Bearing assembly and machining equipment
By designing a carrying component that includes the first groove and the second groove, the silicon wafer is tightly clamped, which solves the problem of the back plating of the back on the ALD processing process, and improves the processing effect of the silicon wafer.
Patent Information
- Application Number
- CN202323378494.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-08
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2033-12-08
AI Technical Summary
During the ALD processing of battery silicon wafers, since the backs of the two silicon wafers cannot be closely fitted, the airflow will form winding and plating through the backs, affecting the processing effect.
Design a carrier component, including the base, the first loading mechanism, and the second loading mechanism. The first groove and the second groove are used to clamp the silicon wafer together to prevent the back of the back tightly to avoid the air flow from the back of the aluminum oxide film on the back. Essence
By holding the silicon wafer tightly, the back plating is avoided, the processing effect of the silicon wafers is improved, and a better membrane layer deposition is achieved.
Smart Images
Figure CN222411816U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of battery production, in particular to a bearing component and processing equipment. Background Art
[0002] In the related art, the front of the battery needs to be passivated, and an aluminum oxide film is usually formed on the front of the silicon wafer of the battery by ALD (Atomic Layer Deposition) atomic layer deposition. Specifically, the silicon wafer is fixed to the metal boat of the ALD machine, and the silicon wafer is fixed by the slot on the support rod in the metal boat. Two silicon wafers are inserted into one slot, and the backs of the two silicon wafers are facing each other. In this way, the airflow in the ALD machine can deposit an aluminum oxide film on the front of the silicon wafer.
[0003] However, the two silicon wafers inserted in a slot rely on natural adhesion, and the back sides of the two silicon wafers cannot fit tightly against each other. During the processing, the airflow passes through the gap between the back sides of the two silicon wafers, and an aluminum oxide film layer is deposited on the back side of the silicon wafer to form a wrap-around coating, resulting in a poor processing effect of the silicon wafer. Utility Model Content
[0004] The embodiment of the utility model discloses a bearing assembly and processing equipment, which can improve the problem of winding plating and have a better processing effect of materials.
[0005] In a first aspect, an embodiment of the utility model discloses a bearing assembly, including a base, a first bearing mechanism and a second bearing mechanism, wherein the first bearing mechanism is arranged on the base, the first bearing mechanism is provided with a first groove, the first groove is used to carry materials, the second bearing mechanism is arranged on the base, the second bearing mechanism is provided with a second groove, the width direction of the second groove is the same as the width direction of the first groove, and the second groove is used to carry the materials;
[0006] The first supporting mechanism and the second supporting mechanism can move relatively to each other so that the first groove and the second groove can clamp or release the material together.
[0007] As an optional implementation, in an embodiment of the utility model, the first supporting mechanism and the second supporting mechanism can move relatively to make the first groove and the second groove staggered or facing each other. When the first groove and the second groove are staggered, the first groove and the second groove are used to clamp the material together. When the first groove and the second groove are facing each other, the first groove and the second groove are used to release the material together.
[0008] As an optional implementation, in an embodiment of the utility model, the first supporting mechanism is slidably disposed on the base along the width direction, and the second supporting mechanism is fixedly disposed relative to the base along the width direction. The first supporting mechanism can slide relative to the base along the width direction so that the first groove and the second groove are staggered or facing each other.
[0009] As an optional embodiment, in an embodiment of the utility model, the supporting assembly also includes a sliding mechanism, which is arranged on the base, and the sliding mechanism is connected to the first supporting mechanism, so that the first supporting mechanism can slide relative to the base along the width direction, and the first supporting mechanism can slide relative to the base along the width direction so that the first groove and the second groove can jointly clamp or release the material.
[0010] As an optional implementation, in an embodiment of the utility model, the bearing assembly further includes a driving mechanism, and the driving mechanism is used to provide a driving force to enable the first bearing mechanism to slide relative to the base along the width direction.
