Anti-static device and anti-static cart
By using the rigid flat -structured parts in the anti -static vehicle, the problem of poor contact with the anti -static chain when the vehicle moves, and the effect of stable grounding is achieved.
Patent Information
- Application Number
- CN202421080254.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-17
- Publication Date
- 2025-01-24
- Estimated Expiration
- 2034-05-17
AI Technical Summary
In the prior art, anti-static chains are easily rolled or stacked when the cart moves, resulting in a decrease in the contact area with the anti-static floor and easily lead to poor contact.
Design an anti-static device that includes a grounding piece with a rigid flat structure. One side of the grounding piece in the thickness direction is in contact with the ground to ensure that it does not rotate when the cart moves, thereby maintaining stable grounding.
Through this design, the anti-static device can ensure stable grounding and improve the problem of poor contact of the anti-static chain in the existing technology.
Smart Images
Figure CN222395854U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to an anti-static device and an anti-static cart. Background Art
[0002] There are requirements for electrostatic protection in semiconductor manufacturing. For example, when electrostatic sensitive products are transferred within the factory, anti-static carts should be used to avoid the risk of electrostatic damage.
[0003] At present, an anti-static cart is equipped with an anti-static chain at the bottom of the cart, and the anti-static chain is used to transfer the static electricity of the cart to the ground. The anti-static chain in the prior art is easy to roll or stack when the cart moves due to its structural characteristics, which reduces the contact area between it and the conductive wire on the anti-static floor, thus easily causing poor contact. Utility Model Content
[0004] The embodiments of the present application at least provide an anti-static device and an anti-static cart to improve the technical problem of poor contact of the anti-static chain in the prior art.
[0005] In a first aspect, an embodiment of the present application provides an anti-static device, which is arranged at the bottom of a cart to transfer static electricity of the cart to the ground, and the anti-static device includes:
[0006] Grounding piece;
[0007] a first chain, wherein a first end of the chain is connected to the grounding member, and a second end of the chain is used to be connected to the bottom of the cart;
[0008] The grounding member is a rigid flat structure, and one side of the grounding member in the thickness direction is arranged to be in contact with the ground when the cart moves.
[0009] In an optional implementation, the grounding element adopts a hollow design.
[0010] In an optional embodiment, the grounding member includes a plurality of rings, and the plurality of rings are sequentially arranged along the length direction of the grounding member, and every two adjacent rings are connected and fixed to each other.
[0011] In an optional embodiment, the grounding member further includes a plurality of connecting rods, the plurality of connecting rods and the plurality of rings are alternately distributed at intervals, and every two adjacent rings are connected and fixed by the connecting rods.
[0012] In an optional implementation, there are multiple grounding elements.
[0013] In an optional embodiment, the plurality of grounding members are arranged in sequence along the width direction, and the plurality of grounding members are connected and fixed to each other.
[0014] In an optional embodiment, the anti-static device further includes:
[0015] A second chain, wherein a first end of the second chain is connected to the grounding member, and a second end of the second chain is used to be connected to the cart.
[0016] In an optional embodiment, the second chain and the first chain are respectively connected to the first end and the second end of the grounding member, and the first end and the second end of the grounding member are opposite ends of the grounding member.
[0017] In an optional embodiment, the second chain and the first chain are respectively connected to a first connection portion and a second connection portion of the cart, and the first connection portion and the second connection portion are respectively located at two ends of a diagonal line of a bottom portion of the cart.
[0018] In a second aspect, an embodiment of the present application further provides an anti-static cart, comprising the anti-static device described in any one of the first aspects, wherein the anti-static device is used to be arranged at the bottom of the cart to transfer the static electricity of the cart to the ground.
[0019] The above technical solution of the present application has the following beneficial technical effects:
[0020] The anti-static device of the embodiment of the present application has a grounding piece which is a rigid flat structure, and one side of the grounding piece in the thickness direction is in contact with the ground when the cart moves. This prevents the grounding piece from rotating due to the dragging of the chain when the cart moves. In this way, the grounding effect of the anti-static device can be ensured, thereby improving the technical problem of poor contact of the anti-static chain in the prior art.
