Piezoelectric displacement table

Abstract

The utility model belongs to the technical field of nanoscale precision displacement tables, and discloses a piezoelectric displacement table, which comprises a base, a movable piece, an inertia piece, a piezoelectric ceramic piece, a stick-slip friction assembly and a pressing assembly, and is characterized in that the movable piece is in sliding connection with the base; the inertia piece is fixed on the base and comprises an inertia block and a flexible mass block, the inertia block is provided with a limiting groove for containing the flexible mass block and the piezoelectric ceramic piece, the first end of the piezoelectric ceramic piece abuts against the flexible mass block, and the second end of the piezoelectric ceramic piece abuts against the groove wall of the limiting groove; the stick-slip friction assembly abuts against the flexible mass block along the first side of the second direction, and the stick-slip friction assembly abuts against the movable piece along the second side of the second direction. The pressing assembly is arranged between the base and the flexible mass block and used for abutting against the flexible mass block in the second direction. According to the piezoelectric displacement table provided by the utility model, the condition that the moving part and the flexible mass block are excessively compact or loose with the stick-slip friction assembly is effectively prevented.

Description

Technical Field

[0001] The utility model relates to the technical field of nanometer-level precision displacement platforms, in particular to a piezoelectric displacement platform. Background Art

[0002] With the continuous development and updating of technology, the demand for precision operation on microscopic scales is increasing. Nano-microdrive technology based on piezoelectric principles has therefore been vigorously developed. It has been widely used in various high-tech fields such as medicine, scientific research, aerospace, and production and manufacturing, providing strong technical support for human experimental research and product manufacturing in the microscopic field.

[0003] As a basic driving method in the field of microscopic operation, piezoelectric ceramic drive utilizes the inverse piezoelectric effect of piezoelectric ceramics. By applying an electric field to the piezoelectric ceramics, it produces a tiny expansion under the action of the electric field. The expansion scale can reach the sub-nanometer scale by precisely controlling the electric field, with large expansion force and fast response. Compared with other cross-scale motion driving methods, the driving control and principle of stick-slip drive are simple and convenient, and have the advantages of high resolution, large stroke, simple structure, precise positioning, large load and easy miniaturization.

[0004] Currently, in some extreme environments, such as ultra-high vacuum and low temperature environments, the structure of the piezoelectric ceramic drive may be too tight or loose, causing the motion actuator to fail. Utility Model Content

[0005] The utility model aims to provide a piezoelectric displacement stage, which can effectively prevent the occurrence of excessively tight or loose structures.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] A piezoelectric translation stage is provided, comprising:

[0008] Pedestal;

[0009] A movable member, slidably connected to the base along a first direction;

[0010] An inertia component is fixed on the base, the inertia component comprises an inertia block and a flexible mass block, the inertia block is provided with a limiting groove, and the flexible mass block is arranged in the limiting groove;

[0011] A piezoelectric ceramic component is disposed in the limiting groove, and a first end of the piezoelectric ceramic component along the first direction abuts against the flexible mass block, and a second end of the piezoelectric ceramic component along the first direction abuts against a groove wall of the limiting groove;

[0012] A stick-slip friction component abuts against the flexible mass block on a first side along the second direction, and a stick-slip friction component abuts against the movable member on a second side along the second direction;

[0013] The pressing assembly is disposed between the base and the flexible mass block, and the pressing assembly is used to hold the flexible mass block along the second direction.

[0014] Optionally, the pressing assembly comprises:

[0015] A cover fixedly connected to the base;

[0016] A pressing block, on which a pressing column is convexly provided, the pressing column passes through the inertia block and abuts against the flexible mass block;

[0017] The first fastener is threadably connected to the cover, and the first fastener abuts against the pressing block along the second direction.

