Lifting sliding table and vacuum treatment system

Abstract

The utility model relates to the technical field of vacuum equipment, and discloses a lifting sliding table and a vacuum treatment system. A lifting sliding table comprises a base, a lifting assembly, a lifting platform and a supporting frame. The lifting assembly is arranged on the base. The lifting platform is connected with the lifting assembly and used for being driven by the lifting assembly to ascend and descend. The supporting frame is arranged on the lifting platform and comprises a frame body, a first buffering assembly and a supporting platform. The first buffer assembly is arranged on the frame body. The support platform is disposed on a first buffer assembly that permits installation error and / or movement offset of the support platform.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum equipment, and in particular to a lifting slide and a vacuum processing system. Background Art

[0002] In the process of industrial manufacturing, scientific research experiments, etc., the docking of the target gun and the matcher is a crucial link, which is directly related to the stability and safety of the entire system. Rigid insertion is a common connection method, which has the advantages of simple structure and convenient installation. However, this connection method also has obvious shortcomings. Because it lacks sufficient elastic buffering, once there is a slight position deviation or uneven force between the target gun and the matcher, it may cause the insertion port to be subjected to excessive pressure or shear force, which in turn causes serious problems such as tearing. Tearing of the insertion port will not only cause damage to the equipment, but may also affect the normal operation of the entire system and even cause safety accidents. Utility Model Content

[0003] The present disclosure provides a lifting slide, comprising:

[0004] Pedestal;

[0005] A lifting assembly is arranged on a base;

[0006] A lifting platform, connected to the lifting assembly, and used for lifting and lowering under the drive of the lifting assembly;

[0007] The support frame is arranged on the lifting platform and comprises:

[0008] Frame;

[0009] A first buffer assembly is disposed on the frame; and

[0010] The support platform is arranged on the first buffer assembly, and the first buffer assembly allows installation error and / or movement deviation of the support platform.

[0011] In some embodiments of the present disclosure, the first buffer assembly includes a plurality of first buffer rods arranged at intervals between the frame and the support platform, and the first buffer rods are used to provide buffering for the support platform.

[0012] In some embodiments of the present disclosure, the first buffer rod includes:

[0013] A first buffer tube, comprising an elastic tube body and a hollow cavity extending axially in the tube body;

[0014] A first guide shaft, the upper end portion of which is axially sleeved in the hollow cavity of the first buffer tube, and the upper end of the first guide shaft is connected to the support platform; and

[0015] The first linear bearing is fixedly connected to the frame and sleeved on the outer portion of the lower end of the first guide shaft. The upper end of the first linear bearing is connected to the lower end of the first buffer tube. The first guide shaft can slide in the first linear bearing.

[0016] In some embodiments of the present disclosure, the hollow cavity of the first buffer tube passes through the elastic tube body of the first buffer tube, and the upper end of the elastic tube body of the first buffer tube abuts against the support platform, and the lower end abuts against the upper end of the first linear bearing.

[0017] In some embodiments of the present disclosure, the lifting slide further includes a buffer platform, and the buffer platform includes:

[0018] A fixed plate, fixedly connected to the lifting platform;

[0019] A second buffer assembly, the lower end of which is connected to the fixing plate; and

[0020] The buffer plate is connected to the upper end of the second buffer assembly to provide buffering for the buffer plate.

[0021] In some embodiments of the present disclosure, the second buffer assembly includes a plurality of second buffer rods, which are arranged at intervals between the fixing plate and the buffer plate, and are used to provide buffering for the buffer plate; and / or

[0022] The lifting platform includes a lifting platform through hole, a fixing plate is arranged on the lower side of the lifting platform through hole, and there is a gap between the fixing plate and the lower end surface of the lifting platform, the buffer plate is arranged in the lifting platform through hole, and the upper end surface of the buffer plate is aligned with the upper end surface of the lifting platform or the upper end surface of the buffer plate is higher than the upper end surface of the lifting platform.

