Silane waste gas treatment device

Abstract

The utility model discloses a silane waste gas treatment device, which relates to the technical field of silane waste gas treatment, and comprises a waste gas treatment box and a spraying assembly, the outer wall of the left side of the waste gas treatment box is provided with a waste gas inlet pipe, and the outer wall of an annular gas outlet pipe is fixedly connected with the waste gas treatment box; the spraying assembly used for spraying is arranged on the outer wall of the top of the waste gas treatment box, and the bottom end of the spraying water inlet pipe is connected with a spraying disc. According to the silane waste gas treatment device, an annular gas outlet pipe is annular, so that silane waste gas can be conveniently and quickly discharged into a waste gas treatment box, alkali liquor for treating the waste gas is input into a spraying disc through a spraying water inlet pipe and is sprayed into the waste gas treatment box through spraying heads, and the spraying heads are distributed at the bottom of the spraying disc; therefore, the contact area of the silane waste gas and the alkali liquor is increased, the reaction of the silane waste gas and the alkali liquor is accelerated, the treatment effect is improved, activated carbon blocks are arranged in the wave net box, and activated carbon can adsorb the waste gas.

Description

Technical Field

[0001] The utility model relates to the technical field of silane waste gas treatment, in particular to a silane waste gas treatment device. Background Art

[0002] Silane waste gas is a common organic waste gas in semiconductor production. Its main sources include the pyrolysis of silicon, the decomposition of silicon fluoride, the pyrolysis and oxidation of silane, etc. Silane waste gas has a pungent odor and strong toxicity, which can cause multiple damages such as eyes, skin and respiratory tract, seriously affecting people's health and environmental quality.

[0003] In order to control the emission of silane waste gas, catalytic combustion and adsorption are currently the main treatment methods used. The existing silane waste gas treatment equipment has low waste gas treatment efficiency, unsatisfactory waste gas purification effect, and is not convenient for regular replacement of activated carbon, resulting in a decrease in adsorption effect.

[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a silane waste gas treatment device is proposed. Utility Model Content

[0005] The purpose of the utility model is to provide a silane waste gas treatment device to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a silane waste gas treatment device, comprising a waste gas treatment box and a spray assembly, the left outer wall of the waste gas treatment box is provided with a waste gas inlet pipe, and the right end of the waste gas inlet pipe is fixedly connected with a ring-shaped air outlet pipe, the outer wall of the ring-shaped air outlet pipe is fixedly connected with the waste gas treatment box, and the waste gas inlet pipe is arranged inside the waste gas treatment box, the spray assembly for spraying is arranged on the top outer wall of the waste gas treatment box, and the spray assembly comprises a spray water inlet pipe, a spray plate and a spray head, the bottom end of the spray water inlet pipe is connected with the spray plate, and the bottom outer wall of the spray plate is provided with a spray head.

[0007] Furthermore, an adsorption filter chamber is arranged below the annular air outlet pipe, and a spray assembly is arranged above the annular air outlet pipe.

[0008] Furthermore, the vertical center axis of the annular air outlet pipe is consistent with the vertical center axis of the spray plate, and at least one spray head is provided.

[0009] Furthermore, an adsorption filtration assembly for adsorption filtration is provided inside the adsorption filtration bin, and the adsorption filtration assembly includes a slide rail, a slider and a wave mesh box, the slide rail is slidably connected to the inside of the slide rail, and the outer wall of the slider is fixed with a wave mesh box.

[0010] Furthermore, sliders are provided at both left and right ends of the wave mesh box, and there are three wave mesh boxes.

[0011] Furthermore, a water guide plate is provided on the bottom inner wall of the exhaust gas treatment box, and the water guide plate is provided below the wave net box.

[0012] Furthermore, the top of the water guide plate is inclined to the right, and an evaporation box is provided on the right side of the water guide plate.

[0013] Furthermore, a plate-type evaporator is arranged inside the evaporation box, and the top of the plate-type evaporator is inclined to the right, and a gas exhaust pipe is arranged on the top outer wall of the evaporation box.

[0014] The utility model provides a silane waste gas treatment device, which has the following beneficial effects:

[0015] 1. The silane waste gas treatment device has a ring-shaped annular air outlet pipe, which is convenient for quickly discharging the silane waste gas into the interior of the waste gas treatment box. The alkali solution for treating the waste gas is input into the interior of the spray plate through the spray inlet pipe, and is sprayed into the interior of the waste gas treatment box through the spray head. The spray plate is disc-shaped, and several spray heads are distributed at the bottom of the spray plate, so as to increase the contact area between the silane waste gas and the alkali solution, accelerate the reaction between the two, and improve the treatment effect.

