Top heat preservation structure and single crystal furnace

Abstract

The utility model discloses a top heat preservation structure and a single crystal furnace. The top heat preservation structure comprises a top heat preservation body, the upper end of the top heat preservation body is provided with an arched part extending upwards, an opening and a wall hanging opening are formed in the top heat preservation body from bottom to top, and the wall hanging opening is communicated with the side end of the opening. The single crystal furnace comprises a furnace body and the top heat preservation structure, a bottom heat preservation felt, a lower heat preservation cylinder, a middle heat preservation cylinder and an upper heat preservation cylinder are sequentially arranged in the furnace body from bottom to top, a furnace cover is arranged at the upper end of the furnace body, the top heat preservation main body is arranged in the furnace body and arranged on the upper heat preservation cylinder, and the top heat preservation main body is arranged on the furnace cover. And the furnace cover is arranged below the furnace cover. The utility model is applied to the technical field of single crystal furnaces.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a top heat insulation structure and a single crystal furnace. Background Art

[0002] In the production process of single crystal silicon, the temperature in the furnace needs to be controlled to achieve silicon crystallization, such as Figure 1 As shown, the existing single crystal furnace top insulation device is an insulation cover located on the top of the furnace body. This insulation cover is a simple circular ring structure with a thickness of about 60 mm. However, this insulation cover usually only covers a small area of ​​the furnace body and cannot cover a larger area of ​​the top of the furnace, resulting in poor insulation effect and affecting the stability of the thermal field power. Moreover, the middle of this insulation cover needs to leave most of the area for the water-cooled screen arm to be installed, resulting in a large heat dissipation area, accelerated heat dissipation and uneven temperature in the furnace. In addition, there is circulating water flowing inside the furnace cover, and the circulating water will carry part of the heat from the top of the furnace, increasing the heat loss in the furnace, affecting the quality of single crystal silicon, and leading to an increase in electricity costs. Utility Model Content

[0003] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art. The first purpose is to provide a top insulation structure that reduces heat loss, reduces power consumption and improves insulation effect;

[0004] The second purpose is to provide a single crystal furnace that reduces heat loss, lowers power consumption and improves thermal insulation effect.

[0005] The technical solution adopted by the utility model is: the top insulation structure comprises a top insulation body, the upper end of the top insulation body has an arched portion extending upward, the top insulation body is provided with an opening and a wall hanging opening from bottom to top, and the wall hanging opening is connected to the side end of the opening.

[0006] Furthermore, the arched portion is a hemispherical structure.

[0007] Furthermore, the opening is located in the middle of the top heat-insulating body, the number of the wall-hanging openings is two, and the two wall-hanging openings are respectively connected to the two side ends of the opening.

[0008] Furthermore, the top heat-insulating body comprises an annular heat-insulating plate, and the arched portion is formed at the upper end of the annular heat-insulating plate.

[0009] Furthermore, the top heat-insulating body is an integrally formed structure.

[0010] Furthermore, the top heat-insulating body is a split structure, and the top heat-insulating body includes a first splicing block and a second splicing block, and the inner side of the first splicing block is connected to the inner side of the second splicing block.

[0011] Furthermore, a slot is provided on the inner side of the first assembling block, and a block adapted to the slot is provided on the inner side of the second assembling block.

[0012] Furthermore, the top insulation body is a viscose-based insulation structure.

[0013] Furthermore, the thickness of the top insulation body ranges from 300 mm to 450 mm.

[0014] In addition, the utility model also provides a single crystal furnace, which includes a furnace body and the top insulation structure, wherein the furnace body is provided with a bottom insulation felt, a lower insulation tube, a middle insulation tube and an upper insulation tube in sequence from bottom to top, and a furnace cover is provided at the upper end of the furnace body, and the top insulation body is provided in the furnace body, and the top insulation body is provided on the upper insulation tube and is located below the furnace cover.

