Dust removal pipeline

Abstract

The utility model provides a dust removal pipeline. The dust removal pipeline comprises a first connecting pipe, a second connecting pipe, a third connecting pipe, a fourth connecting pipe, a first gate valve, a second gate valve, a first dust accumulation cup and a second dust accumulation cup, the upper end of the first connecting pipe is communicated with a cavity of equipment, the lower end of the first connecting pipe is communicated with the upper end of the first gate valve, and the lower end of the first gate valve is communicated with the first dust accumulation cup; the upper end of the second connecting pipe is communicated with the first connecting pipe, the included angle between the second connecting pipe and the first connecting pipe is alpha, and alpha is larger than 0 degree and smaller than 90 degrees; the lower end of the second connecting pipe is communicated with the upper end of a third connecting pipe, the lower end of the third connecting pipe is communicated with the upper end of a second gate valve, and the lower end of the second gate valve is communicated with a second dust accumulation cup; and the upper end of the fourth connecting pipe is communicated with the third connecting pipe. The dust collection cups can be cleaned one by one when the dry pump and the whole equipment normally operate, or the dust collection cups are cleaned when the cavity is prevented and maintained, so that the operation time of the equipment is prolonged, and the maintenance frequency of the equipment is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a dust removal pipeline. Background Art

[0002] In the semiconductor production process, some processes will produce pollutants such as dust. Processes that produce pollutants are usually called harsh processes. Figure 1 As shown, in order to discharge the dust in the chamber 1 of the equipment, a dust removal pipeline 2 and a dry pump 3 (Dry Pump, dry vacuum pump or dry pump) are usually required; the dust removal pipeline 2 is an inverted Y shape, including a first port 201, a second port 202 and a third port 203, the first port 201 is connected to the chamber 1, the second port 202 is connected to the dust cup 5 through a gate valve 4 (Gate valve), the third port 203 is connected to the air intake port of the dry pump 3, and the exhaust port of the dry pump 3 is connected to the dust treatment equipment; the chamber 1 is usually set on the upper floor of the dry pump 3, and the connection line between the first port 201 and the second port 202 of the dust removal pipeline 2 is usually set vertically. When the dry pump 3 is running, suction is generated in the dust removal pipeline 2, and the dust falls into the dust cup 5 under the action of suction and gravity.

[0003] Since the dust cup 5 has a limited capacity for storing dust, it is difficult to clean the dust cup 5 at the same time as the preventive maintenance of the chamber 1. When cleaning the dust, the dry pump 3 and the entire device need to be shut down, the dust cup 5 needs to be removed, and the vertical pipeline needs to be dredged with a brush, which reduces production efficiency. Utility Model Content

[0004] The invention provides a new type of dust removal pipeline to solve the technical problem of shutting down the dry pump and the entire equipment when cleaning the dust.

[0005] In order to solve the above technical problems, the utility model provides a dust removal pipeline, including a first connecting pipe, a second connecting pipe, a third connecting pipe, a fourth connecting pipe, a first gate valve, a second gate valve, a first dust cup and a second dust cup;

[0006] The upper end of the first connecting pipe is used to communicate with the chamber of the device, the lower end of the first connecting pipe is communicated with the upper end of the first gate valve, and the lower end of the first gate valve is communicated with the first dust cup;

[0007] The upper end of the second connecting pipe is connected to the first connecting pipe, and the angle between the second connecting pipe and the first connecting pipe is α, and α satisfies 0°<α<90°;

[0008] The lower end of the second connecting pipe is connected to the upper end of the third connecting pipe, the lower end of the third connecting pipe is connected to the upper end of the second gate valve, and the lower end of the second gate valve is connected to the second dust cup;

[0009] The upper end of the fourth connecting pipe is connected to the third connecting pipe, and the angle between the fourth connecting pipe and the third connecting pipe is β, and β satisfies 0°<β<90°; the lower end of the fourth connecting pipe is used to connect to the dry pump.

[0010] Optionally, the α satisfies 0°<α<45°.