[0016] 2. The silane waste gas treatment device has an activated carbon block inside the wave mesh box. The activated carbon can adsorb the waste gas. The wave mesh box is wavy, which increases the contact area between the silane waste gas and the alkali solution mixture. The wave mesh box is provided with three layers, which improves the adsorption efficiency. The slider can slide inside the slide rail, and the slider and the wave mesh box can be quickly disassembled by pulling outward, which is convenient for replacing the activated carbon block. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the overall left top view of a silane waste gas treatment device of the utility model;

[0018] Figure 2 It is a schematic diagram of the overall structure of a silane waste gas treatment device of the utility model, viewed from the bottom right;

[0019] Figure 3 This is a schematic diagram of the structure of an adsorption and filtration component of a silane waste gas treatment device of the utility model;

[0020] Figure 4 This is a schematic diagram of the structure of a spray head of a silane waste gas treatment device of the utility model;

[0021] Figure 5 The utility model is a schematic diagram of the structure of an annular gas outlet pipe of a silane waste gas treatment device.

[0022] In the figure: 1. Waste gas treatment box; 2. Waste gas inlet pipe; 3. Annular outlet pipe; 4. Spray assembly; 401. Spray water inlet pipe; 402. Spray plate; 403. Spray head; 5. Adsorption filter chamber; 6. Adsorption filter assembly; 601. Slide rail; 602. Slider; 603. Wave mesh box; 7. Water guide plate; 8. Evaporation box; 9. Plate evaporator; 10. Gas discharge pipe. DETAILED DESCRIPTION

[0023] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0024] like Figure 1-Figure 5 As shown, a silane waste gas treatment device comprises a waste gas treatment box 1 and a spray assembly 4, a waste gas inlet pipe 2 is arranged on the left outer wall of the waste gas treatment box 1, and a ring-shaped air outlet pipe 3 is fixedly connected to the right end of the waste gas inlet pipe 2, the outer wall of the ring-shaped air outlet pipe 3 is fixedly connected to the waste gas treatment box 1, and the waste gas inlet pipe 2 is arranged inside the waste gas treatment box 1, a spray assembly 4 for spraying is arranged on the top outer wall of the waste gas treatment box 1, and the spray assembly 4 comprises a spray water inlet pipe 401, a spray plate 402 and a spray head 403, the bottom end of the spray water inlet pipe 401 is connected to the spray plate 402, and the bottom outer wall of the spray plate 402 is provided with a spray head 403, an adsorption filter bin 5 is arranged below the ring-shaped air outlet pipe 3, and a spray assembly 4 is arranged above the ring-shaped air outlet pipe 3, the vertical central axis of the ring-shaped air outlet pipe 3 is consistent with the vertical central axis of the spray plate 402, and there is no less than one spray head 403;

[0025] The specific operation is as follows: silane waste gas enters the annular outlet pipe 3 through the waste gas inlet pipe 2. A plurality of outlets are arranged at the bottom of the annular outlet pipe 3. The annular outlet pipe 3 is annular, which is convenient for quickly discharging the silane waste gas into the waste gas treatment box 1. The alkali solution for treating the waste gas is input into the spray plate 402 through the spray inlet pipe 401, and is sprayed into the waste gas treatment box 1 through the spray head 403. The spray plate 402 is disc-shaped, and a plurality of spray heads 403 are distributed at the bottom of the spray plate 402, so as to increase the contact area between the silane waste gas and the alkali solution, accelerate the reaction between the two, and improve the treatment effect;

[0026] like Figure 1-Figure 5As shown, an adsorption filter assembly 6 for adsorption filtration is provided inside the adsorption filter chamber 5, and the adsorption filter assembly 6 includes a slide rail 601, a slider 602 and a wave net box 603, the slide rail 601 is slidably connected with the slider 602, and the outer wall of the slider 602 is fixed with the wave net box 603, the left and right ends of the wave net box 603 are provided with sliders 602, and there are three wave net boxes 603, the bottom inner wall of the exhaust gas treatment box 1 is provided with a water guide plate 7, and the water guide plate 7 is provided below the wave net box 603, the top of the water guide plate 7 is inclined to the right, and an evaporation box 8 is provided on the right side of the water guide plate 7, the evaporation box 8 is provided with a plate evaporator 9 inside, and the top of the plate evaporator 9 is inclined to the right, and the top outer wall of the evaporation box 8 is provided with a gas exhaust pipe 10;

[0027] The specific operation is as follows: the mixture falls to the wave mesh box 603, and an activated carbon block is arranged inside the wave mesh box 603. The activated carbon can adsorb the waste gas. The wave mesh box 603 is wavy, which increases the contact area between the silane waste gas and the alkali solution mixture. The wave mesh box 603 is provided with three layers, which improves the adsorption efficiency. The slider 602 can slide inside the slide rail 601. The slider 602 and the wave mesh box 603 can be quickly disassembled by pulling outward, which is convenient for replacing the activated carbon block.