[0023] In some embodiments of the present disclosure, the second buffer rod includes:

[0024] A second buffer tube comprises an elastic tube body and a hollow cavity extending axially in the tube body;

[0025] A second guide shaft, the upper end portion of which is axially sleeved in the hollow cavity of the second buffer tube, and the upper end of the second guide shaft is connected to the buffer plate; and

[0026] A second linear bearing is fixedly connected to the fixing plate and sleeved on the outer portion of the lower end of the second guide shaft, the upper end of the second linear bearing is connected to the lower end of the second buffer tube, and the second guide shaft can slide in the second linear bearing; and / or

[0027] The hollow cavity of the second buffer tube penetrates the elastic tube body of the second buffer tube, and the upper end of the elastic tube body of the second buffer tube abuts against the buffer plate, and the lower end abuts against the upper end of the second linear bearing.

[0028] In some embodiments of the present disclosure, the lifting assembly includes:

[0029] Lifting drive device;

[0030] The gear transmission mechanism is connected to the output end of the lifting drive device to receive the driving force, and the gear transmission mechanism includes:

[0031] At least two worm gears;

[0032] at least two worm wheels, respectively meshing with at least two worms;

[0033] At least two screw rods are respectively inserted into the inner rings of at least two worm gears; and

[0034] At least two screw nuts are respectively threadedly connected to at least two screws, the lifting platform is fixedly connected to the screw nuts of the at least two screws, and the lifting drive device drives the lifting platform up and down through at least two worms, at least two worm wheels, at least two screws, and at least two screw nuts.

[0035] In some embodiments of the present disclosure, the lifting slide further includes a vehicle body for carrying the lifting slide, and the vehicle body includes at least one track;

[0036] The base comprises a sliding assembly arranged at the bottom of the base, and the sliding assembly cooperates with at least one track so that the lifting slide can slide on the vehicle body.

[0037] The present disclosure provides a vacuum processing system, comprising:

[0038] Vacuum chamber;

[0039] A cathode target, the upper end of which is sealed and connected to the vacuum chamber, and the cathode target includes a target gun;

[0040] According to the lifting slide in any one of the embodiments of the present disclosure, the supporting platform of the lifting slide is used to carry the cathode target; and

[0041] The matcher is arranged on the lifting platform and comprises an inserting end for inserting into the matching port of the target gun.

[0042] In some embodiments of the present disclosure, the lower end of the matcher is disposed on a buffer plate of the buffer platform; and / or

[0043] The cathode target includes at least one positioning hole;

[0044] The support frame also includes at least one positioning rod, the lower end of the at least one positioning rod is connected to the frame body, and the upper end of the at least one positioning rod is accommodated in at least one positioning hole to position the matching port of the target gun and the insertion end of the matcher.

[0045] According to some embodiments of the present disclosure, the lifting slide and vacuum processing system can bring beneficial technical effects. For example, the lifting slide and vacuum processing system of some embodiments of the present disclosure can not only drive the mechanism set on the lifting platform to lift, but also can dampen the mechanism on the lifting platform. For another example, the lifting slide and vacuum processing system of some embodiments of the present disclosure include a double damping platform, which can dampen the mechanisms set on the two platforms separately, ensuring that the two mechanisms are in a stable and relatively flexible state. For another example, the lifting slide and vacuum processing system of some embodiments of the present disclosure can dampen the cathode target and the matcher separately, so that when the two are connected, no stress is generated to avoid any impact on the matching plug. In addition, in the lifting slide and vacuum processing system of some embodiments of the present disclosure, the cathode target can not only be lifted and lowered but also can slide horizontally, which facilitates the replacement of the target material during installation and disassembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0047] Figure 1 A schematic diagram showing the structure of a lifting slide according to some embodiments of the present disclosure is shown;

[0048] Figure 2 A schematic structural diagram of a first buffer rod according to some embodiments of the present disclosure is shown;

[0049] Figure 3 A schematic diagram showing the structure of a buffer platform according to some embodiments of the present disclosure is shown;

[0050] Figure 4 A schematic diagram showing the structure of a lifting assembly according to some embodiments of the present disclosure is shown;

