PLC-based detection device for MPCVD

Abstract

The utility model relates to a PLC-based detection device for MPCVD, which belongs to the technical field of diamond production, and comprises a base, an MPCVD equipment body is fixed on the upper surface of the base, an isolation hood is arranged above the base, a sealing gasket is fixed on the lower surface of the isolation hood, a detection mechanism used for detecting the internal working environment is arranged on the isolation hood, and the sealing gasket is fixed on the lower surface of the isolation hood. And a lifting mechanism for controlling the lifting of the isolation cover is arranged on the base. According to the PLC-based MPCVD detection device, through cooperation of the detection probe, after the interior of the isolation hood is vacuumized, the detection probe detects the vacuum environment in the isolation hood, and the vacuum detector analyzes the detection result, so that whether the working environment in the isolation hood reaches the standard or not is detected, through cooperation of the motor, a driving gear can be driven to rotate, and the detection efficiency is improved. And through rotation of the driven gear, a rotating rod can be driven to rotate, so that a connecting rod and a baffle plate are driven to rotate, and the detection probe is protected.

Description

Technical Field

[0001] The utility model relates to the technical field of diamond production, in particular to a PLC-based MPCVD detection device. Background Art

[0002] MPCVD refers to microwave plasma chemical vapor deposition. Microwave plasma CVD uses a waveguide to transmit the microwaves generated by a microwave generator into a reactor through an isolator, and introduces a mixed gas of CH4 and H2. Under the excitation of microwaves, a glow discharge is generated in the reaction chamber, ionizing the molecules of the reaction gas to generate plasma, and a diamond film is deposited on the substrate.

[0003] For example, China Utility Model Patent Publication No. (CN213336613U) discloses a vacuum detection device for MPCVD equipment, which includes an MPCVD equipment body and a vacuum detector. The vacuum detector is fixedly mounted on one side of the outside of the MPCVD equipment body, and a detection probe is fixedly mounted on one side of the vacuum detector. The detection probe is located inside the MPCVD equipment body, a mounting plate is fixedly mounted on one side of the detection probe, a sealing plate is fixedly mounted on one side of the mounting plate, and the sealing plate is in contact with one side of the inside of the MPCVD equipment body. This utility model solves the problem that the detection probe of the current vacuum detection equipment is often attached with impurities when used for a long time, affecting the detection effect and being inconvenient to use. However, the probe used for detection in this patent is continuously exposed to the outside. Even if the probe can be cleaned, the accuracy and service life of the probe detection will be affected over time, and the probe cannot be protected, affecting the practicality. Utility Model Content

[0004] In view of the shortcomings of the prior art, the utility model provides a PLC-based MPCVD detection device, which has the advantage of improving the protection of the detection probe, and solves the problem that the probe used for detection in the patent is continuously exposed to the outside. Even if the probe can be cleaned, it will affect the accuracy and service life of the probe detection over time, and the probe cannot be protected, affecting the practicality.

[0005] To achieve the above object, the utility model provides the following technical solution: a PLC-based MPCVD detection device, comprising a base, an MPCVD device body is fixed on the upper surface of the base, an isolation cover is arranged above the base, a sealing gasket is fixed on the lower surface of the isolation cover, a detection mechanism for detecting the internal working environment is arranged on the isolation cover, and a lifting mechanism for controlling the lifting of the isolation cover is arranged on the base;

[0006] The detection mechanism includes a vacuum detector, which is fixed to the upper surface of the isolation cover. A detection probe is fixed to the output end of the vacuum detector, and the other end of the detection probe penetrates and extends to the interior of the isolation cover. A protective tube is fixed to the inner top wall of the isolation cover. A chassis is fixed to the upper surface of the isolation cover, and a protective component is arranged on the chassis.

[0007] Furthermore, the outer side of the isolation cover is connected to a vacuum pipe, the outer side of the vacuum pipe is connected to a first solenoid valve, the outer side of the isolation cover is connected to an air intake pipe, and the outer side of the air intake pipe is connected to a second solenoid valve.

[0008] Furthermore, the detection probe is located inside the protective tube, and the inner diameter of the protective tube is larger than the outer diameter of the detection probe.

