Mask net stretching and pressing device

Abstract

The utility model provides a mask plate net stretching and pressing device which is arranged on a net stretching machine and comprises a protective cover. The laminating mechanism is arranged in the protective cover and comprises a press-fit shell, a press-fit plate, a plurality of lifting devices and a plurality of sensors, the press-fit plate is of an elastic curved surface structure and is arranged below the press-fit shell, the sensors are arranged on the upper surface of the press-fit plate, the lifting devices are arranged in the press-fit shell, and the sensors are arranged on the lower surface of the press-fit plate. The output ends of the lifting devices penetrate through the pressing shell and are arranged on the upper surfaces of the sensors in a one-to-one correspondence mode. The driving mechanism is connected with the protective cover and drives the attaching mechanism to move in the X-axis direction, the Y-axis direction and the Z-axis direction. The controller is in signal connection with the driving mechanism, the lifting device and the sensor. According to the utility model, wrinkles generated in the net stretching process can be effectively controlled and reduced, the net stretching efficiency and yield are improved, and the net stretching production cost is reduced; and meanwhile, the process capability and the quality of an evaporation device are improved.

Description

Technical Field

[0001] The utility model relates to the field of mask plate manufacturing, in particular to a mask plate net stretching and pressing device. Background Art

[0002] In the existing OLED vacuum evaporation process, the evaporation material is evaporated at high temperature and then deposited on the glass substrate through the openings on the mask plate to form a coating, which ultimately enables OLED light emission. The mask plate determines the film-forming area of ​​the substrate, so its design and production quality are very important. In particular, the high-precision metal mask plate (Fine Metal Mask) determines the accuracy of the coating position of the pixel light-emitting layer. The high-precision metal mask plate is mainly composed of a metal mask frame 200 and a high-precision metal mask strip 100 (Fine sheet). The mask strip 100 is stretched, aligned and welded to the mask frame 200 by a stretching machine.

[0003] like Figures 1 to 3 As shown, the net stretching machine applies force to the metal mask strip 100 through multiple groups of left and right clamping jaws 300, and presses the two ends of the metal mask strip 100 through the pressing device 400. Finally, the welding device moves over to perform laser welding on the welding areas on both sides of the mask strip. The position level difference between the clamps, uneven force, and other factors such as the gravity of the mask strip 100 itself will cause uneven surface tension of the metal mask strip 100, thereby generating wrinkles. In order to ensure the use quality of high-precision metal mask plates, it is necessary to control not only the PPA parameters (Pixel position accuracy) of the mask strip, but also the wrinkle specifications of the mask strip during the production process. Wrinkles will cause a gap between the mask strip 100 and the mask frame 200, which will affect the welding effect and the net stretching yield. At the same time, if the wrinkles are further deteriorated, it will also cause poor adhesion between the mask plate and the substrate, causing uneven coating or color mixing in the film forming area of ​​the substrate, affecting the quality and yield of the evaporation device. Wrinkles are a normal phenomenon in the process of stretching the net. How to reduce and effectively control wrinkles is also a technical difficulty that needs to be overcome in the development of stretching nets.

[0004] In order to reduce and control the wrinkles generated during the stretching of the mask strip, a pressing device 400 is generally added to the stretching machine. After the mask strip 100 is put on the machine and aligned to the surface of the mask frame 200, the pressing device 400 is pressed down to the upper surface of the mask strip 200, so that the mask strip 100 and the mask frame 200 are closely fitted, and then welding is performed to complete the production of the mask strip. Because the control of wrinkle parameters is at the micron level, the effect of this device in the actual production of mask plate stretching is not ideal, and there are mainly the following problems:

[0005] 1. The part of the pressing device 400 that contacts the mask strip is composed of a number of equally spaced ejector pins 401. The overall horizontal accuracy of the ejector pins 401 is required to be relatively high. If the heights of the ejector pins 401 are uneven and there is a gap between the ejector pins, some areas of the mask strip are not effectively pressed, which is easy to form wrinkles (such as Figure 2 shown).

[0006] 2. The pressing device 400 needs to rely on experienced engineering and technical personnel to perform mechanical height level calibration. The calibration result cannot be effectively quantified, and it is also impossible to monitor in real time whether the pressing effect is good during use. The only way to discover and check is to wait until the wrinkle data is bad.

[0007] 3. The lifting motion of the pressing device 400 is composed of a servo motor 402, a screw rod 403, a coupling 404 and a slider 405. Due to the large number of transmission units, the lifting accuracy is easily affected by the motion coordination of each component and its own life quality, and is relatively unstable.