[0051] Figure 5 A partial structural schematic diagram of a vacuum processing system according to some embodiments of the present disclosure is shown;

[0052] Figure 6 A schematic structural diagram of a vacuum processing system according to some embodiments of the present disclosure is shown;

[0053] In the above drawings, the reference numerals represent:

[0054] 1000-Vacuum treatment system

[0055] 100-Lifting slide

[0056] 110-Base

[0057] 111-Sliding assembly

[0058] 120-Lifting assembly

[0059] 121-Lifting drive device

[0060] 122-Gear transmission mechanism

[0061] 1221, 1221a, 1221b-Worm

[0062] 123, 123a, 123b-Worm gear

[0063] 124, 124a, 124b-screw

[0064] 125, 125a, 125b-screw nut

[0065] 130-Lifting platform

[0066] 131-Lifting platform through hole

[0067] 140-Support frame

[0068] 141-frame;

[0069] 142-First buffer component

[0070] 1421-First buffer rod

[0071] 14211-First buffer tube

[0072] 14212-First guide shaft

[0073] 14213-First Linear Bearing

[0074] 143-Support Platform

[0075] 144-Positioning rod

[0076] 150-Buffer platform

[0077] 151-Fixed plate

[0078] 152-Second buffer component

[0079] 1521-Second buffer rod

[0080] 153-Buffer plate

[0081] 154-Connection plate

[0082] 160-Hull

[0083] 161-Track

[0084] 200-Vacuum chamber

[0085] 300-Cathode Target

[0086] 310-Target Gun

[0087] 400-Matcher

[0088] 410-Insertion end DETAILED DESCRIPTION

[0089] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0090] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "coupled" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. In the description of the present disclosure, the distal end or the distal side refers to an end or a side that penetrates into a vacuum environment (e.g., a vacuum chamber), and the proximal end or the proximal side refers to an end or a side opposite to the distal end or the distal side (e.g., an end or a side that is away from the vacuum chamber, or an end or a side that is close to the vacuum chamber wall in the vacuum chamber, etc.). Alternatively, the end close to the driving device is the proximal end, and the end away from the driving device is the distal end. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0091] Figure 1 A schematic structural diagram of a lifting slide 100 according to some embodiments of the present disclosure is shown.

[0092] like Figure 1As shown, in some embodiments of the present disclosure, the lifting slide 100 may include a base 110, a lifting assembly 120, a lifting platform 130 and a support frame 140. The lifting assembly 120 is arranged on the base 110. The lifting platform 130 is connected to the lifting assembly 120, and is used to be lifted and lowered under the drive of the lifting assembly 120. The support frame 140 is arranged on the lifting platform 130. The support frame 140 may include a frame body 141, a first buffer assembly 142 and a support platform 143. The first buffer assembly 142 is arranged on the frame body 141. The support platform 143 is arranged on the first buffer assembly 142, and the first buffer assembly 142 allows installation errors and / or movement offsets of the support platform 143.

[0093] The lifting slide 100 of some embodiments of the present disclosure can not only drive the mechanism disposed on the lifting platform 130 to rise and fall, but also can drive the mechanism disposed on the lifting platform 130 (for example, Figure 5 and Figure 6 The cathode target 300 shown in FIG. 1 is provided with a vibration-absorbing structure, thereby allowing for installation errors and / or movement deviations of the support platform 143 and avoiding the impact of the mechanism (e.g., Figure 5 and Figure 6 The cathode target 300 shown in FIG. 10 ) and / or a mechanism for docking with a mechanism on the lifting platform 130 (e.g., Figure 5 and Figure 6 The rigidity of the matching device 400 shown is damaged.

[0094] like Figure 1 As shown, in some embodiments of the present disclosure, the first buffer assembly 142 may include a plurality of first buffer rods 1421 arranged at intervals between the frame 141 and the support platform 143 , and the first buffer rods 1421 are used to provide buffering for the support platform 143 .