[0018] Optionally, the inertia member further comprises a fixed block, wherein a first fixing portion and a first supporting portion are sequentially arranged on the fixed block along a first direction, the first fixing portion is fixedly connected to the base, the first supporting portion is connected to the inertia block, a boss portion is arranged on a side of the inertia block along a second direction facing the first supporting portion, the boss portion is arranged on the first supporting portion, the flexible mass block is arranged on a portion of the inertia block protruding from the first supporting portion on a side of the inertia block along the first direction facing away from the first fixing portion, a first opening groove is arranged on the boss portion, and an opening of the first opening groove is arranged along the first direction facing away from the first fixing portion; wherein,

[0019] The pressing assembly is disposed along a first direction on a side of the first supporting portion facing away from the first fixing portion.

[0020] Optionally, a positioning groove is provided on a side of the first supporting portion facing away from the first fixing portion, and the positioning groove is located on a side of the first supporting portion facing away from the inertia block along the second direction;

[0021] The clamping assembly includes a cover, and the cover is provided with a second fixing portion and a second supporting portion in sequence along a first direction, the second fixing portion is fixedly connected to the base, and the second supporting portion extends into the positioning groove along the first direction.

[0022] Optionally, a second fastener is further included, wherein the second fastener penetrates the second supporting portion along a second direction and is threadedly connected to the first supporting portion.

[0023] Optionally, the flexible mass block comprises a first flexible support plate, a second flexible support plate, and a third flexible support plate and a serpentine support body arranged between the first flexible support plate and the second flexible support plate, which are spaced apart along a first direction; wherein,

[0024] The first end of the first flexible support plate is connected to the bottom surface of the limiting groove, the second end of the first flexible support plate is connected to the third flexible support plate, and the first flexible support plate is in contact with the piezoelectric ceramic member;

[0025] The first end of the second flexible support plate is connected to the bottom surface of the limiting groove, and the second end of the second flexible support plate is connected to the third flexible support plate;

[0026] The first end of the serpentine support body is connected to the third flexible support plate, and the second end of the serpentine support body is in contact with the clamping assembly.

[0027] Optionally, a third fastener is further included, wherein the third fastener passes through the inertia member along the first direction and abuts against the second flexible support plate, and the third fastener is threadedly connected to the inertia member.

[0028] Optionally, the stick-slip friction component comprises:

[0029] A friction block, wherein the flexible mass block is provided with a receiving groove, and the friction block is arranged in the receiving groove;

[0030] A friction plate, wherein a first side of the friction plate abuts against the friction block, and a second side of the friction plate abuts against the movable member.

[0031] Optionally, it also includes:

[0032] A first guide assembly includes a first fixed seat and a first sliding member slidably connected to the first fixed seat, the first fixed seat and the first sliding member are arranged side by side along the second direction, the first fixed seat is fixedly connected to the base, and the first sliding member is fixedly connected to the movable member;

[0033] The second guide assembly includes a second fixed seat and a second sliding member slidably connected to the second fixed seat, the second fixed seat and the second sliding member are arranged side by side along the third direction, the second fixed seat is fixedly connected to the base, and the second sliding member is fixedly connected to the movable member.

[0034] Optionally, the base is provided with a channel, and the movable part, the first guide assembly and the second guide assembly are arranged in the channel.

[0035] Beneficial effects of the utility model:

[0036] The piezoelectric displacement stage provided by the utility model has a piezoelectric ceramic disposed in a limiting groove of an inertial component, and a first end of the piezoelectric ceramic component along a first direction abuts against a flexible mass block, and a second end of the piezoelectric ceramic component along the first direction abuts against a groove wall of the limiting groove, so that when the piezoelectric ceramic component expands, it squeezes the flexible mass block along the first direction, and the flexible mass block deforms along the first direction and drives the movable component to move relative to the base along the first direction. Under the action of the clamping component abutting against the flexible mass block along the second direction, the second side of the stick-slip friction component along the second direction can be pressed against the movable component, and the flexible mass block is compressed along the second direction. Even in extreme environments, the deformation of the flexible mass block can effectively prevent the movable component and the flexible mass block from being overly tight or loose with the stick-slip friction component, thereby preventing the occurrence of motion failure. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a cross-sectional view of the piezoelectric displacement stage provided by the utility model;