[0011] As an optional embodiment, in an embodiment of the utility model, the driving mechanism includes an elastic member, both ends of which are respectively connected to the base and the first supporting mechanism, the elastic member can be compressed to drive the first supporting mechanism to slide relative to the base along the width direction, so that the first groove and the second groove jointly release the material, and has an elastic force, and the elastic force is used to drive the first supporting mechanism to slide relative to the base along the width direction, so that the first groove and the second groove jointly clamp the material.
[0012] As an optional implementation, in the embodiment of the utility model, the width of the first groove is d1, 3mm≤d1≤6mm, and the width of the second groove is d2, 3mm≤d2≤6mm.
[0013] As an optional implementation, in the embodiment of the utility model, the first bearing mechanism and the second bearing mechanism can slide relatively along the width direction, and the relative sliding distance is t, 0.4mm≤t≤0.6mm.
[0014] As an optional implementation, in an embodiment of the utility model, the first bearing mechanism includes a first support rod, the first support rod is provided with a plurality of first grooves, the plurality of first grooves are arranged at intervals along the length direction of the first support rod, and the width direction of the first groove is in the same direction as the length direction of the first support rod;
[0015] The second bearing mechanism includes a second support rod, the second support rod is provided with a plurality of second grooves, the plurality of second grooves are arranged at intervals along the length direction of the second support rod, and the width direction of the second groove is in the same direction as the length direction of the second support rod.
[0016] In the second aspect, an embodiment of the utility model discloses a processing equipment, including an air intake component and the supporting component of the first aspect, wherein the air intake component is arranged on the base, and the air intake component is provided with a plurality of air inlets arranged at intervals along the width direction, and the plurality of air inlets are used to allow air flow.
[0017] Compared with the prior art, the embodiments of the present invention have at least the following beneficial effects:
[0018] In the embodiment of the utility model, the first bearing mechanism and the second bearing mechanism are arranged through the base, and the first groove of the first bearing mechanism and the second groove of the second bearing mechanism are used to bear the material. At the same time, the first bearing mechanism and the second bearing mechanism can move relatively, so that the first groove and the second groove can clamp the material or release the material together. Based on this, the bearing assembly is used to bear the silicon wafer, and a first groove and a second groove simultaneously bear two silicon wafers, and the backs of the two silicon wafers are arranged facing each other. The first groove and the second groove are used to clamp the two silicon wafers together, so that the backs of the two silicon wafers can be closely fitted to each other. When the airflow is used to deposit the aluminum oxide film layer on the front of the silicon wafer, the airflow cannot pass through the backs of the two silicon wafers, so that the aluminum oxide film can be deposited on the back of the silicon wafer to form a wrap-around plating, and the processing effect of the silicon wafer is better. When the first groove and the second groove release the two silicon wafers together, the material can be unloaded. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this technical field, other drawings can be obtained based on these drawings without creative work.
[0020] Figure 1 It is a structural schematic diagram of a processing equipment disclosed in an embodiment of the utility model;
[0021] Figure 2 It is a structural schematic diagram of another perspective of a processing device disclosed in an embodiment of the utility model;
[0022] Figure 3 It is a partial structural schematic diagram of a bearing assembly (a first groove and a second groove are arranged opposite to each other) disclosed in an embodiment of the utility model;
[0023] Figure 4It is a partial structural schematic diagram of a bearing assembly (the first groove and the second groove are staggered) disclosed in an embodiment of the utility model.
[0024] Description of main reference numerals
[0025] 100, processing equipment; 10, supporting assembly; 11, base; 12, first supporting mechanism; 12a, first groove; 121, first support rod; 13, second supporting mechanism; 13a, second groove; 131, second support rod; 20, air intake assembly; 20a, air inlet; 30, driving mechanism; x, direction. DETAILED DESCRIPTION
[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0027] In the present invention, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inside", "outside", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings. These terms are mainly used to better describe the present invention and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.
[0028] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those skilled in the art, the specific meanings of these terms in this utility model can be understood according to specific circumstances.
[0029] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.
[0030] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.