[0021] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. The drawings herein are incorporated into the specification and constitute a part of the specification. These drawings illustrate embodiments consistent with the present application and are used together with the specification to illustrate the technical solutions of the present application. It should be understood that the following drawings only illustrate certain embodiments of the present application and should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can also be obtained based on these drawings without creative work.
[0023] Figure 1 A schematic structural diagram of an anti-static cart in the prior art is shown;
[0024] Figure 2 A schematic structural diagram of an anti-static cart provided in an embodiment of the present application is shown;
[0025] Figure 3 A schematic diagram of the structure of an anti-static device provided in an embodiment of the present application is shown;
[0026] Reference numerals:
[0027] 100, cart; 200, anti-static chain; 300, anti-static device; 310, grounding piece; 311, ring; 312, connecting rod; 320, first chain; 330, metal rod; 340, second chain. DETAILED DESCRIPTION
[0028] There are requirements for electrostatic protection in semiconductor manufacturing. For example, when electrostatic sensitive products are transferred within the factory, anti-static carts should be used to avoid the risk of electrostatic damage.
[0029] Currently, if Figure 1 As shown, the anti-static cart is equipped with an anti-static chain 200 at the bottom of the cart 100, and the static electricity of the cart is transferred to the ground by the anti-static chain 200. The anti-static chain in the prior art is easy to roll or stack when the cart moves due to its structural characteristics, which reduces the contact area between it and the conductive wire on the anti-static floor, thus easily causing poor contact.
[0030] To this end, the embodiments of the present application provide an anti-static device and an anti-static cart to improve the technical problem of poor contact of the anti-static chain in the prior art.
[0031] In order to make the objectives, technical solutions and advantages of the present application more clear, they are described in detail below with reference to specific drawings and embodiments.
[0032] refer to Figure 2 , Figure 2 The structure diagram of an anti-static cart provided in an embodiment of the present application is shown. The anti-static cart provided in an embodiment of the present application includes a cart 100 and an anti-static device 300. The anti-static device 300 is installed at the bottom of the cart 100, and the anti-static device 300 is used to transfer the static electricity of the cart 100 to the anti-static floor or the ground.
[0033] refer to Figure 3 , Figure 3A schematic structural diagram of an anti-static device 300 provided in an embodiment of the present application is shown. The anti-static device 300 provided in an embodiment of the present application includes a grounding member 310 and a first chain 320. The first end of the first chain 320 is connected to the grounding member 310, and the second end is used to connect to the bottom of the cart 100. The grounding member 310 is a rigid flat structure, and the grounding member 310 is configured so that one side of the grounding member 310 in the thickness direction is in contact with the ground when the cart 100 moves. Specifically, since the grounding member 310 is a rigid flat structure, and one side of the grounding member 310 in the thickness direction is in contact with the ground when the cart 100 moves, the grounding member 310 will not rotate due to the drag of the chain when the cart 100 moves. In this way, stable contact between the anti-static device 300 and the ground (conductive wire) can be ensured, thereby improving Figure 1 The prior art has the technical problem that the anti-static chain 200 is prone to poor contact with the ground.
[0034] It should be understood that, in a specific implementation, the grounding member 310 should have a certain weight, so as to prevent the grounding member 310 from tilting or flipping when being dragged by the first chain 320. For example, the weight of the grounding member 310 may be 1 kg, 2 kg, or 3 kg.
[0035] It should also be understood that in a specific implementation, the grounding member 310 should avoid the situation where its side cannot be in contact with the ground due to the connection with the first chain 320. For example, the grounding member 310 can be connected to the first end of the first chain 320 through the side or top surface.
[0036] Optionally, in the embodiment of the present application, the grounding member 310 adopts a hollow design. This arrangement can increase the horizontal structural dimensions of the grounding member 310, such as length and width, as much as possible without changing the weight, so that the grounding member 310 can be more difficult to rotate, thereby ensuring the grounding effect of the grounding member 310.
