Horizontal wafer box convenient to take and place

Abstract

The utility model relates to the technical field of wafer storage, in particular to a horizontally placed wafer box convenient to take and place, which comprises a support frame, the inner wall of the support frame is fixedly connected with a limiting plate, the inside of the support frame is slidably connected with two connecting structures, one end of each connecting structure is fixedly provided with a movable side plate, and the other end of each connecting structure is provided with a sliding block. And a wafer clamping seat is fixedly mounted on one side of the movable side plate. Compared with the prior art, the wafer placing and taking-out device has the advantages that through cooperation of the supporting frame, the limiting plates, the connecting structures, the movable side plates, the wafer clamping seats and the bidirectional lead screws, the wafer clamping seats can be far away from wafers when the wafers are placed and taken out, so that the situation that the wafers excessively rub with the side walls when the wafers are taken out and placed can be prevented, and the wafer placing and taking-out efficiency is improved. And through the cooperation of the vertical plate, the bearing and the holding sleeve, the bidirectional screw rod can be conveniently and rapidly rotated, so that the adjustment is easier, simpler and more convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer storage, in particular to a horizontally placed wafer box which is convenient for taking and placing. Background Art

[0002] Horizontal wafer boxes play an important role in semiconductor production, mainly used to place and transport wafers. In order to simplify transportation and reduce the risk of wafer contamination, chip manufacturers usually use wafer boxes to carry and store wafers. The inside of the wafer box is designed with symmetrical grooves. The size of these grooves is strictly uniform and is mainly used to support the two sides of the wafer. When the horizontal wafer box is taken out, it will be clamped by a special clamp. However, when the wafer is clamped from the horizontal wafer box by a tool, it is easy for the wafer to come into contact with the side wall of the wafer box, which can easily cause damage. Utility Model Content

[0003] The purpose of the present invention is to solve at least one of the above technical deficiencies.

[0004] Therefore, one purpose of the present invention is to provide a horizontally placed wafer box that is convenient for taking and placing, so as to solve the problems mentioned in the background technology and overcome the shortcomings of the prior art.

[0005] In order to achieve the above-mentioned purpose, an embodiment of one aspect of the utility model provides a horizontally placed wafer box that is convenient for taking and placing, including a support frame, an inner wall of the support frame is fixedly connected to a limit plate, two connecting structures are slidably connected inside the support frame, one end of the connecting structure is fixedly installed with a movable side plate, one side of the movable side plate is fixedly installed with a wafer holder, one side of the support frame is rotatably connected with a bidirectional screw rod, and the surface of the bidirectional screw rod is threadedly connected with the connecting structure. The technical effect achieved by adopting the above scheme is: first, the wafer is placed in the groove at the top of the limit plate to preliminarily fix the wafer, and then the bidirectional screw rod is rotated to drive the connecting structure to move, and then the movement of the connecting structure drives the movable side plate to move, so that the slot of the wafer holder contacts the wafer to limit and fix it, when performing the removal operation, the movable side plate is first moved by rotating the bidirectional screw rod, and then the wafer is taken out with a tool, which can prevent the wafer from rubbing against the side wall during transition during removal and placement, thereby having a better protection effect on the wafer, and at the same time, the operation is simple and convenient for taking out and storing.

[0006] Preferably, any of the above schemes is that the connecting structure includes a bending plate, one end of the bending plate is fixedly connected to an insert plate, one side of the insert plate is fixedly connected to a threaded plate, and the bending plate is connected to the movable side plate. The technical effect achieved by adopting the above scheme is that the movement of the threaded plate can drive the bending plate and the insert plate to move, thereby driving the movable side plate to perform moving operations.

[0007] Preferably, any of the above schemes is that a through hole with the same size as the insertion plate is provided on one side of the support frame, the through hole passes through one side of the support frame, and a guide groove matched with the threaded plate is provided on one side of the through hole, and the threaded plate is threadedly connected to the bidirectional screw rod. The technical effect achieved by adopting the above scheme is that the movement of the connecting structure can be guided by the through hole and the guide groove, so that the movable side plate can be moved more stably.

[0008] Preferably, any of the above schemes has two vertical plates fixedly installed on one side of the support frame, bearings are fixedly installed on the sides of the two vertical plates that are close to each other, and a bidirectional screw rod is arranged in the middle of the bearing. The technical effect achieved by adopting the above scheme is that the bidirectional screw rod can be conveniently and quickly rotated through the cooperation between the vertical plates, the bearings and the grip sleeves, thereby making the adjustment easier and more convenient.

[0009] Preferably, any of the above schemes has a grip sleeve fixedly mounted on the surface of the bidirectional screw rod. The technical effect achieved by adopting the above scheme is that the friction between the bidirectional screw rod and the palm can be increased by the grip sleeve, thereby making adjustment easier and more convenient.