[0031] The utility model discloses a bearing assembly and processing equipment, the bearing assembly includes a base, a first bearing mechanism and a second bearing mechanism, the first bearing mechanism is arranged on the base, the first bearing mechanism is provided with a first groove, the first groove is used to carry materials, the second bearing mechanism is arranged on the base, the second bearing mechanism is provided with a second groove, the width direction of the second groove is the same as the width direction of the first groove, the second groove is used to carry the materials, the first bearing mechanism and the second bearing mechanism can be relatively movable so that the first groove and the second groove can clamp or release the materials together. The problem of winding plating can be improved, and the processing effect of the materials is better.
[0032] In order to facilitate the understanding of the technical solution, the structure of the supporting component and the processing equipment of the present application will be described in detail below by taking the processing equipment as an example and combining with the accompanying drawings.
[0033] Please also read Figure 1 and Figure 2 , is a structural schematic diagram of a processing equipment 100 provided by an embodiment of the utility model, the processing equipment 100 includes a bearing assembly 10 and an air intake assembly 20, the bearing assembly 10 includes a base 11, a first bearing mechanism 12 and a second bearing mechanism 13, the first bearing mechanism 12 is arranged on the base 11, the first bearing mechanism 12 is provided with a first groove 12a, the first groove 12a is used to carry materials, the second bearing mechanism 13 is arranged on the base 11, the second bearing mechanism 13 is provided with a second groove 13a, the width direction of the second groove 13a is the same direction as the width direction of the first groove 12a, the second groove 13a is used to carry materials, the first bearing mechanism 12 and the second bearing mechanism 13 can move relatively so that the first groove 12a and the second groove 13a can clamp or release the material together, the air intake assembly 20 is arranged on the base 11, the air intake assembly 20 is provided with a plurality of air inlets 20a arranged at intervals along the width direction, and the plurality of air inlets 20a are used to pass airflow.
[0034] The width direction of the second groove 13a is equal to the width direction of the first groove 12a. Figure 1 In the figure, the direction x is shown, including Figure 1 The direction x shown in all the drawings of the specification including the same direction as the width direction of the second groove 13 a and the width direction of the first groove 12 a.
[0035] In this embodiment, the first carrier mechanism 12 and the second carrier mechanism 13 are arranged through the base 11, and the first groove 12a of the first carrier mechanism 12 and the second groove 13a of the second carrier mechanism 13 are used to carry the material. At the same time, the multiple air inlets 20a of the air inlet assembly 20 can pass airflow, and the airflow is used to realize atomic layer deposition and form a film layer on the surface of the material. Based on this, the carrier assembly 10 is used to carry silicon wafers, and one first groove 12a and one second groove 13a simultaneously carry two silicon wafers, and the backs of the two silicon wafers are arranged to face each other. When the airflow passed through the front of the silicon wafer, the aluminum oxide film layer can be deposited on the front of the silicon wafer.
[0036] Furthermore, the first bearing mechanism 12 and the second bearing mechanism 13 can be relatively movable, so that the first groove 12a and the second groove 13a can clamp or release the material together. In this way, the first groove 12a and the second groove 13a can clamp the two silicon wafers together, so that the backs of the two silicon wafers can be closely attached to each other. When the aluminum oxide film layer is deposited on the front of the silicon wafer by airflow, the airflow cannot pass through the backs of the two silicon wafers, which can avoid the aluminum oxide film being deposited on the back of the silicon wafer to form a wrap-around plating, resulting in a thicker film thickness at the back edge of the silicon wafer, a white difference at the edge of the appearance, and poor edge sintering after sintering. The processing effect of the silicon wafer with a cloudy and black edge is better. When the first groove 12a and the second groove 13a jointly release the two silicon wafers, unloading can be achieved.
