Omnibearing drying structure of megasonic cleaning machine
By designing a comprehensive drying structure in the Zhaoco wave cleaning machine, using up and down adjustment and angle adjustment mechanism, the problem that the dry structure cannot be adjusted in the existing technology has been solved, and the adaptability of different sizes of wafers is achieved. Round performance and energy efficiency.
Patent Information
- Application Number
- CN202421168634.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-27
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2034-05-27
AI Technical Summary
In the prior art, the position of the drying structure cannot be adjusted, resulting in insufficient or excessive drying when processing larger or smaller wafers, and consume more energy, affecting wafer performance.
The comprehensive drying structure of the meson wave cleaning machine is designed. The up and down adjustment mechanism and the angle adjustment mechanism are adopted. Adjust the angle to adapt to the wafers of different sizes.
The adaptability of different sizes of wafers is realized, avoiding incomplete or excessive local drying, reducing energy consumption, preventing the risk of excessive drying, and ensuring wafer performance.
Smart Images
Figure CN222418243U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of drying structures, in particular to an omnidirectional drying structure of a megasonic cleaning machine. Background Art
[0002] With the rapid development of the semiconductor industry, especially the continuous advancement of chip manufacturing technology, the market demand for wafer cleaning machines continues to grow. Wafer cleaning equipment is an indispensable part of the semiconductor manufacturing process. It is mainly responsible for removing residues and impurities on the surface of the wafer to ensure the quality of subsequent processes. With the continuous advancement of chip manufacturing technology, the requirements for wafer surface cleanliness are getting higher and higher, and wafer cleaning technology has also developed rapidly.
[0003] There are many sizes of wafers on the market, with different sizes and different application fields. A specific drying structure can only process wafers that match it. Since the position of the drying structure cannot be adjusted, when drying larger wafers, not only will there be insufficient or excessive local drying, but more energy will be consumed to maintain suitable drying conditions. When drying smaller wafers, there is also a risk of over-drying, which affects wafer performance. For this reason, an all-round drying structure of a megasonic cleaning machine is proposed. Utility Model Content
[0004] The purpose of the utility model is to solve the problem in the prior art that the position of the drying structure cannot be adjusted, resulting in insufficient or excessive local drying when drying larger-sized wafers, and more energy is consumed to maintain suitable drying conditions. When drying smaller-sized wafers, there is also a risk of over-drying, thereby affecting the performance of the wafers. A full-range drying structure for a megasonic cleaning machine is proposed.
[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an omnidirectional drying structure of a megasonic cleaning machine, comprising a frame, eight groups of ventilation plates are arranged inside the frame, an up-and-down adjustment mechanism is arranged inside the frame, an angle adjustment mechanism is arranged inside the frame, the up-and-down adjustment mechanism comprises a servo motor and two groups of double-threaded screws, threaded seats are threadedly connected to the outer walls of the two groups of double-threaded screws near the upper and lower edges, a belt drive assembly is fixedly installed at the output end of the servo motor, guide grooves are opened on both side walls inside the frame, and limit blocks are slidably installed inside the two groups of guide grooves near the upper and lower edges;
[0006] The angle adjustment mechanism comprises eight groups of threaded rods and eight groups of triangular blocks. Cylinders are rotatably mounted on the outer walls of the eight groups of threaded rods, and nuts are threadedly connected to the outer walls of the eight groups of threaded rods.
[0007] Preferably, one end of the eight groups of triangular blocks is respectively fixed to one end of the eight groups of ventilation plates, and the other ends of the eight groups of triangular blocks are respectively fixed to the outer walls of the eight groups of cylinders.
[0008] Preferably, a motor frame plate is fixedly mounted on one end of the servo motor, and one end of the eight groups of threaded rods are respectively fixed to the front and rear ends of the four groups of threaded seats.
[0009] Preferably, dryers are fixedly installed at both ends of the frame, heat conduction boxes are fixedly installed at the exhaust outlets of the two groups of dryers, and special-shaped pipes are fixedly installed at the upper and lower ends of the two groups of heat conduction boxes and near the left and right edges.
[0010] Preferably, one end of the eight groups of nuts are respectively fixed to one end of the eight groups of cylinders.
[0011] Preferably, the upper ends of the two groups of double-start threaded screws pass through the upper end of the frame and are fixed to the two transmission wheels in the belt drive assembly, the lower ends of the two groups of double-start threaded screws are rotatably mounted on the inner bottom end of the frame, and the lower end of the motor frame plate is fixed to the upper end of the frame.
