Special clamping frame for cleaning film magazine

Abstract

The utility model discloses a special card holder for cleaning a wafer box, which comprises a main body fixing frame, support structures for placing the wafer box are longitudinally arranged in the main body fixing frame, a wafer box placing space is arranged between two adjacent support structures, one side of each support structure is movably and / or detachably connected with at least two limiting parts, and the limiting parts are arranged on the main body fixing frame. The spacing between the two adjacent limiting pieces is adjustable, and the limiting pieces abut against the two sides of the wafer box. The utility model provides the special clamping frame for cleaning the wafer box, which has the advantage that the cleaning requirements of the wafer boxes with different specifications, sizes and shapes can be met.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production, in particular to a special card rack for wafer box cleaning. Background Art

[0002] In the semiconductor manufacturing process, wafers are usually stored and transported in cassettes to achieve the ultra-high cleanliness requirement of the wafer surface. Therefore, the cassettes need to be cleaned before use. As a result, many fixed card racks are designed to be customized for cassettes of different models and sizes to meet the clamping and fixing requirements during the cleaning process. The existing dedicated racks for cassette cleaning machines are also large in size, so they occupy a large area, which is not conducive to the rational use of space. At the same time, the dedicated rack structure is generally fixed and cannot be adjusted in real time according to the actual film basket model and specifications. The flexibility of use is small and the limitations are large.

[0003] Chinese patent application publication number CN218340576U, entitled "A special frame for film baskets of a portable film box washing machine", discloses a special frame for film baskets of a portable film box washing machine, including a main frame and a support structure, a film basket main body placement area is arranged above the support structure, a film basket main body blocking structure is arranged on the main frame of the fixed frame on one side of the film basket main body placement area, and adjustment blocks are arranged at both ends of the basket main body blocking structure, and an adjustment rod is movably installed through one side of the adjustment block, and a fastening ring is rotatably installed on the inner end of the adjustment rod through a bearing, and a film basket main body placement track is arranged on both sides of the top of the film basket main body support structure. In the process of daily use, according to the different models and specifications of the film baskets that need to be cleaned, the adjustment rod can be manually twisted to adjust the adjustment block by threading and retracting on the surface of the adjustment block, so that the adjustment block and the main frame of the fixed frame are loosened, and the film basket main body blocking structure is moved up and down, so as to achieve real-time adjustment of the distance between the film basket main body blocking structures, so that the film basket main body blocking structure can block the film basket more accurately, and avoid the problem of the film basket being overturned and falling due to force. However, the device does not solve the problem of real-time adjustment according to the actual film basket model and specifications, still has certain limitations, and does not solve the above-mentioned problems. Utility Model Content

[0004] In order to overcome the deficiencies in the prior art, the utility model provides a special card rack for cleaning a film box, which has the advantages of being compatible with the cleaning requirements of film boxes of different specifications, sizes and shapes.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a special card rack for film box cleaning, including a main body fixing frame, a support structure for placing the film box is longitudinally arranged on the side of the main body fixing frame, and there is a film box placement space between two adjacent support structures. At least two limit members are movably and / or detachably connected to one side of the support structure so that the distance between two adjacent limit members can be adjusted, and the limit members are pressed against both sides of the film box.

[0006] After adopting the above technical scheme, the utility model has the following advantages: a longitudinally arranged support structure for placing a wafer box is provided on the main fixed frame to maximize the utilization of space; by providing a movable or detachably connected limiter on one side of the support structure, the distance between two adjacent limiters can be flexibly adjusted to adapt to wafer boxes of different sizes, thereby significantly enhancing the versatility and flexibility of use of the card rack; the limiters are pressed against both sides of the wafer box to effectively limit the movement of the wafer box, thereby preventing the wafer box from moving or shaking during the cleaning process; this fixing method can effectively protect the wafer box from damage and ensure the smooth progress of the cleaning process; when the wafer size is small, not only can the number of limiters be increased by detachability to realize the simultaneous placement of multiple wafer boxes on one support structure, but also when the operator adjusts the limiters to adapt to wafer boxes of different sizes, there is no need to use additional tools or perform complicated operations, which not only improves the utilization efficiency of space, but also increases the carrying capacity and use efficiency of the card rack.