[0011] Optionally, the first connecting pipe and the third connecting pipe are arranged in parallel.

[0012] Optionally, the β satisfies 0°<β<45°.

[0013] Optionally, the dust removal pipeline also includes a fifth connecting pipe; the lower end of the fourth connecting pipe is connected to the upper end of the fifth connecting pipe, and the lower end of the fifth connecting pipe is connected to the dry pump.

[0014] Optionally, the fifth connecting pipe is arranged in parallel with the first connecting pipe.

[0015] Optionally, the second connecting pipe and the fourth connecting pipe are arranged between the first connecting pipe and the third connecting pipe.

[0016] Optionally, the upper end of the second connecting pipe is connected to the lower middle portion of the first connecting pipe.

[0017] Optionally, the upper end of the fourth connecting pipe is connected to the middle and lower part of the third connecting pipe.

[0018] Optionally, the second connecting tube and the fourth connecting tube have the same shape and size.

[0019] The utility model provides a dust removal pipeline, including two gate valves and two dust cups. When dust needs to be cleaned, the dry pump and the entire equipment can operate normally. At this time, only one of the gate valves can be closed and the dust cup corresponding to the gate valve can be cleaned, and the other gate valve remains open to allow the corresponding dust cup to collect dust. An unexpected effect is that the dust cups can be cleaned one by one when the dry pump and the entire equipment are operating normally, or the dust cups can be cleaned synchronously during preventive maintenance of the chamber, thereby increasing the operating time of the equipment and reducing the number of equipment maintenance times. The amount of dust collected by the two dust cups is more than the amount of dust collected by the original dust cup. In addition, the length of the first connecting pipe and the third connecting pipe is shorter than the original vertical pipeline. When cleaning with a brush, the first connecting pipe and the third connecting pipe are easier to clean, preventing the dust removal pipeline and the dry pump from being blocked. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 The present invention is a schematic diagram of the structure of a dust removal pipeline in the prior art when in use.

[0021] Figure 2 It is a structural schematic diagram of a dust removal pipeline provided by an embodiment of the utility model when in use.

[0022] Figure 3 It is a comparative schematic diagram of the space occupied by two dust removal pipelines provided in one embodiment of the utility model when in use.

[0023] [Description of reference numerals is as follows]:

[0024] Figure 1 : Chamber-1, dust removal pipeline-2, dry pump-3, gate valve-4, dust cup-5; first port-201, second port-202, third port-203;

[0025] Figure 2-3 : The first connecting pipe - 11, the second connecting pipe - 12, the third connecting pipe - 13, the fourth connecting pipe - 14, the first gate valve - 15, the second gate valve - 16, the first dust cup - 17, the second dust cup - 18, the chamber - 19, the dry pump - 20, and the fifth connecting pipe - 21. DETAILED DESCRIPTION

[0026] In order to make the purpose, advantages and features of the utility model clearer, a dust removal pipeline proposed by the utility model is further described in detail below in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiment of the utility model.

[0027] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0028] like Figure 2As shown, this embodiment provides a dust removal pipeline, including a first connecting pipe 11, a second connecting pipe 12, a third connecting pipe 13, a fourth connecting pipe 14, a first gate valve 15, a second gate valve 16, a first dust cup 17 and a second dust cup 18; the upper end of the first connecting pipe 11 is used to connect the chamber 19 of the device, the lower end of the first connecting pipe 11 is connected to the upper end of the first gate valve 15, and the lower end of the first gate valve 15 is connected to the first dust cup 17; the upper end of the second connecting pipe 12 is connected to the first connecting pipe 11, and the second connecting pipe 12 and the second gate valve 16 are connected to the first dust cup 17. The included angle between the first connecting pipe 11 is α, and α satisfies 0°<α<90°; the lower end of the second connecting pipe 12 is connected to the upper end of the third connecting pipe 13, the lower end of the third connecting pipe 13 is connected to the upper end of the second gate valve 16, and the lower end of the second gate valve 16 is connected to the second dust cup 18; the upper end of the fourth connecting pipe 14 is connected to the third connecting pipe 13, and the included angle between the fourth connecting pipe 14 and the third connecting pipe 13 is β, and β satisfies 0°<β<90°; the lower end of the fourth connecting pipe 14 is used to connect to the dry pump 20.