[0028] The filtered mixture flows down to the top of the plate evaporator 9 inside the evaporation box 8 through the water guide plate 7. The high temperature of the plate evaporator 9 can quickly evaporate and dry the liquid, and the gas is discharged through the gas discharge pipe 10.

[0029] In summary, if Figure 1-Figure 5 As shown, when the silane waste gas treatment device is used, first, the silane waste gas enters the annular outlet pipe 3 through the waste gas inlet pipe 2, and a plurality of outlets are arranged at the bottom of the annular outlet pipe 3, so as to quickly discharge the silane waste gas into the waste gas treatment box 1, and the alkali liquid for treating the waste gas is input into the inside of the spray plate 402 through the spray inlet pipe 401, and is sprayed into the inside of the waste gas treatment box 1 through the spray head 403, and a plurality of spray heads 403 are distributed at the bottom of the spray plate 402, so as to increase the contact area between the silane waste gas and the alkali liquid;

[0030] An activated carbon block is arranged inside the wave mesh box 603, and the activated carbon can adsorb the exhaust gas. The wave mesh box 603 increases the contact area between the silane exhaust gas and the alkali solution mixture, and improves the adsorption efficiency. The slider 602 can slide inside the slide rail 601, and the slider 602 and the wave mesh box 603 can be quickly disassembled by pulling outward, so that the activated carbon block can be replaced easily. The filtered mixture flows down through the water guide plate 7 to the top of the plate evaporator 9 inside the evaporation box 8. The high temperature of the plate evaporator 9 can quickly evaporate and dry the liquid, and the gas is discharged through the gas exhaust pipe 10.

[0031] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A silane waste gas treatment device, comprising a waste gas treatment box (1) and a spray assembly (4), characterized in that: The left outer wall of the waste gas treatment box (1) is provided with a waste gas inlet pipe (2), and the right end of the waste gas inlet pipe (2) is fixedly connected to an annular outlet pipe (3), the outer wall of the annular outlet pipe (3) is fixedly connected to the waste gas treatment box (1), and the waste gas inlet pipe (2) is arranged inside the waste gas treatment box (1), the spray assembly (4) for spraying is arranged on the top outer wall of the waste gas treatment box (1), and the spray assembly (4) comprises a spray water inlet pipe (401), a spray plate (402) and a spray head (403), the bottom end of the spray water inlet pipe (401) is connected to the spray plate (402), and the bottom outer wall of the spray plate (402) is provided with a spray head (403).

2. A silane waste gas treatment device according to claim 1, characterized in that: An adsorption filter chamber (5) is arranged below the annular air outlet pipe (3), and a spray assembly (4) is arranged above the annular air outlet pipe (3).

3. A silane waste gas treatment device according to claim 1, characterized in that: The vertical center axis of the annular air outlet pipe (3) is consistent with the vertical center axis of the spray plate (402), and at least one spray head (403) is provided.

4. A silane waste gas treatment device according to claim 2, characterized in that: An adsorption filtration assembly (6) for performing adsorption filtration is arranged inside the adsorption filtration chamber (5), and the adsorption filtration assembly (6) comprises a slide rail (601), a slider (602) and a wave mesh box (603), the slide rail (601) is slidably connected to the slider (602) inside, and the wave mesh box (603) is fixed to the outer wall of the slider (602).

5. A silane waste gas treatment device according to claim 4, characterized in that: Slide blocks (602) are provided at both left and right ends of the wave net box (603), and there are three wave net boxes (603).

6. A silane waste gas treatment device according to claim 1, characterized in that: A water guide plate (7) is provided on the inner wall of the bottom of the exhaust gas treatment box (1), and the water guide plate (7) is arranged below the wave net box (603).

7. A silane waste gas treatment device according to claim 6, characterized in that: The top of the water guide plate (7) is inclined to the right, and an evaporation box (8) is arranged on the right side of the water guide plate (7).

8. A silane waste gas treatment device according to claim 7, characterized in that: A plate-type evaporator (9) is arranged inside the evaporation box (8), and the top of the plate-type evaporator (9) is inclined to the right. A gas exhaust pipe (10) is arranged on the top outer wall of the evaporation box (8).

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