[0015] The beneficial effects of the utility model are:

[0016] With respect to the deficiencies of the prior art, in the utility model, by extending an arched portion upward from the upper end of the top heat-insulating body, the overall thickness can be increased, so that the arched portion can fit the furnace cover at the upper end of the furnace body as closely as possible, and will not affect the opening and closing of the furnace cover. This structure can reduce the air flow between the top heat-insulating structure and the furnace cover, so as to reduce the heat loss through gas flow and radiation heat transfer, thereby achieving the purpose of improving the heat-insulating effect and reducing power consumption; in addition, by providing a wall-hanging opening for inserting a water-cooling screen hanging arm at the side end of the opening, the opening does not need to be inserted into the water-cooling screen hanging arm, so as to reduce the opening area of ​​the opening, which not only facilitates the insertion of the water-cooling screen hanging arm into the wall-hanging opening, but also reduces the heat dissipation area of ​​the opening, so as to increase the area of ​​the top region of the furnace covered by the top heat-insulating body, improve the uniformity of the temperature distribution in the furnace, reduce the heat flow, and improve the stability of the thermal field power, so that the top heat-insulating structure has the advantages of reducing heat loss, reducing power consumption and improving the heat-insulating effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the thermal insulation cover in the prior art;

[0019] Figure 2 This is a three-dimensional schematic diagram of the top insulation structure of the utility model. Figure 1;

[0020] Figure 3 This is a three-dimensional schematic diagram of the top insulation structure of the utility model. Figure 2 ;

[0021] Figure 4 It is a schematic diagram of the planar structure of the top thermal insulation structure of the utility model;

[0022] Figure 5 It is an exploded schematic diagram of the top insulation structure of the utility model;

[0023] Figure 6 It is a schematic diagram of the internal structure of the single crystal furnace of the utility model.

[0024] The reference numerals are as follows:

[0025] 1. Top insulation body; 2. Arched part; 3. Opening; 5. Wall hanging opening; 6. Annular insulation board; 7. First splicing block; 8. Second splicing block; 9. Furnace body; 10. Upper insulation tube; 11. Furnace cover.

[0026] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] It should be noted that all directional indications in the embodiments of the present invention, such as up, down, left, right, front, back, clockwise, counterclockwise, etc., are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0029] In addition, the descriptions of "first", "second", etc. in the present utility model are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0030] like Figures 2 to 4 As shown, in this embodiment, the top insulation structure comprises a top insulation body 1, the upper end of the top insulation body 1 has an arched portion 2 extending upward, and the top insulation body 1 is provided with an opening 3 and a wall hanging opening 5 from bottom to top, and the wall hanging opening 5 is connected to the side end of the opening 3. Specifically, the opening 3 is used for heat dissipation inside the furnace body, and the wall hanging opening 5 is used for installing the water-cooling screen hanging arm inside the furnace body; when installed, the top insulation structure is located in the furnace body of the single crystal furnace and below the furnace cover.

[0031] With respect to the deficiencies of the prior art, in the present invention, by extending an arched portion 2 upward from the upper end of the top heat-insulating body 1, the overall thickness can be increased, so that the arched portion 2 can fit the furnace cover at the upper end of the furnace body as closely as possible, and will not affect the opening and closing of the furnace cover. This structure can reduce the air flow between the top heat-insulating structure and the furnace cover, so as to reduce the heat loss through gas flow and radiation heat transfer, thereby achieving the purpose of improving the heat-insulating effect and reducing power consumption; in addition, by providing a wall-hanging opening 5 for inserting a water-cooling screen hanging arm at the side end of the opening 3, the opening 3 does not need to be inserted with the water-cooling screen hanging arm, so as to reduce the opening area of ​​the opening 3, which not only facilitates the insertion of the water-cooling screen hanging arm into the wall-hanging opening 5, but also reduces the heat dissipation area of ​​the opening 3, so as to increase the area of ​​the top heat-insulating body 1 covering the top area of ​​the furnace, thereby improving the uniformity of the temperature distribution in the furnace, reducing the heat flow, and improving the stability of the thermal field power, so that the top heat-insulating structure has the advantages of reducing heat loss, reducing power consumption and improving the heat-insulating effect.

[0032] In some embodiments, the arched portion 2 is a hemispherical structure. Specifically, by setting the hemispherical arched portion 2, the periphery of the arched portion 2 can better fit with the furnace cover, reducing the air flow between the arched portion 2 and the furnace cover, so as to prevent the circulating water inside the furnace cover from taking away most of the heat from the top of the furnace.

[0033] In some embodiments, the opening 3 is located in the middle of the top heat-insulating body 1, and the number of the wall-hanging openings 5 ​​is two, and the two wall-hanging openings 5 ​​are respectively connected to the two side ends of the opening 3. Specifically, the opening 3 is a circular through hole, and the two wall-hanging openings 5 ​​are arranged opposite to each other.