[0095] Those skilled in the art will appreciate that the support platform 143 should be interpreted broadly and may adopt any suitable structure and implementation method. Figure 1 As shown, the support platform 143 may include a plurality of support members, which are respectively disposed on the plurality of first buffer rods 1421. For another example, in some embodiments, the support platform 143 may include a support structure such as a support frame or a support plate, which is disposed on the plurality of first buffer rods 1421 of the first buffer assembly 142.

[0096] like Figure 1 As shown, in some embodiments, the plurality of first buffer rods 1421 may include seven first buffer rods 1421. It will be appreciated by those skilled in the art that although Figure 1 Only seven first buffer rods 1421 are shown, but this is merely exemplary, and the first buffer assembly 142 may also include other suitable numbers of first buffer rods 1421, such as three, nine, etc.

[0097] Figure 2 A schematic structural diagram of a first buffer rod 1421 according to some embodiments of the present disclosure is shown.

[0098] like Figure 2 As shown, in some embodiments of the present disclosure, the first buffer rod 1421 may include a first buffer tube 14211, a first guide shaft 14212 and a first linear bearing 14213. The first buffer tube 14211 may include an elastic tube body and a hollow cavity extending axially in the tube body. The upper end portion of the first guide shaft 14212 is axially sleeved in the hollow cavity of the first buffer tube 14211, and the upper end of the first guide shaft 14212 is connected to the support platform 143. The first linear bearing 14213 is fixedly connected to the frame 141 and sleeved outside the lower end portion of the first guide shaft 14212. The upper end of the first linear bearing 14213 is connected to the lower end of the first buffer tube 14211, and the first guide shaft 14212 can slide in the first linear bearing 14213.

[0099] like Figure 2 As shown, in some embodiments, the elastic tube may include a tube with a spring disposed at the upper end and / or the lower end. The elastic tube may also include other elastic tubes capable of providing buffering, such as a bellows.

[0100] like Figure 2 As shown, in some embodiments of the present disclosure, the hollow cavity of the first buffer tube 14211 penetrates the elastic tube body of the first buffer tube 14211, and the upper end of the elastic tube body of the first buffer tube 14211 can abut against the support platform 143, and the lower end of the first buffer tube 14211 can abut against the upper end of the first linear bearing 14213.

[0101] In some embodiments, a threaded hole is disposed at the upper end of the first guide shaft 14212, and a bolt hole is disposed at the support platform 143. The upper end of the first guide shaft 14212 and the support platform 143 may be connected by, for example, bolts.

[0102] Figure 3 A schematic structural diagram of a buffer platform 150 according to some embodiments of the present disclosure is shown.

[0103] like Figure 3 As shown, in some embodiments of the present disclosure, the lifting slide 100 may further include a buffer platform 150. The buffer platform 150 may include a fixed plate 151, a second buffer assembly 152, and a buffer plate 153. The fixed plate 151 is fixedly connected to the lifting platform 130. The lower end of the second buffer assembly 152 is connected to the fixed plate 151. The buffer plate 153 is connected to the upper end of the second buffer assembly 152 to provide buffering for the buffer plate 153.

[0104] The lifting platform 100 of some embodiments of the present disclosure includes a double shock-absorbing platform. For example, both the support platform 143 and the buffer platform 150 have a shock-absorbing function, which can be used to control the mechanisms (such as Figure 5 and Figure 6 The cathode target 300 arranged on the lifting platform 130 and the matcher 400 arranged on the buffer platform 150 are shown to be separately damped to ensure that the two mechanisms are in a stable and relatively flexible state, avoiding rigid damage when the mechanisms arranged on the two platforms are docked or perform other movements or displacements.

[0105] like Figure 3 As shown, in some embodiments of the present disclosure, the second buffer assembly 152 may include a plurality of second buffer rods 1521 , which are arranged at intervals between the fixing plate 151 and the buffer plate 153 to provide buffering for the buffer plate 153 .

[0106] like Figure 3 As shown, in some embodiments, the plurality of second buffer rods 1521 may include six second buffer rods 1521. It will be appreciated by those skilled in the art that although Figure 3 Only six second buffer rods 1521 are shown, but this is only exemplary, and the second buffer assembly 152 may also include other suitable numbers of second buffer rods 1521 .

