Heat treatment equipment

Abstract

The utility model discloses heat treatment equipment. The heat treatment equipment comprises a heating furnace body, a process pipe, a gas heating device and an auxiliary heating device. The process pipe is arranged in the heating furnace body. And the gas heating device is communicated with the process pipe and is used for heating shielding gas. And the auxiliary heating device is arranged in the process pipe. In this way, the preheating time of the heat treatment equipment can be shortened, and the productivity can be improved.

Description

Technical Field

[0001] The present application relates to the field of heat treatment technology, and in particular to heat treatment equipment. Background Art

[0002] In the manufacture of solar cells, tubular heat treatment equipment is widely used, such as diffusion furnaces, oxidation furnaces, annealing furnaces, chemical vapor deposition CVD (LPCVD, PECVD, etc.), atomic layer deposition ALD, etc. In the related technology, in the PECVD process, it is necessary to reach a sufficient temperature to meet the process conditions. A complete PECVD process takes about 45 minutes, of which preheating takes about 20 minutes. The long preheating time occupies a considerable part of the process time, which will directly affect the production capacity. With the continuous increase in market demand for production capacity, the diameter of the heat treatment equipment is also increasing (from 450mm-500mm-520mm-540mm), and the time required for the preheating step is getting longer and longer, which has become a bottleneck for increasing production capacity. Utility Model Content

[0003] The embodiments of the present application provide heat treatment equipment, which can reduce the preheating time of the heat treatment equipment and improve production capacity.

[0004] The embodiment of the present application provides a heat treatment device. The heat treatment device includes a heating furnace body, a process pipe, a gas heating device and an auxiliary heating device. The process pipe is arranged in the heating furnace body. The gas heating device is connected to the process pipe, and the gas heating device is used to heat the protective gas. The auxiliary heating device is arranged in the process pipe.

[0005] Optionally, the auxiliary heating device includes a first auxiliary heating device and a second auxiliary heating device, the first auxiliary heating device and the second auxiliary heating device are spaced apart in the gravity direction, and the space between the first auxiliary heating device and the second auxiliary heating device is used to place the carrier.

[0006] Optionally, the first auxiliary heating device is arranged above the second auxiliary heating device in the direction of gravity, the first auxiliary heating device includes a first heating element and a first sleeve sleeved on the first heating element, the second auxiliary heating device includes a second heating element and a second sleeve sleeved on the second heating element, and the first sleeve and the second sleeve extend along the axial direction of the process tube.

[0007] Optionally, the first sleeve is made of silicon carbide and the second sleeve is made of quartz.

[0008] Optionally, the first heating element is a metal heating rod, and the second heating element is an infrared lamp.

[0009] Optionally, the first auxiliary heating device includes a first auxiliary heating plate, the second auxiliary heating device includes a second auxiliary heating plate, the first auxiliary heating plate is provided with a first heating element on the side facing the inside of the process tube, and the second auxiliary heating plate is provided with a second heating element on the side facing the inside of the process tube.

[0010] Optionally, the cross section of the first auxiliary heating plate is rectangular or fan-shaped.

[0011] Optionally, the cross section of the second auxiliary heating plate is rectangular or fan-shaped.

[0012] Optionally, at least one first heating element extends from one end to the other end of the first auxiliary heating plate.

[0013] Optionally, at least one second heating element extends from one end to the other end of the second auxiliary heating plate.

[0014] Optionally, the first auxiliary heating plate has a length direction and a width direction, the first heating element includes a plurality of first heating segments and a plurality of second heating segments, the plurality of first heating segments are arranged side by side with each other along the length direction and extend along the width direction, and the plurality of second heating segments are respectively connected to adjacent ends of two adjacent first heating segments to connect the plurality of first heating segments in series.

[0015] Optionally, the second auxiliary heating plate has a length direction and a width direction, the second heating element includes a plurality of first heating segments and a plurality of second heating segments, the plurality of first heating segments are arranged side by side with each other along the length direction and extend along the width direction, and the plurality of second heating segments are respectively connected to adjacent ends of two adjacent first heating segments to connect the plurality of first heating segments in series.