[0012] Preferably, the upper ends of the eight groups of ventilation plates are fixedly mounted with folded tubes, the eight groups of folded tubes respectively pass through the upper and lower ends of the frame, and are fixed to the other ends of the eight groups of special-shaped tubes;
[0013] Compared with the prior art, the advantages and positive effects of the utility model are:
[0014] 1. In the utility model, by providing an up and down adjustment mechanism, with the cooperation of a servo motor, a belt drive assembly, two groups of double-headed threaded screws, four groups of threaded seats, four groups of guide grooves and four groups of limit blocks, the four groups of threaded seats drive eight groups of ventilation plates to move upward and downward or downward and upward through four groups of threaded rods and four groups of triangular blocks, so that the position height of the eight groups of ventilation plates can be adjusted, and the distance between the eight groups of ventilation plates and the wafers can be adjusted conveniently, and wafers of different sizes can be dried. At the same time, there will be no situation of insufficient or excessive local drying, and the energy consumption will be reduced. The risk of over-drying can also be prevented, and the performance of the wafer will not be affected.
[0015] 2. In the utility model, by providing an angle adjustment mechanism, with the cooperation of eight groups of threaded rods, eight groups of nuts, eight groups of cylinders and eight groups of triangular blocks, the angles of eight groups of ventilation plates can be adjusted, so that the air discharged from the ventilation plates can be accurately blown onto wafers of different sizes to prevent moisture from remaining on the surface of the wafers. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1The utility model provides a front structural schematic diagram of an all-round drying structure of a megasonic cleaning machine;
[0017] Figure 2 The utility model provides a schematic diagram of the structure of the up and down adjustment mechanism and the angle adjustment mechanism of the omnidirectional drying structure of the megasonic cleaning machine;
[0018] Figure 3 The utility model provides a schematic diagram of the structure of a ventilation plate, a threaded rod and an angle adjustment mechanism of an omnidirectional drying structure of a megasonic cleaning machine;
[0019] Figure 4 The utility model provides a stereoscopic diagram of an omnidirectional drying structure of a megasonic cleaning machine.
[0020] Legend: 1. Frame; 11. Dryer; 12. Heat transfer box; 13. Special-shaped pipe; 14. Ventilation plate; 15. Folding pipe; 2. Up and down adjustment mechanism; 21. Servo motor; 22. Double-headed threaded screw; 23. Threaded seat; 24. Belt drive assembly; 25. Guide groove; 26. Limit block; 27. Motor frame; 3. Angle adjustment mechanism; 31. Threaded rod; 32. Triangle block; 33. Cylinder; 34. Nut. DETAILED DESCRIPTION
[0021] In order to more clearly understand the above-mentioned purpose, features and advantages of the utility model, the utility model is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.
[0022] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments of the following disclosure.
[0023] Embodiment 1
[0024] like Figure 1As shown in FIG. 4 , the utility model provides an all-round drying structure of a megasonic cleaning machine, including a frame 1, eight groups of ventilation plates 14 are arranged inside the frame 1, an up-and-down adjustment mechanism 2 is arranged inside the frame 1, an angle adjustment mechanism 3 is arranged inside the frame 1, the up-and-down adjustment mechanism 2 includes a servo motor 21 and two groups of double-threaded screw rods 22, the outer walls of the two groups of double-threaded screw rods 22 and near the upper and lower edges are threadedly connected with threaded seats 23, the output end of the servo motor 21 is fixedly installed with a belt drive assembly 24, and the inner side walls of the frame 1 are Guide grooves 25 are provided, and limit blocks 26 are slidably installed inside the two groups of guide grooves 25 and near the upper and lower edges. A motor frame plate 27 is fixedly installed at one end of the servo motor 21. One end of the eight groups of threaded rods 31 is respectively fixed to the front and rear ends of the four groups of threaded seats 23. The upper ends of the two groups of double-threaded screw rods 22 pass through the upper end of the frame 1 and are fixed to the two driving wheels in the belt drive assembly 24. The lower ends of the two groups of double-threaded screw rods 22 are rotatably installed at the inner bottom end of the frame 1, and the lower end of the motor frame plate 27 is fixed to the upper end of the frame 1.
[0025] Dryers 11 are fixedly installed at both ends of the frame 1, and heat conduction boxes 12 are fixedly installed at the exhaust ports of the two sets of dryers 11. Special-shaped pipes 13 are fixedly installed at the upper and lower ends of the two sets of heat conduction boxes 12 and near the left and right edges. Folding pipes 15 are fixedly installed at the upper ends of the eight sets of ventilation plates 14. The eight sets of folding pipes 15 pass through the upper and lower ends of the frame 1 respectively and are fixed to the other ends of the eight sets of special-shaped pipes 13.
[0026] The air outlet of the ventilation plate 14 is composed of a plurality of holes, which are mainly used for exhausting the hot air entering the interior.