[0038] Figure 2 It is a structural schematic diagram of the piezoelectric displacement stage provided by the utility model;

[0039] Figure 3 This is a structural schematic diagram of the inertial element provided by the utility model from one perspective;

[0040] Figure 4 This is a schematic structural diagram of the inertial element provided by the utility model from another perspective;

[0041] Figure 5 It is a structural schematic diagram of the sealing cover provided by the utility model;

[0042] Figure 6 It is a structural schematic diagram of the movable parts provided by the utility model;

[0043] Figure 7 It is a structural schematic diagram of the base provided by the utility model.

[0044] In the figure:

[0045] 100, base; 101, channel; 102, sink; 103, through hole; 110, first mounting portion; 120, third mounting portion;

[0046] 200, movable part; 201, through slot; 210, second mounting portion; 220, fourth mounting portion;

[0047] 300, inertial member; 310, inertial block; 311, limiting groove; 312, boss portion; 3121, first opening groove; 313, third threaded hole; 320, flexible mass block; 321, first flexible support plate; 322, second flexible support plate; 323, third flexible support plate; 3231, second opening groove; 3232, receiving groove; 324, serpentine support body; 330, fixing block; 331, first fixing portion; 3311, first fixing hole; 332, first supporting portion; 3321, positioning groove; 3322, second threaded hole;

[0048] 400. Piezoelectric ceramics;

[0049] 500, stick-slip friction assembly; 510, friction block; 520, friction plate;

[0050] 600, clamping assembly; 610, cover; 611, second fixing portion; 6111, second fixing hole; 612, second supporting portion; 6121, first threaded hole; 6122, third fixing hole; 620, clamping block; 621, clamping column; 630, first fastener;

[0051] 700, first guide assembly; 710, first fixed seat; 720, first sliding member;

[0052] 800, second guide assembly; 810, second fixed seat; 820, second sliding member. DETAILED DESCRIPTION

[0053] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0054] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0055] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0056] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0057] Reference Figures 1 to 3 As shown, this embodiment provides a piezoelectric displacement stage, including a base 100 , a movable part 200 , an inertial part 300 , a piezoelectric ceramic part 400 , a stick-slip friction component 500 and a pressing component 600 .

[0058] Specifically, the movable part 200 is slidably connected with the base 100 along the first direction; the inertial part 300 is fixed on the base 100, and the inertial part 300 includes an inertial block 310 and a flexible mass block 320, and a limiting groove 311 is provided on the inertial block 310, and the flexible mass block 320 is arranged in the limiting groove 311; the piezoelectric ceramic part 400 is arranged in the limiting groove 311, and the first end of the piezoelectric ceramic part 400 along the first direction abuts against the flexible mass block 320, and the second end of the piezoelectric ceramic part 400 along the first direction abuts against the groove wall of the limiting groove 311; the stick-slip friction component 500 abuts against the flexible mass block 320 along the first side of the second direction, and the stick-slip friction component 500 abuts against the movable part 200 along the second side of the second direction; the clamping component 600 is arranged between the base 100 and the flexible mass block 320, and the clamping component 600 is used to abut the flexible mass block 320 along the second direction. In which, direction a in the figure is the first direction, and direction b is the second direction.