[0016] Optionally, a distance between adjacent first heating sections in an area covered by an orthographic projection of the carrier on the first auxiliary heating plate is smaller than a distance between adjacent first heating sections in other areas on the first auxiliary heating plate.

[0017] Optionally, the spacing between adjacent first heating segments in the area covered by the orthographic projection of the carrier on the second auxiliary heating plate is smaller than the spacing between adjacent first heating segments in other areas of the second auxiliary heating plate.

[0018] Optionally, a heating resistance of a portion of the first heating element and / or the second heating element covered by the orthographic projection of the carrier is higher than a heating resistance of a remaining portion.

[0019] Optionally, the first auxiliary heating plate and / or the second auxiliary heating plate are provided with weight-reducing holes.

[0020] The beneficial effects of the present application are as follows: Different from the prior art, by providing a gas heating device, a heated protective gas can be introduced into the process tube, thereby achieving the heating of the carrier inside the process tube. By providing an auxiliary heating device, the carrier inside the process tube can be directly heated, thereby achieving the heating of the carrier. Among them, the carrier is heated by heating the protective gas by the gas heating device, and the protective gas can directly contact the carrier. By heating in the process tube by the auxiliary heating device, the heat can be directly radiated to the carrier, and the protective gas can also serve as a heat transfer medium to improve the heating efficiency of the auxiliary heating device. The heating furnace body can also heat the carrier inside the process tube. The above-mentioned multiple heating methods can heat the carrier when the carrier is at different temperatures, and due to the distance between the heat source and the carrier, different heating methods can play a major heating role on the carrier at different temperature stages, thereby shortening the preheating time and improving production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of an embodiment of the heat treatment equipment of the present application;

[0022] Figure 2 yes Figure 1 A schematic diagram of an embodiment of a first auxiliary heating device and a second auxiliary heating device in the heat treatment equipment shown;

[0023] Figure 3 yes Figure 2 A schematic cross-sectional structure diagram of the first auxiliary heating device and the second auxiliary heating device shown;

[0024] Figure 4 yes Figure 1 A schematic diagram of another embodiment of the first auxiliary heating device and the second auxiliary heating device in the heat treatment equipment shown;

[0025] Figure 5 yes Figure 1 A schematic diagram of another embodiment of the first auxiliary heating device and the second auxiliary heating device in the heat treatment equipment shown;

[0026] Figure 6 yes Figure 1 A schematic diagram of another embodiment of a first auxiliary heating device and a second auxiliary heating device in a heat treatment equipment is shown.

[0027] Reference numerals:

[0028] 1-Heat treatment equipment;

[0029] 10-heating furnace body; 11-process pipe; 12-auxiliary heating device; 13-gas heating device;

[0030] 121-first auxiliary heating device; 1210-first sleeve; 1211-first heating element;

[0031] 122-second auxiliary heating device; 1220-second sleeve; 1221-second auxiliary heating plate; 1222-second heating element;

[0032] 2- Vehicle. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0034] Combination Figure 1 , an embodiment of the present application provides a heat treatment device 1. The heat treatment device 1 includes a heating furnace body 10, a process tube 11, an auxiliary heating device 12 and a gas heating device 13. The process tube 11 is arranged in the heating furnace body 10. The gas heating device 13 is connected to the process tube 11, and the gas heating device 13 is used to heat the protective gas. The auxiliary heating device 12 is arranged in the process tube 11. Among them, the heating furnace body 10 can heat the process tube 11, and the heat can be transferred to the carrier 2 in the process tube 11. The gas heating device 13 can heat an inert process protective gas such as nitrogen. The heated protective gas is passed into the process tube 11 to heat the interior of the process tube 11 and the carrier 2. The auxiliary heating device 12 is arranged in the process tube 11. The auxiliary heating device 12 can be suspended in the process tube 11, or it can be closely fitted with the process tube 11. The auxiliary heating device 12 can heat the carrier 2 by directly radiating heat. In the aforementioned heating methods, the protective gas is introduced into the process pipe 11, and the protective gas can directly contact the carrier 2, so that the temperature of the carrier 2 can be quickly increased. As the heating proceeds further, the heating effect of the protective gas on the carrier 2 decreases, and the auxiliary heating device 12 can be used as the main heating source to radiate heat to the carrier 2. As the heating continues, the temperature of the carrier 2 approaches the target temperature, and the carrier 2 can be heated by the heating furnace body 10. The aforementioned heating methods can all heat the carrier 2, and the heating methods can cooperate with each other to improve the preheating efficiency of the carrier 2.