[0007] Furthermore, the limiting member has a first groove, the thickness of the first groove decreases gradually in a direction away from the supporting structure, and the minimum thickness of the first groove is slightly smaller than the thickness of the supporting structure.

[0008] By adopting the above-mentioned technical solution, the first groove minimizes the contact area between the thickness of the groove and the support structure, and the pressure distribution is more concentrated. When the limit piece is engaged with the support structure, since the height of the narrowest part of the first groove is slightly smaller than the thickness of the support structure, a certain compression force will be generated, so that the two are tightly combined. This tight combination effectively prevents the limit piece from loosening or shifting during use, thereby improving the stability of the entire bracket structure. Since the first groove forms a certain friction force on the contact surface between the thickness of the groove and the support structure, this friction force provides the necessary resistance during installation, so that the limit piece can be smoothly inserted into the support structure. Similarly, during disassembly, only a slight reverse force needs to be applied to overcome this friction force, so that the limit piece is separated from the support structure, making the installation and disassembly process both quick and convenient.

[0009] Furthermore, the limiting member is provided with a locking member for locking it on the supporting structure.

[0010] By adopting the above-mentioned technical solution, the limiting member is firmly locked on the supporting structure through the locking member, which can significantly enhance the stability of the entire card frame structure, thereby ensuring that the film box will not be displaced or shaken during the cleaning process, and effectively protecting the film box from damage.

[0011] Furthermore, the limiting member is slidably connected to the supporting structure along the width direction of the supporting structure.

[0012] By adopting the above-mentioned technical solution, it can be seen that the limit member can slide along the width direction of the support structure, so that the operator can easily adjust the position of the limit member to adapt to wafer boxes of different sizes. This adjustment method is simple and intuitive, and can quickly locate the required position, thereby improving work efficiency. Since the limit member can slide, its position can be adjusted according to the actual size of the wafer box, thereby achieving flexible adaptation to wafer boxes of different sizes. This design enhances the versatility and flexibility of the card rack, so that the same card rack can be used for cleaning wafer boxes of different specifications.

[0013] Furthermore, the limiting member extends a limiting arm toward the film box placement area, and the limiting arm is detachably connected to the limiting member.

[0014] By adopting the above-mentioned technical solution, it can be known that one end of the limit member extends out of the blocking member to form a limit arm. This limit arm can directly act on the film box, thereby further enhancing the fixing effect of the film box on the card rack and effectively preventing the film box from shaking or moving during the cleaning process. Through the detachable connection design between the limit arm and the limit member, limit arms of different lengths can be selected for film boxes of different sizes, which greatly improves the versatility and flexibility of the card rack, so that the same card rack can adapt to wafer boxes of different specifications. Since the limit arm and the limit member are detachably connected, the process of replacing or adjusting the limit arm becomes very simple and quick. The operator only needs to remove the limit arm and then install a new limit arm of the appropriate size.

[0015] Furthermore, the main body fixing frame has a second groove, and the supporting structure has a convex rib slidably mounted with the second groove.

[0016] By adopting the above-mentioned technical solution, it can be seen that through the sliding installation of the second groove on the main fixed frame and the convex rib on the support structure, the support structure can be flexibly adjusted along the height direction on the main fixed frame, so that the card rack has better tolerance for wafer boxes of different heights, improves the versatility and practicality of the card rack, and the adjustment process is simple and intuitive. The operator can easily adjust the support structure to the appropriate height position. At the same time, this connection method also facilitates the installation and disassembly of the support structure, thereby improving work efficiency.

[0017] Furthermore, the supporting structure is a hollow structure, and the main fixed frame is a skeleton structure.

[0018] By adopting the above-mentioned technical solution, it can be seen that since the support structure adopts a hollow design, the cleaning liquid can easily enter and remove the dirt and residue inside the support structure, thereby significantly improving the cleaning efficiency and reducing the cleaning cost. It can further effectively prevent the accumulated water generated during the cleaning process from accumulating inside the support structure, reducing the risk of secondary contamination of the wafer box. Although the support structure is a hollow design, the design of the skeleton structure ensures sufficient strength and stability, so that the card rack is not easily deformed or damaged when bearing the weight of the wafer box and during the cleaning process. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 2 It is a schematic diagram of the support structure of the main body of the film box of the utility model;

[0021] Figure 3 It is a schematic diagram of the structure of the limiter of the utility model;

