Intelligent heat treatment furnace control system

Abstract

The utility model provides an intelligent heat treatment furnace control system. The intelligent heat treatment furnace control system comprises a temperature acquisition device, a controller module, a data memory, a display module, a 5G transmission module, an EAP system and a temperature control module. According to the utility model, the temperature of the furnace and the temperature of a heated workpiece are detected through the temperature acquisition equipment arranged in the heat treatment furnace, and temperature data are stored in the temperature acquisition equipment and then are sent to the controller module; a control instruction is sent to control the temperature control module to control the temperature of the heat treatment furnace, the data storage records the heat treatment process by recording detected temperature data and sending the control instruction, the display module displays the running state of the system in real time, the system is remotely managed through the EAP system, equipment faults are reduced and prevented, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor heating equipment, in particular to an intelligent heat treatment furnace control system. Background Art

[0002] As intelligent control technology has been widely used and developed in the industrial field, intelligent control systems can accurately monitor and adjust the production process through real-time data collection and analysis, improve production efficiency and reduce energy consumption. Therefore, the heat treatment furnace system based on intelligent control technology has huge innovation potential. By combining advanced sensor technology and automated control strategies, higher-performance heat treatment equipment can be developed to achieve precise control of temperature process parameters, thereby meeting the processing requirements of different materials, improving production efficiency and reducing production costs.

[0003] Publication number CN208378955U provides an annealing furnace control system, which builds an input module, a single-chip microcomputer and an input module, tests the temperature parameters in the furnace through a temperature detector and transmits them to the single-chip microcomputer, and the single-chip microcomputer compares the set value parameters input by the key circuit, automatically starts and stops the heating wire, and achieves the temperature automatic control function. However, the system has a simple structure, the processing process cannot detect and record the processing parameters, and lacks management of the equipment system, which is not conducive to improving the production efficiency of the equipment.

[0004] Based on the above problems, there is an urgent need in this field for an intelligent heat treatment furnace control system that can detect multiple data, detect and adjust various processing parameters in real time, and perform systematic management of the equipment. Utility Model Content

[0005] The purpose of the utility model is to provide an intelligent heat treatment furnace control system to solve the problems raised in the above background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] An intelligent heat treatment furnace control system, comprising:

[0008] A temperature acquisition device, the temperature acquisition device is electrically connected to the controller module, the temperature acquisition device includes a workpiece temperature memory, a workpiece temperature acquisition module, a furnace temperature acquisition module and a furnace temperature memory, the workpiece temperature memory is electrically connected to the workpiece temperature acquisition module, and is used to store the detected real-time temperature data of the heated workpiece, the workpiece temperature acquisition module is installed on the furnace wall of the heat treatment furnace, is electrically connected to the controller module, is used to detect the real-time temperature data of the heated workpiece in the furnace, sends it to the controller module and stores it in the workpiece temperature memory, the furnace temperature acquisition module is installed in the heat treatment furnace, is electrically connected to the controller module, is used to detect the real-time temperature data in the furnace, sends it to the controller module and stores it in the furnace temperature memory, the furnace temperature memory is electrically connected to the furnace temperature acquisition module, and is used to store the detected real-time temperature data of the furnace temperature;

[0009] A controller module, the controller module is used to receive real-time temperature data of the heated workpiece and real-time temperature data of the furnace temperature detected by the temperature acquisition device, send control instruction data to the temperature control module, and store the temperature data and the sent control instruction data in a data storage device;

[0010] A data storage device, the data storage device is electrically connected to the controller module and is used to record the temperature data received and the control instruction data sent by the controller module in real time;

[0011] A display module, the display module is electrically connected to the controller module, and is used to display the temperature data received and the control instruction data sent by the controller module, and to send the control instruction data to the controller module;

[0012] A 5G transmission module, the 5G transmission module is electrically connected to the controller module and is used to transmit data between the controller module and the EAP system;

[0013] An EAP system, wherein the EAP system is used by a user to remotely view the temperature data collected by the temperature collection device in real time and to send control instructions to the controller module through the controller module to remotely manage the system;

[0014] The temperature control module is electrically connected to the controller module and is used to receive control instructions from the controller module to control the furnace temperature.

[0015] In one embodiment, the temperature control module includes a heating regulator and a heating device. The heating regulator is electrically connected to the controller module and is used to control the heating power of the heating device. The heating device is electrically connected to the heating regulator and is installed inside the heat treatment furnace to heat the temperature inside the furnace.

[0016] In one embodiment, the EAP system transmits data to the controller module via SECS / GEM communication protocol.

[0017] In one embodiment, the temperature acquisition module and the furnace temperature acquisition module are connected to the controller module via analog communication.