[0035] By providing a gas heating device 13, heated protective gas can be introduced into the process tube 11, thereby achieving the heating of the carrier 2 inside the process tube 11. By providing an auxiliary heating device 12, the carrier 2 in the process tube 11 can be directly heated, thereby achieving the heating of the carrier 2. Among them, the carrier 2 is heated by heating the protective gas by the gas heating device 13, and the protective gas can directly contact the carrier 2. By the auxiliary heating device 12 heating in the process tube 11, heat can be directly radiated to the carrier 2, and the protective gas can also be used as a heat transfer medium to improve the heating efficiency of the auxiliary heating device 12. The heating furnace body 10 can also heat the carrier 2 inside the process tube 11. The above-mentioned multiple heating methods can heat the carrier 2 when the carrier 2 is at different temperatures, and due to the distance between the heat source and the carrier 2, different heating methods can play a major heating role on the carrier 2 at different temperature stages, thereby shortening the preheating time and improving production capacity.

[0036] In some embodiments, the auxiliary heating device 12 includes a first auxiliary heating device 121 and a second auxiliary heating device 122, and the first auxiliary heating device 121 and the second auxiliary heating device 122 are arranged at intervals in the direction of gravity. The space between the first auxiliary heating device 121 and the second auxiliary heating device 122 is used to place the carrier 2. In other words, the first auxiliary heating device 121 and the second auxiliary heating device 122 are arranged on both sides of the carrier 2 in the process tube 11. By arranging the first auxiliary heating device 121 and the second auxiliary heating device 122, the auxiliary heating device 12 can heat the carrier 2 from different directions, thereby improving the heating efficiency, shortening the preheating time, and facilitating improving the production capacity.

[0037] In some embodiments, in combination Figure 2 and Figure 3 The first auxiliary heating device 121 is arranged above the second auxiliary heating device 122 in the direction of gravity. The first auxiliary heating device 121 includes a first heating element 1211 and a first sleeve 1210 sleeved on the first heating element 1211. The second auxiliary heating device 122 includes a second heating element 1222 and a second sleeve 1220 sleeved on the second heating element 1222. The first sleeve 1210 and the second sleeve 1220 extend along the axial direction of the process tube 11. The first sleeve 1210 and the second sleeve 1220 can be used to accommodate and support the first heating element 1211 and the second heating element 1222. The first sleeve 1210 and the second sleeve 1220 have high strength and can extend a long distance in the axial direction of the process tube 11. The first heating element 1211 and the second heating element 1222 can be inserted or coiled in the first sleeve 1210 and the second sleeve 1220. The first heating element 1211 and the second heating element 1222 can be metal heating, infrared heating, electromagnetic heating, ceramic heating, etc.

[0038] In some embodiments, a plurality of first sleeves 1210 are provided, and the plurality of first sleeves 1210 are spaced apart in the direction surrounding the axis of the process tube 11. A plurality of second sleeves 1220 are provided, and the plurality of second sleeves 1220 are spaced apart in the direction surrounding the axis of the process tube 11. In the above manner, the distances between the first auxiliary heating device 121 and the second auxiliary heating device 122 and the axis of the process tube 11 can be controlled to be uniform, thereby facilitating the uniformity of heating the carrier 2.