[0037] In some embodiments, the first supporting mechanism 12 and the second supporting mechanism 13 can be relatively movable so that the first groove 12a and the second groove 13a are staggered or opposite to each other. When the first groove 12a and the second groove 13a are staggered, the first groove 12a and the second groove 13a are used to clamp the material together. When the first groove 12a and the second groove 13a are opposite to each other, the first groove 12a and the second groove 13a are used to release the material together. Figure 4 As shown, when the first supporting mechanism 12 and the second supporting mechanism 13 move relative to each other so that the first groove 12a and the second groove 13a are offset, the groove wall of the first groove 12a and the groove wall of the second groove 13a are offset, and one of the groove walls of the first groove 12a and one of the groove walls of the second groove 13a can clamp the material together. Figure 3As shown, when the first supporting mechanism 12 and the second supporting mechanism 13 move relatively to make the first groove 12a and the second groove 13a face each other, the groove wall of the first groove 12a faces the groove wall of the second groove 13a, and the distance between one of the groove walls of the first groove 12a and one of the groove walls of the second groove 13a is relatively large. At this time, the material to be processed can be placed in the first groove 12a and the second groove 13a, or the first groove 12a and the second groove 13a jointly release the processed material, and the material can be taken out of the first groove 12a and the second groove 13a to realize material unloading.
[0038] Optionally, the first bearing mechanism 12 is slidably disposed on the base 11 along the width direction, and the second bearing mechanism 13 is fixedly disposed relative to the base 11 along the width direction, and the first bearing mechanism 12 can slide relative to the base 11 along the width direction so that the first groove 12a and the second groove 13a are staggered or facing each other. In this way, the second bearing mechanism 13 is fixedly disposed relative to the base 11 along the width direction, and when the first bearing mechanism 12 slides relative to the base 11 along the width direction, the first bearing mechanism 12 simultaneously slides relative to the second bearing mechanism 13 along the width direction, thereby causing the relative positions of the first groove 12a and the second groove 13a to change along the width direction, so that the first groove 12a and the second groove 13a are staggered or facing each other.
[0039] In some other embodiments, the second supporting mechanism 13 can be slidably disposed on the base 11 along the width direction, the first supporting mechanism 12 is fixedly disposed relative to the base 11 along the width direction, and the second supporting mechanism 13 can slide relative to the base 11 along the width direction so that the first groove 12a and the second groove 13a are staggered or opposite to each other.
[0040] Alternatively, the first supporting mechanism 12 and the second supporting mechanism 13 can be slidably disposed on the base 11 along the width direction, and the first supporting mechanism 12 and the second supporting mechanism 13 can slide along the width direction so that the first groove 12a and the second groove 13a can clamp or release the material together.
[0041] In some embodiments, the bearing assembly 10 further includes a sliding mechanism (not shown), which is disposed on the base 11 and connected to the first bearing mechanism 12, so that the first bearing mechanism 12 can slide relative to the base 11 along the width direction, and the first bearing mechanism 12 can slide relative to the base 11 along the width direction so that the first groove 12a and the second groove 13a can clamp or release the material together. In this way, the first bearing mechanism 12 is connected by the sliding mechanism, and the first bearing mechanism 12 can slide relative to the base 11 along the width direction under the action of the sliding mechanism.
[0042] Exemplarily, the sliding mechanism includes a slide rail and a slider, the slide rail is provided on the base 11, the slider is slidably connected to the slide rail along the width direction, and the first bearing mechanism 12 is connected to the slider. In this way, by providing the slide rail on the base 11 and utilizing the slider to be slidably connected to the slide rail along the width direction, the slider can slide relative to the slider in the width direction, thereby driving the first bearing mechanism 12 to slide relative to the base 11, the structure of the sliding mechanism is relatively simple, and the sliding is stable and reliable.
[0043] In some other embodiments, the sliding mechanism can also be a roller and a slide groove, with the slide groove being arranged on the base 11, and the roller being connected to the first supporting mechanism 12, so that the roller rolls along the slide groove, thereby driving the first supporting mechanism 12 to slide along the width direction relative to the base 11.
[0044] In some embodiments, Figure 3 and Figure 4 As shown, the bearing assembly 10 further includes a driving mechanism 30, which is used to provide a driving force to enable the first bearing mechanism 12 to slide in the width direction relative to the base 11. In this way, the first bearing mechanism 12 is driven to slide in the width direction relative to the base 11 by providing a driving force through the driving mechanism 30, which has a high degree of automation and can reduce the difficulty of operation.