[0029] The dust removal pipeline provided in this embodiment includes two gate valves and two dust cups. When dust needs to be cleaned, the dry pump 20 and the entire device can operate normally. At this time, only one of the gate valves can be closed and the dust cup corresponding to the gate valve can be cleaned, and the other gate valve remains open to allow the corresponding dust cup to collect dust. An unexpected effect is that the dust cups can be cleaned one by one when the dry pump 20 and the entire device are operating normally, or the dust cups can be cleaned synchronously during the preventive maintenance of the chamber 19, thereby increasing the operating time of the equipment and reducing the number of equipment maintenance times. The amount of dust collected by the two dust cups is more than the amount of dust collected by the original dust cup. In addition, the lengths of the first connecting pipe 11 and the third connecting pipe 13 are shorter than the original vertical pipelines. When cleaning with a brush, the first connecting pipe 11 and the third connecting pipe 13 are easier to clean, preventing the dust removal pipeline and the dry pump 20 from being blocked.

[0030] Optional, such as Figure 2 As shown, α satisfies 0°<α<45°. The dust removal pipeline is placed vertically when in use, and the more the second connecting pipe 12 is inclined downward, the less likely dust is to accumulate inside it, so α is preferably 0°<α<45°.

[0031] Optional, such as Figure 2 As shown, the first connecting pipe 11 and the third connecting pipe 13 are arranged in parallel. When the first connecting pipe 11 and the third connecting pipe 13 are parallel, both the first connecting pipe 11 and the third connecting pipe 13 can be installed vertically, thereby preventing dust accumulation in the first connecting pipe 11 and the third connecting pipe 13.

[0032] Optional, such as Figure 2As shown, β satisfies 0°<β<45°. The dust removal pipeline is placed vertically when in use. The more the fourth connecting pipe 14 is inclined downward, the less likely dust is to accumulate inside it. Therefore, β is preferably 0°<β<45°.

[0033] Optional, such as Figure 2 As shown, the dust removal pipeline also includes a fifth connecting pipe 21; the lower end of the fourth connecting pipe 14 is connected to the upper end of the fifth connecting pipe 21, and the lower end of the fifth connecting pipe 21 is connected to the dry pump 20. The fifth connecting pipe 21 can be conveniently connected to the dry pump 20. In other embodiments, the lower end of the fourth connecting pipe 14 can be directly connected to the dry pump 20.

[0034] Optional, such as Figure 2 As shown, the fifth connecting pipe 21 is arranged parallel to the first connecting pipe 11. When the first connecting pipe 11 and the fifth connecting pipe 21 are parallel, both the first connecting pipe 11 and the fifth connecting pipe 21 can be installed vertically, thereby preventing dust accumulation in the first connecting pipe 11 and the fifth connecting pipe 21.

[0035] Optional, such as Figure 2 As shown, the second connecting pipe 12 and the fourth connecting pipe 14 are arranged between the first connecting pipe 11 and the third connecting pipe 13, so that the structure of the entire dust removal pipeline can be more compact and occupy less space. Figure 3 As shown, the span W1 shown on the left is significantly smaller than the span W2 shown on the right.

[0036] Optional, such as Figure 2 As shown, the upper end of the second connecting pipe 12 is connected to the middle and lower part of the first connecting pipe 11. The chamber 19 and the dry pump 20 of the equipment are usually arranged in layers. When the chamber 19 is arranged on the third floor and the dry pump 20 is arranged on the second floor, when the upper end of the second connecting pipe 12 is connected to the middle and lower part of the first connecting pipe 11, the total height of the second connecting pipe 12, the third connecting pipe 13 and the fourth connecting pipe 14 can be reduced.