[0107] In some embodiments of the present disclosure, the lifting platform 130 may include a lifting platform through hole 131 (eg Figure 4 As shown in the lifting platform through hole 131). Figure 3 As shown, the fixing plate 151 is arranged on the lower side of the lifting platform through hole 131, and there is a gap between the fixing plate 151 and the lower end surface of the lifting platform 130, the buffer plate 153 is arranged in the lifting platform through hole 131, and the upper end surface of the buffer plate 153 is aligned with the upper end surface of the lifting platform 130 or the upper end surface of the buffer plate 153 is higher than the upper end surface of the lifting platform 130.

[0108] like Figure 3 As shown, in some embodiments, the fixing plate 151 and the lifting platform 130 can be fixedly connected by two connecting plates 154. The connecting plates 154 have a certain height so that there is a gap between the fixing plate 151 and the lower end surface of the lifting platform 130.

[0109] In some embodiments, the second buffer rod 1521 may include a second buffer tube, a second guide shaft, and a second linear bearing. The second buffer tube may include an elastic tube body and a hollow cavity extending axially in the tube body. The upper end portion of the second guide shaft is axially sleeved in the hollow cavity of the second buffer tube, and the upper end of the second guide shaft is connected to the buffer plate 153. The second linear bearing is fixedly connected to the fixing plate 151 and sleeved outside the lower end portion of the second guide shaft. The upper end of the second linear bearing can be connected to the lower end of the second buffer tube, and the second guide shaft can slide in the second linear bearing.

[0110] In some embodiments, the hollow cavity of the second buffer tube penetrates the elastic tube body of the second buffer tube, and the upper end of the elastic tube body of the second buffer tube can abut against the buffer plate 153, and the lower end can abut against the upper end of the second linear bearing.

[0111] Those skilled in the art may understand that, in some embodiments, the second buffer rod 1521 may include a structure that is the same as or similar to that of the first buffer rod 1421 .

[0112] Figure 4 A schematic structural diagram of a lifting assembly 120 according to some embodiments of the present disclosure is shown.

[0113] like Figure 4 As shown, in some embodiments of the present disclosure, the lifting assembly 120 may include a lifting drive device 121, a gear transmission mechanism 122, at least two worm wheels 123, at least two screws 124 and at least two screw nuts 125. The gear transmission mechanism 122 is connected to the output end of the lifting drive device 121 to receive the driving force. The gear transmission mechanism 122 may include at least two worms 1221, at least two worm wheels 123, at least two screws 124 and at least two screw nuts 125. The at least two worms 1221 include a worm 1221a and a worm 1221b, wherein one end of the worm 1221a is connected to the output end of the lifting drive device 121, and the other end of the worm 1221a is connected to the worm 1221b. The at least two worm wheels 123 include a worm wheel 123a and a worm wheel 123b, which are connected to the worm 1221a and the worm 1221b respectively. At least two screw rods 124 include screw rods 124a and screw rods 124b, which are respectively inserted into the inner rings of the worm wheels 123a and 123b. At least two screw nuts 125 include screw nuts 125a and screw nuts 125b, which are respectively threadedly connected to the screw rods 124a and 124b. The lifting platform 130 is fixedly connected to the screw nuts 125a and the screw nuts 125b, and the lifting drive device 121 drives the lifting platform 130 up and down through the transmission of at least two worms 1221, at least two worm wheels 123, at least two screw rods 124, and at least two screw nuts 125.

[0114] Those skilled in the art will appreciate that although Figure 1 The lifting drive device 121 shown includes a hand wheel and is driven by manpower, but this is only exemplary. The lifting drive device 121 may also include other driving mechanisms, such as a motor.

[0115] like Figure 1 As shown, in some embodiments of the present disclosure, the lifting slide 100 may also include a vehicle body 160 (for clarity, Figure 1 The main body of the vehicle body 160 is not shown in the figure, and is used to carry the lifting slide 100. The vehicle body 160 includes at least one track 161. The base 110 may include a sliding assembly 111, which is arranged at the bottom of the base 110. The sliding assembly 111 cooperates with the at least one track 161 so that the lifting slide 100 can slide on the vehicle body 160.