[0008] 4. The pressing device 400 is a fixture, which is fixed to the net stretching machine by a plurality of bolts 406. The height of the pressing device 400 is controlled by adjusting the height of the bolts. Therefore, the height difference between the two screws should be minimized as much as possible. When the bolts are at different heights or are frequently used, a slight tilt is likely to occur (e.g. Figure 3 As shown in the figure), it is easy to cause poor pressing of the mask strip and the mask frame, resulting in poor welding of the mask strip, affecting the yield rate of the network and increasing the cost of the network.

[0009] 5. At present, the wrinkle data of the mask plate made by this device is generally between 20 and 50μm under good conditions. It is difficult to further reduce the wrinkle by relying on mechanism debugging. If higher PPI products are produced, the wrinkle specifications will be further tightened, and the capacity of this device will also become a bottleneck in the production of stretched mesh mask plates. Summary of the invention

[0010] The technical problem to be solved by the utility model is to provide a mask plate stretching and pressing device that can effectively control and reduce the wrinkles generated in the stretching process, improve the stretching efficiency and yield, and reduce the stretching production cost; at the same time, improve the process capability and the quality of the evaporation device.

[0011] The utility model is implemented as follows: a mask plate net stretching and pressing device, the pressing device is arranged on the net stretching machine, comprising

[0012] Protective cover;

[0013] The laminating mechanism is arranged in the protective cover, and includes a pressing shell, a pressing plate, a plurality of lifting devices and a plurality of sensors. The pressing plate is a curved structure with elasticity and is arranged below the pressing shell. The plurality of sensors are arranged on the upper surface of the pressing plate. The lifting device is arranged in the pressing shell, and the output end of the lifting device passes through the pressing shell and is arranged one by one on the upper surface of the sensor.

[0014] A driving mechanism is disposed on the web stretching machine, connected to the protective cover, and drives the laminating mechanism to move in the directions of the X-axis, Y-axis, and Z-axis;

[0015] A controller is connected to the driving mechanism, the lifting device and the sensor by signals.

[0016] Furthermore, the driving mechanism includes an X-axis moving mechanism, a Y-axis driving cylinder and a Z-axis driving cylinder. The output ends of the Y-axis driving cylinder and the Z-axis driving cylinder are connected to the protective cover to drive the protective cover to move in the Y-axis direction and the Z-axis direction respectively. The X-axis moving mechanism is arranged in the protective cover, including a slide rail, a slider and a driving member. The slide rail is fixed inside the protective cover. The slider is slid on the slide rail through the driving member, and the top of the pressed shell is fixedly connected to the slider.

[0017] Furthermore, the pressing plate is made of rubber or resin.

[0018] Furthermore, the lifting device is a light cylinder.

[0019] Furthermore, the driving member is a cylinder or a servo motor.

[0020] The advantages of the utility model are:

[0021] 1. The utility model adopts an integrated curved surface structure pressing plate. The integrated design can eliminate the horizontal difference between the ejectors in the existing design, better ensure the horizontal accuracy of the contact surface, reduce the wrinkles generated during the net stretching process, and produce products with higher PPI, thereby improving product competitiveness.

[0022] 2. The utility model is connected to the pressing plate by arranging a light lifting device and a sensor. Through the feedback of multiple groups of pressure values ​​during the pressing process, the fitting effect of the pressing plate, the mask strip and the mask frame during the net stretching process can be monitored in real time, so that the wrinkle control in the net stretching process can be visualized, digitized and controllable.

[0023] 3. The utility model drives the laminating mechanism to move in the X-axis, Y-axis and Z-axis directions by setting a driving mechanism, and all of them are controlled by cylinder drive. The medium is compressed air, which is environmentally friendly and does not pollute the cleanliness of the chamber. The motion control is simple and stable, and the stroke accuracy can be more effectively guaranteed. The driving mechanism can stably move the pressing mechanism without tilting, so that the pressing effect is better, the efficiency and yield of the net stretching are improved, and the production cost of the net stretching is reduced. The mask strips need to be welded at different positions on the mask frame, and the laminating mechanism needs to match different mask frame pressing positions. The driving mechanism can be synchronized with the clamping mechanism group to stretch the mask strips at different positions of the net. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention will be further described below in conjunction with the embodiments with reference to the accompanying drawings.

[0025] Figure 1 It is a schematic diagram of the structure of a mask strip and a mask frame in the prior art.

[0026] Figure 2 It is a schematic diagram of the lamination structure of the prior art lamination device and the mask strip.

[0027] Figure 3 It is a schematic diagram of the pressing device and bolt installation structure in the prior art.

[0028] Figure 4 It is a schematic diagram of the side view of the pressing device structure of the utility model.

[0029] Figure 5 It is a top view of the pressing device and mask strip installation structure of the utility model.

