Visual inspection device for integrated circuit device

Abstract

The utility model discloses a visual detection device for an integrated circuit device. The visual detection device is positioned below a connecting plate and is provided with a plurality of detection probes at intervals along the circumferential direction; a first conveying belt and a second conveying belt are arranged on one side of the mounting table in a spaced mode, the conveying directions of the first conveying belt and the second conveying belt are opposite, and a sliding rail provided with a sliding block is arranged on the side, opposite to the mounting table, of the second conveying belt in the mode of being perpendicular to the second conveying belt. A slide rail is arranged on the mounting table, a limiting seat is fixedly mounted on one side, close to the mounting table, of the slide rail, a transmission shaft is slidably mounted between the slide block and the limiting seat, a motor fixedly connected with one end of the transmission shaft is mounted at the top of the slide block, and the other end of the transmission shaft can penetrate through the limiting seat and is fixedly connected with a probe plate for placing a chip body. According to the conveying device, products can be conveyed in a classified mode, the transfer time of the products among different working procedures is saved, and the overall production efficiency can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of chip detection, in particular to a visual detection device for integrated circuit components. Background Art

[0002] With the development of integrated circuits, advanced packaging technology continues to evolve and change to adapt to the requirements and challenges of various new semiconductor processes and new materials. In semiconductor packaging, in order to ensure chip quality, the chips need to be visually inspected after testing and sorting according to the process flow, and chips with poor appearance are picked out before being put into storage. In order to improve the inspection efficiency, machine vision appearance inspection equipment with inspection probes is currently used for quality inspection.

[0003] After searching, the patent publication number CN220177566U discloses "a chip appearance detection, classification and rejection device", including a workbench and a detection tool. There are racks on both sides of the workbench, one of which has a second conveyor belt on the upper end, and the other has a first conveyor belt on the upper end. A turntable is provided at the upper end of the workbench, and a number of slots for placing chips are opened at the upper end of the turntable. Each slot is arranged in a circular array, and the detection tool is placed above one of the slots. The device controls the turntable to rotate intermittently at the upper end of the workbench through a transmission device, and switches the chips that have been detected under the detection tool. When the detection tool is performing detection and chip switching, the slide table robot arm will send the chip on the first conveyor belt into the slot at the upper end of the turntable, or take out the chip in the slot, and then send it out through the second conveyor belt, which can effectively reduce the waiting time of the detection tool and improve the working efficiency.

[0004] The chip is transported to the inspection site. After the inspection is completed, the chip needs to be picked up by a mechanical claw and placed on another conveyor belt. However, the mechanical claw can only realize loading or unloading during a single operation. If the chip inspection fails, the mechanical claw needs to pick up the chip and place it in the corresponding position, and then move to the loading site to pick up a new chip, resulting in a long transfer time of the chip between different processes, affecting the overall production efficiency. Utility Model Content

[0005] The purpose of the utility model is to provide a visual inspection device for integrated circuit devices, which can realize the classified transmission of products, save the transfer time of products between different processes, and is conducive to improving the overall production efficiency.

[0006] To achieve the above object, the technical solution adopted by the utility model is: an integrated circuit device visual inspection device, comprising: a mounting platform, a connecting plate is arranged above the mounting platform, and a plurality of detection probes are arranged below the connecting plate and spaced apart along the circumferential direction;

[0007] A first conveyor belt and a second conveyor belt are arranged at intervals on one side of the mounting platform, and the transmission directions of the first conveyor belt and the second conveyor belt are opposite. A slide rail with a slider installed is arranged on the side of the second conveyor belt opposite to the mounting platform and perpendicular to the second conveyor belt, and a limit seat is fixedly installed on the side of the slide rail close to the mounting platform, a transmission shaft is slidably installed between the slider and the limit seat, and a motor fixedly connected to one end of the transmission shaft is installed on the top of the slider, and the other end of the transmission shaft can pass through the limit seat and is fixedly connected to a probe plate for placing the chip body.

