Novel upper furnace body lifting and rotating device for single crystal furnace

Abstract

The utility model discloses a novel single crystal furnace upper furnace body lifting and rotating device which is fixed on a single crystal furnace stand column and comprises a lifting structure and a rotating structure, and the lifting structure comprises an upper fixing seat, a rotating shaft, a lower fixing seat, an oil cylinder connector, a hydraulic oil cylinder, an oil cylinder fixing seat and a guide rail sliding block assembly. The hydraulic oil cylinder is connected with the fixing base through the oil cylinder connector, the hydraulic oil cylinder is fixed to the stand column through the oil cylinder fixing base, the guide rail sliding block assembly is fixed to the stand column, and the rotating shaft is connected with the guide rail sliding block assembly through the upper fixing base and the lower fixing base. Under the action of the hydraulic oil cylinder, lifting motion of the whole device is achieved through the guide rail sliding block assembly.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal material preparation, in particular to a novel furnace body lifting and rotating device on a single crystal furnace. Background Art

[0002] The single crystal furnace is an essential equipment in the process of converting polycrystalline silicon into single crystal silicon. As a key supporting material for the modern information society, single crystal silicon is one of the most important single crystal materials in the world. It is not only the main functional material for the development of computers and integrated circuits, but also the main functional material for photovoltaic power generation using solar energy. In the process of using a single crystal furnace to prepare single crystal silicon, it is necessary to lift and rotate the upper furnace body of the single crystal furnace, so a corresponding upper furnace body lifting and rotating device is required. The currently disclosed technology uses the traditional shaft lifting and chain or belt driven rotation method, which has a relatively complex structure, high manufacturing cost, and low transmission accuracy. Utility Model Content

[0003] In view of the shortcomings of the prior art, the utility model provides a novel furnace body lifting and rotating device for a single crystal furnace, which adopts a guide rail slider to achieve lifting and a gear transmission to achieve rotation. It has the advantages of simple structure, stable and high-precision transmission, and low manufacturing cost.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a novel lifting and rotating device for a furnace body of a single crystal furnace, fixed on a column of the single crystal furnace, comprising a lifting structure and a rotating structure, wherein the lifting structure comprises an upper fixed seat, a rotating shaft, a lower fixed seat, a cylinder joint, a hydraulic cylinder, a cylinder fixed seat and a guide rail slider assembly, wherein the hydraulic cylinder is connected to the fixed seat via a cylinder joint, the hydraulic cylinder is fixed to the column via a cylinder fixed seat, the guide rail slider assembly is fixed to the column, and the rotating shaft is connected to the guide rail slider assembly via an upper fixed seat and a lower fixed seat; under the action of the hydraulic cylinder, the lifting movement of the entire device is realized through the guide rail slider assembly.

[0005] As a preferred embodiment, the cylinder joint is of universal type.

[0006] As a further improvement, the rotating structure includes a large gear, a gear key, a shaft key, a shaft, a copper sleeve, a fixed block, a plane bearing, a rotating motor reducer assembly, a pinion and a lifting frame. The rotating motor reducer assembly is connected to the pinion, the large gear and the shaft in sequence. A gear key is provided between the large gear and the shaft; a shaft key is provided between the shaft and the upper fixed seat; a fixed block is provided on the shaft, a plane bearing is provided between the fixed block and the lower fixed seat, and the lifting frame is installed on the fixed block; the rotating motor reducer assembly drives the entire lifting frame to rotate with the upper furnace body through the rotation of the pinion.

[0007] As a further improvement, a connecting plate is provided on the lifting frame, and the connecting plate is connected to the furnace body of the single crystal furnace.

[0008] As a further improvement, a copper sleeve is provided between the rotating shaft and the fixed block.

[0009] As a further improvement, a guide assembly is provided, including a guide block, a guide pin, a locking block, a guide seat and a guide groove. The guide block is installed on the fixed block, the guide pin is installed on the guide seat, the locking block and the guide groove are installed on the column, and the guide pin moves along the guide groove.

[0010] The utility model adopts a structure with added reinforcing ribs to ensure the safety and stability of the entire device.

[0011] Beneficial effects of the utility model:

[0012] 1. A guide rail and slider structure is adopted, in which the number of guide rails and sliders is not limited, the structure is simple, the cost is low, and it has good transmission stability.

[0013] 2. The shaft and gear, and the shaft and upper fixed seat are connected by keys, combined with the fixation of the shaft and the lower fixed seat to ensure the stability of the shaft during the rotation of the entire device, avoiding the risk of the shaft being carried by the rotation when rotating under a large load.

[0014] 3. The universal joint of the cylinder is adopted to avoid friction and jamming caused by the eccentricity between the cylinder shaft and the rotating shaft, ensure the stability and safety of the transmission, and at the same time reduce the processing accuracy of the whole device, thereby reducing costs.

[0015] 4. There is no restriction on the type of motor in the rotary motor reducer assembly. At the same time, the use of a gear transmission structure makes the rotary transmission process more accurate and stable.