[0039] In some embodiments, the first auxiliary heating device 121 is arranged above the second auxiliary heating device 122 in the direction of gravity, the first sleeve 1210 is made of silicon carbide, and the second sleeve 1220 is made of quartz. In other words, the first auxiliary heating device 121 is arranged above the carrier 2, and the second auxiliary heating device 122 is arranged below the carrier 2. The first auxiliary heating device 121 arranged above the carrier 2 is equivalent to being suspended above the process tube 11, which is prone to deformation. In order to prevent the first auxiliary heating device 121 from deforming too much, a silicon carbide material with higher strength can be used, and the silicon carbide material can also meet the heat resistance requirements and is suitable for being arranged in the process tube 11. The second sleeve 1220 is arranged below the carrier 2, and the strength requirement is lower than that of the first sleeve 1210. The second sleeve 1220 can be a quartz tube. The quartz tube can also be used as a transparent material, which is conducive to radiant heating of the carrier 2.

[0040] In some embodiments, the first heating element 1211 is a metal heating rod, and the second heating element 1222 is an infrared heating tube. The metal heating rod has higher structural strength, and setting the first heating element 1211 as a metal heating rod can further meet the strength requirements of the first heating element 1211. The second heating element 1222 is an infrared heating tube, which has a higher thermal efficiency and is conducive to increasing the preheating speed.

[0041] Combination Figures 4 to 6In some embodiments, the first auxiliary heating device 121 includes a first auxiliary heating plate, and the second auxiliary heating device 122 includes a second auxiliary heating plate 1221. The first auxiliary heating plate is provided with a first heating element 1211 on the side facing the inside of the process tube 11, and the second auxiliary heating plate 1221 is provided with a second heating element 1222 on the side facing the inside of the process tube 11. The first heating element 1211 and the second heating element 1222 are respectively provided on the side of the first auxiliary heating plate 1221 and the second auxiliary heating plate 1221 facing the carrier 2. The first auxiliary heating plate and the second auxiliary heating plate 1221 can be used to support the first heating element 1211 and the second heating element 1222. Optionally, the first auxiliary heating plate and the second auxiliary heating plate 1221 are also coated with a reflective coating, so that the heat of the first heating element 1211 and the second heating element 1222 is radiated more concentratedly on the carrier 2. It should be noted that the figure schematically shows the structure of the second auxiliary heating plate 1221 and the second heating element 1222, which can be used as a reference for the structure of the first auxiliary heating plate and the first heating element 1211 under the same description.

[0042] In some embodiments, the cross-section of the first auxiliary heating plate is rectangular or fan-shaped. The rectangular first auxiliary heating plate is easy to manufacture and install, and it is also relatively easy to install the first heating element 1211 on the first auxiliary heating plate with a rectangular cross-section. The rectangular first auxiliary heating plate is conducive to reducing the manufacturing difficulty of the equipment. The cross-section of the first auxiliary heating plate is fan-shaped, so that the distance between each part of the first heating element 1211 installed on the first auxiliary heating plate and the axis of the process tube 11 is uniform, so that the first auxiliary heating device 121 can transfer heat to the carrier 2 more evenly. Among them, the cross-section of the first auxiliary heating plate is fan-shaped, which may mean that the cross-section of the first auxiliary heating plate includes two arc segments arranged at intervals, and the two ends of the two arc segments are connected to each other. Optionally, the two arc segments may be concentrically arranged. Optionally, the center of the two arc segments may coincide with the axis of the process tube 11.

[0043] In some embodiments, the cross section of the second auxiliary heating plate 1221 is rectangular or fan-shaped. The rectangular second auxiliary heating plate 1221 is easy to manufacture and install, and it is also relatively easy to install the second heating element 1222 on the second auxiliary heating plate 1221 with a rectangular cross section. The second auxiliary heating plate 1221 with a rectangular setting is conducive to reducing the difficulty of manufacturing the equipment. The cross section of the second auxiliary heating plate 1221 is fan-shaped, so that the distance between each part of the second heating element 1222 installed on the second auxiliary heating plate 1221 and the axis of the process tube 11 is uniform, so that the second auxiliary heating device 122 can transfer heat to the carrier 2 more evenly. Among them, the cross section of the second auxiliary heating plate 1221 is fan-shaped, which may mean that the cross section of the second auxiliary heating plate 1221 includes two arc segments arranged at intervals, and the two ends of the two arc segments are connected to each other. Optionally, the two arc segments may be concentrically arranged. Optionally, the center of the two arc segments may coincide with the axis of the process tube 11.