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] The utility model provides an intelligent heat treatment furnace control system, including a temperature acquisition device, a controller module, a data storage device, a display module, a 5G transmission module, an EAP system and a temperature control module. The utility model detects the furnace temperature and the temperature of the heated workpiece through the temperature acquisition device installed in the heat treatment furnace, saves the temperature data in the temperature acquisition device and sends it to the controller module. The controller module sends a control instruction to control the temperature control module to control the temperature of the heat treatment furnace according to the collected temperature data. The data storage device records the heat treatment process by recording the detected temperature data and sending control instructions. The display module displays the system operation status in real time and sends control instructions. The system is remotely managed through the EAP system to reduce and prevent equipment failures and improve production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the system structure of the utility model.

[0021] In the figure: 10 temperature acquisition device, 11 workpiece temperature storage device, 12 workpiece temperature acquisition module, 13 furnace temperature acquisition module, 14 furnace temperature storage device, 20 controller module, 30 data storage device, 40 display module, 505G transmission module, 60EAP system, 70 temperature control module, 71 heating regulator, 72 heating device. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] Example:

[0024] See also Figure 1 , the utility model provides a technical solution:

[0025] An intelligent heat treatment furnace control system includes a temperature acquisition device 10, a controller module 20, a data storage device 30, a display module 40, a 5G transmission module 50, an EAP system 60 and a temperature control module 70, wherein;

[0026] The temperature acquisition device 10 is electrically connected to the controller module 20. The temperature acquisition device 10 includes a workpiece temperature memory 11, a workpiece temperature acquisition module 12, a furnace temperature acquisition module 13 and a furnace temperature memory 14. The workpiece temperature memory 11 adopts a data recorder of model JM341, which is electrically connected to the workpiece temperature acquisition module 12 and is used to store the detected real-time temperature data of the heated workpiece, which can effectively prevent the problem of being unable to record data when communication is interrupted. The workpiece temperature acquisition module 12 adopts an infrared temperature sensor of model IS30-H2SC2, which is installed on the wall of the heat treatment furnace and connected to the controller module 20. Electrically connected, used to detect the real-time temperature data of the heated workpiece in the furnace, send it to the controller module 20 and store it in the workpiece temperature memory 11. The furnace temperature acquisition module 13 adopts a temperature transmitter with model CWDZ11A, which is installed in the heat treatment furnace and electrically connected to the controller module 20. It is used to detect the real-time temperature data in the furnace, send it to the controller module 20 and store it in the furnace temperature memory 14. The furnace temperature memory 14 adopts a data recorder with model JM341, which is electrically connected to the furnace temperature acquisition module 13 and is used to store the detected real-time temperature data of the furnace temperature, which can effectively prevent the problem of being unable to record data due to communication interruption.

[0027] Furthermore, the temperature acquisition module 12 and the furnace temperature acquisition module 13 are connected to the controller module 20 via analog communication.

[0028] When in use, the workpiece temperature acquisition module 12 detects the temperature of the heated workpiece in real time, stores the detected temperature data in the workpiece temperature memory 11 to prevent data loss, and then sends the detected workpiece temperature data to the controller module 20. One end of the furnace temperature acquisition module 13 penetrates into the heat treatment furnace, detects the temperature in the furnace in real time, stores the detected temperature data in the furnace temperature memory 14, and then sends the detected furnace temperature data to the controller module 20.

[0029] The controller module 20 uses a controller module of model STM32F103C8T6, which is used to receive the real-time temperature data of the heated workpiece and the real-time temperature data of the furnace temperature detected by the temperature acquisition device 10, send control instruction data to the temperature control module 70, and store the temperature data and the sent control instruction data in the data storage 30. The controller module 20 sends control instructions to control the heating power of the temperature control module 70 to heat the workpiece according to the temperature data of the furnace temperature and the temperature data of the heated workpiece according to the process requirements, and at the same time, the temperature data of the furnace temperature, the temperature data of the heated workpiece and the sent control instructions are stored to form the process parameters of the workpiece processing process.

[0030] The data storage device 30 is a data recorder of model JM341, which is electrically connected to the controller module 20 and is used to record the temperature data received and the control instruction data sent by the controller module 20 in real time to form the process parameters of the workpiece processing process.

[0031] The display module 40 uses a touch screen model SDWb070C53, which is electrically connected to the controller module 20 and is used to display the temperature data received and the control instruction data sent by the controller module 20 to display the operating status of the system and send the control instruction data to the controller module 20.

[0032] The 5G transmission module 50 adopts a signal transmission module model MTW56-5-2A, which is electrically connected to the controller module 20 and is used to transmit data between the controller module 20 and the EAP system 60.

