Multi-stage oil-free dry type vacuum system
By adopting a multi-stage oil-free dry vacuum system in the dry vacuum system and using a combination of multi-stage oil-free claw pumps and Roots vacuum pumps, the problems of low vacuum degree and low pumping speed of the existing dry vacuum pumps are solved and achieved More efficient vacuum extraction.
Patent Information
- Application Number
- CN202420998359.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-10
- Publication Date
- 2025-01-21
- Estimated Expiration
- 2034-05-10
AI Technical Summary
The low vacuum degree of the single pump of existing dry vacuum pumps leads to low vacuum efficiency and low pumping speed, which limits its use scenarios.
A multi-stage oil-free dry vacuum system is adopted, including a rough pump unit and a fine pump unit. The rough pump unit is composed of several oil-free claw pumps connected in parallel and in series. The fine pump unit is composed of a Roots vacuum pump and an oil-free claw pump. Composed in series, the air extraction interfaces of different pressures are realized through the rough and fine air inlet flanges.
It achieves higher vacuum degree and greater pumping speed, improving the vacuuming efficiency of the dry vacuum system.
Smart Images
Figure CN222376711U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of vacuum pumps, and in particular relates to a multi-stage oil-free dry vacuum system. Background Art
[0002] A dry vacuum pump is an oil-free vacuum pump that does not use any oil or other liquids in the working chamber and directly extracts gas through mechanical methods. The dry vacuum pump has the advantages of no oil consumption, stable performance and low cost. The oil-free claw pump commonly installed in the dry vacuum pump has the advantages of simple structure, low failure rate and maintenance-free. However, due to the low vacuum degree of a single pump, the use scenario is greatly limited, so the vacuuming efficiency is not high and the pumping speed is low.
[0003] In view of the above-mentioned prior art, it is necessary to reasonably improve the existing dry vacuum pump structure. To this end, the applicant has made a useful design, and the technical solution to be introduced below is produced under this background. Utility Model Content
[0004] The task of the utility model is to provide a multi-stage oil-free dry vacuum system, which adopts a multi-stage pump group to obtain a higher vacuum degree, and a Roots vacuum pump can be added to obtain a greater pumping speed and a higher ultimate vacuum degree.
[0005] The task of the utility model is accomplished in this way. A multi-stage oil-free dry vacuum system includes a frame, and an electric control box, a rough pump group and a fine pump group installed on the frame. The characteristics are: the rough pump group is composed of several oil-free claw pumps connected in parallel and then in series with another oil-free claw pump, and the oil-free claw pumps are connected through a rough pump group pipeline. The fine pump group is composed of a Roots vacuum pump and an oil-free claw pump connected in series through a fine pump group pipeline. The rough pump group and the fine pump group are connected in series. The rough pump group is provided with a rough air intake flange, and the fine pump group is provided with a fine air intake flange. The rough air intake flange and the fine air intake flange are both connected to the container to be pumped.
[0006] In a specific embodiment of the present utility model, the several oil-free claw pumps of the rough pump group are specifically a first rough oil-free claw pump and a second rough oil-free claw pump, and the other oil-free claw pump of the rough pump group is a third rough oil-free claw pump. The pipeline of the rough pump group includes a first rough pipeline, a second rough pipeline and a third rough pipeline. The first rough oil-free claw pump and the second rough oil-free claw pump are arranged up and down and connected through the first rough pipeline. One end of the second rough pipeline is connected to the first rough pipeline, and the other end is connected to the third rough oil-free claw pump, so as to realize the parallel connection of the first rough oil-free claw pump and the second rough oil-free claw pump and the series connection with the third rough oil-free claw pump.
[0007] In another specific embodiment of the utility model, the first oil-free claw pump for rough pumping is connected to a third rough pumping pipeline, a rough pumping air inlet interface is provided at the end of the third rough pumping pipeline, the rough pumping air inlet interface is connected to the fine pumping exhaust interface of the fine pumping pump group, and the rough pumping air inlet flange is provided on the pipeline body of the third rough pumping pipeline.
[0008] In another specific embodiment of the utility model, the Roots vacuum pump and the oil-free claw pump of the fine pump group are respectively a fine pumping Roots vacuum pump and a fine pumping oil-free claw pump, the fine pumping Roots vacuum pump and the fine pumping oil-free claw pump are connected in series through a fine pump group pipeline, and the fine pumping Roots vacuum pump is provided with the fine pumping air inlet flange and the fine pumping pressure gauge.
[0009] In another specific embodiment of the utility model, the fine pumping oil-free claw pump is provided with a fine pumping exhaust interface, and the fine pumping exhaust interface is connected to the rough pumping air inlet interface of the rough pumping group to realize the series connection of the rough pumping group and the fine pumping group.