[0027] The specific settings and functions of this embodiment are described in detail below. By setting up an up and down adjustment mechanism 2, the servo motor 21 is started, and the output end of the servo motor 21 drives the belt transmission component 24 to operate, and the belt transmission component 24 drives the two groups of double-headed threaded screws 22 to rotate. Under the thread cooperation of the two groups of double-headed threaded screws 22 and the four groups of threaded seats 23, the two groups of double-headed threaded screws 22 rotate inside the four groups of threaded seats 23 respectively, and under the cooperation of the four groups of limit blocks 26 and the four groups of guide grooves 25, the four groups of threaded seats 23 can be limited, so that the four groups of threaded seats 23 can only move up and down, and two of the groups of threaded seats 23 are in the two groups of double-headed threaded screws 2 2 moves upward or downward, and the other two groups of threaded seats 23 move downward or upward on the outer walls of the two groups of double-headed threaded screws 22, so that the four groups of threaded seats 23 drive the eight groups of ventilation plates 14 to move upward and downward or downward and upward through the four groups of threaded rods 31 and the four groups of triangular blocks 32, so that the position height of the eight groups of ventilation plates 14 can be adjusted, and the distance between the eight groups of ventilation plates 14 and the wafers can be adjusted conveniently, and wafers of different sizes can be dried. At the same time, there will be no situation of insufficient or excessive local drying, and the energy consumption will be reduced, and the risk of overdrying can be prevented, and the performance of the wafer will not be affected;
[0028] By starting the two groups of dryers 11, the heat generated by the two groups of dryers 11 will be transmitted to the interior of the two groups of heat transfer boxes 12, and the heat inside the two groups of heat transfer boxes 12 enters the interior of the eight groups of ventilation plates 14 through the eight groups of special-shaped tubes 13 and the eight groups of folded tubes 15, and is exported from the interior of the eight groups of ventilation plates 14, so that the wafers can be dried. Due to the arrangement of the eight groups of folded tubes 15, when the eight groups of ventilation plates 14 move up and down, the eight groups of folded tubes 15 will also expand and contract, so that the eight groups of folded tubes 15 can change with the up and down adjustment of the eight groups of ventilation plates 14, thereby ensuring the transportation of hot air.
[0029] Embodiment 2
[0030] like Figure 2 , Figure 3 and Figure 4 As shown, the angle adjustment mechanism 3 includes eight groups of threaded rods 31 and eight groups of triangular blocks 32. The outer walls of the eight groups of threaded rods 31 are rotatably mounted with cylinders 33. The outer walls of the eight groups of threaded rods 31 are threadedly connected with nuts 34. One end of the eight groups of triangular blocks 32 is respectively fixed to one end of eight groups of ventilation plates 14, the other ends of the eight groups of triangular blocks 32 are respectively fixed to the outer walls of eight groups of cylinders 33, and one end of the eight groups of nuts 34 is respectively fixed to one end of eight groups of cylinders 33.
[0031] The effect achieved by the entire embodiment is that, by providing an angle adjustment mechanism 3, by rotating the nut 34, the nut 34 drives the cylinder 33 to rotate, and the cylinder 33 drives the ventilation plate 14 to rotate through the triangular block 32, and under the thread cooperation of the nut 34 and the threaded rod 31, the nut 34 can be rotated on the outer wall thread of the threaded rod 31, and the nut 34 can be fixed on the outer wall of the threaded rod 31 through the thread between the nut 34 and the threaded rod 31, and then through the above steps, the angles of the other seven groups of ventilation plates 14 can be adjusted one by one, and then the angles of the eight groups of ventilation plates 14 can be adjusted, so that the wind exported from the ventilation plate 14 can be accurately blown onto wafers of different sizes to prevent moisture from remaining on the surface of the wafer.