[0010] Preferably, any of the above schemes has a groove on the top of the limiting plate, and the diameter of the groove is the same as the diameter of the wafer. The technical effect achieved by adopting the above scheme is that the wafer can be initially limited by the groove, thereby facilitating the subsequent limiting operation of the wafer by the wafer holder.

[0011] Preferably, any of the above schemes is that a protective soft cover is fixedly installed on the inner wall of the wafer holder, and the shape of the wafer holder is U-shaped. The technical effect achieved by adopting the above scheme is that the protective soft cover can reduce friction and protect the wafer when the wafer holder is positioning the wafer.

[0012] Compared with the prior art, the advantages and beneficial effects of the utility model are:

[0013] 1. This kind of horizontally placed wafer box that is easy to take and place, through the cooperation between the support frame, the limit plate, the connection structure, the movable side plate, the wafer holder and the bidirectional lead screw, can make the wafer holder away from the wafer when placing and removing the wafer, so as to prevent the wafer from rubbing against the side wall during the removal and placement, thereby better protecting the wafer.

[0014] 2. This kind of wafer box is placed horizontally and is easy to take and place. Through the cooperation between the vertical plate, the bearing and the grip sleeve, the bidirectional screw can be easily and quickly rotated, making the adjustment easier and simpler. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the structure of the first perspective of the embodiment of the utility model;

[0016] Figure 2 This is a schematic diagram of the structure of the first embodiment of the utility model from a second viewing angle;

[0017] Figure 3 This is a schematic diagram of the structure of the first embodiment of the utility model from a third viewing angle;

[0018] Figure 4 This is the first embodiment of the utility model Figure 3 A schematic diagram of the structure at A;

[0019] Figure 5 This is a schematic diagram of the structure of the fourth viewing angle of the first embodiment of the utility model.

[0020] Among them: 1-support frame, 2-limiting plate, 3-connecting structure, 301-bending plate, 302-insertion plate, 303-threaded plate, 4-movable side plate, 5-wafer holder, 6-bidirectional screw rod, 7-through hole, 8-guide slide groove, 9-vertical plate, 10-bearing, 11-grip sleeve, 12-groove, 13-protective soft sleeve. DETAILED DESCRIPTION

[0021] The present invention is further described below in conjunction with the accompanying drawings, but the protection scope of the present invention is not limited to the following description.

[0022] Embodiment 1: Figures 1 to 5 As shown, a horizontally placed wafer box that is convenient for taking and placing includes a supporting frame 1, the inner wall of the supporting frame 1 is fixedly connected to a limiting plate 2, and the interior of the supporting frame 1 is slidably connected to two connecting structures 3, one end of the connecting structure 3 is fixedly installed with a movable side plate 4, and one side of the movable side plate 4 is fixedly installed with a wafer holder 5, and one side of the supporting frame 1 is rotatably connected with a bidirectional screw rod 6, and the surface of the bidirectional screw rod 6 is threadedly connected with the connecting structure 3, firstly, the wafer is placed in the groove 12 at the top of the limiting plate 2 to preliminarily fix the wafer, and then the bidirectional screw rod 6 is rotated to drive the connecting structure 3 to move, and then the movement of the connecting structure 3 drives the movable side plate 4 to move, so that the card slot of the wafer holder 5 contacts the wafer to limit and fix it, when performing the taking-out operation, first the moving side plate 4 is moved by rotating the bidirectional screw rod 6, and then the wafer is taken out with a tool, which can prevent the wafer from rubbing against the side wall during transition during taking out and placing, thereby having a better protection effect on the wafer, and at the same time, the operation is simple and convenient for taking out and storing.

[0023] As an optional technical solution of the present utility model, the connecting structure 3 includes a bending plate 301, one end of the bending plate 301 is fixedly connected to an insert plate 302, one side of the insert plate 302 is fixedly connected to a threaded plate 303, the bending plate 301 is connected to the movable side plate 4, and the movement of the threaded plate 303 can drive the bending plate 301 and the insert plate 302 to move, thereby driving the movable side plate 4 to perform moving operations.

[0024] As an optional technical solution of the utility model, a through hole 7 with the same size as the insertion plate 302 is opened on one side of the support frame 1, and the through hole 7 passes through one side of the support frame 1. A guide groove 8 compatible with the threaded plate 303 is opened on one side of the through hole 7. The threaded plate 303 is threadedly connected to the bidirectional screw rod 6. The movement of the connecting structure 3 can be guided by the through hole 7 and the guide groove 8, so that the movable side plate 4 can move more stably.