[0010] The utility model has the beneficial effects of adopting the above structure: first, the vacuum system first evacuates the gas in the pumped cavity by the rough pump group, and after the pressure of the rough pump group is stable, the fine pump group automatically starts, and then the fine pump group evacuates the pumped cavity to a higher vacuum degree, and the rough and fine air inlet flanges of the vacuum system can be used at the same time, realizing that two air pumping interfaces with different pressures can be provided in a set of vacuum system; second, the addition of the Roots vacuum pump and the use of the oil-free claw pump can enable the vacuum system to obtain a higher pumping speed and a higher ultimate vacuum degree, thereby improving the vacuum pumping efficiency of the dry vacuum system. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 This is a schematic diagram of the overall structure of the multi-stage oil-free dry vacuum system of the utility model;
[0012] Figure 2 This is a schematic diagram of the structure of the roughing pump set of the utility model;
[0013] Figure 3 It is a structural schematic diagram of the fine pumping group described in the utility model.
[0014] In the figure: 1. rack; 2. electric control box; 3. roughing pump group, 31. roughing air inlet flange, 32. roughing air inlet interface, 33. roughing pump group pipeline, 331. roughing first pipeline, 332. roughing second pipeline, 333. roughing third pipeline, 34. roughing exhaust port, 35. roughing first oil-free claw pump, 36. roughing second oil-free claw pump, 37. roughing third oil-free claw pump, 38. roughing pressure gauge; 4. fine pumping pump group, 41. fine pumping air inlet flange, 42. fine pumping exhaust interface, 43. fine pumping pump group pipeline, 44. fine pumping Roots vacuum pump, 45. fine pumping oil-free claw pump, 46. fine pumping pressure gauge. DETAILED DESCRIPTION
[0015] The specific implementation methods of the present invention are described in detail below in conjunction with the accompanying drawings, but the description of the embodiments is not a limitation of the technical solution. Any changes in form rather than substance based on the concept of the present invention should be regarded as the protection scope of the present invention.
[0016] In the following description, all concepts related to directionality or orientation such as up, down, left, right, front and back are based on the positions shown in the corresponding drawings. They are only used to facilitate the description of the technical solution provided by the utility model and simplify the description in conjunction with the drawings, and therefore cannot be understood as a special limitation on the technical solution provided by the utility model.
[0017] See also Figure 1 The utility model relates to a multi-stage oil-free dry vacuum system, comprising a frame 1, an electric control box 2, a rough pump group 3 and a fine pump group 4. The electric control box 2, the rough pump group 3 and the fine pump group 4 are arranged on the frame 1. The rough pump group 3 and the fine pump group 4 are both arranged on the upper and lower layers of the frame 1. The electric control box 2 controls the rough pump group 3 and the fine pump group 4 to perform suction work.
[0018] The roughing pump group 3 is composed of several oil-free claw pumps connected in parallel and then in series with another oil-free claw pump, and the oil-free claw pumps are connected through a roughing pump group pipeline 33. The fine pump group 4 is composed of a Roots vacuum pump and an oil-free claw pump connected in series through a fine pump group pipeline 43. The roughing pump group 3 and the fine pump group 4 are connected in series through a roughing third pipeline 333.
[0019] Specifically, Figure 1 and Figure 2As shown, in this embodiment, the several oil-free claw pumps of the rough pump group 3 are specifically the first rough oil-free claw pump 35 and the second rough oil-free claw pump 36, and the other oil-free claw pump of the rough pump group 3 is the third rough oil-free claw pump 37. The rough pump group pipeline 33 includes a first rough pumping pipeline 331, a second rough pumping pipeline 332 and a third rough pumping pipeline 333. The first rough pumping claw pump 35 and the second rough pumping claw pump 36 are arranged up and down and connected through the first rough pumping pipeline 331, that is, the two ends of the first rough pumping pipeline 331 are respectively connected to the first rough pumping claw pump 35 and the second rough pumping claw pump 36 to realize the connection between the two. One end of the second rough pumping pipeline 332 is connected to the first rough pumping pipeline 331, and the other end is connected to the third rough pumping claw pump 37, so as to realize the parallel connection of the first rough pumping claw pump 35 and the second rough pumping claw pump 36 and the series connection with the third rough pumping claw pump 37.
[0020] The first oil-free claw pump 35 for rough pumping is connected to a third rough pumping pipe 333, the end of the third rough pumping pipe 333 is provided with a rough pumping air intake interface 32, the pipe body of the third rough pumping pipe 333 is provided with a rough pumping air intake flange 31, and the rough pumping air intake flange 31 is connected to the pumped container.
[0021] like Figure 1 and Figure 3 As shown, the Roots vacuum pump and the oil-free claw pump of the fine pumping group 4 are respectively a fine pumping Roots vacuum pump 44 and a fine pumping oil-free claw pump 45, which are arranged up and down and connected by a fine pumping group pipeline 43 to achieve series connection. The fine pumping Roots vacuum pump 44 is provided with a fine pumping air intake flange 41 and a fine pumping pressure gauge 46, the fine pumping air intake flange 41 is connected to the pumped container, and the fine pumping pressure gauge 46 is used to measure the gas pressure in the fine pumping group 4.
