Anti-deviation single crystal furnace adjusting mechanism

Abstract

The utility model relates to the technical field of single crystal furnaces, and discloses an anti-deviation single crystal furnace adjusting mechanism which comprises an adjusting plate surface assembly, an adjusting lifting rod assembly is mounted at the bottom of the adjusting plate surface assembly, and a movable fixing assembly is mounted at the bottom of the adjusting lifting rod assembly. The movable fixing assembly is installed on the device, so that when the device is used, a convenient and labor-saving moving mode can be provided through the movable fixing assembly, and when the device reaches a designated position, the device is fixed through parts arranged on the outer side; in this way, the stable fixing effect can be achieved, the device is convenient to move when needing to be moved, and waste of manpower is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to an anti-deviating single crystal furnace regulating mechanism. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals without dislocation using the Czochralski method. The diameter of the single crystal can be affected by factors such as temperature, pulling speed and rotation speed, crucible tracking speed and rotation speed, and the flow rate of the protective gas during the growth process. Among them, the temperature mainly determines whether the crystal can be formed, and the speed will directly affect the intrinsic quality of the crystal, and this influence can only be known through testing after the single crystal is pulled out. A thermal field with a suitable temperature distribution not only allows the single crystal to grow smoothly, but also has a high quality; if the temperature distribution of the thermal field is not very reasonable, various defects are likely to occur during the growth of the single crystal, affecting the quality. In severe cases, the phenomenon of crystallization will occur and the single crystal cannot be grown. Therefore, in the early stage of investing in a single crystal growth enterprise, it is necessary to configure the most reasonable thermal field according to the growth equipment to ensure the quality of the single crystal produced. In crystal growth analysis and design, experiments and numerical simulation complement each other.

[0003] The application number is CN201020571938.6, which discloses a single crystal furnace installation auxiliary device. A single crystal furnace frame horizontal adjustment mechanism includes a fixing screw, an adjusting screw, a nut and a frame pad, wherein the frame pad is arranged on the bottom surface of the frame, the adjusting screw is screwed into the mounting hole of the frame from the top surface of the frame, the nut is screwed outside the adjusting screw, a threaded hole is opened at the axis of the adjusting screw, and the fixing screw passes through the threaded hole at the axis of the adjusting screw to fix the frame and the frame pad. The utility model uses adjusting screws and nuts to adjust the height, which reduces the difficulty of horizontal adjustment and reduces the workload; and after the position is determined, the fixing screw is used to fix the frame on the frame pad, thereby ensuring the accuracy of the frame after horizontal adjustment and the durability of the horizontality.

[0004] Although the above-mentioned utility model reduces the difficulty of horizontal adjustment and the workload by using adjusting screws and nuts to adjust the height, and uses fixing screws to fix the frame to the frame pad after the position is determined, thereby ensuring the accuracy and durability of the horizontality of the frame after horizontal adjustment, it is still insufficient in that when the device needs to be moved, a certain amount of manpower cost is required, which makes it more laborious and time-consuming to move, and the fixing effect of the fixing block at the bottom is relatively general.

[0005] Therefore, it is necessary to install a mobile fixing component on the device, so that when the device is used, the component can provide a more convenient and labor-saving moving method, and when it reaches the specified position, it is fixed by the parts arranged on the outside. This not only has a more stable fixing effect, but also is more convenient when it needs to be moved, avoiding waste of manpower. Utility Model Content

[0006] The utility model aims to provide an anti-deviating single crystal furnace adjustment mechanism to solve the problems raised in the above background technology.

[0007] In order to solve the above technical problems, the utility model is realized by the following technical solutions:

[0008] The utility model discloses an anti-deviating single crystal furnace adjustment mechanism, which comprises an adjustment plate surface component, an adjustment lifting rod component is installed at the bottom of the adjustment plate surface component, and a movable fixing component is installed at the bottom of the adjustment lifting rod component.

[0009] Furthermore, the adjustment panel assembly includes a supporting tabletop, wherein supporting triangle plates are respectively installed at the bottom of the four corners of the supporting tabletop, and an adjustment gap is installed in the middle, a shock-absorbing ring is installed on the inner side of the adjustment gap, and an adjustment telescopic rod is installed inside the gap.