[0034] In some embodiments, the top heat-insulating body 1 includes an annular heat-insulating plate 6, and the arched portion 2 is formed at the upper end of the annular heat-insulating plate 6; the top heat-insulating body 1 is an integrally formed structure.

[0035] like Figure 5As shown, in some embodiments, the top insulation body 1 is a split structure, and the top insulation body 1 includes a first splicing block 7 and a second splicing block 8, the inner side of the first splicing block 7 is connected to the inner side of the second splicing block 8; the inner side of the first splicing block 7 is provided with a card slot, and the inner side of the second splicing block 8 is provided with a card block adapted to the card slot. Specifically, the top insulation body 1 can also be a split structure, specifically split into the first splicing block 7 and the second splicing block 8 in the left and right parts, so as to facilitate the disassembly and assembly of the top insulation body 1 and reduce the production cost.

[0036] In some embodiments, the top insulation body 1 is a viscose-based insulation structure; the thickness of the top insulation body 1 ranges from 300mm to 450mm. Specifically, by setting the top insulation body 1 as a viscose-based insulation structure, the top insulation body 1 has certain rigidity, self-support, small specific gravity, no short fiber shedding, low thermal conductivity, high insulation performance and high temperature resistance. The use temperature can reach 3000℃, so that when it is covered on the top of the single crystal furnace thermal field, it can effectively cover the top area of ​​the furnace, effectively reduce heat loss, and improve the uniformity of temperature distribution in the furnace; in addition, when the thickness of the top insulation body 1 is increased to 300mm to 450mm, it has a better insulation effect.

[0037] In addition, if Figure 6 As shown, the utility model also provides a single crystal furnace, which includes a furnace body 9 and the top insulation structure, wherein the furnace body 9 is provided with a bottom insulation felt, a lower insulation tube, a middle insulation tube and an upper insulation tube 10 from bottom to top, and a furnace cover 11 is provided at the upper end of the furnace body 9, and the top insulation body 1 is provided in the furnace body 9, and the top insulation body 1 is provided on the upper insulation tube 10 and is located below the furnace cover 11.

[0038] The specific structure of the single crystal furnace refers to the above-mentioned embodiment. Since the single crystal furnace adopts all the embodiments of the above-mentioned top insulation structure, it has at least all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be described one by one here.

[0039] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A top insulation structure, characterized in that: It comprises a top heat-insulating body (1), the upper end of which is provided with an arched portion (2) extending upwards, and an opening (3) and a wall-hanging opening (5) are provided on the top heat-insulating body (1) from bottom to top, wherein the wall-hanging opening (5) is connected to the side end of the opening (3).

2. A top insulation structure according to claim 1, characterized in that: The arched portion (2) is a hemispherical structure.

3. A top insulation structure according to claim 1 or 2, characterized in that: The opening (3) is located in the middle of the top heat-insulating body (1), and there are two wall-hanging openings (5), which are respectively connected to two side ends of the opening (3).

4. A top insulation structure according to claim 1, characterized in that: The top heat-insulating body (1) comprises an annular heat-insulating plate (6), and the arched portion (2) is formed at the upper end of the annular heat-insulating plate (6).

5. A top insulation structure according to claim 4, characterized in that: The top heat-insulating body (1) is an integrally formed structure.

6. A top insulation structure according to claim 1, characterized in that: The top heat-insulating body (1) is a split structure, and comprises a first splicing block (7) and a second splicing block (8), wherein the inner side of the first splicing block (7) is connected to the inner side of the second splicing block (8).

7. A top insulation structure according to claim 6, characterized in that: The first splicing block (7) is provided with a slot on its inner side, and the second splicing block (8) is provided with a block matching the slot on its inner side.

8. A top insulation structure according to claim 1, characterized in that: The top heat-insulating body (1) is a viscose-based heat-insulating structure.

9. A top insulation structure according to claim 1 or 8, characterized in that: The thickness of the top heat-insulating body (1) ranges from 300 mm to 450 mm.

10. A single crystal furnace, characterized in that: It comprises a furnace body (9) and a top insulation structure as claimed in any one of claims 1 to 9, wherein the furnace body (9) is provided with a bottom insulation felt, a lower insulation tube, a middle insulation tube and an upper insulation tube (10) in sequence from bottom to top, a furnace cover (11) is provided at the upper end of the furnace body (9), the top insulation body (1) is provided in the furnace body (9), the top insulation body (1) is provided on the upper insulation tube (10), and is located below the furnace cover (11).

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