[0022] In the figure: 1, main body fixing frame; 11, supporting structure; 12, limiting member; 121, limiting arm; 122, first groove; 123, locking member. DETAILED DESCRIPTION

[0023] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0024] Embodiment 1:

[0025] like Figures 1 to 3 As shown, a special card rack for film box cleaning is provided, wherein a support structure 11 for placing the film box is longitudinally arranged on the inner side of the main fixed frame, a film box placement space is provided between two adjacent support structures 11, and at least two limit members 12 are movably and / or detachably connected to one side of the support structure 11 so that the distance between two adjacent limit members 12 can be adjusted, and the limit members 12 are pressed against both sides of the film box to limit the movement of the film box.

[0026] It can be understood that a longitudinally arranged support structure 11 for placing film boxes is provided on the main fixed frame to maximize space utilization. By providing a movable or detachably connected limiter 12 on one side of the support structure 11, the distance between two adjacent limiters 12 can be flexibly adjusted to adapt to film boxes of different sizes, thereby significantly enhancing the versatility and flexibility of use of the card holder. The limiters 12 are pressed against both sides of the film box, effectively limiting the movement of the film box, thereby preventing the film box from moving or shaking during the cleaning process. This fixing method can effectively protect the film box from damage and ensure the smooth progress of the cleaning process. When the chip size is small, not only can the number of limiters 12 be increased by detachable means to achieve the simultaneous placement of multiple film boxes on one support structure 11, but also when the operator adjusts the limiters 12 to adapt to film boxes of different sizes, there is no need to use additional tools or perform complicated operations, which not only improves the utilization efficiency of space, but also increases the carrying capacity and use efficiency of the card holder.

[0027] Preferably, the limiting member 12 is made of a dustproof material, such as polytetrafluoroethylene.

[0028] Preferably, the limiting member 12 is slidably connected to the supporting structure 11 along the width direction of the supporting structure 11 .

[0029] It can be understood that the limit member 12 can slide along the width direction of the support structure 11, so that the operator can easily adjust the position of the limit member 12 to adapt to film boxes of different sizes. This adjustment method is simple and intuitive, and can quickly locate the desired position, thereby improving work efficiency. Since the limit member 12 can slide, its position can be adjusted according to the actual size of the film box, thereby achieving flexible adaptation to film boxes of different sizes. This design enhances the versatility and flexibility of the card rack, so that the same card rack can be used for cleaning film boxes of different specifications.

[0030] Preferably, the limiting member 12 has a first groove 122 , the thickness of the first groove 122 decreases gradually in a direction away from the supporting structure 11 , and the minimum thickness of the first groove 122 is slightly smaller than the thickness of the supporting structure 11 .

[0031] It can be understood that the first groove 122 minimizes the contact area between the thickness of the part with the support structure 11, and the pressure distribution is more concentrated. When the limit member 12 is engaged with the support structure 11, since the height of the narrowest part of the first groove 122 is slightly smaller than the thickness of the support structure 11, a certain compression force will be generated, so that the two are tightly combined. This tight combination effectively prevents the limit member 12 from loosening or shifting during use, thereby improving the stability of the entire bracket structure. Since the first groove 122 forms a certain friction force between the thickness of the part with the support structure 11, this friction force provides the necessary resistance during installation, so that the limit member 12 can be smoothly guided to the support structure 11. Similarly, during disassembly, only a slight reverse force needs to be applied to overcome this friction force, so that the limit member 12 is separated from the support structure 11, making the installation and disassembly process quick and convenient.

[0032] Preferably, anti-skid ribs may be provided at the contact portion between the first groove 122 and the support structure 11 to increase friction and make the connection more secure. This embodiment will not go into detail on this, and it is only necessary to achieve the purpose of stable fit.

[0033] Preferably, the limiting member 12 is provided with a locking member 123 for locking the limiting member 12 on the supporting structure 11 .

[0034] Preferably, the locking member 123 may be a locking screw, which is threadedly connected to the wall of the groove and abuts against the supporting structure to lock the limiting member 12 .

[0035] It is understandable that by firmly locking the limiting member 12 on the supporting structure 11 through the locking member 123, the stability of the entire card frame structure can be significantly enhanced, which ensures that the film box will not be displaced or shaken during the cleaning process, and effectively protects the film box from damage.