[0009] Furthermore, the protective component includes a motor, which is fixed to the inner top wall of the chassis, and a driving gear is fixed to the output shaft of the motor, a driven gear is meshed on the outer side of the driving gear, and the lower surface of the driven gear is rotatably connected to the upper surface of the isolation cover through a bearing, a rotating rod is fixed to the inner side of the driven gear, the bottom end of the rotating rod passes through and extends to the interior of the isolation cover, and a connecting rod is fixed to the outer side, and a baffle is fixed to the other end of the connecting rod, and a limiting block is fixed to the lower surface of the protective tube.

[0010] Furthermore, the outer diameter of the baffle is larger than the inner diameter of the protective tube, and the limit block is arc-shaped, and the inner diameter is matched with the outer diameter of the baffle.

[0011] Furthermore, the lifting mechanism includes an electric push rod, which is fixed to the inner top wall of the base, and the output shaft of the electric push rod passes through and extends to the upper side of the base and is fixed with a mounting block, and the mounting block is fixed to the outer side of the isolation cover, the lower surface of the mounting block is fixed with a sensing block, and the upper surface of the base is fixed with a sensor.

[0012] Furthermore, the number of the electric push rods is two, and they are symmetrically distributed about the central axis of the base.

[0013] Compared with the prior art, the technical solution of this application has the following beneficial effects:

[0014] 1. The PLC-based MPCVD detection device, through the cooperation of the detection probe, detects the vacuum environment inside the isolation cover after the isolation cover is evacuated, and the vacuum detector analyzes the detection results to detect whether the working environment inside the isolation cover meets the standards. Through the cooperation of the motor, the driving gear can be driven to rotate, thereby driving the driven gear to rotate. Through the rotation of the driven gear, the rotating rod can be driven to rotate, thereby driving the connecting rod and the baffle to rotate, so as to protect the detection probe.

[0015] 2. The PLC-based MPCVD detection device can drive the installation block to move through the cooperation of the electric push rod, thereby driving the isolation cover to move, so that the isolation cover can be opened and the workpiece on the MPCVD equipment can be placed and removed. Through the cooperation of the sensing block and the sensor, the position between the isolation cover and the base can be sensed, thereby controlling the operation of the motor, so as to protect the detection probe after the isolation cover is opened. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the detection mechanism of the utility model;

[0018] Figure 3 It is a partial schematic diagram of the detection mechanism of the utility model;

[0019] Figure 4 It is a schematic diagram of the lifting mechanism of the utility model.

[0020] In the figure: 1 base, 2 MPCVD equipment body, 3 isolation cover, 4 sealing gasket, 5 detection mechanism, 501 vacuum detector, 502 detection probe, 503 protective tube, 504 chassis, 505 motor, 506 driving gear, 507 driven gear, 508 rotating rod, 509 connecting rod, 510 baffle, 511 limit block, 6 lifting mechanism, 601 electric push rod, 602 mounting block, 603 sensing block, 604 sensor, 7 vacuum tube, 8 first solenoid valve, 9 air inlet pipe, 10 second solenoid valve. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] See also Figure 1 In this embodiment, a PLC-based MPCVD detection device includes a base 1, an MPCVD equipment body 2 is fixed on the upper surface of the base 1, an isolation cover 3 is arranged above the base 1, and a sealing gasket 4 is fixed on the lower surface of the isolation cover 3 to improve the sealing inside the reaction chamber. A detection mechanism 5 for detecting the internal working environment is arranged on the isolation cover 3, which is convenient for effectively protecting the probe used for detection and improving the accuracy and service life of the detection. A lifting mechanism 6 for controlling the lifting of the isolation cover 3 is arranged on the base 1, which is convenient for the staff to place and take out the processed workpiece.

[0023] Among them, the outside of the isolation cover 3 is connected to a vacuum tube 7, and the outside of the vacuum tube 7 is connected to a first solenoid valve 8, so that the reaction chamber can be in a vacuum environment to improve the processing effect. The outside of the isolation cover 3 is connected to an air intake pipe 9, and the outside of the air intake pipe 9 is connected to a second solenoid valve 10, so that the gas required for the processing is passed into the isolation cover 3 through the air intake pipe 9 so that the gas can react.