[0008] The further improved scheme in the above technical scheme is as follows:

[0009] 1. In the above solution, an electric telescopic rod is provided between the connecting plate and the mounting platform.

[0010] 2. In the above solution, an arc-shaped fill light plate is respectively provided on both sides of the connecting plate.

[0011] 3. In the above solution, the detection probe and the connecting plate are fixedly connected by a connecting rod.

[0012] 4. In the above solution, a positioning seat is disposed on one side of the motor and on the slider, and one end of the transmission shaft away from the limiting seat can penetrate the positioning seat and be fixedly connected to the output shaft of the motor.

[0013] Due to the application of the above technical solution, the utility model has the following advantages compared with the prior art:

[0014] The utility model provides a visual inspection device for integrated circuit devices, wherein a first conveyor belt and a second conveyor belt are arranged at intervals on one side of a mounting platform, a slide rail with a slider installed is arranged on the side of the second conveyor belt opposite to the mounting platform and in a manner perpendicular to the second conveyor belt, and a limit seat is fixedly installed on the side of the slide rail close to the mounting platform, a transmission shaft is slidably installed between the slider and the limit seat, and a motor fixedly connected to one end of the transmission shaft is installed on the top of the slider, and the other end of the transmission shaft can pass through the limit seat and is fixedly connected to a probe plate for placing a chip body, so that the chip body is transferred between a plurality of detection probes for all-round detection, after the detection is completed, the detection probe is moved away from the detection probe through a cross plate and the probe plate is located above the first conveyor belt or the second conveyor belt, and the transmission shaft is driven to rotate by the motor so that the chip body on the probe plate directly falls on the first conveyor belt or the second conveyor belt for continued transmission, while realizing all-round visual inspection of the material, products with different inspection results can be placed on different conveyor belts, so as to realize classified transmission of products, save the transfer time of products between different processes, and help improve the overall production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Attached Figure 1 This is a schematic diagram of the overall structure of the integrated circuit device visual inspection device of the utility model;

[0016] Attached Figure 2 The schematic diagram of the local structure of the integrated circuit device visual inspection device of the utility model is as follows: Figure 1 ;

[0017] Attached Figure 3 The schematic diagram of the local structure of the integrated circuit device visual inspection device of the utility model is as follows: Figure 2 .

[0018] In the above drawings: 1. mounting table; 2. electric telescopic rod; 3. connecting plate; 4. connecting rod; 5. detection probe; 6. arc fill light plate; 71. limit seat; 72. motor; 73. positioning seat; 74. transmission shaft; 75. probe plate; 8. first conveyor belt; 9. second conveyor belt; 10. chip body; 11. slider; 12. slide rail. DETAILED DESCRIPTION

[0019] The present invention can be further understood through the specific embodiments given below, but they are not intended to limit the present invention.

[0020] Embodiment 1: A visual inspection device for integrated circuit devices, comprising: a mounting platform 1, a connecting plate 3 is arranged above the mounting platform 1, and a plurality of inspection probes 5 are arranged below the connecting plate 3 and spaced apart along the circumferential direction;

[0021] A first conveyor belt 8 and a second conveyor belt 9 are arranged at intervals on one side of the mounting platform 1, and the conveying directions of the first conveyor belt 8 and the second conveyor belt 9 are opposite. A slide rail 12 with a slider 11 is arranged on the side of the second conveyor belt 9 opposite to the mounting platform 1 and perpendicular to the second conveyor belt 9, and a limit seat 71 is fixedly installed on the side of the slide rail 12 close to the mounting platform 1;

[0022] Place the chip body on the probe plate, and slide the slider along the slide rail, thereby driving the transmission shaft to move inside the limit seat. When the transmission shaft moves, it drives the probe plate to move, and the movement of the probe plate can drive the chip body to move. When the chip body moves to the bottom of the connecting plate, open the detection probe, and multiple detection probes perform all-round scanning and detection around the chip body, and transmit the data to the background;