[0025] As an optional technical solution of the utility model, two vertical plates 9 are fixedly installed on one side of the support frame 1, and bearings 10 are fixedly installed on the side where the two vertical plates 9 are close to each other. A bidirectional screw rod 6 is arranged in the middle of the bearing 10. Through the cooperation between the vertical plates 9, the bearing 10 and the grip sleeve 11, the bidirectional screw rod 6 can be conveniently and quickly rotated, thereby making the adjustment easier and more convenient.

[0026] As an optional technical solution of the present invention, a grip sleeve 11 is fixedly installed on the surface of the bidirectional screw rod 6. The grip sleeve 11 can increase the friction between the bidirectional screw rod 6 and the palm, thereby making the adjustment easier and more convenient.

[0027] As an optional technical solution of the present invention, a groove 12 is provided on the top of the limiting plate 2, and the diameter of the groove 12 is the same as the diameter of the wafer. The wafer can be initially limited by the groove 12, thereby facilitating the subsequent limiting operation of the wafer by the wafer holder 5.

[0028] As an optional technical solution of the present invention, a protective soft cover 13 is fixedly installed on the inner wall of the wafer holder 5. The shape of the wafer holder 5 is U-shaped. The protective soft cover 13 can reduce friction and protect the wafer when the wafer holder 5 performs positioning operation on the wafer.

[0029] A horizontally placed wafer box that is easy to take and place, the working principle is as follows: first, the wafer is placed in the groove 12 on the top of the limit plate 2 to preliminarily fix the wafer, and then the bidirectional lead screw 6 is rotated to drive the connecting structure 3 to move, and then the movement of the connecting structure 3 drives the movable side plate 4 to move, so that the slot of the wafer holder 5 contacts the wafer to limit and fix it, and when performing the removal operation, the movable side plate 4 is first moved by rotating the bidirectional lead screw 6, and then the wafer is taken out with a tool.

[0030] To sum up, the horizontally placed wafer box which is convenient for taking and placing can keep the wafer holder 5 away from the wafer when placing and removing the wafer through the cooperation among the support frame 1, the limit plate 2, the connecting structure 3, the movable side plate 4, the wafer holder 5 and the bidirectional screw 6, so as to prevent the wafer from rubbing against the side wall during the transition and placement, thereby providing better protection for the wafer. Through the cooperation among the vertical plate 9, the bearing 10 and the grip sleeve 11, the bidirectional screw 6 can be easily and quickly rotated, making the adjustment easier and more convenient.

[0031] Embodiment 2 is a horizontally placed wafer box that is convenient for taking and placing. Based on the above embodiment, this embodiment fixes a protective plate on the inner wall of the groove 12 and the bottom of the limit plate 2 to prevent damage caused by collision when storing and retrieving wafers.

Claims

1. A horizontally placed wafer box that is convenient for taking and placing, comprising a support frame (1), characterized in that: The inner wall of the support frame (1) is fixedly connected to a limit plate (2); the interior of the support frame (1) is slidably connected to two connection structures (3); a movable side plate (4) is fixedly mounted on one end of the connection structure (3); a wafer holder (5) is fixedly mounted on one side of the movable side plate (4); a bidirectional lead screw (6) is rotatably connected to one side of the support frame (1); and the surface of the bidirectional lead screw (6) is threadedly connected to the connection structure (3).

2. The horizontally placed wafer box that is convenient for taking and placing according to claim 1 is characterized in that: The connection structure (3) comprises a bending plate (301), one end of the bending plate (301) is fixedly connected to an insertion plate (302), one side of the insertion plate (302) is fixedly connected to a threaded plate (303), and the bending plate (301) is connected to the movable side plate (4).

3. The horizontally placed wafer box that is convenient for taking and placing according to claim 2 is characterized in that: A through hole (7) having the same size as the insertion plate (302) is provided on one side of the support frame (1); the through hole (7) passes through one side of the support frame (1); a guide groove (8) adapted to the threaded plate (303) is provided on one side of the through hole (7); and the threaded plate (303) is threadedly connected to the bidirectional screw rod (6).

4. The horizontally placed wafer box that is convenient for taking and placing according to claim 3 is characterized in that: Two vertical plates (9) are fixedly mounted on one side of the support frame (1), and bearings (10) are fixedly mounted on the adjacent sides of the two vertical plates (9), and a bidirectional screw rod (6) is arranged in the middle of the bearing (10).

5. The horizontally placed wafer box that is convenient for taking and placing according to claim 4 is characterized in that: A grip sleeve (11) is fixedly mounted on the surface of the bidirectional screw rod (6).

6. The horizontally placed wafer box that is convenient for taking and placing according to claim 5, characterized in that: A groove (12) is provided on the top of the limiting plate (2), and the diameter of the groove (12) is the same as the diameter of the wafer.

7. The horizontally placed wafer box for easy access according to claim 6, characterized in that: A protective soft cover (13) is fixedly mounted on the inner wall of the wafer holder (5), and the shape of the wafer holder (5) is U-shaped.

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