[0024] See also Figure 2-3 In order to facilitate effective protection of the probe used for detection and improve the accuracy and service life of the detection, the detection mechanism 5 in this embodiment includes a vacuum detector 501, which is fixed to the upper surface of the isolation cover 3. A detection probe 502 is fixed to the output end of the vacuum detector 501, and the other end of the detection probe 502 penetrates and extends to the interior of the isolation cover 3 so as to detect the environmental conditions inside the isolation cover 3. A protective cylinder 503 is fixed to the inner top wall of the isolation cover 3, and a chassis 504 is fixed to the upper surface of the isolation cover 3, and a protective component is arranged on the chassis 504.

[0025] In this example, the detection probe 502 is located inside the protective tube 503 , and the inner diameter of the protective tube 503 is larger than the outer diameter of the detection probe 502 , and the length of the detection probe 502 is smaller than the length of the protective tube 503 , so as to effectively protect the detection probe 502 .

[0026] It should be noted that the protection component includes a motor 505, which is fixed to the inner top wall of the chassis 504, and the output shaft of the motor 505 is fixed with a driving gear 506, and the output shaft of the motor 505 drives the driving gear 506 to rotate, and the outer side of the driving gear 506 is meshed with a driven gear 507, and the driving gear 506 drives the driven gear 507 to rotate, and the lower surface of the driven gear 507 is rotatably connected to the upper surface of the isolation cover 3 through a bearing, and a rotating rod 508 is fixed to the inner side of the driven gear 507, and the driven gear 507 drives the rotating rod 508 to rotate, and the bottom end of the rotating rod 508 penetrates and extends to the inside of the isolation cover 3 , and a connecting rod 509 is fixed on the outside, the rotating rod 508 drives the connecting rod 509 to rotate, and a baffle 510 is fixed to the other end of the connecting rod 509, and the connecting rod 509 drives the baffle 510 to rotate so as to control the opening and closing of the protective tube 503, and a limiting block 511 is fixed on the lower surface of the protective tube 503, the outer diameter of the baffle 510 is larger than the inner diameter of the protective tube 503, the shape of the limiting block 511 is arc-shaped, and the inner diameter is adapted to the outer diameter of the baffle 510, so as to limit the rotation trajectory of the baffle 510, so that the baffle 510 can completely close the protective tube 503 and protect the detection probe 502.

[0027] See also Figure 4In order to facilitate the staff to place and remove the processed workpiece, the lifting mechanism 6 in this embodiment includes an electric push rod 601, which is fixed to the inner top wall of the base 1. The output shaft of the electric push rod 601 passes through and extends to the upper side of the base 1, and is fixed with a mounting block 602. The output shaft of the electric push rod 601 drives the mounting block 602 to move. The mounting block 602 is fixed to the outer side of the isolation cover 3. The mounting block 602 drives the isolation cover 3 to move, which is convenient for the staff to place or remove the workpiece. The lower surface of the mounting block 602 is fixed with a sensing block 603, and the upper surface of the base 1 is fixed with a sensor 604. The spacing between the sensing block 603 and the sensor 604 can be used to control the operation of the electric push rod 601 and the motor 505, thereby realizing automatic opening detection or protection.

[0028] In this example, there are two electric push rods 601 , which are symmetrically distributed about the central axis of the base 1 . The number of the induction blocks 603 and the number of the sensors 604 are equal, and their positions correspond one to one.

[0029] The electrical components appearing in the article are all electrically connected to the main controller and the power supply. The main controller can be a conventional known device for control such as a computer, and the existing public power connection technology is not described in detail in the article.

[0030] The control method of the present invention is controlled by a controller. The control circuit of the controller can be realized by simple programming by technicians in this field. The provision of power is also common knowledge in this field. The present invention is mainly used to protect mechanical devices, so the present invention will no longer explain the control method and circuit connection in detail.

[0031] The working principle of the above embodiment is:

[0032] (1) First, turn on the electric push rod 601. The output shaft of the electric push rod 601 drives the mounting block 602 to move. The mounting block 602 drives the isolation cover 3 to move, so that the isolation cover 3 moves up, thereby facilitating the staff to place the workpiece on the MPCVD equipment body 2. After the workpiece is placed, turn on the electric push rod 601 again to control the isolation cover 3 to move down until the sensing block 603 moves to a suitable position with the sensor 604. The sensor 604 sends a signal to the electric push rod 601 to stop the electric push rod 601 from moving. At this time, the isolation cover 3 presses the sealing gasket 4 against the base 1 to improve the sealing inside the isolation cover 3.