[0059] In this embodiment, the piezoelectric ceramic is arranged in the limiting groove 311 of the inertial member 300, and the first end of the piezoelectric ceramic member 400 along the first direction abuts against the flexible mass block 320, and the second end of the piezoelectric ceramic member 400 along the first direction abuts against the groove wall of the limiting groove 311, so that when the piezoelectric ceramic member 400 expands, the flexible mass block 320 is squeezed along the first direction, and the flexible mass block 320 is deformed along the first direction and drives the movable member 200 to move along the first direction relative to the base 100. And under the action of the pressing assembly 600 abutting against the flexible mass block 320 along the second direction, the second side of the stick-slip friction assembly 500 along the second direction can be pressed against the movable member 200, and the flexible mass block 320 is compressed along the second direction. Even in extreme environments, through the deformation of the flexible mass block 320, the excessive tightness or looseness between the movable member 200 and the flexible mass block 320 and the stick-slip friction assembly 500 can be effectively prevented, thereby preventing the occurrence of motion failure and achieving stable stick-slip motion.

[0060] In this embodiment, refer to Figures 2 to 4 As shown, the inertial member 300 also includes a fixed block 330, and the fixed block 330 is sequentially provided with a first fixed portion 331 and a first supporting portion 332 along the first direction, the first fixed portion 331 is fixedly connected to the base 100, and the first supporting portion 332 is connected to the inertial block 310, and a boss portion 312 is provided on the side of the inertial block 310 facing the first supporting portion 332 along the second direction, and the boss portion 312 is provided on the first supporting portion 332, and a flexible mass block 320 is provided on a portion of the inertial block 310 protruding from the first supporting portion 332 on the side of the inertial block 310 facing away from the first fixed portion 331 along the first direction, and a first opening groove 3121 is provided on the boss portion 312, and the opening of the first opening groove 3121 is provided along the first direction facing away from the first fixed portion 331. The clamping assembly 600 is arranged along the first direction on the side of the first supporting portion 332 facing away from the first fixing portion 331, so that the clamping assembly 600 corresponds to the flexible mass block 320 along the second direction, effectively ensuring the compact structure of the piezoelectric displacement stage. The first opening groove 3121 is in a U-shape. In this embodiment, the inertial member 300 has a certain deformation performance through the arrangement of the first opening groove 3121, that is, it can bend at the first opening groove 3121, and the deformation of the flexible mass block 320 along the second direction can cause the inertial member 300 to deform at the first opening groove 3121, further preventing the movable member 200 and the flexible mass block 320 from being overly tight or loose with the stick-slip friction assembly 500.

[0061] Specifically, the first fixing portion 331 is provided with a plurality of first fixing holes 3311, and the first fixing holes 3311 are correspondingly provided through the first screw connection member (not shown) and threadedly connected with the base 100, so as to realize the fixed connection between the first fixing portion 331 and the base 100. For example, four first fixing holes 3311 are provided and arranged in a matrix. Among them, the first fixing holes 3311 can be countersunk holes.

[0062] In this embodiment, refer to Figures 2 to 5 As shown, the clamping assembly 600 includes a cover 610, a clamping block 620 and a first fastener 630 (not shown). The cover 610 is fixedly connected to the base 100; a clamping column 621 is convexly provided on the clamping block 620, and the clamping column 621 passes through the inertia block 310 and abuts against the flexible mass block 320; the first fastener 630 is threadedly connected to the cover 610, and the first fastener 630 abuts against the clamping block 620 along the second direction. In this embodiment, screwing the first fastener 630 can adjust the squeezing force of the clamping column 621 on the flexible mass block 320, which is convenient for operation, and the setting of the cover 610 facilitates the assembly of the piezoelectric displacement stage. The first fastener 630 can be a headless screw.

[0063] Specifically, the cover 610 is provided with a second fixing portion 611 and a second supporting portion 612 in sequence along the first direction, the second fixing portion 611 is fixedly connected to the base 100, and the first fastener 630 passes through the second supporting portion 612 and abuts against the pressing block 620. Furthermore, the second fixing portion 611 is provided to protrude from the second supporting portion 612 along the second direction toward one side of the base 100, so as to make room for adjustment of the pressing block 620, thereby ensuring the compact structure of the piezoelectric displacement stage.