[0116] like Figure 1 As shown, in some embodiments, the vehicle body 160 may include two rails 161 , and the sliding assembly 111 may include a plurality of sliders or rollers, respectively cooperating with the two rails 161 , so that the lifting slide 100 can slide on the vehicle body 160 .

[0117] Figure 5 FIG. 1 is a partial structural schematic diagram of a vacuum processing system 1000 according to some embodiments of the present disclosure. Figure 6 FIG. 1 is a schematic structural diagram of a vacuum processing system 1000 according to some embodiments of the present disclosure.

[0118] like Figure 5 and Figure 6 As shown, in some embodiments of the present disclosure, the vacuum processing system 1000 may include a vacuum chamber 200, a cathode target 300, a lifting slide 100 according to any embodiment of the present disclosure, and a matcher 400. The upper end of the cathode target 300 is sealed and connected to the vacuum chamber 200, and the cathode target 300 includes a target gun 310. The support platform 143 of the lifting slide 100 is used to carry the cathode target 300. The matcher 400 is arranged on the lifting platform 130, and the matcher 400 includes an insertion end 410 for inserting into the matching port of the target gun 310.

[0119] like Figure 5 and Figure 6 As shown, in some embodiments of the present disclosure, the lower end of the matcher 400 is disposed on the buffer plate 153 of the buffer platform 150 .

[0120] like Figure 5 and Figure 6 As shown, in some embodiments of the present disclosure, the cathode target 300 includes at least one positioning hole (not shown in the figure). Figure 1 and Figure 5As shown, the support frame 140 may also include at least one positioning rod 144, the lower end of the at least one positioning rod 144 is connected to the frame body 141, and the upper end of the at least one positioning rod 144 is accommodated in at least one positioning hole to position the matching port of the target gun 310 and the insertion end 410 of the matcher 400.

[0121] During installation, the matcher 400 is securely placed on the buffer plate 153 of the buffer platform 150. The matching port of the target gun 310 of the cathode target 300 is accurately inserted into the insertion end 410 of the matcher 400, and the target gun 310 is placed on the flexible buffer plane support platform 143 of the support frame 140. The vehicle body 160 is driven to send the target gun 310 to the lifting position, and the lifting drive device 121 is driven to extend the target gun to the installation position of the chamber flange, and the mounting bolts after the cathode target 300 and the vacuum chamber 200 flange are connected are tightened. Since the buffer platform 150 and the support platform 143 are both flexible platforms with elasticity (such as springs), during the tightening process, the spring will compensate for the height of the movement, so that no stress will be generated to cause any impact on the matching plug.

[0122] In some embodiments of the present disclosure, the support platform 143 of the lifting slide 100 is used to carry the cathode target 300. The cathode target 300 can not only be lifted and lowered with the lifting slide 100 but also can slide horizontally with the lifting slide 100, thereby making the installation and replacement of the target material more labor-saving, convenient and quick.

[0123] It should be pointed out that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A lifting slide, characterized in that: include: Pedestal; A lifting assembly is arranged on the base; A lifting platform, connected to the lifting assembly, and configured to be lifted and lowered under the drive of the lifting assembly; A support frame, arranged on the lifting platform, comprises: Frame; A first buffer assembly is disposed on the frame; and A support platform is arranged on the first buffer assembly, and the first buffer assembly allows installation error and / or movement deviation of the support platform.

2. The lifting slide according to claim 1, characterized in that: The first buffer assembly includes a plurality of first buffer rods arranged at intervals between the frame and the support platform, and the first buffer rods are used to provide buffering for the support platform.

3. The lifting slide according to claim 2, characterized in that: The first buffer rod comprises: A first buffer tube, comprising an elastic tube body and a hollow cavity extending axially in the tube body; a first guide shaft, the upper end portion of which is axially sleeved in the hollow cavity of the first buffer tube, and the upper end of the first guide shaft is connected to the support platform; and The first linear bearing is fixedly connected to the frame and sleeved on the outer portion of the lower end of the first guide shaft. The upper end of the first linear bearing is connected to the lower end of the first buffer tube. The first guide shaft can slide in the first linear bearing.