[0033] (2) When the sensor 604 senses the sensing block 603, the sensor 604 sends a signal to the motor 505. The output shaft of the motor 505 drives the driving gear 506 to rotate, the driving gear 506 drives the driven gear 507 to rotate, the driven gear 507 drives the rotating rod 508 to rotate, the rotating rod 508 drives the connecting rod 509 to rotate, and the connecting rod 509 drives the baffle 510 to rotate, thereby opening the protective cylinder 503. At this time, the environment inside the isolation cover 3 is connected with the protection cylinder 503. At the same time, the first solenoid valve 8 is opened, and the inside of the isolation cover 3 is evacuated through the vacuum pipe 7, so that the equipment works in a vacuum environment. The detection probe 502 will detect the vacuum environment inside the isolation cover 3. The vacuum detector 501 detects whether the vacuum environment inside the isolation cover 3 meets the standard. If it meets the standard, the second solenoid valve 10 is opened to pass the gas required for processing into the isolation cover 3 through the air inlet pipe 9 so that the gas can react.

[0034] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0035] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that many changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention.

Claims

1. A PLC-based MPCVD detection device, comprising a base (1), characterized in that: An MPCVD equipment body (2) is fixed on the upper surface of the base (1); an isolation cover (3) is arranged above the base (1); a sealing gasket (4) is fixed on the lower surface of the isolation cover (3); a detection mechanism (5) for detecting the internal working environment is arranged on the isolation cover (3); and a lifting mechanism (6) for controlling the lifting of the isolation cover (3) is arranged on the base (1); The detection mechanism (5) comprises a vacuum detector (501), the vacuum detector (501) is fixed to the upper surface of the isolation cover (3), a detection probe (502) is fixed to the output end of the vacuum detector (501), the other end of the detection probe (502) penetrates and extends to the interior of the isolation cover (3), a protective tube (503) is fixed to the inner top wall of the isolation cover (3), a machine box (504) is fixed to the upper surface of the isolation cover (3), and a protective component is arranged on the machine box (504).

2. The PLC-based MPCVD detection device according to claim 1, characterized in that: The outside of the isolation cover (3) is connected to a vacuum pumping pipe (7), the outside of the vacuum pumping pipe (7) is connected to a first solenoid valve (8), the outside of the isolation cover (3) is connected to an air intake pipe (9), and the outside of the air intake pipe (9) is connected to a second solenoid valve (10).

3. The PLC-based MPCVD detection device according to claim 1, characterized in that: The detection probe (502) is located inside the protective tube (503), and the inner diameter of the protective tube (503) is greater than the outer diameter of the detection probe (502).

4. The PLC-based MPCVD detection device according to claim 1, characterized in that: The protection component comprises a motor (505), wherein the motor (505) is fixed to the inner top wall of the chassis (504), a driving gear (506) is fixed to the output shaft of the motor (505), a driven gear (507) is meshed on the outer side of the driving gear (506), a lower surface of the driven gear (507) is rotatably connected to the upper surface of the isolation cover (3) via a bearing, a rotating rod (508) is fixed to the inner side of the driven gear (507), the bottom end of the rotating rod (508) penetrates and extends to the inside of the isolation cover (3), and a connecting rod (509) is fixed to the outer side, a baffle (510) is fixed to the other end of the connecting rod (509), and a limiting block (511) is fixed to the lower surface of the protection tube (503).

5. The PLC-based MPCVD detection device according to claim 4, characterized in that: The outer diameter of the baffle (510) is greater than the inner diameter of the protective tube (503); the limiting block (511) is arc-shaped, and its inner diameter matches the outer diameter of the baffle (510).

6. The PLC-based MPCVD detection device according to claim 1, characterized in that: The lifting mechanism (6) comprises an electric push rod (601), the electric push rod (601) is fixed to the inner top wall of the base (1), the output shaft of the electric push rod (601) passes through and extends to the upper side of the base (1), and is fixed with a mounting block (602), the mounting block (602) is fixed to the outer side of the isolation cover (3), the lower surface of the mounting block (602) is fixed with a sensing block (603), and the upper surface of the base (1) is fixed with a sensor (604).

7. The PLC-based MPCVD detection device according to claim 6, characterized in that: The number of the electric push rods (601) is two, and they are symmetrically distributed about the central axis of the base (1).

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