[0064] Further, the second fixing portion 611 is provided with a plurality of second fixing holes 6111, and the second fixing holes 6111 are correspondingly provided in a one-to-one manner by the second screw connector and are threadedly connected to the base 100, so as to realize the fixed connection between the second fixing portion 611 and the base 100. For example, two second fixing holes 6111 are provided and are spaced apart along the third direction. The second fixing holes 6111 can be countersunk holes. The c direction in the figure is the third direction.

[0065] Furthermore, a first threaded hole 6121 is provided on the second supporting portion 612 , and the first fastener 630 is threadedly connected to the first threaded hole 6121 .

[0066] In a feasible embodiment, a positioning groove 3321 is provided on a side of the first supporting portion 332 facing away from the first fixing portion 331. The positioning groove 3321 is located on a side of the first supporting portion 332 facing away from the inertial block 310 along the second direction. The second supporting portion 612 extends into the positioning groove 3321 along the first direction. A limit is formed between the first supporting portion 332 and the second supporting portion 612 to ensure that the structure of the piezoelectric displacement stage is reliable.

[0067] Specifically, the piezoelectric displacement stage further includes a second fastener (not shown), which passes through the second support portion 612 along the second direction and is threadedly connected to the first support portion 332 to connect the first support portion 332 and the second support portion 612 into a whole. The force of the first fastener 630 acting on the first support portion 332 and the force of the flexible mass block 320 acting on the inertia block 310 may cause the inertia block 310 to bend at the first opening groove 3121, further preventing the movable part 200 and the flexible mass block 320 from being overly tight or loose with the stick-slip friction assembly 500. The second fastener may be a bolt.

[0068] Specifically, the second support portion 612 is provided with a plurality of third fixing holes 6122, and the first support portion 332 is provided with a plurality of second threaded holes 3322 corresponding to the third fixing holes 6122. The first support portion 332 and the second support portion 612 are fixedly connected by a second fastener that passes through the third fixing holes 6122 in a one-to-one correspondence and is threadedly connected to the second threaded holes 3322. For example, two third fixing holes 6122 are provided and are spaced apart along the third direction. The third fixing holes 6122 may be countersunk holes.

[0069] In this embodiment, refer to Figures 2 to 4 As shown, the flexible mass block 320 includes a first flexible support plate 321, a second flexible support plate 322, and a third flexible support plate 323 and a serpentine support body 324 disposed between the first flexible support plate 321 and the second flexible support plate 322. The first flexible support plate 321 abuts against the piezoelectric ceramic member 400.

[0070] Specifically, the first end of the first flexible support plate 321 is connected to the bottom surface of the limiting groove 311, and the second end of the first flexible support plate 321 is connected to the third flexible support plate 323; the first end of the second flexible support plate 322 is connected to the bottom surface of the limiting groove 311, and the second end of the second flexible support plate 322 is connected to the third flexible support plate 323; the first end of the serpentine support body 324 is connected to the third flexible support plate 323, and the second end of the serpentine support body 324 abuts against the clamping assembly 600. The serpentine support body 324 is located on the side of the third flexible support plate 323 facing the bottom of the limiting groove 311. Specifically, the clamping column 621 abuts against the serpentine support body 324.

[0071] Specifically, the second opening grooves 3231 are respectively provided on both sides of the third flexible support plate 323 along the third direction to balance the force on the flexible mass block 320. The second opening grooves 3231 are U-shaped.

[0072] In this embodiment, the clamping assembly 600 squeezes the serpentine support body 324, and the serpentine support body 324 is compressed and acts on the third flexible support plate 323, and the stick-slip friction assembly 500 is squeezed through the third flexible support plate 323, thereby making the transmission between the stick-slip friction assembly 500 and the movable part 200 stable and reliable. Through the deformation ability of the serpentine support body 324, the excessive tightness or looseness between the movable part 200 and the flexible mass block 320 and the stick-slip friction assembly 500 can be effectively prevented.