[0016] 5. Use the guide structure to ensure the stable operation and accurate positioning of the entire device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the structure of an embodiment of the utility model;

[0018] Figure 2 This is a schematic diagram of the structure of the guiding assembly of the embodiment of the utility model;

[0019] In the figure: 1. column; 2. large gear; 3. gear key; 4. shaft key; 5. upper fixed seat; 6. shaft; 7. copper sleeve; 8. fixed block; 9. plane bearing; 10. lower fixed seat; 11. cylinder joint; 12. hydraulic cylinder; 13. cylinder fixed seat; 14. guide rail slider assembly; 15. rotary motor reducer assembly; 16. small gear; 17. lifting frame; 18. connecting plate; 19. guide block; 20. guide pin; 21. locking block; 22. guide seat; 23. guide groove. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] like Figure 1 As shown, a novel furnace body lifting and rotating device for a single crystal furnace is fixed to a single crystal furnace column 1, including a lifting structure and a rotating structure, characterized in that: the lifting structure includes an upper fixed seat 5, a rotating shaft 6, a lower fixed seat 10, a cylinder joint 11, a hydraulic cylinder 12, a cylinder fixed seat 13 and a guide rail slider assembly 14, the hydraulic cylinder 12 is connected to the fixed seat 10 through the cylinder joint 11, and the cylinder joint 11 is a universal type. The hydraulic cylinder 12 is fixed to the column 1 through the cylinder fixed seat 13, the guide rail slider assembly 14 is fixed to the column 1, and the rotating shaft 6 is connected to the guide rail slider assembly 14 through the upper fixed seat 5 and the lower fixed seat 10; under the action of the hydraulic cylinder 12, the lifting movement of the entire device is realized through the guide rail slider assembly 14.

[0022] The rotating structure includes a large gear 2, a gear key 3, a shaft key 4, a shaft 6, a copper sleeve 7, a fixed block 8, a plane bearing 9, a rotating motor reducer assembly 15, a pinion 16 and a lifting frame 17. The rotating motor reducer assembly 15 is connected with the pinion 16, the large gear 2 and the shaft 6 in sequence. A gear key 3 is provided between the large gear 2 and the shaft 6; a shaft key 4 is provided between the shaft 6 and the upper fixed seat 5; a fixed block 8 is provided on the shaft 6, and a copper sleeve 7 is provided between the shaft 6 and the fixed block 8. A plane bearing 9 is provided between the fixed block 8 and the lower fixed seat 10, and the lifting frame 17 is installed on the fixed block 8; the rotating motor reducer assembly 15 transmits power to the large gear 2 through the pinion 16. Since the large gear 2 and the shaft 6 cannot rotate under the restriction of the gear key 3 and the shaft key 4, the rotating motor reducer assembly 15 drives the entire lifting frame 17 to rotate with the upper furnace body through the rotation of the pinion 16. The lifting frame 17 is provided with a connecting plate 18 , and the connecting plate 18 is connected to the upper furnace body of the single crystal furnace.

[0023] like Figure 2 As shown, a guide assembly is also provided, including a guide block 19, a guide pin 20, a locking block 21, a guide seat 22 and a guide groove 23. The guide block 19 is installed on the fixed block 8, the guide pin 20 is installed on the guide seat 22, the locking block 21 and the guide groove 23 are installed on the column 1, and the guide pin 20 moves along the guide groove 23 to ensure stable operation and accurate positioning of the entire device.

Claims

1. A novel furnace body lifting and rotating device for a single crystal furnace, fixed to a single crystal furnace column (1), comprising a lifting structure and a rotating structure, characterized in that: The lifting structure comprises an upper fixed seat (5), a rotating shaft (6), a lower fixed seat (10), a cylinder joint (11), a hydraulic cylinder (12), a cylinder fixed seat (13) and a guide rail slider assembly (14); the hydraulic cylinder (12) is connected to the fixed seat (10) via the cylinder joint (11); the hydraulic cylinder (12) is fixed to the column (1) via the cylinder fixed seat (13); the guide rail slider assembly (14) is fixed to the column (1); the rotating shaft (6) is connected to the guide rail slider assembly (14) via the upper fixed seat (5) and the lower fixed seat (10); under the action of the hydraulic cylinder (12), the lifting movement of the entire device is realized through the guide rail slider assembly (14).

2. A novel furnace body lifting and rotating device for a single crystal furnace as claimed in claim 1, characterized in that: The oil cylinder joint (11) is of a universal type.

3. A novel furnace body lifting and rotating device for a single crystal furnace as claimed in claim 1, characterized in that: The rotating structure comprises a large gear (2), a gear key (3), a rotating shaft key (4), a rotating shaft (6), a copper sleeve (7), a fixed block (8), a plane bearing (9), a rotating motor reducer assembly (15), a pinion (16) and a lifting frame (17); the rotating motor reducer assembly (15) is connected to the pinion (16), the large gear (2) and the rotating shaft (6) in sequence; a gear key (3) is provided between the large gear (2) and the rotating shaft (6); a rotating shaft key (4) is provided between the rotating shaft (6) and an upper fixed seat (5); a fixed block (8) is provided on the rotating shaft (6); a plane bearing (9) is provided between the fixed block (8) and a lower fixed seat (10); and the lifting frame (17) is mounted on the fixed block (8); the rotating motor reducer assembly (15) drives the entire lifting frame (17) to rotate with the upper furnace body through the rotation of the pinion (16).

4. A novel furnace body lifting and rotating device for a single crystal furnace as claimed in claim 3, characterized in that: The lifting frame (17) is provided with a connecting plate (18), and the connecting plate (18) is connected to the upper furnace body of the single crystal furnace.

5. A novel furnace body lifting and rotating device for a single crystal furnace as claimed in claim 3, characterized in that: A copper sleeve (7) is provided between the rotating shaft (6) and the fixed block (8).

6. A novel furnace body lifting and rotating device for a single crystal furnace as described in any one of claims 1 to 3, characterized in that: A guide assembly is also provided, comprising a guide block (19), a guide pin (20), a locking block (21), a guide seat (22) and a guide groove (23), wherein the guide block (19) is mounted on the fixing block (8), the guide pin (20) is mounted on the guide seat (22), the locking block (21) and the guide groove (23) are mounted on the column (1), and the guide pin (20) moves along the guide groove (23).

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