[0010] Furthermore, the adjustable lifting rod assembly includes a telescopic main rod, a telescopic support rod is installed inside the telescopic main rod, and an adjustable telescopic rod 2 is installed on the middle side thereof.

[0011] Furthermore, the movable and fixed component includes a fixed suction cup, a control telescopic motor is installed on the inner top of the fixed suction cup, a telescopic outer rod is installed on the bottom of the control telescopic motor, a telescopic inner rod is installed on the bottom of the telescopic outer rod, a rotating rod is installed on the bottom of the telescopic inner rod, and movable rollers are installed on both sides of the rotating rod.

[0012] Furthermore, the second adjustable telescopic rod includes two adjustable telescopic cross bars, and an adjustable telescopic sleeve is installed between the two adjustable telescopic cross bars.

[0013] Furthermore, a sliding groove is provided in the middle of the adjustable telescopic sleeve.

[0014] The utility model has the following beneficial effects:

[0015] (1) The utility model is an anti-drift single crystal furnace adjustment mechanism. By installing a moving and fixing component on the device, when the device is used, the component can provide a more convenient and labor-saving moving method, and when it reaches the specified position, it is fixed by the parts arranged on the outside. This not only has a more stable fixing effect, but also is more convenient when it needs to be moved, avoiding waste of manpower.

[0016] (2) The utility model is an anti-deviating single crystal furnace adjustment mechanism. By installing an adjusting lifting rod assembly on the device, the furnace height of the fixed bracket can be adjusted up and down as needed during use, thereby making the application of the device more extensive and avoiding limitations on the objects of use.

[0017] (3) The utility model is an anti-deviating single crystal furnace adjustment mechanism. By changing the original panel assembly in the device into an adjustment panel assembly, when using it, no matter how large the furnace circle is, when fixing the bracket, it can be adjusted to the corresponding circle, providing a more adaptable practical device. Through this setting, the adaptability of the device can be improved.

[0018] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 This is a schematic diagram of the overall structure of an anti-deviating single crystal furnace adjustment mechanism of the utility model;

[0021] Figure 2 This is a schematic diagram of the bottom structure of an anti-deviating single crystal furnace adjustment mechanism of the utility model;

[0022] Figure 3 for Figure 2 A schematic diagram of the structure enlargement of part A;

[0023] Figure 4 It is a side cross-sectional structural schematic diagram of an anti-deviating single crystal furnace adjustment mechanism of the utility model;

[0024] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0025] In the figure: 1. Adjust the board assembly; 2. Adjust the lifting rod assembly; 3. Move the fixed assembly; 101. Support the desktop; 102. Support the triangle plate; 103. Adjust the gap; 104. Shock-absorbing ring; 105. Adjust the telescopic rod one; 201. Telescopic main rod; 202. Telescopic support rod; 203. Adjust the telescopic rod two; 301. Fix the suction cup; 302. Control the telescopic motor; 303. Telescopic outer rod; 304. Telescopic inner rod; 305. Rotating rod; 306. Move the roller; 2031. Adjust the telescopic cross rod; 2032. Adjust the telescopic sleeve; 20321. Slide groove. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] See also Figure 1 - Figure 4 As shown, the utility model is an anti-deviating single crystal furnace adjustment mechanism, comprising an adjustment plate surface assembly 1, an adjustment lifting rod assembly 2 is installed at the bottom of the adjustment plate surface assembly 1, and a movable fixing assembly 3 is installed at the bottom of the adjustment lifting rod assembly 2.

[0028] By installing a mobile fixing component 3 on the device, when using the device, the component can provide a more convenient and labor-saving moving method, and when reaching the specified position, it is fixed by the parts arranged on the outside. This not only has a more stable fixing effect, but also is more convenient when it needs to be moved, avoiding waste of manpower.

[0029] The adjustment panel assembly 1 includes a supporting table top 101, and supporting triangle plates 102 are respectively installed at the bottom of the four corners of the supporting table top 101, and an adjustment gap 103 is installed in the middle, and a shock-absorbing ring 104 is installed on the inner side of the adjustment gap 103, and an adjustment telescopic rod 105 is installed inside it. Through the setting of the adjustment panel assembly 1, when using, no matter how large the circle of the stove is, it can be adjusted to the corresponding circle, providing a more suitable practical device. Through this setting, the adaptability of the device can be improved, and the shock-absorbing ring 104 arranged on the inner side can provide a certain shock-absorbing effect when the device is fixed and supported.