[0073] In a possible implementation, Figure 4 As shown, the piezoelectric displacement stage further includes a third fastener (not shown), which passes through the inertial member 300 along the first direction and abuts against the second flexible support plate 322, and the third fastener is threadedly connected to the inertial member 300. The third fastener presses the second flexible support plate 322 so that the third flexible support plate 323 presses the first flexible support plate 321, and the first flexible support plate 321 presses the piezoelectric ceramic member 400, thereby making the piezoelectric ceramic member 400 firmly disposed in the limiting groove 311 of the inertial member 300. The third fastener may be a bolt.

[0074] Specifically, a third threaded hole 313 communicating with the limiting groove 311 is provided on one side of the inertia block 310 protruding from the fixing block 330 . The third fastener passes through the third threaded hole 313 and abuts against the second flexible support plate 322 .

[0075] In this embodiment, refer to Figure 4 As shown, the inertial member 300 includes two inertial blocks 310 spaced apart along the third direction, the flexible mass block 320, the piezoelectric ceramic member 400 and the stick-slip friction assembly 500 are arranged in a one-to-one correspondence, and the clamping block 620 is provided with two clamping columns 621 corresponding to the flexible mass blocks 320 in a one-to-one manner, which can make the transmission of the piezoelectric displacement stage more stable and reliable, and effectively prevent the movable member 200 and the flexible mass block 320 from being overly tight or loose with the stick-slip friction assembly 500.

[0076] In this embodiment, refer to Figure 1 , Figure 2 and Figure 6As shown, the stick-slip friction assembly 500 includes a friction block 510 and a friction plate 520. The flexible mass block 320 is provided with a receiving groove 3232, and the friction block 510 is arranged in the receiving groove 3232; the first side of the friction plate 520 abuts against the friction block 510, and the second side of the friction plate 520 abuts against the movable part 200. In this embodiment, the friction block 510 is limited by the receiving groove 3232 so that the flexible mass block 320 and the friction block 510 are kept in a fixed position, and the friction plate 520 and the movable part 200 have a large contact area, thereby having a good transmission effect, and can increase the selection range of the squeezing force of the pressing assembly 600 on the flexible mass block 320, so as to further prevent the movable part 200 and the flexible mass block 320 from being too tight or loose with the stick-slip friction assembly 500. Among them, the third flexible support plate 323 is provided with a receiving groove 3232.

[0077] Specifically, a through slot 201 is provided on the movable part 200 , and both ends of the through slot 201 penetrate the movable part 200 along the first direction. The friction plate 520 is provided in the through slot 201 , and the through slot 201 realizes the positioning of the friction plate 520 relative to the movable part 200 along the third direction.

[0078] In this embodiment, refer to Figure 1 , Figure 6 and Figure 7 As shown, the piezoelectric displacement stage further includes a first guide assembly 700 and a second guide assembly 800. The first guide assembly 700 includes a first fixed seat 710 and a first sliding member 720 slidably connected to the first fixed seat 710, the first fixed seat 710 and the first sliding member 720 are arranged side by side along the second direction, the first fixed seat 710 is fixedly connected to the base 100, and the first sliding member 720 is fixedly connected to the movable member 200; the second guide assembly 800 includes a second fixed seat 810 and a second sliding member 820 slidably connected to the second fixed seat 810, the second fixed seat 810 and the second sliding member 820 are arranged side by side along the third direction, the second fixed seat 810 is fixedly connected to the base 100, and the second sliding member 820 is fixedly connected to the movable member 200. In this embodiment, the first guide assembly 700 and the second guide assembly 800 are installed in different orientations, so that the position between the movable part 200 and the base 100 relative to the second direction and the third direction can remain relatively stable, further preventing the movable part 200 and the flexible mass block 320 from being excessively tight or loose with the stick-slip friction assembly 500.

[0079] Exemplarily, the first guide assembly 700 and the second guide assembly 800 are preferably cross roller assemblies, which can bear loads in all directions and achieve high-precision and smooth linear motion. The cross roller assembly is a prior art and will not be described in detail in this application.