[0030] Figure 6 This is a diagram showing the state changes of the pressing plate pressing the mask strip according to the utility model.

[0031] Explanation of the accompanying drawings: mask strip 100, mask frame 200, clamping mechanism 300, pressing device 400, ejector pin 401, servo motor 402, screw rod 403, coupling 404, slider 405, bolt 406, protective cover 1, laminating mechanism 2, pressing shell 21, pressing plate 22, lifting device 23, sensor 24, driving mechanism 3, X-axis moving mechanism 31, slide rail 311, slider 312, Y-axis driving cylinder 32, Z-axis driving cylinder 33, controller 4. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0033] The technical problem to be solved by the utility model is to provide a mask plate stretching and pressing device that can effectively control and reduce the wrinkles generated in the stretching process, improve the stretching efficiency and yield, and reduce the stretching production cost; at the same time, improve the process capability and the quality of the evaporation device.

[0034] The idea of ​​the utility model to solve the above technical problems is: the pressing plate of the pressing mechanism is set to an elastic curved surface structure, and a lifting device is arranged above the pressing plate. During pressing, it is gradually flattened from the middle to both sides, so as to reduce the wrinkles generated in the process of stretching the net, improve the efficiency and yield of stretching the net, reduce the production cost of stretching the net, and provide real-time feedback of the pressing effect through sensors.

[0035] like Figures 4 to 6 As shown, a mask plate stretching and pressing device is arranged on the stretching machine, including a protective cover 1, a laminating mechanism 2, a driving mechanism 3 and a controller 4; the laminating mechanism 2 is arranged in the protective cover 1, and includes a pressing shell 21, a pressing plate 22, a plurality of lifting devices 23 and a plurality of sensors 24, the pressing plate 21 is a curved structure with elasticity, and is arranged below the pressing shell 21, the pressing plate 21 is made of rubber or resin, and will not cause scratches on the surface of the mask strip 100 and other adverse phenomena, and its length can be greater than the width of the mask strip. A plurality of sensors 24 are arranged on the upper surface of the pressing plate 22, and the lifting device 23 is arranged in the pressing shell 21. The lifting device 23 is a light cylinder, and its output end passes through the pressing shell 21 and is fixed on the upper surface of the sensor 24 one by one. The sensor 24 is a pressure sensor; the driving mechanism 3 is arranged on the net stretching machine to drive the laminating mechanism 2 to move in the X-axis, Y-axis and Z-axis directions. The driving mechanism 3 includes an X-axis moving mechanism 31, a Y-axis driving cylinder 32 and a Z-axis driving cylinder 33. The Y-axis driving cylinder 32 and the Z-axis driving cylinder 33 are The output end of the axis driving cylinder 33 is connected to the protective cover 1, and drives the protective cover 1 to move in the Y-axis direction and the Z-axis direction respectively. The X-axis moving mechanism 31 is arranged in the protective cover 1, and includes a slide rail 311, a slider 312 and a driving member (not shown). The driving member is a cylinder or a servo motor. The slide rail 311 is fixed inside the protective cover 1. The slider 312 is driven by the driving member to slide on the slide rail 311. The top of the pressing shell 21 is fixedly connected to the slider 312, and the laminating mechanism 2 moves on the slide rail 311 through the slider 312. The controller 4 is connected to the driving mechanism 3, the lifting device 23 and the sensor 24 by signal. The controller 4 receives the pressure value sent by the sensor 24 and controls the operation of the driving mechanism 3 and the lifting device 23.

[0036] Working principle:

[0037] 1. The laminating mechanism 2 is installed above the clamping mechanism 300 of the net stretching machine. Before the net is officially stretched, a standard laminating value verification will be performed on the sensor 24 in the laminating mechanism 2. Through different pressure laminating and a wrinkle data performance after welding, an effective standard reference value of the laminating pressure of the sensor is obtained.

[0038] 2. The mask strip 100 is transported to the designated position of the mask frame 200 by the clamping claw mechanism 300 and the net is aligned, and force is applied to the mask strip 100 so that the PPA (pixel position accuracy) meets the specifications. After the alignment is completed, the laminating mechanism 2 is quickly moved to the preset position according to the machine position parameter setting value by the driving mechanism 3, and drives the laminating mechanism 2 to slowly descend until the sensor 24 on the top of the pressing plate 22 senses the pressure, and the driving mechanism 3 stops driving the laminating mechanism 2 to descend, and then the controller 4 controls the lifting device 23 in the pressing shell 21 to start, and the lifting device 23 in the middle starts to gradually apply force to both sides, so that the mask strip 100 is also gradually flattened from the middle to both sides. During the pressing process, when the value detected by the sensor 24 reaches the error range allowed by the standard setting value, the corresponding lifting device 23 will stop moving until all sensors 24 reach the error range allowed by the standard setting value, and the pressing action is completed. At this time, the laminating mechanism 2 , the mask strip 100 and the mask frame 200 are in a well-laminating state.