[0030] The adjustable lifting rod assembly 2 includes a telescopic main rod 201, a telescopic support rod 202 is installed inside the telescopic main rod 201, and an adjustable telescopic rod 203 is installed on the middle side thereof. By installing the adjustable lifting rod assembly 2 on the device, the height of the furnace of the fixed bracket can be adjusted up and down as needed during use, which makes the application of the device more extensive and avoids the limitation of the users.

[0031] The mobile fixing component 3 includes a fixed suction cup 301, a control telescopic motor 302 is installed on the inner top of the fixed suction cup 301, a telescopic outer rod 303 is installed on the bottom of the control telescopic motor 302, a telescopic inner rod 304 is installed on the bottom of the telescopic outer rod 303, a rotating rod 305 is installed on the bottom of the telescopic inner rod 304, and moving rollers 306 are installed on both sides of the rotating rod 305.

[0032] The second adjustable telescopic rod 203 includes two adjustable telescopic cross bars 2031 , and an adjustable telescopic sleeve 2032 is installed between the two adjustable telescopic cross bars 2031 .

[0033] A sliding groove 20321 is provided in the middle of the adjusting telescopic sleeve 2032 .

[0034] When using this device, firstly, by installing a moving and fixing component 3 on the device, when using the device, the component can provide a more convenient and labor-saving moving method, and when reaching the specified position, it is fixed by the parts arranged on the outside, so that it not only has a more stable fixing effect, but also is more convenient when it needs to be moved, avoiding waste of manpower. After fixing, the device can be adjusted according to the size of the furnace. By setting the adjustment panel component 1, when using it, no matter how large the circle of the furnace is, it can be adjusted to the corresponding circle, providing a more suitable practical device. Through this setting, the adaptability of the device can be improved, and the shock-absorbing ring 104 arranged on the inner side can provide a certain shock-absorbing effect when the device is fixed and supported. By installing an adjustable lifting rod component 2 on the device, the height of the furnace of the fixed bracket can be adjusted during use according to the need, so that the application of the device is more extensive and the limitation of the user object is avoided.

[0035] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. An anti-deviating single crystal furnace adjustment mechanism, comprising an adjustment plate assembly (1), characterized in that: An adjusting lifting rod assembly (2) is installed at the bottom of the adjusting plate surface assembly (1), and a moving fixing assembly (3) is installed at the bottom of the adjusting lifting rod assembly (2).

2. The anti-deviation single crystal furnace adjustment mechanism according to claim 1, characterized in that: The adjustment panel assembly (1) comprises a support tabletop (101), the bottoms of the four corners of the support tabletop (101) are respectively provided with support triangles (102), and an adjustment gap (103) is provided in the middle thereof, a shock absorbing ring (104) is provided on the inner side of the adjustment gap (103), and an adjustment telescopic rod (105) is provided inside the adjustment gap (103).

3. The anti-deviation single crystal furnace adjustment mechanism according to claim 1, characterized in that: The adjustable lifting rod assembly (2) comprises a telescopic main rod (201), a telescopic support rod (202) is installed inside the telescopic main rod (201), and an adjustable telescopic rod 2 (203) is installed on one side in the middle of the telescopic main rod (201).

4. The anti-deviation single crystal furnace adjustment mechanism according to claim 1, characterized in that: The movable fixing assembly (3) comprises a fixed suction cup (301), a control telescopic motor (302) is installed on the top of the fixed suction cup (301), a telescopic outer rod (303) is installed on the bottom of the control telescopic motor (302), a telescopic inner rod (304) is installed on the bottom of the telescopic outer rod (303), a rotating rod (305) is installed on the bottom of the telescopic inner rod (304), and moving rollers (306) are installed on both sides of the rotating rod (305).

5. The anti-deviating single crystal furnace adjustment mechanism according to claim 3, characterized in that: The second adjustable telescopic rod (203) comprises two adjustable telescopic cross bars (2031), and an adjustable telescopic sleeve (2032) is installed in the middle of the two adjustable telescopic cross bars (2031).

6. The anti-deviating single crystal furnace adjustment mechanism according to claim 5, characterized in that: A sliding groove (20321) is provided in the middle of the adjustable telescopic sleeve (2032).

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