[0080] Specifically, the base 100 is provided with a channel 101, in which the movable part 200, the first guide assembly 700 and the second guide assembly 800 are arranged, which can further keep the position of the movable part 200 and the base 100 relative to the second direction and the third direction relatively stable and ensure the compact structure of the piezoelectric displacement stage.

[0081] Exemplarily, at least one first guide assembly 700 is provided. For example, two first guide assemblies 700 are provided. Specifically, two first mounting portions 110 are provided at intervals along the third direction on one side of the channel 101 away from the inertial member 300 along the second direction, two second mounting portions 210 corresponding to the first mounting portions 110 are provided on the movable block, the first fixed seat 710 is provided on the corresponding first mounting portion 110, and the first sliding member 720 is provided on the corresponding second mounting portion 210. Exemplarily, the cross-sectional shape of the channel 101 is rectangular, and the two first guide assemblies 700 are respectively located at two corners of the channel 101 away from the inertial member 300 along the second direction.

[0082] Exemplarily, at least one second guide assembly 800 is provided. For example, specifically, a third mounting portion 120 is provided on one side of the channel 101 along the second direction close to the inertial member 300, the third mounting portion 120 is located on one side of the channel 101 along the third direction, a fourth mounting portion 220 corresponding to the third mounting portion 120 is provided on the movable block, a second fixed seat 810 is provided on the corresponding third mounting portion 120, and a second sliding member 820 is provided on the corresponding fourth mounting portion 220. Exemplarily, the cross-sectional shape of the channel 101 is rectangular, and the second guide assembly 800 is located at one of the corners of the channel 101 along the second direction close to the inertial member 300.

[0083] In this embodiment, refer to Figure 7 As shown, a sink 102 is provided on the periphery of the base 100 , and the inertia piece 300 and the cover 610 are both disposed in the sink 102 . Furthermore, a through hole 103 communicating with the channel 101 is provided at the bottom of the sink 102 , and the inertia block 310 is passed through the through hole 103 .

[0084] It is understandable that the connection method not explicitly described in the text may be a threaded connection method as required. Of course, common connection methods such as welding or bonding may also be used.

[0085] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A piezoelectric displacement stage, characterized in that: include: Base (100); A movable member (200) is slidably connected to the base (100) along a first direction; An inertia member (300) is fixed on the base (100), the inertia member (300) comprising an inertia block (310) and a flexible mass block (320), the inertia block (310) being provided with a limiting groove (311), and the flexible mass block (320) being arranged in the limiting groove (311); A piezoelectric ceramic component (400) is arranged in the limiting groove (311), and a first end of the piezoelectric ceramic component (400) along the first direction abuts against the flexible mass block (320), and a second end of the piezoelectric ceramic component (400) along the first direction abuts against a groove wall of the limiting groove (311); A stick-slip friction component (500) is in contact with the flexible mass block (320) along a first side in the second direction, and the stick-slip friction component (500) is in contact with the movable part (200) along a second side in the second direction; The pressing assembly (600) is arranged between the base (100) and the flexible mass block (320), and the pressing assembly (600) is used to hold the flexible mass block (320) along the second direction.

2. The piezoelectric translation stage according to claim 1, characterized in that: The pressing assembly (600) comprises: A cover (610) fixedly connected to the base (100); A pressing block (620), wherein a pressing column (621) is convexly provided on the pressing block (620), and the pressing column (621) passes through the inertia block (310) and abuts against the flexible mass block (320); The first fastener (630) is threadedly connected to the cover (610), and the first fastener (630) abuts against the pressing block (620) along the second direction.