[0039] 3. After the lamination is completed, the lens will come over to measure the PPA again to confirm that there is no problem. The welding device of the stretching machine (not shown) moves over to perform laser welding on the welding areas on both sides of the mask strip 100. The height of the weld point is generally controlled to be within 10μm. It can be judged that the wrinkles of the finished mask plate after welding should be controlled to about 10μm, and the process capability of the stretching machine will also be greatly improved. After welding is completed, the CCD lens group and position sensor on the stretching machine will measure the PPA data and wrinkle data of the stretched mask strip. If the data is within the specification, the next welding will be carried out, and this cycle will be repeated. Because the mask strip 100 needs to be welded at different positions on the mask frame 200, the bonding mechanism 2 needs to match different mask frame 200 lamination positions. The utility model can synchronize with the clamping mechanism 300 to stretch the mask strips at different positions through the driving mechanism 3.

[0040] The advantages of the utility model are:

[0041] 1. The utility model adopts an integrated curved surface structure pressing plate. The integrated design can eliminate the horizontal difference between the ejectors in the existing design, better ensure the horizontal accuracy of the contact surface, reduce the wrinkles generated during the net stretching process, and produce products with higher PPI, thereby improving product competitiveness.

[0042] 2. The utility model is connected to the pressing plate by arranging a light lifting device and a sensor. Through the feedback of multiple groups of pressure values ​​during the pressing process, the fitting effect of the pressing plate, the mask strip and the mask frame during the net stretching process can be monitored in real time, so that the wrinkle control in the net stretching process can be visualized, digitized and controllable.

[0043] 3. The utility model drives the laminating mechanism to move in the X-axis, Y-axis and Z-axis directions by setting a driving mechanism, and all of them are controlled by cylinder drive. The medium is compressed air, which is environmentally friendly and does not pollute the cleanliness of the chamber. The motion control is simple and stable, and the stroke accuracy can be more effectively guaranteed. The driving mechanism can stably move the pressing mechanism without tilting, so that the pressing effect is better, the efficiency and yield of the net stretching are improved, and the production cost of the net stretching is reduced. The mask strips need to be welded at different positions on the mask frame, and the laminating mechanism needs to match different mask frame pressing positions. The driving mechanism can be synchronized with the clamping mechanism group to stretch the mask strips at different positions of the net.

[0044] Although the specific implementation methods of the present invention are described above, those skilled in the art should understand that the specific embodiments described are only illustrative and are not intended to limit the scope of the present invention. Equivalent modifications and changes made by those skilled in the art in accordance with the spirit of the present invention should be included in the scope of protection of the claims of the present invention.

Claims

1. A mask plate stretching and pressing device, the pressing device is arranged on a stretching machine, characterized in that: include Protective cover; The laminating mechanism is arranged in the protective cover, and includes a pressing shell, a pressing plate, a plurality of lifting devices and a plurality of sensors. The pressing plate is a curved structure with elasticity and is arranged below the pressing shell. The plurality of sensors are arranged on the upper surface of the pressing plate. The lifting device is arranged in the pressing shell, and the output end of the lifting device passes through the pressing shell and is arranged one by one on the upper surface of the sensor. A driving mechanism, which is arranged on the web stretching machine and connected to the protective cover, drives the laminating mechanism to move in the directions of the X-axis, the Y-axis and the Z-axis; A controller is connected to the driving mechanism, the lifting device and the sensor by signals.

2. The mask plate stretching and pressing device according to claim 1, characterized in that: The driving mechanism includes an X-axis moving mechanism, a Y-axis driving cylinder and a Z-axis driving cylinder. The output ends of the Y-axis driving cylinder and the Z-axis driving cylinder are connected to the protective cover to drive the protective cover to move in the Y-axis direction and the Z-axis direction respectively. The X-axis moving mechanism is arranged in the protective cover, and includes a slide rail, a slider and a driving member. The slide rail is fixed inside the protective cover. The slider is slidably arranged on the slide rail through the driving member, and the top of the pressed shell is fixedly connected to the slider.

3. The mask plate stretching and pressing device according to claim 2, characterized in that: The pressing plate is made of rubber or resin.

4. The mask plate stretching and pressing device according to claim 3, characterized in that: The lifting device is a light cylinder.

5. The mask plate stretching and pressing device according to claim 2, characterized in that: The driving member is a cylinder or a servo motor.

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