[0045] Exemplarily, the driving mechanism 30 includes an elastic member, the two ends of which are respectively connected to the base 11 and the first bearing mechanism 12, the elastic member can be compressed to drive the first bearing mechanism 12 to slide relative to the base 11 along the width direction, so that the first groove 12a and the second groove 13a jointly release the material, and has an elastic force, and the elastic force is used to drive the first bearing mechanism 12 to slide relative to the base 11 along the width direction, so that the first groove 12a and the second groove 13a jointly clamp the material. In this way, when the first groove 12a and the second groove 13a are arranged opposite to each other, the two ends of the elastic member are compressed by the base 11 and the first bearing mechanism 12 to generate an elastic force, at this time, the material to be processed can be placed in the first groove 12a and the second groove 13a, and the elastic force can make the first bearing mechanism 12 slide relative to the base 11 along the width direction, so that the first groove 12a and the second groove 13a are arranged in a staggered manner, and the first groove 12a and the second groove 13a are used to clamp the material. Likewise, when the material is processed, the elastic member can be compressed. At this time, the first groove 12a and the second groove 13a are arranged opposite to each other, and the first groove 12a and the second groove 13a release the material together.
[0046] In some embodiments, the width of the first groove 12a is d1, 3mm≤d1≤6mm, and the width of the second groove 13a is d2, 3mm≤d2≤6mm. If d1<3mm, the size of d1 is small, and when the material is placed in the first groove 12a or removed from the first groove 12a, the material is easy to collide with the first groove 12a, the risk of material damage is high, and the processing quality of the material is poor. If d1>6mm, when the material is placed in the first groove 12a and the first groove 12a and the second groove 13a do not clamp the material together, the material is easy to shake in the first groove 12a and collide with the first groove 12a, the risk of material damage is high, and the processing quality of the material is poor. Therefore, the width d1 of the first groove 12a can be 3mm≤d1≤6mm, which can avoid the collision between the material and the first groove 12a, reduce the risk of material damage, and improve the processing quality of the material. The width d1 of the first groove 12a may be 3 mm, 3.5 mm, 4 mm, 4.5 mm, 5 mm, 5.5 mm, 6 mm, etc., and is preferably 4.5 mm, which is not specifically limited in this embodiment.
[0047] This embodiment is described by taking the first groove 12a as an example. The width of the second groove 13a can refer to the first groove 12a, and will not be described here one by one. Therefore, the width d2 of the second groove 13a can be 3mm≤d1≤6mm, which can avoid the collision between the material and the second groove 13a, reduce the risk of material damage, and improve the processing quality of the material. Among them, the width d2 of the second groove 13a can be 3mm, 3.5mm, 4mm, 4.5mm, 5mm, 5.5mm, 6mm, etc., and is preferably 4.5mm, which is not specifically limited in this embodiment.
[0048] Exemplarily, the first bearing mechanism 12 and the second bearing mechanism 13 can slide relative to each other in the width direction, and the relative sliding distance is t, 0.4mm≤t≤0.6mm. The larger the relative sliding distance t, the larger the misalignment distance between the first groove 12a and the second groove 13a, the smaller the width when the first groove 12a and the second groove 13a are clamped together, the smaller the thickness of the material that can be clamped, the tighter the clamping, and the smaller the relative sliding distance t, and vice versa. If the relative sliding distance t<0.4mm, the relative sliding distance t is small, the misalignment distance between the first groove 12a and the second groove 13a is small, the width when the first groove 12a and the second groove 13a are clamped together is large, the clamping is loose, the material is easy to shake in the first groove 12a and the second groove 13a and collide with the first groove 12a and the second groove 13a, the risk of material damage is high, and the processing quality of the material is poor. If the relative sliding distance t>0.6mm, the relative sliding distance t is larger, the misalignment distance between the first groove 12a and the second groove 13a is larger, the width of the first groove 12a and the second groove 13a when clamped together is smaller, the clamping is tighter, and the material is easily deformed or even bent and cracked when clamped together by the first groove 12a and the second groove 13a. The risk of material damage is higher and the material processing quality is poor. Therefore, the relative sliding distance t can be 0.4mm≤t≤0.6mm, which can avoid collision between the material and the first groove 12a and the second groove 13a, and reduce the clamping force on the material, thereby reducing the risk of material damage and improving the material processing quality.