3. The piezoelectric displacement stage according to claim 1, characterized in that: The inertia member (300) further comprises a fixing block (330), wherein the fixing block (330) is provided with a first fixing portion (331) and a first supporting portion (332) in sequence along a first direction, wherein the first fixing portion (331) is fixedly connected to the base (100), and the first supporting portion (332) is connected to the inertia block (310), and a boss portion (312) is provided on one side of the inertia block (310) facing the first supporting portion (332) along a second direction, wherein the boss portion (312) is provided on the first supporting portion (332), and the flexible mass block (320) is provided on a portion of the inertia block (310) that protrudes from the first supporting portion (332) on one side of the inertia block (310) that is away from the first fixing portion (331) along the first direction, and a first opening groove (3121) is provided on the boss portion (312), and the opening of the first opening groove (3121) is provided along the first direction away from the first fixing portion (331); wherein, The pressing assembly (600) is arranged along a first direction on a side of the first supporting portion (332) facing away from the first fixing portion (331).

4. The piezoelectric displacement stage according to claim 3, characterized in that: A positioning groove (3321) is provided on a side of the first supporting portion (332) facing away from the first fixing portion (331), and the positioning groove (3321) is located on a side of the first supporting portion (332) facing away from the inertia block (310) along the second direction; The clamping assembly (600) comprises a cover (610), wherein the cover (610) is provided with a second fixing portion (611) and a second supporting portion (612) in sequence along a first direction, wherein the second fixing portion (611) is fixedly connected to the base (100), and the second supporting portion (612) extends along the first direction into the positioning groove (3321).

5. The piezoelectric displacement stage according to claim 4, characterized in that: It also includes a second fastener, which passes through the second support portion (612) along the second direction and is threadedly connected to the first support portion (332).

6. The piezoelectric translation stage according to claim 1, characterized in that: The flexible mass block (320) comprises a first flexible support plate (321), a second flexible support plate (322) arranged at intervals along a first direction, and a third flexible support plate (323) and a serpentine support body (324) arranged between the first flexible support plate (321) and the second flexible support plate (322); wherein, The first end of the first flexible support plate (321) is connected to the bottom surface of the limiting groove (311), the second end of the first flexible support plate (321) is connected to the third flexible support plate (323), and the first flexible support plate (321) is in abutment with the piezoelectric ceramic component (400); The first end of the second flexible support plate (322) is connected to the bottom surface of the limiting groove (311), and the second end of the second flexible support plate (322) is connected to the third flexible support plate (323); The first end of the serpentine support body (324) is connected to the third flexible support plate (323), and the second end of the serpentine support body (324) is in abutment with the clamping assembly (600).

7. The piezoelectric translation stage according to claim 6, characterized in that: It also includes a third fastener, which passes through the inertia piece (300) along the first direction and abuts against the second flexible support plate (322), and the third fastener is threadedly connected to the inertia piece (300).

8. The piezoelectric translation stage according to claim 1, characterized in that: The stick-slip friction assembly (500) comprises: A friction block (510), wherein the flexible mass block (320) is provided with a receiving groove (3232), and the friction block (510) is arranged in the receiving groove (3232); A friction plate (520), wherein a first side of the friction plate (520) abuts against the friction block (510), and a second side of the friction plate (520) abuts against the movable member (200).

9. The piezoelectric translation stage according to claim 1, characterized in that: Also includes: A first guide assembly (700) comprises a first fixed seat (710) and a first sliding member (720) slidably connected to the first fixed seat (710), wherein the first fixed seat (710) and the first sliding member (720) are arranged side by side along a second direction, and the first fixed seat (710) is fixedly connected to the base (100), and the first sliding member (720) is fixedly connected to the movable member (200); The second guide assembly (800) includes a second fixed seat (810) and a second sliding member (820) slidably connected to the second fixed seat (810), the second fixed seat (810) and the second sliding member (820) are arranged side by side along a third direction, and the second fixed seat (810) is fixedly connected to the base (100), and the second sliding member (820) is fixedly connected to the movable member (200).

10. The piezoelectric translation stage according to claim 9, characterized in that: The base (100) is provided with a channel (101), and the movable part (200), the first guide assembly (700) and the second guide assembly (800) are arranged in the channel (101).

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