[0032] The method of use and working principle of the device are as follows: first, the frame 1 is assembled with the megasonic cleaning machine, and then the external transmission mechanism is passed through the frame 1, and then the mechanism is adjusted according to the size of the wafer. The servo motor 21 is first started, and the output end of the servo motor 21 drives the belt transmission component 24 to operate, and the belt transmission component 24 drives the two groups of double-headed threaded screws 22 to rotate. Under the thread cooperation of the two groups of double-headed threaded screws 22 and the four groups of threaded seats 23, the two groups of double-headed threaded screws 22 rotate inside the four groups of threaded seats 23 respectively, and under the cooperation of the four groups of limiting blocks 26 and the four groups of guide grooves 25, the four groups of threaded seats 23 can be limited, so that the four groups of threaded seats 23 can only move up and down, and two groups of threaded seats 23 move upward on the outer walls of the two groups of double-headed threaded screws 22, and the other two groups of threaded seats 23 move downward on the outer walls of the two groups of double-headed threaded screws 22, so that the four groups of threaded seats 23 drive the eight groups of ventilation plates 1 through the four groups of threaded rods 31 and the four groups of triangular blocks 32. 4 moves upward and downward, then, by rotating the nut 34, the nut 34 drives the cylinder 33 to rotate, and the cylinder 33 drives the ventilation plate 14 to rotate through the triangular block 32. Under the thread cooperation between the nut 34 and the threaded rod 31, the nut 34 can be threadedly rotated on the outer wall of the threaded rod 31, and the nut 34 can be fixed on the outer wall of the threaded rod 31 through the thread between the nut 34 and the threaded rod 31. Then, through the above steps, the other seven groups of ventilation plates 14 are adjusted one by one, and the angle of the ventilation plates 14 can be adjusted. Finally, by placing the frame with the wafers placed on the conveying mechanism, the wafers on the frame are cleaned by the megasonic cleaning machine, and then the wafers on the frame are conveyed to the inside of the frame 1 through the conveying mechanism, and the two groups of dryers 11 are started to run. The heat generated by the two groups of dryers 11 will be transmitted to the inside of the two groups of heat conduction boxes 12, and then introduced into the inside of the eight groups of ventilation plates 14 through the four groups of special-shaped tubes 13 and the four groups of folded tubes 15, and the wafers are dried by the eight groups of ventilation plates 14.
[0033] The above are only preferred embodiments of the present invention, and are not intended to limit the present invention in other forms. Any technician familiar with the profession may use the technical contents disclosed above to change or modify them into equivalent embodiments with equivalent changes and apply them to other fields. However, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present invention without departing from the technical solution of the present invention still falls within the protection scope of the technical solution of the present invention.
Claims
1. An omnidirectional drying structure of a megasonic cleaning machine, comprising a frame (1), characterized in that: Eight groups of ventilation plates (14) are arranged inside the frame (1), an up-and-down adjustment mechanism (2) is arranged inside the frame (1), an angle adjustment mechanism (3) is arranged inside the frame (1), the up-and-down adjustment mechanism (2) comprises a servo motor (21) and two groups of double-threaded screw rods (22), the outer walls of the two groups of double-threaded screw rods (22) are threadedly connected with threaded seats (23) near the upper and lower edges, a belt transmission assembly (24) is fixedly installed at the output end of the servo motor (21), guide grooves (25) are provided on both side walls inside the frame (1), and limit blocks (26) are slidably installed inside the two groups of guide grooves (25) near the upper and lower edges; The angle adjustment mechanism (3) comprises eight groups of threaded rods (31) and eight groups of triangular blocks (32); cylinders (33) are rotatably mounted on the outer walls of the eight groups of threaded rods (31); and nuts (34) are threadedly connected to the outer walls of the eight groups of threaded rods (31).
2. The omnidirectional drying structure of a megasonic cleaning machine according to claim 1, characterized in that: One end of the eight groups of triangular blocks (32) is respectively fixed to one end of the eight groups of ventilation plates (14), and the other ends of the eight groups of triangular blocks (32) are respectively fixed to the outer walls of the eight groups of cylinders (33).
3. The omnidirectional drying structure of a megasonic cleaning machine according to claim 1, characterized in that: A motor frame plate (27) is fixedly mounted on one end of the servo motor (21), and one end of the eight groups of threaded rods (31) are respectively fixed to the front and rear ends of the four groups of threaded seats (23).
4. The omnidirectional drying structure of a megasonic cleaning machine according to claim 1, characterized in that: Dryers (11) are fixedly mounted on both ends of the frame (1), heat conduction boxes (12) are fixedly mounted on the air outlets of the two sets of dryers (11), and special-shaped pipes (13) are fixedly mounted on the upper and lower ends of the two sets of heat conduction boxes (12) and near the left and right edges.
5. The omnidirectional drying structure of a megasonic cleaning machine according to claim 2, characterized in that: One end of the eight groups of nuts (34) is fixed to one end of the eight groups of cylinders (33) respectively.
6. The omnidirectional drying structure of a megasonic cleaning machine according to claim 3, characterized in that: The upper ends of the two groups of double-threaded screw rods (22) penetrate the upper end of the frame (1) and are fixed to the two transmission wheels in the belt transmission assembly (24); the lower ends of the two groups of double-threaded screw rods (22) are rotatably mounted on the inner bottom end of the frame (1); and the lower end of the motor frame plate (27) is fixed to the upper end of the frame (1).
7. The omnidirectional drying structure of a megasonic cleaning machine according to claim 4, characterized in that: The upper ends of the eight groups of ventilation plates (14) are all fixedly mounted with folded tubes (15), and the eight groups of folded tubes (15) respectively pass through the upper and lower ends of the frame (1) and are fixed to the other ends of the eight groups of special-shaped tubes (13).