Assembled tool of chemical vapor deposition furnace

Abstract

The utility model relates to the field of CVD (Chemical Vapor Deposition) equipment, and discloses an assembly type tool of a chemical vapor deposition furnace, which comprises a first graphite plate, a hole is formed in the top end of the first graphite plate, a first graphite column is arranged on the inner wall of the hole, and the bottom end of the outer wall of the first graphite column is clamped with the hole; second graphite plates are arranged on the outer sides of the first graphite columns, second graphite columns are arranged at the top ends of the outer walls of the first graphite columns, the top ends of the first graphite columns are clamped with the second graphite columns, and the adjacent sides of the two second graphite columns are clamped. A plurality of positioning discs are arranged at the top ends of the first graphite plate and the second graphite plate, a plurality of grooves are formed in the top ends of the positioning discs, and supporting JIGs are arranged on the inner walls of the grooves. According to the multi-layer structure tool, the first graphite column, the second graphite plate and the second graphite column are matched with one another, so that the multi-layer structure tool with the adjustable layer number can be formed.

Description

Technical Field

[0001] The utility model relates to the field of CVD equipment, in particular to an assembly tool for a chemical vapor deposition furnace. Background Art

[0002] Chemical vapor deposition (CVD) is a method for depositing thin films on solid surfaces. The desired thin film is formed by converting a gas precursor into a solid deposit through a chemical reaction. At high temperatures, the gas precursor decomposes in the reaction chamber and deposits on the substrate surface to form a uniform and dense film. CVD can be used to prepare various functional materials, such as metals, semiconductors, oxides, etc., and is widely used in electronics, optoelectronics, energy storage and other fields.

[0003] The CVD system consists of a high-temperature reaction chamber, a gas supply system, heating elements, and a temperature control system. The high-temperature reaction chamber is usually made of high-temperature resistant materials, such as graphite or quartz tubes, to accommodate substrates and reaction gases. The gas supply system introduces gas precursors into the reaction chamber through valves and flow controllers. The heating element is usually a resistance wire or a hot plate to provide the required high temperature. The temperature control system monitors and regulates the temperature in the reaction chamber. At the same time, tooling is required to place the workpiece on which the thin film is to be deposited in the high-temperature reaction chamber.

[0004] However, in the existing chemical vapor deposition furnace tooling, the tooling is customized according to the height of the workpiece. Therefore, in actual use, its height dimension cannot be adjusted according to the height of the workpiece. Utility Model Content

[0005] In order to make up for the above shortcomings, the utility model provides an assembly type tooling of a chemical vapor deposition furnace, aiming to improve the problem in the prior art that its height dimension cannot be adjusted according to the height of the workpiece.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an assembly tooling of a chemical vapor deposition furnace, comprising a first graphite plate, a hole is opened at the top of the first graphite plate, a first graphite column is arranged on the inner wall of the hole, the bottom end of the outer wall of the first graphite column is engaged with the hole, a second graphite plate is arranged on the outside of the first graphite column, a second graphite column is arranged on the top of the outer wall of the first graphite column, the top of the first graphite column is engaged with the second graphite column, and the adjacent sides of the two second graphite columns are engaged with each other.

[0007] As a further description of the above technical solution: a plurality of positioning plates are arranged at the top of the first graphite plate and the second graphite plate, a plurality of grooves are opened at the top of the positioning plates, and a supporting JIG is arranged on the inner wall of the groove.

[0008] The utility model has the following beneficial effects:

[0009] 1. This flexible and adjustable tooling structure can be applied to the CVD chamber structure with horizontal air inlet and outlet. It should be noted that by repeatedly placing the second graphite column, the height between layers can be adjusted to meet the use requirements of workpieces of different vertical dimensions. At the same time, adjusting the height between layers can also optimize the gas flow distribution on the workpiece surface and improve the uniformity of the coating thickness on the workpiece surface.

[0010] 2. The utility model also discloses a supporting tool for supporting the workpiece, such as Figure 3 The base of the support JIG is a wedge-shaped square block, and the positioning plate has three wedge-shaped grooves arranged equidistantly along the circumferential direction. The support JIG can be placed in the wedge-shaped grooves and can slide in the radial direction according to the size of the supported workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a front view of an assembly tool for a chemical vapor deposition furnace proposed by the utility model;

[0012] Figure 2 A three-dimensional diagram of an assembly tool for a chemical vapor deposition furnace proposed by the utility model;

[0013] Figure 3 This is a schematic diagram of the positioning plate structure of an assembly type tooling of a chemical vapor deposition furnace proposed by the utility model;

[0014] Figure 4 This is a schematic diagram of the first graphite plate structure of an assembly tooling of a chemical vapor deposition furnace proposed by the utility model.