[0022] The fine pumping oil-free claw pump 45 is provided with a fine pumping exhaust interface 42, and the fine pumping exhaust interface 42 is connected to the rough pumping air inlet interface 32 of the rough pumping group 3, so as to realize the series connection of the rough pumping group 3 and the fine pumping group 4. The gas sucked by the fine pumping group 4 is discharged into the rough pumping group 3 and then discharged through the rough pump group 3.
[0023] Please continue reading Figures 1 to 3 The working principle of the multi-stage oil-free dry vacuum system described in the utility model is:
[0024] When the system is started, the third roughing oil-free claw pump 37 in the roughing pump group 3 is started first, and the gas is drawn into the pump group through the roughing intake flange 31, and discharged from the exhaust port 34 through the roughing pump group pipeline 33; after the pressure in the roughing pump group pipeline 33 drops and reaches the preset value, the first roughing oil-free claw pump 35 and the second roughing oil-free claw pump 36 are started; after the pressure in the fine pump group pipeline 43 drops and reaches the preset value, the fine pumping oil-free claw pump 45 in the fine pump group 4 is started; after the pressure in the fine pump group pipeline 43 continues to drop and reaches the preset value, the fine pumping Roots vacuum pump 44 is turned on, and the entire multi-stage oil-free dry vacuum system starts to work normally. The gas is drawn into the pump group through the fine pumping intake flange 41, passes through the fine pump group pipeline 43, and then passes through the fine pumping exhaust interface 42 and the roughing intake interface 32. At this time, the gas sucked by the fine pump group 4 is merged into the pump group pipeline 33, and finally discharged from the roughing exhaust port 34.
Claims
1. A multi-stage oil-free dry vacuum system, comprising a frame (1), an electric control box (2), a roughing pump group (3) and a fine pump group (4) mounted on the frame (1), characterized in that: The roughing pump group (3) is composed of several oil-free claw pumps connected in parallel and then in series with another oil-free claw pump, and the oil-free claw pumps are connected via a roughing pump group pipeline (33). The fine pump group (4) is composed of a Roots vacuum pump and an oil-free claw pump connected in series via a fine pump group pipeline (43). The roughing pump group (3) and the fine pump group (4) are connected in series. The roughing pump group (3) is provided with a roughing air intake flange (31), and the fine pump group (4) is provided with a fine pumping air intake flange (41). Both the roughing air intake flange (31) and the fine pumping air intake flange (41) are connected to the pumped container.
2. A multi-stage oil-free dry vacuum system according to claim 1, characterized in that: The several oil-free claw pumps of the rough pumping pump group (3) are specifically a first rough pumping oil-free claw pump (35) and a second rough pumping oil-free claw pump (36); another oil-free claw pump of the rough pumping pump group (3) is a third rough pumping oil-free claw pump (37); the rough pumping pump group pipeline (33) comprises a first rough pumping pipeline (331), a second rough pumping pipeline (332) and a third rough pumping pipeline (333); the first rough pumping oil-free claw pump (35) and the second rough pumping oil-free claw pump (36) are arranged up and down and connected through the first rough pumping pipeline (331); one end of the second rough pumping pipeline (332) is connected to the first rough pumping pipeline (331), and the other end is connected to the third rough pumping oil-free claw pump (37), so that the first rough pumping oil-free claw pump (35) and the second rough pumping oil-free claw pump (36) are connected in parallel and connected in series with the third rough pumping oil-free claw pump (37).
3. A multi-stage oil-free dry vacuum system according to claim 2, characterized in that: The first oil-free claw pump (35) for rough pumping is connected to a third rough pumping pipeline (333), and a rough pumping air intake interface (32) is provided at the end of the third rough pumping pipeline (333). The rough pumping air intake interface (32) is connected to the fine pumping exhaust interface (42) of the fine pumping pump group (4), and the pipeline body of the third rough pumping pipeline (333) is provided with the rough pumping air intake flange (31).
4. A multi-stage oil-free dry vacuum system according to claim 1, characterized in that: The Roots vacuum pump and the oil-free claw pump of the fine pumping pump group (4) are respectively a fine pumping Roots vacuum pump (44) and a fine pumping oil-free claw pump (45), and the fine pumping Roots vacuum pump (44) and the fine pumping oil-free claw pump (45) are connected in series via a fine pumping pump group pipeline (43), and the fine pumping Roots vacuum pump (44) is provided with the fine pumping air inlet flange (41) and the fine pumping pressure gauge (46).
5. A multi-stage oil-free dry vacuum system according to claim 4, characterized in that: The fine pumping oil-free claw pump (45) is provided with a fine pumping exhaust interface (42), and the fine pumping exhaust interface (42) is connected to the rough pumping air intake interface (32) of the rough pumping group (3), so as to realize the series connection of the rough pumping group (3) and the fine pumping group (4).