[0037] Optional, such as Figure 2 As shown, the upper end of the fourth connecting pipe 14 is connected to the middle and lower part of the third connecting pipe 13, so that the height of the fourth connecting pipe 14 can be reduced.

[0038] Optional, reference Figure 2 As shown, the second connecting tube 12 and the fourth connecting tube 14 have the same shape and size. When the connecting tube sections need to be welded, the second connecting tube 12 and the fourth connecting tube 14 have the same shape and size, so that the second connecting tube 12 and the fourth connecting tube 14 can be interchanged, which is convenient for installing the second connecting tube 12 and the fourth connecting tube 14. In other embodiments, the connecting tube sections can be integrally formed.

[0039] In summary, the utility model provides a dust removal pipeline, including two gate valves and two dust cups. When dust needs to be cleaned, the dry pump 20 and the entire device can operate normally. At this time, only one of the gate valves can be closed and the dust cup corresponding to the gate valve can be cleaned, and the other gate valve remains open to allow the corresponding dust cup to collect dust. An unexpected effect is that the dust cups can be cleaned one by one when the dry pump 20 and the entire device are operating normally, or the dust cups can be cleaned synchronously during the preventive maintenance of the chamber 19, thereby increasing the operating time of the equipment and reducing the number of equipment maintenance times. The amount of dust collected by the two dust cups is more than the amount of dust collected by the original dust cup. In addition, the lengths of the first connecting pipe 11 and the third connecting pipe 13 are shorter than the original vertical pipelines. When cleaning with a brush, the first connecting pipe 11 and the third connecting pipe 13 are easier to clean, preventing the dust removal pipeline and the dry pump 20 from being blocked.

[0040] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.

Claims

1. A dust removal pipeline, characterized in that: It includes a first connecting pipe, a second connecting pipe, a third connecting pipe, a fourth connecting pipe, a first gate valve, a second gate valve, a first dust cup and a second dust cup; The upper end of the first connecting pipe is used to communicate with the chamber of the device, the lower end of the first connecting pipe is communicated with the upper end of the first gate valve, and the lower end of the first gate valve is communicated with the first dust cup; The upper end of the second connecting pipe is connected to the first connecting pipe, and the angle between the second connecting pipe and the first connecting pipe is α, and α satisfies 0°<α<90°; The lower end of the second connecting pipe is connected to the upper end of the third connecting pipe, the lower end of the third connecting pipe is connected to the upper end of the second gate valve, and the lower end of the second gate valve is connected to the second dust cup; The upper end of the fourth connecting pipe is connected to the third connecting pipe, and the angle between the fourth connecting pipe and the third connecting pipe is β, and β satisfies 0°<β<90°; the lower end of the fourth connecting pipe is used to connect to the dry pump.

2. A dust removal pipeline according to claim 1, characterized in that: The α satisfies 0°<α<45°.

3. A dust removal pipeline according to claim 1, characterized in that: The first connecting pipe and the third connecting pipe are arranged in parallel.

4. A dust removal pipeline as claimed in claim 3, characterized in that: The β satisfies 0°<β<45°.

5. A dust removal pipeline according to claim 1, characterized in that: The dust removal pipeline also includes a fifth connecting pipe; the lower end of the fourth connecting pipe is connected to the upper end of the fifth connecting pipe, and the lower end of the fifth connecting pipe is connected to the dry pump.

6. A dust removal pipeline as claimed in claim 5, characterized in that: The fifth connecting pipe is arranged in parallel with the first connecting pipe.

7. A dust removal pipeline according to claim 1, characterized in that: The second connecting pipe and the fourth connecting pipe are disposed between the first connecting pipe and the third connecting pipe.

8. A dust removal pipeline according to claim 1, characterized in that: The upper end of the second connecting pipe is communicated with the middle and lower part of the first connecting pipe.

9. A dust removal pipeline according to claim 1, characterized in that: The upper end of the fourth connecting pipe is communicated with the middle and lower part of the third connecting pipe.

10. The dust removal pipeline according to claim 1, characterized in that: The second connecting pipe and the fourth connecting pipe have the same shape and size.

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