[0044] Combination Figure 4 In some embodiments, at least one first heating element 1211 extends from one end of the first auxiliary heating plate to the other end. The first heating element 1211 arranged in this way is easy to install. Optionally, a weight-reducing hole is arranged on the first auxiliary heating plate. Optionally, the first heating element 1211 is installed between adjacent weight-reducing holes.

[0045] In some embodiments, at least one second heating element 1222 extends from one end to the other end of the second auxiliary heating plate 1221. The first heating element 1211 thus arranged is easy to install. Optionally, a weight-reducing hole is arranged on the second auxiliary heating plate 1221. Optionally, the second heating element 1222 is installed between adjacent weight-reducing holes.

[0046] In other embodiments, in combination Figure 5 and Figure 6 , the first auxiliary heating plate has a length direction and a width direction, the length direction is along the axial direction of the process tube 11, and the width direction refers to the direction orthogonal to the length direction. The first heating element 1211 includes a plurality of first heating segments and a plurality of second heating segments, the plurality of first heating segments are arranged side by side with each other along the length direction and extend along the width direction, and the plurality of second heating segments are respectively connected to the adjacent ends of two adjacent first heating segments to connect the plurality of first heating segments in series. In other words, the first heating element 1211 is arranged in a serpentine shape on the first auxiliary heating plate. In the above manner, the thermal field generated by the first heating element 1211 can be increased, thereby increasing the heating efficiency of the carrier 2.

[0047] In some embodiments, reference Figure 6 , the spacing between adjacent first heating segments in the area covered by the orthographic projection of the carrier 2 on the first auxiliary heating plate is smaller than the spacing between adjacent first heating segments in other areas of the first auxiliary heating plate. Through the above manner, the first heating segments corresponding to the carrier 2 can be distributed more concentratedly, so that the thermal fields of the first heating segments can be concentrated on each other, so as to improve the heating efficiency of the carrier 2.

[0048] In some embodiments, the heating resistance of the portion of the first heating element 1211 covered by the orthographic projection of the carrier 2 is higher than the heating resistance of the remaining portion. This configuration enables the portion of the first heating element 1211 corresponding to the carrier 2 to generate more heat, thereby improving the heating efficiency of the carrier 2.

[0049] In some other embodiments, in combination Figure 5 and Figure 6, the second auxiliary heating plate 1221 has a length direction and a width direction, the second heating element 1222 includes a plurality of first heating segments and a plurality of second heating segments, the plurality of first heating segments are arranged side by side with each other along the length direction and extend along the width direction, and the plurality of second heating segments are respectively connected to the adjacent ends of two adjacent first heating segments to connect the plurality of first heating segments in series. In other words, the second heating element 1222 is arranged in a serpentine shape on the first auxiliary heating plate. In the above manner, the thermal field generated by the second heating element 1222 can be increased, thereby increasing the heating efficiency of the carrier 2.

[0050] In some embodiments, in combination Figure 6 , the spacing between adjacent first heating segments in the area covered by the orthographic projection of the carrier 2 on the second auxiliary heating plate 1221 is smaller than the spacing between first heating segments in other areas on the second auxiliary heating plate 1221. In the above manner, the first heating segments corresponding to the carrier 2 can be distributed more concentratedly, so that the thermal fields of the first heating segments can be concentrated to improve the heating efficiency of the carrier 2.

[0051] In some embodiments, the heating resistance of the portion of the second heating element 1222 covered by the orthographic projection of the carrier 2 is higher than the heating resistance of the remaining portion. This configuration enables the portion of the second heating element 1222 corresponding to the carrier 2 to generate more heat, thereby improving the heating efficiency of the carrier 2.

[0052] In some embodiments, in combination Figure 4 The first auxiliary heating plate and / or the second auxiliary heating plate 1221 are provided with weight-reducing holes. By providing the weight-reducing holes, the weight of the first auxiliary heating plate and / or the second auxiliary heating plate 1221 can be reduced, thereby reducing their deformation due to their own weight and ensuring the uniformity of the thermal field.