[0015] Legend:

[0016] 1. First graphite plate; 2. First graphite column; 3. Second graphite plate; 4. Positioning plate; 5. Support JIG; 6. Groove; 7. Hole; 8. Second graphite column. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] Reference Figure 1 , Figure 2 and Figure 4The utility model provides an embodiment: an assembly tool for a chemical vapor deposition furnace, comprising a first graphite plate 1, a hole 7 is opened at the top of the first graphite plate 1, a first graphite column 2 is arranged on the inner wall of the hole 7, the bottom end of the outer wall of the first graphite column 2 is engaged with the hole 7, a second graphite plate 3 is arranged on the outer side of the first graphite column 2, a second graphite column 8 is arranged on the top of the outer wall of the first graphite column 2, the top of the first graphite column 2 is engaged with the second graphite column 8, and the adjacent sides of the two second graphite columns 8 are engaged with each other;

[0019] Specifically, the first graphite column 2 is inserted into the hole 7 of the first graphite plate 1, wherein the lower surface of the graphite column step is in contact with the surface of the graphite plate, and then the three holes of the second graphite plate 3 are aligned with the corresponding first graphite column 2, and the second graphite plate 3 is supported by the upper surface of the step of the first graphite column 2, and the second graphite column 8 is inserted into the first graphite column 2, and the lower surface of the second graphite column 8 is in contact with the surface of the second graphite plate 3, and then the second graphite plate 3 and the second graphite column 8 are placed in sequence, and finally the second graphite plate 3 is placed on the top layer to form a multi-layer structure tooling with an adjustable number of layers.

[0020] Reference Figure 2 and Figure 3 A plurality of positioning plates 4 are provided at the top of the first graphite plate 1 and the second graphite plate 3, a plurality of grooves 6 are provided at the top of the positioning plates 4, and a supporting JIG 5 is provided on the inner wall of the groove 6;

[0021] Specifically, the base of the support JIG5 is a wedge-shaped square block, and the positioning plate 4 has three grooves 6 arranged equidistantly along the circumferential direction. The support JIG5 can be placed in the grooves 6 and can slide in the radial direction according to the size of the supported workpiece.

[0022] Working principle: Before using the device, first, insert the first graphite column 2 into the hole 7 of the first graphite plate 1, wherein the lower surface of the graphite column step is in contact with the surface of the graphite plate, then align the three holes of the second graphite plate 3 with the corresponding first graphite column 2, support the second graphite plate 3 by the upper surface of the step of the first graphite column 2, and insert the second graphite column 8 into the first graphite column 2 at the same time, wherein the lower surface of the second graphite column 8 is in contact with the surface of the second graphite plate 3, and then place the second graphite plate 3 and the second graphite column 8 in turn, and finally place the second graphite plate 3 on the top layer to form a multi-layer structure tooling with adjustable number of layers. When the vertical dimension of the workpiece is high, the height between the two adjacent layers of the second graphite plates 3 can be increased directly by placing two or more second graphite columns 8, so as to meet the use effect of workpieces of different heights.

[0023] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An assembly tool for a chemical vapor deposition furnace, comprising a first graphite plate (1), characterized in that: The top of the first graphite plate (1) is provided with a hole (7), the inner wall of the hole (7) is provided with a first graphite column (2), the bottom end of the outer wall of the first graphite column (2) is engaged with the hole (7), a second graphite plate (3) is provided on the outer side of the first graphite column (2), the top of the outer wall of the first graphite column (2) is provided with a second graphite column (8), the top of the first graphite column (2) is engaged with the second graphite column (8), and the adjacent sides of the two second graphite columns (8) are engaged with each other.

2. The assembly tool of a chemical vapor deposition furnace according to claim 1, characterized in that: A plurality of positioning plates (4) are arranged at the top of the first graphite plate (1) and the second graphite plate (3), a plurality of grooves (6) are opened at the top of the positioning plates (4), and a supporting JIG (5) is arranged on the inner wall of the groove (6).

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