[0036] Furthermore, the limiting member 12 extends a limiting arm 121 toward the film box placement area, and the limiting arm 121 is detachably connected to the limiting member 12 .

[0037] It can be understood that one end of the limit member 12 extends out of the blocking member to form a limit arm 121. This limit arm 121 can directly act on the film box, thereby further enhancing the fixing effect of the film box on the card rack and effectively preventing the film box from shaking or moving during the cleaning process. Through the detachable connection design between the limit arm 121 and the limit member 12, limit arms 121 of different lengths can be selected for film boxes of different sizes, which greatly improves the versatility and flexibility of the card rack, so that the same card rack can adapt to wafer boxes of different specifications. Since the limit arm 121 and the limit member 12 are detachably connected, the process of replacing or adjusting the limit arm 121 becomes very simple and quick. The operator only needs to remove the limit arm 121 and then install a new limit arm 121 of the appropriate size.

[0038] Preferably, the limiting arm 121 and the limiting member 12 can be connected by threads or clamping.

[0039] Preferably, the limiting arm 121 in this embodiment is a cylinder.

[0040] Furthermore, the main body fixing frame has a second groove, and the supporting structure 11 has a convex rib slidably mounted with the second groove.

[0041] It can be understood that, through the sliding installation of the second groove on the main fixed support frame and the convex rib on the support structure 11, the support structure 11 can be flexibly adjusted along the height direction on the main fixed frame, so that the card rack has better tolerance for wafer boxes of different heights, improves the versatility and practicality of the card rack, and the adjustment process is simple and intuitive. The operator can easily adjust the support structure 11 to a suitable height position. At the same time, this connection method also facilitates the installation and disassembly of the support structure 11, thereby improving work efficiency.

[0042] Preferably, in order to keep the main fixing frame and the supporting structure 11 stable during the cleaning process, anti-slip strips may be laid in the grooves or a fixing structure may be added at the contact end, such as a snap fit or a bolt fit.

[0043] Preferably, the support structure 11 is a hollow structure, and the main fixed frame 1 is a skeleton structure.

[0044] It can be understood that since the support structure 11 adopts a hollow design, the cleaning liquid can easily enter and remove the dirt and residue inside the support structure 11, thereby significantly improving the cleaning efficiency and reducing the cleaning cost, and further effectively preventing the accumulated water generated during the cleaning process from accumulating inside the support structure 11, reducing the risk of secondary contamination of the wafer box. Although the support structure 11 is a hollow design, the design of the skeleton structure ensures sufficient strength and stability, so that the card rack is not easily deformed or damaged when bearing the weight of the wafer box and during the cleaning process.

[0045] In addition to the above-mentioned preferred embodiments, the present invention also has other implementation modes. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative work are within the scope of protection requested by the present invention.

Claims

1. A special card rack for cleaning film boxes, characterized in that: It comprises a main body fixing frame, in which a supporting structure for placing a film box is longitudinally arranged, a film box placement space is provided between two adjacent supporting structures, and at least two limiting members are movably and / or detachably connected to one side of the supporting structure so that the distance between two adjacent limiting members can be adjusted, and the limiting members are pressed against both sides of the film box.

2. A special card rack for film box cleaning according to claim 1, characterized in that: The limiting member has a first groove, the thickness of the first groove decreases gradually in a direction away from the supporting structure, and the minimum thickness of the first groove is slightly smaller than the thickness of the supporting structure.

3. A special card rack for film box cleaning according to claim 2, characterized in that: The limiting member is provided with a locking member for locking the limiting member on the supporting structure.

4. A special card rack for film box cleaning according to claim 1, characterized in that: The limiting member is slidably connected to the supporting structure along a width direction of the supporting structure.

5. A special card rack for film box cleaning according to claim 1, characterized in that: The limiting member extends a limiting arm toward the film box placement area, and the limiting arm is detachably connected to the limiting member.

6. A special card rack for film box cleaning according to claim 1, characterized in that: The main body fixing frame is provided with a second groove, and the supporting structure is provided with a convex rib which is slidably mounted with the second groove.

7. A special card rack for film box cleaning according to claim 1, characterized in that: The supporting structure is a hollow structure, and the main fixing frame is a skeleton structure.

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