[0053] The above are merely embodiments of the present application and are not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A heat treatment device, characterized in that: include: Heating the furnace body; A process pipe, wherein the process pipe is arranged in the heating furnace body, A gas heating device, the gas heating device is connected to the process pipe, and the gas heating device is used to heat the protective gas; An auxiliary heating device is arranged in the process pipe.

2. The heat treatment equipment according to claim 1, characterized in that: The auxiliary heating device includes a first auxiliary heating device and a second auxiliary heating device, the first auxiliary heating device and the second auxiliary heating device are spaced apart in the gravity direction, and the space between the first auxiliary heating device and the second auxiliary heating device is used to place a carrier.

3. The heat treatment equipment according to claim 2, characterized in that: The first auxiliary heating device is arranged above the second auxiliary heating device in the direction of gravity, the first auxiliary heating device includes a first heating element and a first sleeve sleeved on the first heating element, the second auxiliary heating device includes a second heating element and a second sleeve sleeved on the second heating element, and the first sleeve and the second sleeve extend along the axial direction of the process pipe.

4. The heat treatment equipment according to claim 3, characterized in that: The first sleeve is made of silicon carbide, and the second sleeve is made of quartz.

5. The heat treatment equipment according to claim 3, characterized in that: The first heating element is a metal heating rod, and the second heating element is an infrared lamp.

6. The heat treatment equipment according to claim 2, characterized in that: The first auxiliary heating device includes a first auxiliary heating plate, and the second auxiliary heating device includes a second auxiliary heating plate. The first auxiliary heating plate is provided with a first heating element on a side facing the inside of the process tube, and the second auxiliary heating plate is provided with a second heating element on a side facing the inside of the process tube.

7. The heat treatment equipment according to claim 6, characterized in that: The cross section of the first auxiliary heating plate is rectangular or fan-shaped.

8. The heat treatment equipment according to claim 6, characterized in that: The cross section of the second auxiliary heating plate is rectangular or fan-shaped.

9. The heat treatment equipment according to claim 6, characterized in that: At least one of the first heating elements extends from one end to the other end of the first auxiliary heating plate.

10. The heat treatment equipment according to claim 6, characterized in that: At least one of the second heating elements extends from one end to the other end of the second auxiliary heating plate.

11. The heat treatment equipment according to claim 6, characterized in that: The first auxiliary heating plate has a length direction and a width direction, the first heating element includes a plurality of first heating segments and a plurality of second heating segments, the plurality of first heating segments are arranged side by side with each other along the length direction and extend along the width direction, the plurality of second heating segments are respectively connected to adjacent ends of two adjacent first heating segments to connect the plurality of first heating segments in series.

12. The heat treatment equipment according to claim 6, characterized in that: The second auxiliary heating plate has a length direction and a width direction, the second heating element includes a plurality of first heating segments and a plurality of second heating segments, the plurality of first heating segments are arranged side by side with each other along the length direction and extend along the width direction, the plurality of second heating segments are respectively connected to adjacent ends of two adjacent first heating segments to connect the plurality of first heating segments in series.

13. The heat treatment equipment according to claim 11, characterized in that: The spacing between adjacent first heating segments in the area covered by the orthographic projection of the carrier on the first auxiliary heating plate is smaller than the spacing between adjacent first heating segments in other areas of the first auxiliary heating plate.

14. The heat treatment equipment according to claim 12, characterized in that: The spacing between adjacent first heating segments in the area covered by the orthographic projection of the carrier on the second auxiliary heating plate is smaller than the spacing between adjacent first heating segments in other areas of the second auxiliary heating plate.

15. The heat treatment equipment according to any one of claims 3 to 14, characterized in that: The heating resistance of the portion of the first heating element and / or the second heating element covered by the orthographic projection of the carrier is higher than the heating resistance of the remaining portion.

16. The heat treatment equipment according to any one of claims 6 to 14, characterized in that: The first auxiliary heating plate and / or the second auxiliary heating plate are provided with weight-reducing holes.

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