[0033] The EAP system 60 is used for the user to remotely view the temperature data collected by the temperature collection device 10 in real time and to send control instructions to the controller module 20 through the controller module 20, so as to remotely manage the system and improve the utilization efficiency of the equipment.

[0034] Furthermore, the EAP system 60 uses a resource management device of model SAIMTEAP-1, and transmits data with the controller module 20 via the SECS / GEM communication protocol.

[0035] The temperature control module 70 is electrically connected to the controller module 20 and is used to receive control instructions from the controller module 20 to control the furnace temperature.

[0036] Furthermore, the temperature control module 70 includes a heating regulator 71 and a heating device 72. The heating regulator 71 adopts a frequency converter with a model number of G120, which is electrically connected to the controller module 20 and is used to control the heating power of the heating device 72. The heating device 72 adopts a halogen lamp with a model number of J78-30W, which is electrically connected to the heating regulator 71 and is installed inside the heat treatment furnace to heat the temperature inside the furnace. The controller module 20 changes the output of the heating power of the heating device 72 by changing the frequency of the heating regulator 71 according to the collected furnace temperature and the temperature of the heated workpiece, so as to adjust the temperature inside the furnace.

[0037] The use principle of the utility model: when in use, the furnace temperature and the temperature of the heated workpiece are detected by the temperature acquisition device installed in the heat treatment furnace, the temperature data is stored in the temperature acquisition device and sent to the controller module, the controller module sends a control instruction to control the temperature control module to control the temperature of the heat treatment furnace according to the collected temperature data, the data storage device records the heat treatment process by recording the detected temperature data and sending control instructions, the display module displays the system operation status in real time, and the system is remotely managed through the EAP system to reduce and prevent equipment failures and improve production efficiency.

[0038] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An intelligent heat treatment furnace control system, characterized in that: include: A temperature acquisition device (10), the temperature acquisition device (10) being electrically connected to a controller module (20), the temperature acquisition device (10) comprising a workpiece temperature memory (11), a workpiece temperature acquisition module (12), a furnace temperature acquisition module (13) and a furnace temperature memory (14), the workpiece temperature memory (11) being electrically connected to the workpiece temperature acquisition module (12) and being used to store detected real-time temperature data of a heated workpiece, the workpiece temperature acquisition module (12) being mounted on a furnace wall of a heat treatment furnace and being electrically connected to the controller module (20) and being used to detect real-time temperature data of a heated workpiece in the furnace, sending the data to the controller module (20) and storing the data in the workpiece temperature memory (11), the furnace temperature acquisition module (13) being mounted in the heat treatment furnace and being electrically connected to the controller module (20) and being used to detect real-time temperature data in the furnace, sending the data to the controller module (20) and storing the data in the furnace temperature memory (14), the furnace temperature memory (14) being electrically connected to the furnace temperature acquisition module (13) and being used to store detected real-time temperature data of the furnace temperature; A controller module (20), the controller module (20) being used to receive real-time temperature data of a heated workpiece and real-time temperature data of a furnace temperature detected by a temperature acquisition device (10), send control instruction data to a temperature control module (70), and store the temperature data and the sent control instruction data in a data storage device (30); A data storage device (30), the data storage device (30) being electrically connected to the controller module (20) and used for recording in real time the temperature data received and the control instruction data sent by the controller module (20); A display module (40), the display module (40) being electrically connected to the controller module (20), and being used for displaying the temperature data received and the control instruction data sent by the controller module (20), and sending the control instruction data to the controller module (20); A 5G transmission module (50), the 5G transmission module (50) being electrically connected to the controller module (20) and used for transmitting data between the controller module (20) and the EAP system (60); An EAP system (60), wherein the EAP system (60) is used for a user to remotely view temperature data collected by a temperature collection device (10) in real time and to send a control instruction to the controller module (20) through the controller module (20) to remotely manage the system; A temperature control module (70) is electrically connected to the controller module (20) and is used to receive a control instruction from the controller module (20) to control the furnace temperature.

2. The intelligent heat treatment furnace control system according to claim 1, characterized in that: The temperature control module (70) comprises a heating regulator (71) and a heating device (72); the heating regulator (71) is electrically connected to the controller module (20) and is used to control the heating power of the heating device (72); the heating device (72) is electrically connected to the heating regulator (71) and is installed inside the heat treatment furnace and is used to heat the temperature inside the furnace.

3. The intelligent heat treatment furnace control system according to claim 1, characterized in that: The EAP system (60) transmits data with the controller module (20) via the SECS / GEM communication protocol.

4. The intelligent heat treatment furnace control system according to claim 1, characterized in that: The temperature acquisition module (12) and the furnace temperature acquisition module (13) are connected to the controller module (20) via analog communication.

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