[0049] In some embodiments, the first supporting mechanism 12 includes a first support rod 121, the first support rod 121 is provided with a plurality of first grooves 12a, the plurality of first grooves 12a are arranged at intervals along the length direction of the first support rod 121, and the width direction of the first groove 12a is in the same direction as the length direction of the first support rod 121, and the second supporting mechanism 13 includes a second support rod 131, the second support rod 131 is provided with a plurality of second grooves 13a, the plurality of second grooves 13a are arranged at intervals along the length direction of the second support rod 131, and the width direction of the second groove 13a is in the same direction as the length direction of the second support rod 131. In this way, a plurality of first grooves 12a arranged at intervals along the length direction are set by the first support rod 121, and a plurality of second grooves 13a arranged at intervals along the length direction are set by the second support rod 131. On the one hand, the first supporting mechanism 12 and the second supporting mechanism 13 can carry multiple materials at the same time, so that multiple materials can be processed simultaneously, and the processing equipment 100 has a high processing efficiency. On the other hand, the first support rod 121 and the second support rod 131 are designed as long rods, which can reduce the overall volume of the first supporting structure and the second supporting structure and reduce the occupied space. The processing equipment 100 can use more space to place materials, and the processing equipment 100 can achieve a smaller volume design, which is convenient for transportation and use.
[0050] Among them, the width direction of the first groove 12a is the same direction as the length direction of the first support rod 121, and the direction x shown in all the drawings in the specification is the same direction as the length direction. The length direction of the first support rod 121 is shown as direction x in the drawings in the specification, just like the width direction of the second groove 13a and the width direction of the first groove 12a.
[0051] Exemplarily, the first supporting mechanism 12 includes multiple first support rods 121, which are arranged in a U-shape so that the first grooves 12a of the multiple first support rods 121 are used to be distributed on the three adjacent sides of the material and to support the corresponding three sides, and the second supporting mechanism 13 includes multiple second support rods 131, which are arranged in a U-shape so that the second grooves 13a of the multiple second support rods 131 are used to be distributed on the three adjacent sides of the material and to support the corresponding three sides. In this way, multiple first support rods 121 are arranged in a U shape, and the first grooves 12a of the first support rods 121 are used to support the three adjacent sides of the material. The load-bearing is relatively stable and reliable, and the risk of damage caused by material shaking can be reduced. The second support rods 131 are arranged in a U shape, which can also reduce the risk of damage caused by material shaking. Moreover, when the first grooves 12a and the second grooves 13a jointly clamp the material, the clamping force can be distributed to multiple positions of the material to avoid stress concentration and damage to the material.
[0052] The embodiment of the utility model provides a processing device 100, in which a first bearing mechanism 12 and a second bearing mechanism 13 are arranged through a base 11, and a material is carried by using a first groove 12a of the first bearing mechanism 12 and a second groove 13a of the second bearing mechanism 13, and at the same time, multiple air inlets 20a of the air inlet assembly 20 can be introduced into the airflow, and the airflow is used to realize atomic layer deposition and form a film layer on the surface of the material. Based on this, the bearing assembly 10 is used to carry silicon wafers, and a first groove 12a and a second groove 13a simultaneously carry two silicon wafers, and the backs of the two silicon wafers are arranged to face each other, and when the airflow introduced by the air inlet 20a passes through the front of the silicon wafer, an aluminum oxide film layer can be deposited on the front of the silicon wafer.
[0053] Furthermore, the first bearing mechanism 12 and the second bearing mechanism 13 can move relative to each other, so that the first groove 12a and the second groove 13a can clamp or release the material together. In this way, the first groove 12a and the second groove 13a can clamp two silicon wafers together, so that the backs of the two silicon wafers can be closely attached to each other. When the aluminum oxide film layer is deposited on the front of the silicon wafer by airflow, the airflow cannot pass through the backs of the two silicon wafers, so that the aluminum oxide film is deposited on the back of the silicon wafer to form a wrap-around plating, and the processing effect of the silicon wafer is better. When the first groove 12a and the second groove 13a release the two silicon wafers together, the material can be unloaded.
