite boat; The positioning plate is installed on one of the support seats, and the pushing assembly is installed on the other support seat; the pushing assembly is configured to move toward or away from the positioning plate, and jointly position the graphite boat with the positioning plate.

7. The calibration device according to claim 6, characterized in that: The pushing assembly includes a pushing member and a third driving member, the third driving member is installed on the support seat, and the pushing member is connected to the third driving member; the pushing member is configured to move towards or away from the positioning plate under the drive of the third driving member.

8. The calibration device according to any one of claims 1 to 3, characterized in that: The calibration device also includes a feeding mechanism and a transfer mechanism, both of which are arranged on the frame, the feeding mechanism is configured to transfer the graphite boat, and the transfer mechanism is configured to grab the graphite boat on the feeding mechanism and transfer it to the carrying mechanism.

9. The calibration device according to claim 8, characterized in that: The transfer mechanism comprises a fourth driving member and a clamping assembly, wherein the fourth driving member is mounted on the frame, and the clamping assembly is mounted on the fourth driving member; The clamping assembly includes a fifth driving member and two clamping members, the two clamping members are arranged on the fifth driving member at intervals, the fifth driving member is connected to the clamping member, and is configured to drive the two clamping members to clamp or release the graphite boat.

10. The calibration device according to any one of claims 1 to 3, characterized in that: The calibration device further includes a detection component, which is mounted on the frame and configured to detect the calibration quality of the graphite boat after the calibration mechanism calibrates the graphite boat.

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