[0037] On the other hand, since the grounding member 310 adopts a hollow design, the weight of the grounding member 310 is reduced, which can reduce the friction between the grounding member 310 and the ground, thereby avoiding ground damage and noise caused by excessive friction.
[0038] refer to Figure 3 , illustratively, the grounding member 310 includes a plurality of rings 311, which are sequentially arranged along the length direction of the grounding member 310, and each two adjacent rings 311 are connected and fixed to each other. In this way, the hollow design of the grounding member 310 can be realized, that is, the plurality of rings 311 form the grounding member 310, and the center of each ring 311 forms a hollow area of the grounding member 310.
[0039] In specific configuration, the ring 311 may be a circular structure, an elliptical structure, a square structure, a triangular structure, etc. This embodiment of the present application does not make any specific limitation on this.
[0040] In the specific setting, two adjacent rings 311 can be directly connected and fixed, or indirectly connected and fixed. In the embodiment of the present application, the two adjacent rings 311 are preferably indirectly connected and fixed. For example, the grounding member 310 also includes a plurality of connecting rods 312, and the plurality of connecting rods 312 and the plurality of rings 311 are alternately distributed at intervals, and each two adjacent rings 311 are connected and fixed by the connecting rod 312. Specifically, the grounding member 310 and the connecting rod 312 can be fixed by welding. In this way, it is possible to allow a gap between the rings 311, thereby increasing the length of the grounding member 310, so that the grounding member 310 can be in contact with more conductive wires.
[0041] It should be understood that in a specific implementation, the bottom surface of the connecting rod 312 should not be lower than the bottom surface of the ring 311. That is, the connecting rod 312 can be set on the side of the ring 311, or on the top surface of the ring 311. In this way, it can be avoided that the connecting rod 312 supports the ring 311 to make it tilt and reduce the contact area with the ground, so that the grounding effect of the ring 311 can be ensured.
[0042] In other possible implementations, the grounding member 310 may also adopt other hollow designs. For example, the grounding member 310 may adopt a mesh structure.
[0043] Optionally, in the embodiment of the present application, there are multiple grounding members 310. Specifically, multiple grounding members 310 are respectively connected to the first end of the first chain 320, and multiple grounding members 310 are arranged in parallel with each other. Such an arrangement can increase the contact area between the anti-static device 300 and the earth (conductive wire), thereby facilitating improving the grounding effect.
[0044] Optionally, in the embodiment of the present application, a plurality of grounding members 310 are arranged in sequence along the width direction, and the plurality of grounding members 310 are connected and fixed to each other. Such an arrangement can improve the stability of the grounding member 310 and increase the difficulty of rotating the grounding member 310. Specifically, when the plurality of grounding members 310 are arranged at intervals along the width direction and connected and fixed to each other, the plurality of grounding members 310 form a unified whole, the width of the unified whole is larger than the width of a single grounding member 310, the weight is heavier, and the difficulty of rotating is greatly increased. Therefore, such an arrangement can improve the stability of the grounding member 310.
[0045] In the specific setting, multiple grounding members 310 can be directly connected and fixed, or indirectly connected and fixed. In the embodiment of the present application, the multiple connecting members are preferably indirectly connected and fixed. For example, a metal rod 330 is arranged between two adjacent grounding members 310, and the two ends of the metal rod 330 are respectively connected and fixed to a grounding member 310. Specifically, the grounding members 310 can be fixed by welding. In this way, not only can the spacing connection and fixation between two adjacent grounding members 310 be achieved, but also a certain distance is allowed between the two adjacent grounding members 310, so that the structural width can be further increased and the stability of the grounding member 310 can be improved.
[0046] Optionally, in the embodiment of the present application, a plurality of grounding members 310 are respectively connected and fixed to the first end of the first chain 320. This arrangement can improve the connection strength between the grounding members 310 and improve the reliability of the structure.