[0054] The above is a detailed introduction to a load-bearing component and processing equipment disclosed in the embodiment of the utility model. This article uses individual examples to illustrate the principle and implementation method of the utility model. The description of the above embodiments is only used to help understand the load-bearing component and processing equipment of the utility model and its core idea; at the same time, for general technical personnel in this field, according to the idea of the utility model, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the utility model.
Claims
1. A load-bearing assembly, characterized in that: include: Base; A first carrying mechanism, the first carrying mechanism is arranged on the base, the first carrying mechanism is provided with a first groove, and the first groove is used for carrying materials; as well as A second bearing mechanism, the second bearing mechanism is arranged on the base, the second bearing mechanism is provided with a second groove, the width direction of the second groove is the same as the width direction of the first groove, and the second groove is used to carry the material; The first supporting mechanism and the second supporting mechanism can move relatively to each other so that the first groove and the second groove can clamp or release the material together.
2. The bearing assembly according to claim 1, characterized in that: The first supporting mechanism and the second supporting mechanism can move relatively to make the first groove and the second groove staggered or facing each other. When the first groove and the second groove are staggered, the first groove and the second groove are used to clamp the material together. When the first groove and the second groove are facing each other, the first groove and the second groove are used to release the material together.
3. The bearing assembly according to claim 2, characterized in that: The first supporting mechanism is slidably arranged on the base along the width direction, and the second supporting mechanism is fixedly arranged relative to the base along the width direction. The first supporting mechanism can slide relative to the base along the width direction so that the first groove and the second groove are staggered or opposite to each other.
4. The bearing assembly according to any one of claims 1 to 3, characterized in that: The supporting assembly also includes a sliding mechanism, which is arranged on the base and connected to the first supporting mechanism so that the first supporting mechanism can slide relative to the base along the width direction, and the first supporting mechanism can slide relative to the base along the width direction so that the first groove and the second groove can jointly clamp or release the material.
5. The bearing assembly according to claim 4, characterized in that: The bearing assembly further includes a driving mechanism, and the driving mechanism is used to provide a driving force to enable the first bearing mechanism to slide relative to the base along the width direction.
6. The bearing assembly according to claim 5, characterized in that: The driving mechanism includes an elastic member, both ends of which are respectively connected to the base and the first bearing mechanism, the elastic member can be compressed to drive the first bearing mechanism to slide relative to the base along the width direction, so that the first groove and the second groove jointly release the material, and has an elastic force, and the elastic force is used to drive the first bearing mechanism to slide relative to the base along the width direction, so that the first groove and the second groove jointly clamp the material.
7. The bearing assembly according to any one of claims 1 to 3, characterized in that: The width of the first groove is d1, 3mm≤d1≤6mm, and the width of the second groove is d2, 3mm≤d2≤6mm.
8. The bearing assembly according to claim 7, characterized in that: The first bearing mechanism and the second bearing mechanism can slide relatively to each other along the width direction, and the distance of relative sliding is t, 0.4 mm≤t≤0.6 mm.
9. The bearing assembly according to any one of claims 1 to 3, characterized in that: The first bearing mechanism comprises a first support rod, the first support rod is provided with a plurality of first grooves, the plurality of first grooves are arranged at intervals along the length direction of the first support rod, and the width direction of the first groove is in the same direction as the length direction of the first support rod; The second bearing mechanism includes a second support rod, the second support rod is provided with a plurality of second grooves, the plurality of second grooves are arranged at intervals along the length direction of the second support rod, and the width direction of the second groove is in the same direction as the length direction of the second support rod.
10. A processing equipment, characterized in that: It comprises an air intake assembly and a bearing assembly as claimed in any one of claims 1 to 9, wherein the air intake assembly is arranged on the base, and the air intake assembly is provided with a plurality of air intakes spaced apart along the width direction, and the plurality of air intakes are used for introducing airflow.