[0023] A transmission shaft 74 is slidably mounted between the slider 11 and the limit seat 71, and a motor 72 fixedly connected to one end of the transmission shaft 74 is mounted on the top of the slider 11, and the other end of the transmission shaft 74 can penetrate the limit seat 71 and is fixedly connected to a probe plate 75 on which the chip body 10 is placed;

[0024] By starting the electric telescopic rod, the electric telescopic rod drives the connecting plate to move, the connecting plate drives the connecting rod to move, and the connecting rod drives the detection probe to move, so as to realize multi-stage zoom detection of the chip body. At the same time, in a dim environment, in order to prevent the detection results from being inaccurate due to the influence of light, the arc fill light board can be started. The two arc fill light boards can provide high brightness light, thereby providing light assistance to the chip body.

[0025] An electric telescopic rod 2 is arranged between the connecting plate 3 and the mounting platform 1 .

[0026] An arc-shaped fill light plate 6 is disposed on each of the two sides of the connecting plate 3 .

[0027] The detection probe 5 is fixedly connected to the connecting plate 3 via a connecting rod 4;

[0028] The detection probes 5 are arranged at equal intervals.

[0029] The above-mentioned slide rail is an electric slide rail.

[0030] Embodiment 2: A visual inspection device for integrated circuit devices, comprising: a mounting platform 1, a connecting plate 3 is arranged above the mounting platform 1, and a plurality of inspection probes 5 are arranged below the connecting plate 3 and spaced apart along the circumferential direction;

[0031] A first conveyor belt 8 and a second conveyor belt 9 are arranged at intervals on one side of the mounting platform 1, and the conveying directions of the first conveyor belt 8 and the second conveyor belt 9 are opposite. A slide rail 12 with a slider 11 is arranged on the side of the second conveyor belt 9 opposite to the mounting platform 1 and perpendicular to the second conveyor belt 9, and a limit seat 71 is fixedly installed on the side of the slide rail 12 close to the mounting platform 1;

[0032] The chip body is transferred between several detection probes for all-round detection. After the detection is completed, the detection probe is moved away from the detection probe by a horizontal plate and the detection plate is located above the first conveyor belt or the second conveyor belt. The transmission shaft is then driven to rotate by a motor so that the chip body on the detection plate falls directly on the first conveyor belt or the second conveyor belt for further transmission.

[0033] A transmission shaft 74 is slidably mounted between the slider 11 and the limit seat 71, and a motor 72 fixedly connected to one end of the transmission shaft 74 is mounted on the top of the slider 11, and the other end of the transmission shaft 74 can penetrate the limit seat 71 and is fixedly connected to a probe plate 75 on which the chip body 10 is placed;

[0034] While achieving all-round visual inspection of materials, products with different inspection results can be placed on different conveyor belts to achieve classified transmission of products, saving the transfer time of products between different processes and helping to improve overall production efficiency.

[0035] An electric telescopic rod 2 is arranged between the connecting plate 3 and the mounting platform 1 .

[0036] An arc-shaped fill light plate 6 is disposed on each of the two sides of the connecting plate 3 .

[0037] A positioning seat 73 is disposed on one side of the motor 72 and on the slider 11, and one end of the transmission shaft 74 away from the limiting seat 71 can penetrate the positioning seat 73 and be fixedly connected to the output shaft of the motor 72;

[0038] When the detection is completed, the slider drives the probe plate to move through the transmission shaft. When the chip body is moved to the top of the first conveyor belt or the second conveyor belt according to the detection result, the motor is started, the motor drives the transmission shaft to rotate, and the transmission shaft drives the probe plate to rotate. The rotation of the probe plate can flip the chip body to the surface of the first conveyor belt or the second conveyor belt. The first conveyor belt and the second conveyor belt can then transmit the chip body. Since the transmission directions of the first conveyor belt and the second conveyor belt are different, the chip bodies with different detection results can be classified and screened.