4. The lifting slide according to claim 3, characterized in that: The hollow cavity of the first buffer tube penetrates the elastic tube body of the first buffer tube, and the upper end of the elastic tube body of the first buffer tube abuts against the supporting platform, and the lower end abuts against the upper end of the first linear bearing.

5. The lifting slide according to claim 1, characterized in that: Also includes a buffer platform, the buffer platform includes: A fixed plate, fixedly connected to the lifting platform; A second buffer assembly, the lower end of which is connected to the fixing plate; and A buffer plate is connected to the upper end of the second buffer assembly to provide buffering for the buffer plate.

6. The lifting slide according to claim 5, characterized in that: The second buffer assembly includes a plurality of second buffer rods, which are arranged between the fixing plate and the buffer plate at intervals, and are used to provide buffering for the buffer plate; and / or The lifting platform includes a lifting platform through hole, the fixing plate is arranged at the lower side of the lifting platform through hole and has a gap with the lower end surface of the lifting platform, the buffer plate is arranged in the lifting platform through hole, and the upper end surface of the buffer plate is aligned with the upper end surface of the lifting platform or the upper end surface of the buffer plate is higher than the upper end surface of the lifting platform.

7. The lifting slide according to claim 6, characterized in that: The second buffer rod comprises: A second buffer tube comprises an elastic tube body and a hollow cavity extending axially in the tube body; A second guide shaft, the upper end portion of which is axially sleeved in the hollow cavity of the second buffer tube, and the upper end of the second guide shaft is connected to the buffer plate; and a second linear bearing, fixedly connected to the fixing plate and sleeved on the outer portion of the lower end of the second guide shaft, wherein the upper end of the second linear bearing is connected to the lower end of the second buffer tube, and the second guide shaft can slide in the second linear bearing; and / or The hollow cavity of the second buffer tube passes through the elastic tube body of the second buffer tube, and the upper end of the elastic tube body of the second buffer tube abuts against the buffer plate, and the lower end abuts against the upper end of the second linear bearing.

8. The lifting slide according to claim 1, characterized in that: The lifting assembly comprises: Lifting drive device; A gear transmission mechanism is connected to the output end of the lifting drive device to receive the driving force, and the gear transmission mechanism includes: At least two worm gears; at least two worm wheels, respectively meshing with the at least two worms; at least two screw rods, respectively passing through the inner rings of the at least two worm gears; and At least two screw nuts are respectively threadedly connected to the at least two screws, the lifting platform is fixedly connected to the screw nuts of the at least two screws, and the lifting drive device drives the lifting platform up and down through the transmission of the at least two worms, the at least two worm wheels, the at least two screws, and the at least two screw nuts.

9. The lifting slide according to claim 1, characterized in that: It also includes a vehicle body for carrying the lifting slide, and the vehicle body includes at least one track; The base includes a sliding assembly arranged at the bottom of the base, and the sliding assembly cooperates with the at least one track to enable the lifting slide to slide on the vehicle body.

10. A vacuum processing system, characterized in that: include: Vacuum chamber; A cathode target, the upper end of which is sealed and connected to the vacuum chamber, and the cathode target comprises a target gun; The lifting slide according to any one of claims 1 to 9, wherein the support platform of the lifting slide is used to carry the cathode target; as well as The matcher is arranged on the lifting platform, and the matcher comprises an insertion end for inserting into the matching port of the target gun.

11. The vacuum processing system according to claim 10, characterized in that: The lower end of the matcher is arranged on the buffer plate of the buffer platform; and / or The cathode target includes at least one positioning hole; The support frame also includes at least one positioning rod, the lower end of the at least one positioning rod is connected to the frame body, and the upper end of the at least one positioning rod is accommodated in the at least one positioning hole to position the matching port of the target gun and the insertion end of the matcher.

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