[0047] In the specific configuration, in order to facilitate the connection and fixation of the first chain 320 with the plurality of grounding members 310, the buckle at the first end of the first chain 320 may adopt other shapes besides a circle. For example, the buckle at the first end of the first chain 320 may be a triangular buckle, which is connected and fixed to the plurality of grounding members 310 through its bottom edge.
[0048] Optionally, in the embodiment of the present application, the anti-static device 300 further includes a second chain 340, a first end of the second chain 340 is connected to the grounding member 310, and a second end of the second chain 340 is used to connect to the cart 100. Specifically, the second chain 340 and the first chain 320 are respectively connected to the first end and the second end of the grounding member 310, and the first end and the second end of the grounding member 310 are opposite ends of the grounding member 310. This arrangement can reduce the risk of the anti-static device 300 falling off, which is conducive to improving the reliability of the device.
[0049] Optionally, in the embodiment of the present application, the second chain 340 and the first chain 320 are respectively connected to the first connection portion and the second connection portion of the cart 100, and the first connection portion and the second connection portion are respectively located at both ends of the diagonal line of the bottom of the cart 100. This arrangement can keep the anti-static device 300 at the bottom of the cart 100 to prevent the operator from stepping on it.
[0050] The anti-static device 300 of the embodiment of the present application has a grounding piece 310 which is a rigid flat structure, and one side of the grounding piece 310 in the thickness direction is in contact with the ground when the cart 100 moves. This prevents the grounding piece 310 from rotating due to the dragging of the chain when the cart 100 moves. In this way, the grounding effect of the anti-static device 300 can be ensured, thereby improving the technical problem of poor contact of the anti-static chain 200 in the prior art.
[0051] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in one or more embodiments of this specification should be understood by people with ordinary skills in the field to which this application belongs. The "first", "second" and similar words used in one or more embodiments of this specification do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.
[0052] One or more embodiments of this specification are intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of one or more embodiments of this specification should be included in the scope of protection of this application.
[0053] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.
Claims
1. An anti-static device, used to be arranged at the bottom of a cart to transfer the static electricity of the cart to the ground, characterized in that: The anti-static device comprises: Grounding piece; a first chain, wherein a first end of the chain is connected to the grounding member, and a second end of the chain is used to be connected to the bottom of the cart; The grounding member is a rigid flat structure, and one side of the grounding member in the thickness direction is arranged to be in contact with the ground when the cart moves.
2. The antistatic device according to claim 1, characterized in that: The grounding piece adopts a hollow design.
3. The antistatic device according to claim 2, characterized in that: The grounding member comprises a plurality of rings, which are arranged in sequence along the length direction of the grounding member, and every two adjacent rings are connected and fixed to each other.
4. The antistatic device according to claim 3, characterized in that: The grounding member further comprises a plurality of connecting rods, wherein the plurality of connecting rods and the plurality of rings are alternately distributed at intervals, and every two adjacent rings are connected and fixed by the connecting rods.
5. The anti-static device according to claim 1, characterized in that: The number of the grounding elements is multiple.
6. The antistatic device according to claim 5, characterized in that: The plurality of grounding members are arranged in sequence along the width direction, and the plurality of grounding members are connected and fixed to each other.
7. The antistatic device according to claim 1, characterized in that: The anti-static device also includes: A second chain, wherein a first end of the second chain is connected to the grounding member, and a second end of the second chain is used to be connected to the cart.
8. The anti-static device according to claim 7, characterized in that: The second chain and the first chain are respectively connected to a first end and a second end of the grounding member, and the first end and the second end of the grounding member are opposite ends of the grounding member.
9. The antistatic device according to claim 7, characterized in that: The second chain and the first chain are respectively connected to a first connection portion and a second connection portion of the cart, and the first connection portion and the second connection portion are respectively located at two ends of a diagonal line of a bottom of the cart.
10. An anti-static cart, characterized in that: It comprises an anti-static device as described in any one of claims 1 to 8, wherein the anti-static device is used to be arranged at the bottom of the cart to transfer the static electricity of the cart to the ground.