[0039] The two arc-shaped fill light panels 6 arranged opposite to each other are symmetrically distributed about the electric telescopic rod 2 .

[0040] The above-mentioned slider is an electric slider.

[0041] The working principle is:

[0042] When in use, place the chip body on the probe plate, and make the slider slide on the slide rail, thereby driving the transmission shaft to move inside the limit seat. When the transmission shaft moves, it drives the probe plate to move, and the movement of the probe plate can drive the chip body to move. When the chip body moves to the bottom of the connecting plate, open the detection probe, and multiple detection probes perform all-round scanning and detection around the chip body, and transmit the data to the background;

[0043] By starting the electric telescopic rod, the electric telescopic rod drives the connecting plate to move, the connecting plate drives the connecting rod to move, and the connecting rod drives the detection probe to move, so as to realize multi-stage zoom detection of the chip body. At the same time, in a dim environment, to prevent the inaccurate detection results caused by the influence of light, the arc fill light board can be started. The two arc fill light boards can provide high-brightness light, thereby providing light assistance to the chip body;

[0044] When the detection is completed, the slider drives the probe plate to move through the transmission shaft. When the chip body is moved to the top of the first conveyor belt or the second conveyor belt according to the detection result, the motor is started, the motor drives the transmission shaft to rotate, and the transmission shaft drives the probe plate to rotate. The rotation of the probe plate can flip the chip body to the surface of the first conveyor belt or the second conveyor belt. The first conveyor belt and the second conveyor belt can then transmit the chip body. Since the transmission directions of the first conveyor belt and the second conveyor belt are different, the chip bodies with different detection results can be classified and screened.

[0045] When the above-mentioned integrated circuit device visual inspection device is used, after the inspection is completed, the probe plate retracts to hold the chip body to be inspected, and at the same time, the probe plate is flipped so that the inspected chip falls on the first conveyor belt or the second conveyor belt for further transmission. While achieving all-round visual inspection of the material, products with different inspection results can be placed on different conveyor belts to achieve classified transmission of products, saving the transfer time of products between different processes, which is beneficial to improving overall production efficiency.

[0046] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. An integrated circuit device visual inspection device, comprising: The mounting platform (1) is characterized in that a connecting plate (3) is arranged above the mounting platform (1), and a plurality of detection probes (5) are arranged below the connecting plate (3) and at intervals along the circumferential direction; A first conveyor belt (8) and a second conveyor belt (9) are arranged at intervals on one side of the mounting platform (1), and the conveying directions of the first conveyor belt (8) and the second conveyor belt (9) are opposite. A slide rail (12) equipped with a slider (11) is arranged on the side of the second conveyor belt (9) opposite to the mounting platform (1) and in a manner perpendicular to the second conveyor belt (9). A limit seat (71) is fixedly installed on the side of the slide rail (12) close to the mounting platform (1). A transmission shaft (74) is slidably installed between the slider (11) and the limit seat (71). A motor (72) fixedly connected to one end of the transmission shaft (74) is installed on the top of the slider (11). The other end of the transmission shaft (74) can pass through the limit seat (71) and is fixedly connected to a probe plate (75) for placing a chip body (10).

2. The integrated circuit device visual inspection device according to claim 1, characterized in that: An electric telescopic rod (2) is arranged between the connecting plate (3) and the mounting platform (1).

3. The integrated circuit device visual inspection device according to claim 1, characterized in that: An arc-shaped fill light plate (6) is respectively arranged on both sides of the connecting plate (3).

4. The integrated circuit device visual inspection device according to claim 1, characterized in that: The detection probe (5) and the connecting plate (3) are fixedly connected via a connecting rod (4).

5. The integrated circuit device visual inspection device according to claim 1, characterized in that: A positioning seat (73) is provided on one side of the motor (72) and on the slider (11), and one end of the transmission shaft (74) away from the limiting seat (71) can penetrate the positioning seat (73) and be fixedly connected to the output shaft of the motor (72).

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